Alicat Scientific MC Series Operating Manual
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Alicat Scientific MC Series Operating Manual

Precision gas mass flow controllers
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Operating Manual
WHISPER
MC-Series
MCS-Series
MCV-Series
MCR-Series
Precision Gas Mass Flow Controllers
The Fastest Flow Controller Company in the World!

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Summary of Contents for Alicat Scientific MC Series

  • Page 1 Operating Manual WHISPER MC-Series MCS-Series MCV-Series MCR-Series Precision Gas Mass Flow Controllers The Fastest Flow Controller Company in the World!
  • Page 2 FULL TECHNICAL SUPPORT | LIFETIME WARRANTY RECALIBRATION Your Alicat instrument is a precision device and Alicat strongly recommends that you send it to us on a yearly basis for recalibration. A yearly recalibration does a few things: ► It insures that your unit is functioning according to specification. ►...
  • Page 3 Please take the time to read the information contained in this manual. This will help to ensure that you get the best possible service from your instrument. This manual covers the following Alicat Scientific instruments: MC and MCR-Series Mass Gas Flow Controllers...

  • Page 4: Table Of Contents

    TABLE OF CONTENTS Page GETTING STARTED MOUNTING PLUMBING POWER AND SIGNAL CONNECTIONS INPUT SIGNALS Analog Input Signal RS-232 / RS-485 Digital Input Signal OUTPUT SIGNALS RS-232 / RS-485 Digital Output Signal Standard Voltage (0-5 Vdc) Output Signal Optional 0-10 Vdc Output Signal Optional Current (4-20 mA) Output Signal Optional 2nd Analog Output Signal Information for Alicat TFT (Color Display) Instruments...
  • Page 5 TABLE OF CONTENTS Page DISP SETUP LCD Contrast Rotate Display MCV Controller Operating Notes MCD Controller Operating Notes RS-232 or RS-485 Output and Input Sending a Command Polling Mode Streaming Mode Data Format Changing the Gas Selection Using Gas Select via RS-232 / RS-485 Sending a Setpoint via RS-232 / RS-485 Sending a Setpoint to a Bidirectional Controller via RS-232 / RS-485 Additional Serial Commands...

  • Page 6: Getting Started

    GETTING STARTED Power Jack Control Valve 8 Pin MiniDIN Display Screen Inlet Connection Port Outlet Connection Port Flow Direction Arrow Small Valve Mass Flow Controller shown with an upstream valve configuration and connection port fittings Inlet Connection Port Outlet Connection Port Large Valve Mass Flow Controller shown with a downstream valve configuration and connection port fittings MOUNTING...

  • Page 7: Plumbing

    PLUMBING Your controller is shipped with plastic plugs fitted in the port openings. To lessen the chance of contaminating the flow stream do not remove these plugs until you are ready to install the device. Make sure that the gas will flow in the direction indicated by the flow arrow. Standard MC-Series Gas Flow Controllers have female inlet and outlet port connections.

  • Page 8: Power And Signal Connections

    POWER AND SIGNAL CONNECTIONS Power can be supplied to your controller through either the power jack (power jack not available on CSA/ATEX approved devices) or the 8 pin Mini-DIN connector. An AC to DC adapter which converts line AC power to DC voltage and current as specified below is required to use the power jack.

  • Page 9: Input Signals

    INPUT SIGNALS Analog Input Signal Apply analog input to Pin 4 as shown on page 8. For 6 Pin Locking Industrial Connector, DB9 and DB15 pin-outs see pages 91 - 94. For PROFIBUS pin-outs see page 89. Standard 0-5 Vdc is the standard analog input signal. Apply the 0-5 Vdc input signal to pin 4, with common ground on pin 8.

  • Page 10: Rs-232 / Rs-485 Digital Input Signal

    RS-232 / RS-485 Digital Input Signal To use the RS-232 or RS-485 input signal, connect the RS-232 / RS-485 Output Signal (Pin 5), the RS-232 / RS-485 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown below. (See page 35 for details on accessing RS-232 / RS-485 input.) ...

