Page 1 USER MANUAL Mask Aligners MJB4 Manual High End Mask Aligner Rev 02/01-06 www.suss.com...
Page 3: Table Of Contents
CONTENTS ONTENTS 1. Warnings and Safety Precautions ..............1 1.1. Guidelines on Safety at Work .................1 1.2. Definition of Danger Advice and Warnings .............1 1.3. Intended Use of this Machine .................1 1.4. Main Switch with Emergency Off Function .............1 1.5. Dangers ......................2 1.5.1.
Page 4 CONTENTS 3.2.8. Basic Pneumatic Settings ..............21 3.3. Operating Sequences ...................22 3.3.1. Switching the Machine On/Off .............22 3.3.2. Switching On and Calibrating the Exposure Lamp ......23 3.3.3. Setting Exposure Values ..............24 3.3.4. Saving and Loading Programs ............25 3.3.5. Loading the Mask ................26 3.3.6.
Page 5 CONTENTS 4.6. Schematics of the Pneumatic System MJB4 ..........53 4.7. Schematics of the Electronic System MJB4 ..........63 4.8. International Chemical Safety Cards Mercury ..........149 4.9. Lock-Out / Tag-Out Checklist ..............152 MJB4 - Contents Rev02 01-06...
Page 6 CONTENTS MJB4 - Contents Rev02 01-06...
Page 7 IR adjustment is available for both microscopes. These microscopes were developed from the successful SUSS MJB3 Mask Aligners, which were the international leaders among these types of instruments for over 3 decades.
Page 8 MJB4 - Foreword Rev02 01-06...
Page 9 Attention ! It is strongly recommended to read this user manual before starting the mask aligner the first time. MJB4 - Attention ! Rev02 01-06...
Page 10 MJB4 - Attention ! Rev02 01-06...
Page 11: Warnings And Safety Precautions
SUSS MicroTec cannot accept any responsibility for physical injury or damage to the machine which re- sults from incorrect use of this machine and failure Any other form of use must be agreed on with SUSS to follow these safety instructions. MicroTec Lithography's Engineering Product Sup- port department.
Page 12: Dangers
WARNINGS AND SAFETY PRECAUTIONS To begin operating the machine again, the main The lamp cooling must be correctly adjusted accord- switch must be turned to ON and the machine must ing to the lamp type! be restarted. There is a risk of lamp explosion if the lamp house is opened prematurely while the lamp is hot.
Page 13: Danger Of Poisoning
Mercury can cause acute and chronic poisoning. Only SUSS MicroTec employees or qualified and Note: trained staff may service the machine. The EU safety data sheets can be found The operating and starting voltages in in the Appendix and must be read.
Page 14 1.6.1.2. Changing the Lamp served. Only use lamps of a type approved for use by SUSS MicroTec Lithography! Significant deviations from the setting values endan- ger your safety! In almost all exposure lamps, the anode (positive pole) is at the bottom.
Page 15: Preparing The Machine For Working
WARNINGS AND SAFETY PRECAUTIONS MicroTec's service to carry out a check! chine has been connected to the power supply net- work by switching on the main power switch. Note! The following pressure values should be present on In addition, in order to achieve good ex- the machine: posure results, the evenness of the light should be adjusted after fitting a...
Page 16 WARNINGS AND SAFETY PRECAUTIONS MJB4 - Warnings and Safety Rev02 01-06...
Page 17: Installation And Transport
Users who open containers with system compo- nents or install or transport the machine without a SUSS MicroTec technician or a person authorized by SUSS MicroTec do so at their own risk. Power connections and supply connections (com- pressed air, nitrogen, etc.) at the installation site must be completely installed by the customer before installation so the machine can be connected.
Page 18 INSTALLATION AND TRANSPORT Power Data: Supply Media: Standard with 300 VA ; 230 V AC ±10% ; Nitrogen: ca. 1.5bar, 30 - 45 psi; CPC200: 50/60 Hz Consumption: Depends on lamp model; see Standard with 500 VA ; 230 V AC ±10% ; the table ”Settings for lamp CPC350: 50/60 Hz...
