Related Manuals for SUSS MicroTec Delta10TT
Summary of Contents for SUSS MicroTec Delta10TT
- Page 1 OPERATOR MANUAL TECHNICAL DOCUMENTATION Spin Coater Delta10TT AK 200.347 www.suss.com...
-
Page 2: Table Of Contents
TABLE OF CONTENTS TABLE OF CONTENTS SAFETY INSTRUCTIONS PRODUCT DESCRIPTION _____________________________________________ 1 Intended Use ........... .1 System Components . - Page 3 TABLE OF CONTENTS COMPONENTS AND CONNECTION ____________________________________ 1 System Components ..........1 Spinning Module .
- Page 4 TABLE OF CONTENTS MECHANICAL DRAWINGS AND PARTS LIST ____________________________ 1 Drawing Whole Unit ..........1 Vacuum coupling .
- Page 5 TABLE OF CONTENTS TABLE OF CONTENTS SAFETY INSTRUCTIONS ______________________________________________ 1 General Information ..........1 Operating Personnel .
-
Page 6: Safety Instructions
SAFETY INSTRUCTIONS 1 SAFETY INSTRUCTIONS 1.1 General Information erator or of persons being close by. The system, other equipment or the envi- ronment can be damaged as well. Prior to installation, starting and operation of the system relevant safety instructions should be read Caution! carefully and considered accordingly. -
Page 7: Transport And Installation
SAFETY INSTRUCTIONS • Commissioning and operating: logue, order documentation, instructions and in Commissioning and operating of the device re- other product documentation. quires appropriately trained and informed per- sonnel. The complete knowledge of dangers • The general erecting and safety regulations, and hazards that can arise from operation and processing is mandatory for each operator. -
Page 8: Hotplates Operation
SAFETY INSTRUCTIONS has to be assured at any time. Warning! In case of any safety deficiencies the (HMDS hotplates only) system has to be switched off and the ser- In case of a power failure the hotplate vice personnel has to be informed accord- cover may not be opened! Instead - after ingly. -
Page 9: Handling Of Electronic Components
SAFETY INSTRUCTIONS pacemakers! rized or unintentional operation. • Whenever it is likely that the system is no longer Danger! electrically safe, make it inoperable and secure Electrical hazard it against any unauthorized or unintentional op- When the system is switched on, elec- eration. -
Page 10: Electrical Drawer/Ci Box
SAFETY INSTRUCTIONS 1.3.3.2 Electrical Drawer/CI Box poisoning). - Do not touch. Danger - High Voltage! Electrical equipment is behind the covers. Danger! Access only for qualified and authorized Process chemicals persons and if the system is switched off. Inflammable, explosive, toxic - Do not inhale its vapors (danger of suffocation). -
Page 11: List Of Hazardous Materials
Consider and observe Material Safety The use of other materials than the pre- Data Sheets of the corresponding mate- scribed is not allowed without written ok rials. from SUSS MicroTec Lithography GmbH. Hazardous Type of Material Materials • THK AFE Avoid contact with benzine and diluent. -
Page 12: List Of Items That Become Solid Waste
SAFETY INSTRUCTIONS 1.3.6 List of Items that become Solid Waste Items To Do Parts contaminated Clean contaminated parts using corresponding solvent. by resist Therefore see respective Material Safety Data Sheet (MSDS) of the supplier. Disassemble heavily contaminated parts. Note! Heavily contaminated Never clean heavily contaminated parts in or in the vicinity of the system. -
Page 13: Symbols Used On System
SAFETY INSTRUCTIONS 1.3.8 Symbols Used on System bels concerning process chemicals used. Irrespective of number of caution symbols and information placed on or around the The following safety instructions (caution and com- system all safety instructions of this mand symbols) may be seen on the system. manual have to be observed 1.3.9 Emergencies 1.3.8.1 Caution Symbols... -
Page 14: Disposal
SAFETY INSTRUCTIONS Always wear safety goggles, gloves and • Forward metals (Stainless Steel, Aluminium) to protective clothing when working with a recycling process. hazardous materials. • Chemically used in processes have to be dis- posed of according to the applicable local and environmental laws and regulations. -
