Alicat Scientific MC Series Operating Manual
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Alicat Scientific MC Series Operating Manual

Precision gas mass flow controllers
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Operating Manual
MC Series
MCR Series
MCS Series
MCV Series
Precision Gas Mass Flow Controllers
Innovative Flow and Pressure Solutions

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Summary of Contents for Alicat Scientific MC Series

  • Page 1 Operating Manual MC Series MCR Series MCS Series MCV Series Precision Gas Mass Flow Controllers Innovative Flow and Pressure Solutions...
  • Page 2 Limited Lifetime Warranty Alicat Scientific, Inc. warrants to the original purchaser (hereinafter referred to as “Buyer”) that instruments manufactured by Alicat Scientific (hereinafter referred to as “Product”) shall be free from defects in materials and workmanship for the life of the Products.

  • Page 3: Table Of Contents

    Table of Contents Page Installation Plumbing Mounting Application Power and Signal Connections Input Signals Analog Input Signal RS-232 / RS-485 Input Signal Output Signals RS-232 / RS-485 Digital Output Signal Standard Voltage (0-5 Vdc) Output Signal Optional 0-10 Vdc Output Signal Optional Current (4-20 mA) Output Signal Optional 2nd Analog Output Signal MC and MCR Series Mass Flow Controller Operation...
  • Page 4 Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals Figure 4. Typical Multiple Device (Addressable) Wiring Configuration Figure 5. Optional Industrial Connector Figure 6. Main Mode Display, MC Series Flow Controller Figure 7. Select Menu Display Figure 8. MC Series Control Setup Display Figure 9.

  • Page 5: Installation

    Thank you for purchasing an MC Series Gas Flow Controller. Please take the time to read the information contained in this manual. This will help to ensure that you get the best possible service from your instrument. This manual covers the following Alicat Scientific instruments:...

  • Page 6: Power And Signal Connections

    Power and Signal Connections Power can be supplied to your MC Series controller through either the power jack (power jack not available on CSA/ATEX approved devices) or the 8 pin Mini-DIN connector as shown in Figure 1. AC to DC adapter which converts line AC power to DC voltage and current as specified below is required to use the power jack.

  • Page 7: Input Signals

    Input Signals Analog Input Signal Apply analog input to Pin 4 as shown in Figure 1. Standard 0-5 Vdc: Unless ordered otherwise, 0-5 Vdc is the standard analog input signal. Apply the 0-5 Vdc input signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can be wired through a 50K ohm potentiometer and back to the analog input on pin 4 to create an adjustable 0-5 Vdc input signal source as shown below.

  • Page 8: Output Signals

    Standard Voltage (0-5 Vdc) Output Signal All MC Series flow controllers have a 0-5 Vdc (optional 0-10 Vdc) output signal available on Pin 6. This is generally available in addition to other optionally ordered outputs. This voltage is usually in the range of 0.010 Vdc for zero flow and 5.0 Vdc for full-scale flow.

  • Page 9: Figure 4. Typical Multiple Device (Addressable) Wiring Configuration

    DB-9 Serial Port 8 Pin Mini-DIN Port 5----------Ground--------------------------------------Ground----------8 3----------Transmit------------------------------------Receive---------3 2----------Receive-------------------------------------Transmit--------5 Figure 3. Mini-DIN to DB-9 Connection for RS-232 / RS-485 Signals Purple (Ground) Yellow Unit A Purple Yellow Unit B Purple Yellow Unit C Female Serial Cable Front Figure 4. Typical Multiple Device (Addressable) Wiring Confi guration Note: The easiest way to connect multiple devices is with a Multi-Drop Box (see page 55).

  • Page 10: Figure 5. Optional Industrial Connector

    An industrial connector is standard on all CSA/ATEX approved devices (see pages 65 & 66). It is also available as an option on all other Alicat instruments. Function Cable Color Power In ( RS-232TX / RS-485 + Blue RS-232RX / RS-485 - White Remote Tare Meters (Ground to Tare) Green...

  • Page 11: Mc And Mcr Series Mass Flow Controller Operation

    The MC Series can have several screen “modes” depending on how the device is ordered. All MC Series controllers have a default Main Mode, Select Menu Mode, Control Set Up Mode, Gas Select Mode (the Gas Select Mode may not be available on controllers calibrated for a custom gas or blend), Communication Select Mode, Manufacturer Data Mode and a Miscellaneous Mode.