Page 19 INSTALLATION AND TRANSPORT Lamps that can be used: • HG 200 W/2 - PN: 146 051 (additional lamp adapter required, item no.: 189336) • HBO 350 W-S - PN: 146 049 • USH 350 DS - PN: 182 538 • UXM 501 MD - PN: 148 979 (additional lamp adapter required, item no.: 182721)
Page 20: Transporting The Mask Aligner
Users who transport the machine without a SUSS tainers MicroTec service technician or a person authorized by SUSS MicroTec do so at their own risk. • If shipping damage is suspected, do not open containers until a SUSS MicroTec service 2.2.1.
Page 21 INSTALLATION AND TRANSPORT transporting the it on wheels over a ramp. • We recommend using cross beam part no.: 187724 for transporting the machine (see figure: Warning! “Transporting the MJB4 using a cross beam”). The center of gravity is behind the mid- The cross beam ensures that the transport straps dle of the machine (lamp housing).
Page 22: Transport Safeguards
INSTALLATION AND TRANSPORT 2.2.5. Transport Safeguards TSA Microscope Manipulator The following transportation safeguards must be Remove screws 1 and 2. removed before commissioning the machine. Screw 1 secures the microscope stroke, and screw Adjusting Table 2 secures the X-Y adjustment on the manipulator. Transportation safety screws 1 (3x) and 2 (2x) must be removed from the adjusting table.
Page 23: Taking The Machine Out Of Service
Before shutting down the machine for a longer mirror housing. period of time, you must be advised by a SUSS MicroTec service technician. We strongly recommend the following before long- term decommissioning: •...
Page 24 INSTALLATION AND TRANSPORT MJB4 - Installation and Transport Rev02 01-06...
Page 25: Operation Of The Mjb4
Masks and wafer/substrates to a total thickness of pneumatic system and the PLC controller, can be 9.00 mm can be processed. quickly replaced. SUSS MJB4 Mask Aligner 1 TSA/IR lighting 6 Main switch with emergency off function 2 Microscope focus setting...
Page 26: Definitions
MJB4 OPERATION OF THE 3.1. Definitions 3.2. Controls and Displays Main switch with emergency off function 3.1.1. Notations This switch connects or disconnects the mask You should be familiar with the following definitions aligner and ballasts to or from the power supply when reading this manual.
Page 27: Display/Touch Screen
MJB4 OPERATION OF THE 3.2.2. Display/Touch Screen Table – Theta Motion This is the small micrometer screw on the right side Instructions, confirmations and other information of the adjusting table. The maximum turning range is appear on this screen depending on the situation. ±5°.
Page 28: Tsa Microscope Manipulator
MJB4 OPERATION OF THE 3.2.3. TSA Microscope 3.2.4. TSA Microscope Manipulator 3.2.4.1. M500 Microscope The microscope manipulator is moved in the X and Y directions using the split knurled knob on the right Brightness is regulated with the left controller under side of the manipulator.
Page 29: Microscope Lighting
MJB4 OPERATION OF THE Lens X Separation Button The left/right lens can be moved separately in the X direction using the left/right controller. TSA Lighting Aperture Diaphragm The left and right aperture diaphragms are used for the separate setting of the left and right lens lighting. TSA Splitfield Switch This switch on the front of the microscope selects the left and/or right lens images as the source for the...
Page 30: Lamp Housing
Exposure intensity and 1.2.7. "Buttons in the Display / Touch Screen"). homogeneity can now be measured. To end the Using the SUSS UV1000 intensity meter with the sequence, move the contact level forward. The appropriate probe, you check and set the intensity aligner returns to its initial status.
Page 31: Basic Pneumatic Settings
MJB4 OPERATION OF THE 3.2.8. Basic Pneumatic Settings corresponding manometer. All main pressures are monitored by detectors which display an error message in the display if there is a deviation of approx. -20%. Low Vacuum (with controller) This controller sets the low pressure in the vacuum chamber between the substrate and mask.
