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Summary of Contents for Pall GASKLEEN PG550
- Page 1 PALL GASKLEEN ® BULK GAS PURIFIER ASSEMBLIES With AresKleen Purification Materials PG550 PG550-MAN PG2400 PG2400-MAN PG11000 PG11000-MAN INSTALLATION / REPLACEMENT INSTRUCTIONS Revision F: March 2014...
- Page 2 Pall Gaskleen Bulk Purifier Assemblies ® Installation / Replacement Instructions These instructions are to be used with the following Pall Gaskleen ® Bulk Purifier assemblies containing Pall AresKleen™ Purification Material: Gaskleen ® PG550 PURIFIER (0.4 μm or 3 nm filtration)
- Page 3 Table 1: Hardware Product: Purifier Purifier End Fittings: Design Flow Rate Housing and Maximum Dimensions: Allowable Working Pressure (MAWP): PG550 Diameter = .25” Fixed 75 slpm (2.65 scfm) 3.00” (76 mm) male gasket seal* 500 psig (3.45 MPa) Length = 7.94”...
- Page 4 Pall Gaskleen ® Bulk Purifiers improve and maintain the purity of specific process gases or gas mixtures used in semiconductor manufacturing and other purity-critical applications. Purifier datasheets should be referenced for performance specifications. IMPORTANT: Use of this equipment with other than intended gases may create potentially hazardous conditions.
- Page 5 Heat, flammable gas, and toxic gas for GEH4P purification material. º Heat for OXP purification material. º • NEVER PASS PURE OXYGEN OR AIR THROUGH A PALL GASKLEEN ® PURIFIER CONTAINING INP, SIP, FCP, GEH4P, SF6P, OR NH3P PURIFICATION MATERIALS.
- Page 6 • Hazardous gas should never be introduced into the purifier or associated piping until a field leak test demonstrates the system is ready for service (see step 12 of this installation procedure). Pall Corporation assumes no liability for damage or injury resulting from improper installation or operation of the Gaskleen ®...
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Page 7: Installation Procedure
Figure 1: Flow Schematics The schematics above show a suggested tubing arrangement for a Pall Gaskleen ® Bulk Gas Purifier or Pall Gaskleen ® Bulk Gas Purifier with bypass manifold. The PG550 and PG2400 models come without shut-off valves. The PG11000 model comes mounted on a panel with shut-off valves. -
Page 8: Installation And Safety Notes
Purifiers are supplied with an over-temperature indicator, which should be checked during installation. If the indicator turns black, contact Pall Corporation SLS for technical assistance. INSTALLATION AND SAFETY NOTES: • Only trained personnel should install, operate, and maintain gas control equipment. -
Page 9: Site Preparation
Table 3: Installation Information Product: Minimum Purge Tools Required for Installation: Gas Flow Rate: PG550 2 slpm (4.2 scfh) .625" and .75" open-end wrenches PG550-MAN 2 slpm (4.2 scfh) .625" and .75" open-end wrenches PG2400 (VMM4) 5 slpm (10.6 scfh) Two .75"... - Page 10 Most purifiers are not intended for exterior installation; however, bulk purifiers are often installed outdoors. Contact Pall Corporation SLS for technical assistance. • User installation of bypass valve and piping is recommended to enable direct purging of the process gas line. When the manifold option is selected no additional piping is needed.
- Page 11 7. For PG11000, slowly open inlet valve. Allow purifier to come to equilibrium with upstream gas supply pressure by introducing purge gas into the unit (Pall recommends setting the purge gas supply pressure between 30 – 60 psig, 0.21 – 0.41 MPa). Do not exceed MAWP for purifier.
- Page 12 8. Remove the protective cap from the outlet end of the purifier. 9. If purge gas flow is not detected from the outlet end of the unit, increase gas pressure or flow rate until gas is detected (for the PG11000, opening the outlet valve more may be necessary to initiate purge gas flow).
- Page 13 11. Open the manifold inlet valve then slowly open the purifier inlet valve. Allow purifier to come to equilibrium with upstream gas supply pressure by introducing purge gas into the unit (Pall recommends setting the purge gas supply pressure between 30 – 60 psig, 0.21 – 0.41 MPa).
- Page 14 4. Perform an outboard helium leak test on the purifier at the inlet and outlet gasket seal connections using a sniffer probe. 5. Should leakage be detected, contact Pall Corporation SLS for technical assistance. Do not attempt to repair purifier or valves in assembly.
- Page 15 4. Perform an outboard helium leak test on the valves and the inlet and outlet gasket seal connections using a sniffer probe. 5. Should leakage be detected, contact Pall Corporation SLS for technical assistance. Do not attempt to repair purifier or valves in assembly.
- Page 16 Should questions arise during conditioning, immediately interrupt process gas flow by closing the inlet and outlet valves on the purifier, then contact Pall Corporation SLS for technical assistance.