  • Page 12: Gas Temperature

    Gas Temperature: The MC Series flow controllers utilize a temperature sensor to measure the line temperature of the gas flow being monitored. The temperature is displayed in engineering units of degrees Celsius (°C). The flow controllers use the temperature of the gas in the calculation of the mass flow rate.

  • Page 13: Control Setup Mode

    Menu display (Fig.7) This mode allows the user to set up most parameters commonly associated with PID control. Alicat Scientific flow controllers allow the user to select how the set-point is to be conveyed to the controller, what that set-point is if control is local, and what the Proportional and Differential terms of the PID control loop will be.

  • Page 14: Loop

    Loop—The selection of what variable to close the loop on is a feature unique to these mass flow controllers. When the mass flow controller is supplied with the control valve upstream of the electronics portion of the system, the unit can be set to control on outlet pressure (absolute pressures only) or volumetric flow rate, instead of mass flow rate.

  • Page 15: Gas Select Mode

    Gas Select Mode The gas select mode is accessed by pressing the button above “Gas Select” on the Select Menu display. The screen will appear as shown in Figure 9. PgUP PgDWN Main C2H6 Ethane Hydrogen Helium >N2 Nitrogen Nitrous Oxide Neon DOWN Figure 9.

  • Page 16: Communication Select Mode

    Communication Select Mode The Communication Select mode is accessed by pressing the button below “Comm. RS-232F” or “Comm. RS-485” on the Select Menu display. The screen will appear as shown in Figure 10. Main Select > UnitID ( A ) ..Baud ( 19200 ) .

  • Page 17: Manufacturer Data Mode

    Manufacturer Data Mode “Manufacturer Data” is accessed by pressing the “Mfg. Data” button on the Select Menu display (Figure 11). The “Mfg 1” display shows the name and telephone number of the manufacturer. The “Mfg 2” display shows important information about your flow meter including the model number, serial number, and date of manufacture.

  • Page 18: Lcd Contrast

    Main Select > LCD Contrast ( 10 ) . . PVM DBand (0.5% FS) . PRESS Avg (001) ..FLOW Avg (001) ..DOWN Misc Figure 12. Miscellaneous Display LCD Contrast: The Liquid Crystal Display Contrast can be adjusted between 0 and 30 with zero being the lightest contrast and 30 being the darkest contrast.

  • Page 19: Mcv Controller Operating Notes

    The air pressure is vented to atmosphere. Solenoid valves can be ordered from Alicat Scientific for use with the MCV series mass flow controller. Note: All standard MC Series device features and functions are available on the MCV Series and operate in accordance with the standard MC Series operating instructions.

  • Page 20: Information For Alicat Tft (Color Display) Controllers

    Information for Alicat TFT (Color Display) Instruments Alicat TFT (color display) instruments have a hi-contrast back-lit LCD display. TFT instruments operate in accordance with Alicat standard operating instructions with a few notable differences. Multi-Color Display The color of each parameter is displayed on the Main Mode screen as follows: GREEN = NORMAL CONDITIONS YELLOW = OVER 100% - 128% RED = OVER 128%...
  • Page 21 Because of these differences, you will note the following: 1. Increasing ‘P’ gain can be used to damp out overshoot and slow oscillations in pressure controllers. You will know that ‘P’ gain is too high, when the controller breaks into fast oscillations on step changes in set-point.

  • Page 22: Rs-232 Or Rs-485 Output And Input

    RS-232 / RS-485 Output and Input Configuring HyperTerminal®: 1. Open your HyperTerminal® RS-232 / RS-485 terminal program (installed under the “Accessories” menu on all Microsoft Windows® operating systems). 2. Select “Properties” from the file menu. 3. Click on the “Configure” button under the “Connect To” tab. Be sure the program is set for: 19,200 baud (or matches the baud rate selected in the RS-232 / RS-485 communications menu on the meter) and an 8-N-1-None (8 Data Bits, No Parity, 1 Stop Bit, and no Flow Control) protocol.

  • Page 23: Sending A Set-Point Via Rs-232 Or Rs-485

    Sending a Set-point via RS-232 / RS-485: To send a set-point via RS-232 / RS-485, “Serial” must be selected under the “Input” list in the control set up mode. To give controllers a set-point, or change an existing point, simply type in a number between 0 and 65535 (2% over range), where 64000 denotes full-scale flow rate, and hit “Enter”.