Page 32: Operating Sequences
MJB4 OPERATION OF THE 3.3. Operating Sequences the lamp, proceed as described in section 1.3.2. "Switching On and Calibrating the Exposure Lamp". A brief introduction can be found in section 1.8. "Step-by-step Machine Operation". 3.3.1.3. Switching Off the Machine 3.3.1. Switching the Machine On/ The machine is switched off using the Electronics ON/OFF button.
Page 33: Switching On And Calibrating The Exposure Lamp
Afterwards the exposure lamp must be switched on with the LAMP OFF button. The label of the button SUSS MicroTec assumes no liability for damages changes to LAMP HEATING during the warm up resulting from the improper use of the mask aligner.
Page 34: Setting Exposure Values
MJB4 OPERATION OF THE 3.3.3. Setting Exposure Values Hard Contact Time This selection is activated by pressing the This function is used to set the time for nitrogen SETTINGS MENU button and the EXPOSURE flushing under the substrate before exposure. VALUES button.
Page 35: Saving And Loading Programs
MJB4 OPERATION OF THE 3.3.4. Saving and Loading Pro- grams This function is an optimal method for saving selected settings to a specific program space (0 to 96) or selecting a previously saved program. Select the PROGRAM MENU in the SETTINGS MENU.
Page 36: Loading The Mask
MJB4 OPERATION OF THE 3.3.5. Loading the Mask 3.3.6. Loading the Substrate Caution! Pulling out the transport slide and loading the substrate If the microscope is in the lower posi- tion when loading or unloading the Pull out the transport slide as far as it will go. Insert mask, the microscope must be moved to the upper position by pressing the a suitable substrate retainer (chuck) with the...
Page 37: Wedge Error Compensation Pressure
MJB4 OPERATION OF THE 3.3.9. Wedge Error Compensation (WEC) The WEC is performed manually. To perform WEC using the contact lever, the separation lever must be in the contact position. The substrate is moved against the mask with the previously set pressure (see 3.3.6) and WEC is performed.
Page 38: First Exposure Of Substrate
MJB4 OPERATION OF THE 3.4. First Exposure of Sub- The exposure unit moves by approx. strate 150 mm in the direction of the operator. Unloading the Mask No adjustment is necessary for the first exposure of the substrate. With the machine in its initial state, the following procedure steps are required: To release the mask holder, remove both screws on the right side of the mask holder frame.
Page 39: Adjusting The Substrate With The Upper Microscope
MJB4 OPERATION OF THE 3.5. Adjusting the Substrate Experienced operators can use the contact lever with the Upper Micro- without first selecting the LOAD SUBSTRATE scope button. 3.5.4. Adjusting the Microscope In this mode the substrate is adjusted using the TSA microscope.
Page 40: Exposure
MJB4 OPERATION OF THE 3.6. Adjusting the Substrate Never adjust the substrate if the mask with IR Lighting and substrate are in contact! Doing so will damage the mask and substrate. Checking the adjustment see section 1.2.7. "Buttons For IR substrate adjustment, special IR cameras p/n in the Display / Touch Screen".
Page 41 MJB4 OPERATION OF THE Setting the separation lever to the adjusting po- Adjustment (menu in the SUBSTRATE ADJUST- sition MENT display) Never adjust the substrate if the mask Use the X, Y and theta micrometer screws on the and substrate are in contact! Doing so adjusting table for this.
Page 42: Transmitted Light
MJB4 OPERATION OF THE 3.6.2. Transmitted Light Set the brightness using the left/right potentiometers on the left front plate. 3.6.2.1. Setting the Exposure Values The left and right aperture diaphragms on the See section 1.3.3. "Setting Exposure Values". microscope allow you to set the lighting on the left and right separately.
