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2.2 Requirements of Corrosive Gas
Corrosive Gas
H
S
2
SO
2
Cl
2
NO
2
HF
NH
3
O
3
Note: ppb (part per billion) refers to the unit of concentration，1ppb stands for the volume ratio of
part per billion.
Unit
ppb
ppb
ppb
ppb
ppb
ppb
ppb
- 16 -
Concentration
< 3
< 10
< 1
< 50
< 1
< 500
< 2
S19a Pro Server Installation Guide
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