  • Page 24: Gas Select

    Gas Select – The selected gas can be changed via RS-232 / RS-485 input. To change the selected gas, enter the following commands: In Streaming Mode: $$#<Enter> In Polling Mode: Address$$#<Enter> (e.g. B$$#<Enter>) Where # is the number of the gas selected from the table below. Note that this also corresponds to the gas select menu on the flow controller screen: Argon Methane...
  • Page 25 The computer will respond by reading the current value for register 21 between 0-65535. It is good practice to write this value down so you can return to the factory settings if necessary. Enter the value you wish to try by writing the new value to register 21. For example, if you wished to try a “P” term of 220, you would type *W21=220 followed by “Enter”...

  • Page 26: Collecting Data

    +014.70 +025.00 +02.004 +02.004 2.004 Air +014.70 +025.00 +02.004 +02.004 2.004 Air MC Series Mass Flow Controller Data Format Note: On units with the totalizer function, the sixth column will be the totalizer value, with gas select moving to a seventh column.

  • Page 27: Sending A Simple Script File To Hyperterminal

    Sending a Simple Script File to HyperTerminal® It is sometimes desirable to capture data for an extended period of time. Standard streaming mode information is useful for short term events, however, when capturing data for an extended period of time, the amount of data and thus the file size can become too large very quickly. Without any special programming skills, the user can use HyperTerminal®...

  • Page 28: Operating Principle

    Operating Principle All M Series Gas Flow Meters (and MC Series Gas Flow Controllers) are based on the accurate measurement of volumetric flow. The volumetric flow rate is determined by creating a pressure drop across a unique internal restriction, known as a Laminar Flow Element (LFE), and measuring differential pressure across it.

  • Page 29: Other Gases

    Other Gases: M Series Flow Meters can easily be used to measure the flow rate of gases other than those listed as long as “non-corrosive” gas compatibility is observed. For example, a flow meter that has been set for air can be used to measure the flow of argon. The conversion factor needed for measuring the flow of different gases is linear and is simply determined by the ratio of the absolute viscosity of the gases.

  • Page 30: Volumetric Flow And Mass Flow Conversion

    Once the corrected mass flow rate at standard conditions has been determined and the density at standard conditions is known (see the density table at the back of this manual), a true mass flow can be calculated as detailed in the following example: Mass Flow Meter Reading = 250 SCCM (Standard Cubic Centimeters/Minute) Gas: Helium Gas Density at 25C and 14.696 PSIA = .16353 grams/Liter...

  • Page 31: Standard Gas Data Tables

    October 2005) may notice small discrepancies between the gas property tables of your old and new units. Alicat Scientific, Inc. has incorporated the latest data sets from NIST (including their REFPROP 7 data) in our products’ built-in gas property models. Be aware that the calibrators that you may be using may be checking against older data sets such as the widely distributed Air Liquide data.

  • Page 32: Gas Viscosities, Densities And Compressibilities At

    Viscosity* Density** Compressibility Short Form Long Form 25 deg C 25 deg C 25 deg C Number 14.696 PSIA 14.696 PSIA 14.696 PSIA 184.918 1.1840 0.9997 Argon 225.593 1.6339 0.9994 Methane 111.852 0.6569 0.9982 Carbon Monoxide 176.473 1.1453 0.9997 Carbon Dioxide 149.332 1.8080 0.9949...

  • Page 33: Gas Viscosities, Densities And Compressibilities At

    Viscosity* Density** Compressibility Short Form Long Form 0 deg C 0 deg C 0 deg C Number 14.696 PSIA 14.696 PSIA 14.696 PSIA 172.588 1.2927 0.9994 Argon 209.566 1.7840 0.9991 Methane 103.657 0.7175 0.9976 Carbon Monoxide 165.130 1.2505 0.9994 Carbon Dioxide 137.129 1.9768 0.9933...

  • Page 34: Troubleshooting

    After installation, there is no flow. Alicat Scientific MC controllers incorporate normally closed valves and require a set-point to operate. Check that your set-point signal is present and supplied to the correct pin and that the correct input is selected under the Input list in the control set up mode screen.

  • Page 35: Maintenance And Recalibration

    Averaging” on page 18. Jumps to zero at low flow. MC Series Controllers feature a programmable zero deadband. The factory setting is usually 0.5% of full scale. This can be adjusted between NONE and 3.2% of full scale. See page 18.