Page 43: Advanced Techniques
MJB4 OPERATION OF THE 3.7. Advanced Techniques 3.6.2.5. Adjusting the Substrate Focusing the Substrate Level 3.7.1. Exposure Programs For fine lens adjustment, use the OBJECTIVE FOCUS FINE MANUAL knob on the microscope. An important parameter for exposure is the type of Adjustment (menu in the SUBSTRATE ADJUST- contact between the mask and substrate.
Page 44: Multiple Exposure
MJB4 OPERATION OF THE Exposure Time gradually reduce these times. All parameters can be set in the EXPOSURE Pressing this button opens the EXPOSURE VALUES menu. To test the set values and the TIME menu, which allows you to enter the de- adjustment, use the CHECK ADJUSTMENT button.
Page 45: Step-By-Step Machine Operation
MJB4 OPERATION OF THE 3.8. Step-by-step Machine Operation 3.8.1. Selecting exposure program, e.g., soft contact Menu in the Display Button Strokes in the Display MAIN MENU SETTINGS MENU SETTINGS MENU EXPOSURE VALUES ADJUSTING & EXPOSING LAMP TEST PROCESS selection FIRST EXPOSURE FLOOD EXPOSURE SOFT CONTACT HARD CONTACT...
Page 46: Programs
MJB4 OPERATION OF THE 3.8.2. Programs Saving a New Program All active parameters are stored under a selected program number. Menu in the Display Button Strokes in the Display MAIN MENU SETTINGS MENU SETTINGS MENU PROGRAM MENU CONTENT Select available program space PROGRAM MENU SAVE All parameters stored under the program number...
Page 47: Loading, Adjusting And Exposing The Substrate
MJB4 OPERATION OF THE 3.8.3. Loading, Adjusting and Exposing the Substrate Menu in the Display Button Strokes in the Display MAIN MENU LOAD SUBSTRATE LOAD SUBSTRATE Load the mask holder with the mask Pull out the slide and load the chuck Place the substrate on the chuck Insert the slide completely Raise the substrate with the contact lever (WEC)
Page 48 MJB4 OPERATION OF THE MJB4 - Operation Rev02 01-06...
Page 49: Appendix
MJB4 PPENDIX 4. A PPENDIX 4.1. Parameter Ranges and This table lists the value ranges of parameters used Default Settings in the main processes. Parameter Description Default value Range of values Expose Type Type of exposure Soft [Soft, Hard, Low Vac, Vac, Flood-E, Lamptest] Exp.
Page 50: List Of Abbreviations
MJB4 PPENDIX 4.2. List of Abbreviations Θ Theta rotation Constant intensity controller Constant power controller InfraRed Nitrogen Programmable Logic Controller Top Side Alignment Vacuum Wedge error compensation Appendix MJB4 E Rev02 01-06...
Page 51 MJB4 PPENDIX Appendix MJB4 E Rev02 01-06...
Page 52: Index
MJB4 PPENDIX 4.3. Index Lamp cooling 5 Lamp housing 21 Lamp test 21 Adjusting table 13 Low vacuum 22 Adjusting the substrate 30 Low vacuum contact exposure 35 Ballast 24 Main switch 2 Microscope Lighting 20 Microscope lighting 30 Mirror housing 14 Changing the lamp 5 MJB4 Mask Aligner V Check adjustment 21...
Page 53: Spare Parts List (Extract)
MJB4 PPENDIX 4.4. Spare Parts List (extract) Id.-No. Name 190361 SUSS MJB4 MASKALIGNER BASE MACHINE 187250 BASIC ASSEMBLY MJB4 WITHOUT LAMPHOUSE 187260 BASIC MASCHINE MJB4 151334 L-PLUG CONNECTION 188753 DISTRIBUTOR BLOCK FR-12-M5 151529 PLUG CONNECTION 151543 PLUG CONNECTION 189407 SENSOR...