Page 15: Analysis Of Hazards
SAFETY INSTRUCTIONS 1.5 Analysis of Hazards Hazard Preventive measures Squeezing/shearing of hand or fingers Cleaning and maintenance work is to be ef- during maintenance work within the fected by specially qualified persons only. range of moving parts. No bypassing of safety installations Disconnect from power and media supply prior to maintenance work. -
Page 16: Product Description
PRODUCT DESCRIPTION 2 PRODUCT DESCRIPTION 2.1 Intended Use Delta10BM/T spinning system is applied exclusive- ly to coat, dry, clean and develop wafers and sub- strates using spinning techniques, according to the specifications agreed upon mutually. Delta 10BM/T is applied exclusively to process sub- strate with sizes up to: max. -
Page 17: System Components
PRODUCT DESCRIPTION 2.2 System Components 2.2.1 BM Model Overview The spinning bowl is mounted into a aluminium plate. The vacuum indicator shows the vacuum No.: Denomination [bar] if the vacuum switch is on. Spinning bowl The spinning bowl is covered by a transparent cov- Controller er which is manually operated. -
Page 18: Tt Model Overview
PRODUCT DESCRIPTION 2.2.2 TT Model Overview No.: Denomination Power and vacuum inlet Connection for waste air exhaust delta10 - Rev00 - dl/18-01-2005... -
Page 19: Media Required For Operation
PRODUCT DESCRIPTION 2.3 Media Required for Opera- 2.5 Technical Data tion 2.5.1 Dimensions According to the version following media are re- quired for the operation: Delta 10BM • Compressed air (Option) Mounting dimensions • Nitrogen (Option) • Vacuum Spinning module •... -
Page 20: Noise Emission
PRODUCT DESCRIPTION 110 V: ......max. 4.5 A 230 V: ......max. 2.2 A Vacuum Hose connection: . -
Page 21: Installation Site
INSTALLATION SITE 3 INSTALLATION SITE 3.1 Transportation and Storage • ambient relative humidity max. 60 %, no con- densation Prior to installation and operation of the 3.1.2 Operating Conditions unit, the installation and operating instruc- tions have to be thoroughly read and ob- served. -
Page 22: Unpacking
INSTALLATION SITE and operating the unit. Check the contents upon unpacking for damages during transport. In case of transport damages or damages in transit, please contact the manufacturer immediately. Verify receipt of all parts based on packing list. In case of missing parts, please refer to the manufacturer. - Page 23 INSTALLATION SITE 3.2.3 Dimension BM-Modul BM model measurements (mm) SCREW DIN912 M6 (4x) HOLE O 6,6 delta10 - dl/01-2005...
-
Page 24: Dimension T-Module
INSTALLATION SITE 3.2.4 Dimension T-Model delta10 - dl/01-2005... - Page 25 INSTALLATION SITE Side view S t e h b o l z e n M 3 x 1 5 delta10 - dl/01-2005...
-
Page 26: Mounting The Controller
INSTALLATION SITE 3.2.5 Mounting the Controller • Remove the left cover plate. • Turn the inner screws until the controller is firmly fixed. Please observe that a min. depth of 320 mm will be • Fix the left cover plate. required due to connecting cables. -
Page 27: Dimension Controller
/ without center pins etc.). Warning! According to customer preference the system is The substrate is placed on the chuck. The started up by SUSS MicroTec Lithography service chuck is specially balanced – therefore to or by the customer. handle very cautiously. -
Page 28: Connection Media Supply And Media Disposal
INSTALLATION SITE of installation. Stop button operating the system isn‘t al- lowed. In case of emergency the Emer- • Move the unit to the installationsite. gency Stop button must be within easy • Put a spirit level onthe spin chuck reach (distance nearer than 400 mm to •... - Page 29 COMPONENTS AND CONNECTION 4 COMPONENTS AND CONNECTION 4.1 System Components No.: Description Aluminium plate Spinning bowl Cover Vacuum indicator Vacuum switch Controller with display TT Model delta10 - Rev00 - dl/18-01-2005...
- Page 30 COMPONENTS AND CONNECTION 4.2 Spinning Module 4.2.2 Spinning Module (Underseite) No.: Description No.: Description Drain tube for media waste Cover Motor Process bowl Vacuum hose Media waste opening Motor cable Vacuum switch On/Off 4.3 Controller Spinning chuck Vacuum gauge 4.2.1 TT Model Waste Bottle (Option) No.: Description <STEP>...