  • Page 36: Mc And Mcr Series Technical Specifications

    Technical Data for Micro-Flow and Ultra-Low Flow MC Mass Flow Controllers 0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale The following specifications are for the standard configuration of the Alicat product. There are many low-cost customization options available. Specification Mass Controller Description...
  • Page 37 Technical Data for Low Flow MC Mass Flow Controllers 0 to 100SCCM Full Scale through 0 to 20SLPM Full Scale The following specifications are for the standard configuration of the Alicat product. There are many low-cost customization options available. Specification Mass Controller Description Accuracy...
  • Page 38 Technical Data for Moderate Flow MC Mass Flow Controllers 0 to 50SLPM Full Scale through 0 to 100SLPM Full Scale The following specifications are for the standard configuration of the Alicat product. There are many low-cost customization options available. Specification Mass Controller Description Accuracy...
  • Page 39 Technical Data for High Flow MCR Mass Flow Controllers 0 to 250SLPM Full Scale through 0 to 2000SLPM Full Scale The following specifications are for the standard configuration of the Alicat product. There are many low-cost customization options available. Specification Mass Controller Description Accuracy...

  • Page 40: Mc And Mcr Series Dimensional Drawings

    MC Series:  0 - 0.5SCCM 0 - 1SCCM 0 - 2SCCM 0 - 5SCCM 0 - 10SCCM 0 - 20SCCM 0 - 50SCCM                ...
  • Page 41 MCR Series: 0 - 50SLPM  0 - 100SLPM                       MCR Series: 0 - 250SLPM     ...
  • Page 42 MCR Series: 0 - 500SLPM 0 - 1000SLPM   0 - 1500SLPM                            ...

  • Page 43: Mcv Technical Specifications

    Technical Data for MCV Mass Flow Controller for Vacuum Applications 0 to 0.5SCCM Full Scale through 0 to 20SLPM Full Scale Specification MCV Mass Controller Description Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare High Accuracy Option ±...

  • Page 44: Mcp Technical Specifications

    Technical Data for MCP Moderate Flow Mass Flow Controllers 0 to 50SLPM Full Scale through 0 to 250SLPM Full Scale NOTICE: The following specifications are applicable to Alicat MCP Series Mass Flow Controllers only. Please note maximum pressure of 60 PSIG. MCP units are fitted with a high performance valve that provides increased speed of response and control stability for low pressure applications.
  • Page 45 MCP Series: 50SLPM  100SLPM                 MCP Series: 250SLPM ...

  • Page 46: Mcs And Mcrs Series Technical Information

    Technical Data for MCS and MCRS Mass Flow Controllers Alicat MCS and MCRS instruments are built for use with aggressive gases. For the most part, these instruments maintain the specifications of equivalently ranged MC and MCR Series devices. In addition to Alicat’s standard 30 gas select programming, MCS and MCRS controllers are configured to operate with the following aggressive gases.

  • Page 47: Mcs And Mcrs Series Dimensional Drawings

    MCS Series: 0 – 0.5SCCM 0 – 1SCCM 0 – 2SCCM 0 – 5SCCM 0 – 10SCCM 0 – 20SCCM 0 – 50SCCM MCS Series: 0 – 100SCCM 0 – 200SCCM 0 – 500SCCM 0 – 1SLPM 0 – 2SLPM 0 –...
  • Page 48 MCRS Series: 0 – 50SLPM 0 – 100SLPM MCRS Series: 0 – 250SLPM...
  • Page 49 MCRS Series: 0 – 500SLPM 0 – 1000SLPM 0 – 1500SLPM MCRS Series: 0 – 2000SLPM...

  • Page 50: Profibus Technical Specifications

    All other operating specifications are shown in the Technical Data page for standard Alicat instruments. All standard device features and functions are available and operate in accordance with the standard Alicat Scientific device operating manual provided with the device. Meter or Small Valve...

  • Page 51: Devicenet Technical Specifications

    Information for Alicat DeviceNet Compatible Instruments DeviceNet OVERVIEW Alicat DeviceNet compatible instruments support the Predefined Master/Slave Connection Set. There are three connectors on the Alicat meter/controller. Only one of the connections is required for DeviceNet operations. This is a DeviceNet standard M12 Micro Connector. The other two connectors are provided for convenience and are not necessary for operation of the DeviceNet compatible Alicat meter/controller.
  • Page 52 Revision (Maj, Min) 0x01,0x01 Status 0x00 Serial Number 0x######## Product Name Alicat Scientific Inc MFC DeviceNet Object Class 0x03 DeviceNet Assembly Object Class 0x04 Connection Object Class 0x05 S-Device Supervisor Class 0x30 Technical Data for DeviceNet Meters, Gauges and Controllers NOTICE: The following specifications are applicable to Alicat DeviceNet enabled meters, gauges and controllers only.