Page 54 MJB4 PPENDIX Id.-No. Name 151585 PLUG CONNECTION 151497 PLUG CONNECTION 173967 MANIFOLD DISTRIBUTOR CONNECTION QST3-6-4 173968 CONNECTION QSC-6H 151584 Y-PLUG CONNECTION 173969 SCHOTT-PLUG CONNECTION QSMS-6 151565 COUPLING QM-M5-M5 151583 T-PLUG CONNECTION 151444 PLUG CONNECTION 173974 T-PLUG CONNECTION QSMT-4 173977 PLUG CONNECTION QSM-M7-4-I 174020 PLUG CONNECTION STRAIGHT QSM-G1/8-6-I 150924...
Page 55 MJB4 PPENDIX Id.-No. Name 185535 STAGE HOUSING MJB4 151334 L-PLUG CONNECTION 144169 COUPLING MASTER SELFSEALING RED M5 R1/8" 151444 PLUG CONNECTION 151529 PLUG CONNECTION 185546 BEARING FOR BELT DRIVE 187515 TOOTHED BELT T 2.5 Z 122 B10 L305 185490 TRANSPORT SLIDE 151082 HOSE NOZZLE M2.5 152100...
Page 56 MJB4 PPENDIX Id.-No. Name 150894 HOSE COUPLING M5 FOR HOSE 5X1 145525 ELLIPSOIDAL REFLECTOR D-144/POLISHED/LH350 150909 L-SWIVEL CONNECTION M5 FOR HOSE 4X1 150914 T-SWIVEL CONNECTION M5 FOR HOSE 4X1 111440 LAMP HOUSE BASE ASSEMBLY LH350 150906 L-CONNECTION 151174 FLOWMETER 151130 REDUCING NIPPLE R1/4"/M5 150906 L-CONNECTION...
Page 57 MJB4 PPENDIX Appendix MJB4 E Rev02 01-06...
Page 58: Service Information
MJB4 PPENDIX 4.5. Service Information Component name Component no. Pneumatic system Adjusting table TSA microscope Exposure unit The first digit in the identifiers of valves, chokes, sen- sors, etc. always refers to the component numbers listed above. Appendix MJB4 E Rev02 01-06...
Page 59: Overview
MJB4 PPENDIX 4.5.1. Overview 4.5.1.1. Valves (Y) Valve Block I Identifier Medium Function Mirror house forward / backward Exposure shutter closer Exposure shutter opener Lamp house heat sink cooling TSA microscope up / down TSA manipulator brakes X and Y direction Unassigned 1.1Y6 Hard contact nitrogen / pressure controlled...
Page 60 MJB4 PPENDIX 4.5.1.2. Throttles (R) Identifier Function 1.1R3 Vacuum reduction under wafer 1.1R4 Hard contact nitrogen flow / volume controlled 1.1R5 Wafer vacuum release / flow controlled 1.1R6 Hard contact nitrogen / pressure controlled 1.1R9 Pre-vacuum flow / vacuum contact 1.1R10 Nitrogen flow / vacuum chamber reduction 1.1R11...
Page 61 MJB4 PPENDIX 4.5.1.4. Pressure Regulators (CP) Identifier Function 0CP1 Machine main air pressure 0CP2 Machine main nitrogen pressure 1.3CP1 WEC pressure 4.5.1.5. Flowmeter (F) Identifier Function Lamp socket cooling 4.5.1.6. Gauges (PD) Identifier Function Machine main air pressure Machine main nitrogen pressure Vacuum 4.5.1.7.
Page 62 MJB4 PPENDIX 4.5.1.8. Connector on Distribution Board (JP, X) Identifier Function Service PLC Jumper K1 nc / no select PLC base unit (OD232 module) Valve block I Valve block II Power PLC Board connector PLC analog output (AD081) PLC module digital in (ID211) Interlock nitrogen CIC1200 Buzzer Splitter box for camera selection left / right...
Page 63: Schematics Of The Pneumatic System Mjb4
MJB4 PPENDIX 4.6. Schematics of the Pneu- matic System MJB4 Item Description Schematic Sheet-No. Page Pneumatic plan 191930 1 of 4 191930 2 of 4 191930 3 of 4 191930 4 of 4 MJB4 - Appendix Rev02 01-06...
