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5. Technical data
Process chamber
Heating
Loading system:
Loading area:
Controller:
Gas flow control:
Vacuum:
Programs:
Temperature:
Ramp up rate:
Cool down rate:
Cooling:
Interfaces:
Dimensions:
Weight
Voltage
Frequency
Current
Power
Ambient
temperature
Safety class
Ambient
temperature
Humidity
UniTemp GmbH • Luitpoldstr. 6 • D-85276 Pfaffenhofen • +49 (0) 8441 787663 • www.unitemp.de • info@unitemp.de
Operation Instructions RSS-110-S En Ver. 06.2016
Cold wall process chamber made of aluminium with integrated gas
in- and outlet
4 heater cartridges at 400 W (230 V) electric power each (115V:
300W), total power: 1.6 kW (230 V), 1.2 kW (115 V)
Manual loading, heating plate (hard coated Aluminium) in process
chamber,
110 mm x 110 mm
Simatic S7 based process controller, 50 steps programmable
(process steps), freely programmable process gas flow
1 process gas line (N
Process chamber can be evacuated down to 10
external vacuum pump (not scope of delivery)
50 programs with up to 50 steps each storable in process
controller (touch panel)
Room temperature up to 400°C
Up to 120 K/minute (@ 230 V)
400 °C - 200 °C: 150 K/min
200 °C - 150 °C: 110 K/min
150 °C - 80 °C: 70 K/min
Water cooling required, inlet pressure 2...6 bar (0.2...0.6 MPa),
minimum Δp = 4 bar (0.4 MPa), low water hardness, free of Cu
particles
USB 2.0 Memory Stick (at right side of touch panel module),
Ethernet (at bottom side of touch panel module)
274 mm x 517 mm x 215 mm (W x D x H) (Standard system)
14 kg
230 V 1~
50...60 Hz
Max. 10 A
1.6 kW
Max. 40 °C
IP20
0 °C to 40 °C (Operating) / -20 °C to 60 °C (Storage)
10-90% non-condensing 10-90% non-condensing
) (controlled via mass flow controller (MFC)
2
-3
mbar/hPa using
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