  • Page 11: Output Signals

    OUTPUT SIGNALS RS-232 / RS-485 Digital Output Signal To use the RS-232 or RS-485 output signal, it is necessary to connect the RS-232 / RS-485 Output Signal (Pin 5), the RS-232 / RS-485 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown on page 8. (See page 35 for details on accessing RS-232 / RS-485 output.) Standard Voltage (0-5 Vdc) Output Signal MC-Series flow controllers equipped with a 0-5 Vdc (optional 0-10 Vdc) will...
  • Page 12 CAUTION! Do not connect this device to “loop powered’” systems, as this will destroy portions of the circuitry and void the warranty. If you must interface with existing loop powered systems, always use a signal isolator and a separate power supply. Purple (Ground) Yellow Unit A...

  • Page 13: Information For Alicat Tft (Color Display) Instruments

    Information for Alicat TFT (Color Display) Instruments Alicat TFT (color display) instruments have a high contrast back-lit LCD display. TFT instruments operate in accordance with Alicat standard operating instructions for our monochrome menus and displays with the following differences. Multi-Color Display Color Codes: GREEN: Green labels identify the parameters and/or adjustments associated with the button directly above or below the label.

  • Page 14: Displays And Menus

    DISPLAYS AND MENUS The device screen defaults to Main display as soon as power is applied to the controller. Note: See page 31 to rotate the display 180°. Main The Main display shows pressure, temperature, setpoint, volumetric flow and mass flow. SETPT PSIA 0.000...

  • Page 15: Main

    MAIN The following parameters are displayed in the Main mode: Pressure; Temperature; Setpoint; Volumetric Flow and Mass Flow. This mode defaults on power up, with mass SETPT PSIA +0.00 +21.50 +13.60 flow as the primary displayed parameter. Pressing the button next to the parameter will SCCM +0.00 put that parameter in the primary display.

  • Page 16: Flashing Error Message

    Flashing Error Message: An error message (MOV = mass overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange) flashes when a measured parameter exceeds the range of the sensor. When any item flashes, neither the flashing parameter nor the mass flow measurement is accurate.

  • Page 17: Select Menu

    SELECT MENU From Select Menu you can change the selected gas, interact with your RS-232 / RS-485 settings, read manufacturer’s data and access the control setup and miscellaneous screens. Press the button next to the desired operation to bring that function to the screen. DEVICE DEVICE STATE...

  • Page 18: Setpoint Source

    CONTROL Control setup is accessed by pressing the button below Control on the Select Menu display. From this screen you can select your setpoint source, choose a loop variable and adjust the PID terms. Press BACK to return to the Select Menu display.

  • Page 19: Loop Variable

    CAUTION! Never leave a Controller with a non-zero setpoint if no pressure is available to make flow. The controller will apply full power to the valve in an attempt to reach the setpoint. When there is no flow, this can make the valve very HOT! CONTROL (continued) LOOP VAR—The selection of what variable to close the loop on is a feature unique to...

  • Page 20: Pid Tuning

    PID TUNING PID Values determine the performance and operation of your proportional control valve. These terms dictate control speed, control stability, overshoot and oscillation. LOOP SETPT SETPT +0.0 SOURCE All units leave the factory with a generic tuning designed to handle most applications. If you encounter issues with valve stability, oscillation or speed, fine tuning these parameters may resolve the problem.
  • Page 21 The PD algorithm is the PID algorithm used on most Alicat controllers. It is divided into two segments: The first compares the process value to the setpoint to generate a proportional error. The proportional error is multiplied by the ‘P’ gain, with the result added to the output valve drive.

  • Page 22: About

    ABOUT Press DEVICE INFO to show important information about your flow device including the model number, serial number, and date of manufacture. DEVICE DEVICE STATE INFO INFO Press BACK to return to the About display. Push MAIN to return to the Main display. Manufacturer information is accessed by pressing the MFG INFO button on the About BACK...

  • Page 23: Tares

    TARES Press TARES to access TARE PRESS (Pressure Tare), AUTO TARE and TARE FLOW. Press BACK to return to the Tares display. Push MAIN to return to the Main display. TARE TARE AUTO FLOW PRESS TARE AUTO TARE ON/ OFF—refers to the standard -ON- auto-tare or “auto-zero”...