Page 64 MJB4 PPENDIX Appendix MJB4 E Rev02 01-06...
Page 65 PPENDIX 191930 - Pneumatic Plan, Sheet 1 of 4 MJB4 - Appendix Rev.02 01-06...
Page 67 PPENDIX 191930 - Pneumatic Plan, Sheet 2 of 4 MJB4 - Appendix Rev.02 01-06...
Page 69 PPENDIX 191930 - Pneumatic Plan, Sheet 3 of 4 MJB4 - Appendix Rev.02 01-06...
Page 71 PPENDIX 191930 - Pneumatic Plan, Sheet 4 of 4 MJB4 - Appendix Rev.02 01-06...
Page 73: Schematics Of The Electronic System Mjb4
MJB4 PPENDIX 4.1. Schematics of the Electronic System MJB4 Item Description Assembly-No. Schematic Page Wire list, R06 190675 Sheet 1 Wire list, R06 190675 Sheet 2 Wire list, R06 190675 Sheet 3 Wire list, R06 190675 Sheet 4 Wire list, R06 190675 Sheet 5 Wire list, R06...
Page 74 MJB4 PPENDIX Item Description Assembly-No. Schematic Page Power supply 186661 189826 187246 190672 Sensors manipulator 185452 190674 Phönix SACB-6/3-L-M16 (U2 manipulator) 190669 190670 Sensors lamp house 187260 190673 Phönix SACB-6/3-L-M16 (U3 lamp house) 190669 190671 Wiring diagram distributorplate MJB4 189489 Components side printing distributorplate 189489 MJB4...
Page 75 PPENDIX Wire list, Rev: 06, Sheet 1 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 77 PPENDIX Wire list, Rev: 06, Sheet 2 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 79 PPENDIX Wire list, Rev: 06, Sheet 3 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 81 PPENDIX Wire list, Rev: 06, Sheet 4 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 83 PPENDIX Wire list, Rev: 06, Sheet 5 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 85 PPENDIX Wire list, Rev: 06, Sheet 6 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 87 PPENDIX Wire list, Rev: 06, Sheet 7 of 7 MJB4 - Electronics Schematics Rev.02 01-06...
Page 89 PPENDIX Overview of cables MJB4 - Electronics Schematics Rev.02 01-06...
Page 91 PPENDIX 189872 - Cable W1: Unit U1 - SPS OD232 MJB4 - Electronics Schematics Rev.02 01-06...
Page 93 PPENDIX 189873 - Cable W2: Pneumatic I MJB4 - Electronics Schematics Rev.02 01-06...
Page 95 PPENDIX 189874 - Cable W3: Pneumatic II MJB4 - Electronics Schematics Rev.02 01-06...
Page 97 PPENDIX 189902 - Cable W4: Unit U1 - VCC PLC MJB4 - Electronics Schematics Rev.02 01-06...
Page 99 PPENDIX 189876 - Cable W5: Unit U1 - PLC ID211 MJB4 - Electronics Schematics Rev.02 01-06...
Page 101 PPENDIX 189877 - Cable W6: Unit U1 - PLC AD081 MJB4 - Electronics Schematics Rev.02 01-06...
Page 103 PPENDIX 189903 - Cable W7: Unit U1 - Interlock N CIC1200 MJB4 - Electronics Schematics Rev.02 01-06...
Page 105 PPENDIX 189898 - Cable W8: VCC Unit U1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 107 PPENDIX 189875 - Cable W9: Signals X2 - U1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 109 PPENDIX 189900 - Cable W10: VCC Touchscreen MJB4 - Electronics Schematics Rev.02 01-06...
Page 111 PPENDIX 191494 - Cable W11: Illumination, Sheet 1 of 2 MJB4 - Electronics Schematics Rev.02 01-06...
Page 113 PPENDIX 191494 - Cable W11: Illumination, Sheet 2 of 2 MJB4 - Electronics Schematics Rev.02 01-06...