- Page 17 Should purging with an inert gas ever be required, the purification material will require conditioning again before returning to service. Consult with Pall Corporation SLS for technical assistance and recommendations. • DO NOT subject previously conditioned purification material to a vacuum.
- Page 18 T minutes = V/((A%/100) F) Select the appropriate gas group by active ingredient (see following pages). Generally, the active ingredient is the Intended Process Gas as specified in the Part number of the purifier. Contact Pall Corporation SLS for technical assistance.
- Page 19 (77.7 ft (116.5 ft (23.30 ft (105.9 scfh) (10.6 scfh) 11 liters (0.39 ft Note: Contact Pall Corporation SLS for technical assistance with conditioning of any Gaskleen ® Purifier for service in gases not listed below. WARNING: A purifier that has been conditioned for a particular process gas must be used for that process gas only.
- Page 20 This indicator should be monitored during conditioning. If the indicator turns black discontinue conditioning by stopping flow of condition- ing gas and initiating flow of inert gas, then contact Pall Corporation SLS for technical assistance. For purifiers containing HCLP, HBRP or CDAP material, the indicator is shipped in the purifier’s original packaging but it is not affixed...
- Page 21 Note: If the surface temperature of the purifier feels very warm to the touch at any time during the installation or conditioning procedure, immediately stop gas flow, recheck for leaks and recheck that the contents of the gas cylinder / gas source match the intended process gas for use in the purifier (as per the product part #).
- Page 22 pressurizing unit with 30 psig (0.21 MPa) of HCl for 2 hours and then flowing 5.0 slpm (10.6 scfh) of 100% process gas through the unit for 150 minutes. Ensure that effluent gas during conditioning is directed to a scrubber or vent and NOT the process tool.
- Page 23 rate for conditioning – column D). Then flow dilute blend gas for the minimum volume (column B) of process gas to flow through purifier and a flow rate that is ≤ the maximum flow rate not to be exceeded during conditioning. After completing the dilute blend conditioning, repeat with actual process gas concentration for an additional 200 –...
- Page 24 Upon completion of the above Conditioning Procedures, ensure that product label on the purifier corresponds to the process gas being used and purge all connecting lines and equipment. The Pall Gaskleen ® Bulk Gas Purifier is now ready for service.
- Page 25 6. POST-CONDITIONING 1. Once the purifier is conditioned with a process gas, it must be left under pressure of that gas. If the process gas is subsequently purged with an inert gas, a second conditioning with the process gas may be required prior to re-use with the same process gas.
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Page 26: Operation
Sheets (SDS). Requisite SDS documents should be available for use at all times. If specific purification material SDS is required, contact Pall Microelectronics for a duplicate copy. SDS for process gases are obtainable from gas suppliers. The purifier assembly is sufficiently durable to make purification material spillage most unlikely. -
Page 27: Maintenance
“guideline” purposes only. It may need to be suitably adapted to specific applications. Should doubt exist as to whether a contemplated purging protocol is suitable, or for advice on purging equipment requirements, contact Pall Corporation SLS for technical assistance. DANGER! - Page 28 amount of inert gas shown below for each of the purifier. Monitor the effluent gas to determine when conditions are safe to remove the purifier. Gaskleen ® PG550 Purifier: Minimum of 1,200 liters (42.4 ft ) of inert purge gas Gaskleen ®...
- Page 29 with at least the minimum volume of inert gas listed above for the specific assembly being purged). • Purifiers exposed to “Intended Process Gases” listed for SIP, FCP, NH3P and SF6P purification materials should be purged with at least the minimum volume of inert gas listed above for the specific assembly being purged (exceptions for SiH , SiH , and SiH(CH...
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Page 30: Troubleshooting
purged to the OSHA TWA, the purifier must be purged until the concentration of the hazardous/toxic gas is below the permissible OSHA Ceiling or Peak Concentration (TLV). Ensure that the hazardous/toxic gas concentration is less than the NIOSH IDLH of the gas. Specific values for each of these levels are contained within the SDS for each service gas. - Page 31 Also, purifiers are supplied with an over-temperature indicator, which should be checked periodically during normal operation. If the indicator turns black, contact Pall Corporation SLS for technical assistance. Possible Causes: •...
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Page 32: Disposal Procedure
(not available for all intended gas types). Contact Pall Corporation Microelectronics for details and technical assistance. Use of Pall purifiers that are a part of a manifold (PG2400-MAN and PG11000-MAN) allows for easy removal of the purifier without the need to shut down the process gas line. Closing the inlet and... - Page 36 Microelectronics Visit us on the Web at www.pall.com/MicroE 25 Harbor Park Drive Pall Corporation has offices and plants throughout the world. For Pall representatives in your area, please go to www.pall.com/contact Port Washington, NY 11050 Because of technological developments related to the products, systems,...
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