- Page 31 COMPONENTS AND CONNECTION No.: Description <TIME> display and buttons (process time programmable between 1 and 999 sec). Function button/control led <START> green <STOP> Power button <ON> <OFF> 4.3.1 Controller backside No.: Description Power line 110 V Sensor Motor connection delta10 - Rev00 - dl/18-01-2005...
- Page 32 OPERATION 5 OPERATION Prior to any operation, check that all parts Ejection of parts of the system - especially pressure tanks When using a spin chuck without vacuum, - are intact and not damaged. the rotation speed may not exceed 2,000 rpm.
- Page 33 OPERATION Each process step is made up of three process pa- rameters Removing the processed substrate or wa- fer. Para- Label Panel Description Unit meter Interface Rotation 1/min speed of the chuck Acceleration Level 0=high 9=low Time TIME Seconds • After pushing the STOP-button, you will get the digital „P“...
- Page 34 OPERATION Rotation speed • Enter parameters as described for step 1. • Press in the <RPM> area. Save Parameter • The speed value is displayed. • For saving parameters press <STEP> or <START>. • The speed deviation under operation conditions is ±...
- Page 35 OPERATION celerates up to the rotation speed of process step no. 2. • When the spinning process is over, the control- ler turns automatically to start mode. • When the chuck is stopped open the cover. • Remove the wafer or the substrate. •...
- Page 36 OPERATION 5.5 Problem Solving Problem Eventual consequences Measures to be taken Preventive measures Power supply breaks • Motor runs down • Unload system manu- • Ensure continuous down. • Vacuum holds the sub- ally. power supply. strate (option) • Resotre power supply. •...
- Page 37 MAINTENANCE AND CLEANING 6 MAINTENANCE AND CLEANING 6.1.3 Emptying the Media Waste Warning! Container (Option) Prior to all maintenance and cleaning work inside the unit, the unit and addi- tional modules have to be disconnected • The media waste container must be emptied from all external and media supplies.
- Page 38 MAINTENANCE AND CLEANING 6.2.1 Cleaning the Process Bowl For cleaning the chuck can be removed. (see me- chanical drawings added to this operation instruc- tion). • Remove the chuck out of the motor shaft. • Clean the chuck and the process bowl with a sui- table cleansing agent.
- Page 39 MECHANICAL DRAWINGS AND PARTS LIST 7 MECHANICAL DRAWINGS AND PARTS LIST 7.1 Drawing Whole Unit delta10 - Rev00 - dl/18-01-2005...
- Page 40 MECHANICAL DRAWINGS AND PARTS LIST 7.2 Vacuum coupling delta10 - Rev00 - dl/18-01-2005...
- Page 41 MECHANICAL DRAWINGS AND PARTS LIST 7.3 Parts List Order Pos. Description Base plate 512.243 Process bowl 512.242 Cover 512.241 Glas for cover 512.240 Hinge 1 512.239 Hinge 2 512.238 Bolt for hinge 512.237 Waste pipe 512.236 Shaft ring 512.056 Flange 512.235 Housing 512.058...
- Page 42 TECHNICAL DOCUMENTATION Spin Coater Delta10TT AK 200.347 www.suss.com...
- Page 43 TECHNICAL DOCUMENTATION Electrical Schematics dl/2005-01...
- Page 44 L PE LINE LOAD 2x115V L' N' 19V/5A 19V/3.15A 19V/1.6A 181VA -W002 2x 1.5mm² GEBRÜCKT JUMPER 230VAC -M16.1 M16x5 5AmT 0.8AmT 0.8AmT 1-3 & 2-4 GEBRÜCKT JUMPER 115VAC -W001 -W003 ge-gn ws ge 7 x 0.5² , -M16.2 M16x5 PE_(Schirm + ge) -X1_7_(ws) -F3_(rs) -X1_6_(gr)
- Page 45 Kabeldurchführung -M9.1 8,2mm - 9,2mm -F1_(bl) -X1_5_(br) ST_AC -X1_6_(gr) -F3_(rs) -X1_7_(ws) -F2_(gn) PE_(Schirm + ge) Kabeldurchführung -M7.1 6,2mm - 7,5mm ST_A1_2_E1_2 / +24V_IO (br) ST_A1_2_E1_2 / E1 (sw) ST_A1_2_E1_2 / 0V_IO (bl) -W004 2x 0.75mm² ST_POWER ST_POWER / 0V_IO (rs) 0V_IO ST_POWER / +24V_IO (bl) +24V_IO...