  • Page 53: Option: Totalizing Mode

    Option: Totalizing Mode MC Series Flow Controllers can be purchased with the Totalizing Mode option. This option adds an additional mode screen that displays the total flow (normally in the units of the main flow screen) that has passed through the meter or controller since the last time the totalizer was cleared. The Totalizing Mode screen shown below is accessed by pushing the “MODE”...

  • Page 54: Option: Portable Meters And Gauges

    Alicat Portable Meters and Gauges Alicat Portable Flow Meters and Gauges use a common 9 Volt battery located in the top section of your meter. Output signals from the flow meter are passed through the female connector on top of the flow meter. Turn the switch on top of the flow meter “off”...

  • Page 55: Option: Remote Electronics

    Option: Remote Electronics for High Line or Gas Temperatures Some applications involve operating temperatures outside the standard Alicat device specifi cations. A solution using remote electronics is available. (This option is not applicable for liquid devices.) The fl ow body’s components are minimized to only the required sensors.

  • Page 56: Accessory: Flow Vision™ Sc

    Accessory: Flow Vision™ SC Software Flow Vision™ SC is an intuitive software interface to help your test cycles run smoother and shorten your engineering time! Devices Flow Vision™ SC lets you connect to and communicate Scripts with multiple Alicat units simultaneously. Now you can view virtual Data Logs displays, control tabs, charts and data lines from every connected Alicat device on the same screen.

  • Page 57: Accessories

    Accessories Part Number Description FLOWVISIONSC Flow Vision™ SC software for interface with all Alicat instruments 9 position Multi-Drop Box BB9-I 9 position Multi-Drop Box, Industrial connectors PVPS24U Universal 100-240 VAC to 24 Volt DC Power Supply Adapter PS24VHC High current power supply for BB9 use with Large Valve Controllers PCASE Industrial carry and storage case for portable meters/gauges DC-61...

  • Page 58: Eight Pin Mini-Din Pin-Out

    Eight Pin Mini-DIN Connector Pin-Outs If your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to reference the following pin-out diagram. DB-9 Serial Port 8 Pin Mini-DIN Port 5----------Ground--------------------------------------Ground----------8 5----------Ground--------------------------------------Ground----------8 3----------Transmit------------------------------------Receive---------3 3----------Transmit-------------------------------------Receive---------3 2----------Receive-------------------------------------Transmit--------5 2----------Receive--------------------------------------Transmit--------5 Mini-DIN to DB-9 Connection for RS-232 / RS-485 Signals RS-232 / RS-485 Digital Output Signal If you will be using the RS-232 / RS-485 output signal, it is necessary to connect the RS-232 / RS-485...

  • Page 59: Profibus Pin-Out

    PROFIBUS Pin-Outs If your Alicat Instrument was ordered with a PROFIBUS connection, please be sure to reference the following pin-out diagram. Power and Signal Connections: Connect to the device using two DB9 connectors. The female top connection is PROFIBUS. The male connection on the side is power and RS-232 or RS-485. Pin out diagrams for all PROFIBUS enabled Alicat devices are shown below.

  • Page 60: Db15 Pin-Out Diagrams

    DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram. The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15 equipped Alicat.
  • Page 61 DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram. The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15B equipped Alicat.
  • Page 62 DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram. The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15K equipped Alicat.
  • Page 63 DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram. The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15H equipped Alicat.
  • Page 64 DB15 Pin-Outs If your instrument was ordered with a DB15 connection, be sure to check the Calibration Label on the device and reference the appropriate pin-out diagram. The following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 wire to a DB15S equipped Alicat.

  • Page 65: Information For Csa And Atex Labeled Devices

    Additional Information for Alicat CSA and ATEX Approved Devices See the following page for Special Conditions regarding the use of these units! II 3 G EEx nA IIC T4 Class I, Div. 2 Group A, B, C and D T4 24 Vdc, 0.800A max Class I, Zone 2 AEx nA IIC T4 WARNINGS:...
  • Page 66 USE of Alicat instruments (M, MS, MC, MCS, MCR, MCRS, P, PS, PC, PCS, PCR and PCRS product families only) in Class 1 Division 2 applications. CSA certifi es the use of this product for general use as well as use in hazardous locations as defi ned by Class 1 Division 2 Group A, B, C and D T4.

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