  • Page 24: Basic Config

    BASIC CONFIG Press BASIC CONFIG to select gases, device units, and change STP and NTP references. Press BACK to return to the Select Menu display. Push MAIN to return to the Main STP/ DEVICE display. UNITS Gas Select allows you to set your device to up to 150 gases and mixes.

  • Page 25: Composer

    COMPOSER Composer allows you to program and save up to 20 custom gas mixes containing 2 to 5 component gases found in the gas lists (pages 39-46). The DOWN minimum resolution is 0.01%. >Add Mix: 20 Free Composer is accessed by selecting COMPOSER User Mixes on the GAS SELECT display.
  • Page 26 DOWN SELECT DOWN SELECT DIGIT DIGIT Percent of Air: Percent of Ar Argon: 50.00 30.00 ˄ ˄ BACK/ BACK/ CANCEL CLEAR CANCEL CLEAR DOWN SELECT EDIT ADD GAS DIGIT NAME OPTNS Percent of He Helium: COMPOSER Mix: MyGAS 50% Air 20.00 30% AR Argon ˄...

  • Page 27: Device Units

    DEVICE UNITS Press DEVICE UNITS to access menus of units of measure for each parameter (and totalizer if so equipped). Scroll to the desired unit and press select. DOWN Mass Flow Once selected, you will see the message Volumetric Flow shown below.

  • Page 28: Stp/Ntp

    STP/NTP STP/NTP allows selection of the temperature and pressure reference condition for mass flow. For standardardized flow (when using mass flow units that begin with S), Stan T DOWN and Stan P define the reference temperature Stan T: 25.00#C and pressure. For normalized flow (when Stan P: 14.700 PSIA Norm T: 25.00#C using mass flow units that begin with N),...

  • Page 29: Adv Setup

    ADV SETUP Press ADV SETUP to adjust the sensor settings, unit ID, baud rate, or display settings. Press BACK to return to the Select Menu display. Push MAIN to return to the Main display. DISP COMM SENSOR SETUP SETUP SETUP SENSOR SETUP ZERO BAND refers to Display Zero Deadband.

  • Page 30: Comm Setup

    DOWN SELECT DOWN SELECT DIGIT DIGIT Avg Time Const: msec Avg Time Const: msec BACK/ BACK/ CANCEL CLEAR CANCEL CLEAR CLEAR CLEAR FLOW AVG PRESS AVG COMM SETUP Press COMM SETUP to adjust the unit ID or baud rate. UNIT ID – Valid unit identifiers are the letters A-Z and @.

  • Page 31: Disp Setup

    DISP SETUP Press DISP SETUP to adjust the LCD contrast or rotate the display. LCD CONTRAST: The display contrast can be adjusted between 0 and 28, with zero being the lightest and 28 being the darkest. Use the UP and ROTATE DISP DOWN buttons to adjust the contrast.

  • Page 32: Mcv Controller Operating Notes

    MCV Controller Operating Notes Alicat’s MCV mass flow controller is equipped with an integrated Swagelok® positive shutoff valve. The normally closed valve is air actuated and will remain closed until it is connected to an air source supplying between 60 and 120 psig of air pressure. Once the appropriate amount of air pressure is supplied to the shutoff valve, it will open, allowing flow through the mass controller.

  • Page 33: Mcd Controller Operating Notes

    MCD Dual Valve Mass Controller Operating Notes The MCD is a versatile Dual-Valve Mass Flow and Pressure Controller. It can be used to: • Measure mass flow and volumetric flow in both directions, plus absolute pressure and temperature; • Control mass or volumetric flow from a pressurized source or to vacuum; •...
  • Page 34 Inverse Mass Flow (or Volumetric Flow)Control with Vacuum Vacuum Source FLOW Process Bidirectional Mass Flow (or Volumetric Flow)Control Vacuum Source FLOW Gas Source Process FLOW Flowing Absolute Pressure Control Vacuum Source Back-Pressure Control Gas Source Process Positive Pressure Control Dead-Ended Absolute Pressure Control Atmosphere or Vacuum FLOW Closed Process...