- Page 46 ST_A1_2_E1_2 / 0V_IO (bl) ST_A1_2_E1_2 / +24V_IO (br) ST_A1_2_E1_2 / E1 (sw) Deckel Cover ST_POWER / +24V_IO (bl) ST_POWER / 0V_IO (rs) ST_ANALOG / AGND (gr) ST_ANALOG / Sollwert (ge) Motor ST_A1_2_E1_2 / A2 (gn) ST_A1_2_E1_2 / A1 (br) Motor_pin1 (ws) Datum 25.01.05 Stand:...
- Page 47 DREHZAHL PROTOKOLL Geräte-Nr.: AK-200.347 SPIN SPEED PROTOCOL Serial-No Maschinen Typ: D10TT Machine Typ Kunde: Hasylab Desy, HH Customer Prozess: Process Vorgabe -Drehzahl Ist-Drehzahl Anzeige-Drehzahl O.K. Nominal RPM Actual RPM Monitored RPM 1000 1005 1000 2000 2008 2000 3000 3007 3000 4000 3988 4000...
- Page 48 Chuckinspection protocol 3" Chuck topside leveling pos.1 & 2 ...0,027..mm ../..mm concentric running ..0,009..mm ../..mm Vacuum-0,80bar Remarks: minimum vacuum: -0.80 bar permissible deviation from topside leveling: 0,030mm permissible deviation from concentric running: 0,030mm Chuck partnumber: tool AK: protocol number: 1/3 525030 200347 Order number:...
- Page 49 Chuckinspection protocol 4" Chuck topside leveling pos.1 & 2 ...0,022..mm ../..mm concentric running ..0,004..mm ../..mm Vacuum-0,87bar Remarks: minimum vacuum: -0.80 bar permissible deviation from topside leveling: 0,030mm permissible deviation from concentric running: 0,030mm Chuck partnumber: tool AK: protocol number: 1/3 516903 200347 Order number:...
- Page 50 Abnahme – Checkliste Delta 10 / 1 von 3 PROTOKOLL DELTA10TT PROTOCOL ABNAHME-CHECKLISTE Geräte- Nr./ AK 200.347 SYSTEM CHECKLIST Serial - No. Kunde: Hasylab Desy, Hamburg Customer Maschinenbezeichnung angebracht (am Steuerteil) ..x Tool logo fixed (at controllersite) Firmenschild (Süss-Logo) vorhanden ......Company name fixed Typenschilder angebracht ...........
- Page 51 Abnahme – Checkliste Delta 10 / 2 von 3 PROTOKOLL DELTA10TT PROTOCOL ABNAHME-CHECKLISTE Geräte- Nr./ AK 200.347 SYSTEM CHECKLIST Serial - No. Kunde: Hasylab Desy, HH Customer Chucksitz auf Motorwelle ..........Chuck mounting Chuck Planität (Protokoll) .......... Chuck surface planar Drehzahlprotokoll, 200>6000 Rpm ......
- Page 52 Abnahme – Checkliste Delta 10 / 3 von 3 PROTOKOLL DELTA10TT PROTOCOL ABNAHME-CHECKLISTE Geräte- Nr./ AK 200.347 SYSTEM CHECKLIST Serial - No. Kunde:Hasylab Desy, HH Customer Rpm-Toleranz (+/- 60) bei Solldrehzahl 200>6000 ..x Rpm-tolerance(+/- 60) at Set-rotation 200>6000 Lackablaufflasche vorhanden, (TT-Modul) ....x Resist waste bottle present, (only at TT-Module) 3m Absaugschlauch vorhanden, (TT-Modul) ....
Need help?
Do you have a question about the MicroTec Delta10TT and is the answer not in the manual?
Questions and answers