entegris SB300 FOSB Manuals

Manuals and User Guides for entegris SB300 FOSB. We have 1 entegris SB300 FOSB manual available for free PDF download: User Manual

entegris SB300 FOSB User Manual

entegris SB300 FOSB User Manual (14 pages)

300 mm Wafers

Brand: entegris | Category: Industrial Equipment | Size: 4 MB

Table of Contents

Table of Contents
2
Introduction
3
Features
3
- Terminology
  3
- FIMS Compatibility
  3
- Automated Ergonomic Handling
  3
- Identification
  3
- Cleanability
  3
Components and Materials
4
- Door
  4
- Shell
  5
Secondary Packaging
5
- Standard Two-Pack
  5
Assembly Instructions
6
- SB300 Options
  6
Datum Orientation
7
- Horizontal Datum
  7
- Facial Datum
  7
- Bilateral Datum
  7
- X, Y, and Z Dimensions
  7
- Structure
  7
Semi Standards
8
- Semi E62
  8
- Semi M31-0999
  8
- Semi E106
  9
- Semi E47.1
  9
- Semi E57
  9
Specifications
9
Equipment Interface
10
- Load Port Interface
  10
- Door Interface Points
  11
- Bottom Interface Points
  11
General Use Instructions
13
- Manual Assembly
  13
- D-Ring Handles
  13
Limited Warranty
14
For more Information
14
Terms and Conditions of Sale
14

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