  • Page 35: Rs-232 Or Rs-485 Output And Input

    RS-232 / RS-485 Output and Input Alicat mass flow and pressure units come standard with Alicat’s integrated multi-drop RS-232 connectivity; although, RS-485 can be substituted. Alicat’s Flow Vision Software Flow Vision is an affordable software program that interfaces with RS-232 or RS-485 and is compatible with most Alicat flow and pressure instruments.

  • Page 36: Polling Mode

    Parenthesis denote a value that must be filled in by the user. For example,(unit ID)<CR> should be changed to A<CR> when using a device with Unit ID “A”. It may also be useful to note that commands are case insensitive. For example, A<CR> is equivalent to a<CR>. Polling Mode All Alicat devices are sent in Polling Mode with Unit ID A unless otherwise requested.

  • Page 37: Changing The Gas Selection Using Gas Select Via Rs-232 / Rs-485

    For example, suppose a controller with unit ID A was ordered with units of SCFM or the “device units” are currently selected as SCFM. If air is selected and the setpoint value is set to 2.004 SCFM, at atmospheric temperature, the data frame may read: +014.70 +025.00...

  • Page 38: Additional Serial Commands

    STANDARD GAS DATA TABLES: Those of you who have older Alicat products may notice small discrepancies between the gas property tables of your old and new units. Alicat Scientific, Inc. has incorporated the latest data sets from NIST (including their REFPROP 9 data where available) in our products’ built-in gas property models.

  • Page 47: Supported Units List

    Supported Units: This device supports many different units. You may select the desired units (see page 28). Note that only units appropriate to this device are available for selection. Pressure Units Absolute Gauge Differential Notes pascal hPaA hPaG hPaD hectopascal kPaA kPaG kPaD...
  • Page 48 True Mass Flow Units Label Notes mg/s milligram per second mg/m milligram per minute gram per second gram per minute gram per hour kg/m kilogram per minute kg/h kilogram per hour oz/s ounce per second oz/m ounce per minute lb/m pound per minute lb/h pound per hour...

  • Page 49: Troubleshooting

    TROUBLESHOOTING Display does not come on or is weak. Check power and ground connections. Please reference the technical specifications (pages 59 - 88) to assure you have the proper power for your model. Flow reading is approximately fixed either near zero or near full scale regardless of actual line flow.
  • Page 50 Meter does not agree with another meter I have in line. Volumetric meters are affected by pressure drops. Volumetric flow meters should not be compared to mass flow meters. Mass flow meters can be compared against one another provided there are no leaks between the two meters and they are set to the same standard temperature and pressure.

  • Page 51: Maintenance And Recalibration

    Avoid excess moisture or solvents. For repair, recalibration or recycling of this product contact: Alicat Scientific, Inc. 7641 N Business Park Drive Tucson, Arizona 85743 Ph. 520-290-6060 Fax 520-290-0109 e-mail: service@alicat.com...

  • Page 52: Option: Totalizing Mode

    Option: Totalizing Mode - Controllers Controllers can be purchased with the Totalizing Mode option. This option adds an additional mode screen that displays the total flow (normally in the units of the main flow screen) that has passed through the device since the last time the totalizer was cleared.
  • Page 53 BATCH PROCESSING MODE Batch mode is a function within the optional Totalizing mode. Batch mode is designed to provide repeatable, finite flow quantities. To activate Batch Mode: Press BATCH. Then use SELECT DIGIT to move the arrow to the desired digit, and the UP and DOWN buttons to change the value.

  • Page 54: Option: Remote Electronics

    Option: Remote Electronics for High Line or Gas Temperatures Some applications involve operating temperatures outside the standard Alicat device specifications. A solution using remote electronics is available. (This option is not applicable for liquid devices.) The flow body’s components are minimized to only the required sensors.