Page 115 PPENDIX 191513 - Cable W12: Unit A4 Splitterbox - U1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 117 PPENDIX 191981 - Cable W13: Sensor 1.1C1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 119 PPENDIX 191982 - Cable W14: Sensor 1.3C1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 121 PPENDIX 191983 - Cable W15: Sensor 00C3 MJB4 - Electronics Schematics Rev.02 01-06...
Page 123 PPENDIX 191984 - Cable W16: Sensor 00C1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 125 PPENDIX 191985 - Cable W17: Sensor 00C2 MJB4 - Electronics Schematics Rev.02 01-06...
Page 127 PPENDIX 191986 - Cable W18: Sensor 9/C1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 129 PPENDIX 189907 - Cable W19: PLC SCU41-CIC1200 MJB4 - Electronics Schematics Rev.02 01-06...
Page 131 PPENDIX 189878 - Cable W20: Elektronic ON key 2S2 MJB4 - Electronics Schematics Rev.02 01-06...
Page 133 PPENDIX 189904 - Cable W21: Touchscreen Port B - PLC CJ1M MJB4 - Electronics Schematics Rev.02 01-06...
Page 135 PPENDIX 189906 - Cable W22: Touchscreen Port A MJB4 - Electronics Schematics Rev.02 01-06...
Page 137 PPENDIX 188501 - Cable W23: Unit U2 - Unit U1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 139 PPENDIX 190053 - Cable W24: Unit U3 - Unit U1 MJB4 - Electronics Schematics Rev.02 01-06...
Page 141 PPENDIX 189826 - Power supply MJB4 - Electronics Schematics Rev.02 01-06...
Page 143 PPENDIX 190672 - PLC MJB4 - Electronics Schematics Rev.02 01-06...
Page 145 PPENDIX 190674 - Sensors manipulator MJB4 - Electronics Schematics Rev.02 01-06...
Page 147 PPENDIX 190670 - Phönix SACB-6/3-L-M16 (U2 manipulator) MJB4 - Electronics Schematics Rev.02 01-06...
Page 149 PPENDIX 190673 - Sensors lamp house MJB4 - Electronics Schematics Rev.02 01-06...
Page 151 PPENDIX 190671 - Phönix SACB-6/3-L-M16 (U3 lamp house) MJB4 - Electronics Schematics Rev.02 01-06...
Page 153 PPENDIX 189489 - Wiring diagram distributorplate MJB4 MJB4 - Electronics Schematics Rev.02 01-06...
Page 155 PPENDIX 189489 - Components side printing distributorplate MJB4 MJB4 - Electronics Schematics Rev.02 01-06...
Page 157 PPENDIX 189489 - Layout distributorplate MJB4 MJB4 - Electronics Schematics Rev.02 01-06...
Page 159: International Chemical Safety Cards Mercury
MJB4 PPENDIX 4.8. International Chemical Safety Cards Mercury MJB4 - Appendix Rev.02 01-06...
Page 160 MJB4 PPENDIX MJB4 - Appendix Rev02 01-06...
Page 161 MJB4 PPENDIX MJB4 - Appendix Rev.02 01-06...
Page 162: Lock-Out / Tag-Out Checklist
MJB4 PPENDIX 4.9. Lock-Out / Tag-Out Checklist MJB4 - Appendix Rev02 01-06...
Page 163 MJB4 PPENDIX MJB4 - Appendix Rev.02 01-06...
Page 164 Yokohama, Kanagawa, Japan 226-0006 Phone (+33)-(0) 4 50 35 83 92 Phone (+81)-45-931-5600 Fax (+33)-(0) 4 50 35 88 01 Fax (+81)-45-931-5601 SUSS MicroTec Test Systems GmbH SUSS MicroTec (Shanghai) Co.,Ltd. Süss-Strasse 1 580 Nanjing W.Rd D-01561 Sacka/Dresden l Germany...

SUSS MicroTec MJB4 User Manual

1 Warnings and Safety Precautions

2 Installation and Transport

3 Operation of the MJB4

4 Appendix

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