  • Page 55: Accessory: Bb9 Multi-Drop Box

    Accessory: BB9 Multi-Drop Box The BB9 Multi-Drop Box makes it convenient to wire multiple flow and/or pressure devices to a single RS-232 or RS-485 port. Now with an RS-232 to USB interface! The Multi-Drop Box has nine 8 pin Mini-DIN ports available. The ports are to be used with a standard double ended 8 pin Mini-DIN (DC-62) style cable going from the box to each flow or pressure device.

  • Page 56: Accessory: Flow Vision™ Sc

    Accessory: Flow Vision™ SC Software Flow Vision™ SC is an intuitive software interface to help your test cycles run smoother and shorten your engineering time! Flow Vision™ SC lets you connect to and communicate with multiple Alicat units simultaneously. Now you can view virtual displays, control tabs, charts and data lines from every connected Alicat device on the same screen.

  • Page 57: Accessories

    Accessories Part Number Description FLOWVISIONSC Flow Vision™ SC software for interface with all Alicat instruments FLOWVISIONMX Flow Vision™ MX software for gas blending BB9-232 9 position Multi Drop Box with 9-pin serial port and USB to PC BB9-I 9 position Multi-Drop Box, Industrial connectors BB9-485 9 position Multi Drop Box with serial port only BB9-I-485...
  • Page 58 Accessories MNPT to Compression Fittings Filters & Elements FNPT-MNPT 10-32 - 1/8” SS-200-1-0157 10-32 5μ 510053 10-32 - 1/4” SS-400-1-0256 10-32 20μ 510054 1/8” - 1/8” SS-200-1-2 1/8” 20μ ILF-1/8-20 1/8” - 1/4” SS-400-1-2 1/4” 40μ ILF-1/4-40 1/8” - 3/8” SS-600-1-2 1/2”...

  • Page 59: Mc And Mcr Technical Specifications

    Technical Data for Alicat MC and MCR Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 5000 slpm Full Scale Standard Operating Specifications (Contact Alicat for available options) Performance MC & MCR Mass Flow Controller Accuracy at calibration ±...
  • Page 60 MC-Series: Upstream Valve 26.67mm 0 - 0.5 sccm 1.050in 0 - 1 sccm 0 - 2 sccm 0 - 5 sccm 0 - 10 sccm 0 - 20 sccm 0 - 50 sccm 98.98mm 3.897in 8.53mm 8.53mm .336in .336in 13.34mm 84.77mm 13.34mm .525in...
  • Page 61 MC-Series: 0 - 100 sccm 0 - 200 sccm 26.67mm 0 - 500 sccm 1.050in 0 - 1 slpm 0 - 2 slpm 0 - 3 slpm 0 - 5 slpm 0 - 10 slpm 0 - 20 slpm 103.30mm 4.067in 8.89mm 8.89mm...
  • Page 62 MCR-Series: 0 - 250 slpm 57.15mm 40.64mm 2.250in 1.600in 139.56mm 5.495in 28.45mm 28.45mm 1.120in 1.120in 8.13mm 1/2" NPT 194.31mm .320in Both Sides 20.32mm 28.58mm 7.650in .800in 1.125in 78.11mm 82.55mm 3.075in 3.250in 14.61mm 9.53mm 19.05mm .575in 4.45mm .375in .750in .175in 36.20mm 47.63mm 1.425in 1.875in...
  • Page 63 MCR-Series: 0 - 2000 slpm 73.66mm 57.15mm 2.900in 2.250in 139.56mm 5.495in 28.45mm 28.45mm 1.120in 1.120in 205.74mm 36.83mm 28.58mm 8.100in 1.450in BOTH SIDES 1.125in 171.45mm 6.750in 107.95mm 4.250in 5.08mm 68.58mm .200in 5.08mm 2.700in .200in 47.63mm 68.58mm 9.53mm 1.875in 2.700in .375in DATE X 8-32 UNC .330in[8.38mm] 4X 8-32 UNC...
  • Page 64 MCRH-Series 0 - 5000 slpm                            MCRH 5000 slpm approximate weight: 28.0 lb.

  • Page 65: Whisper Technical Specifications

    Technical Data for Whisper Low Pressure Drop Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 1000 slpm Full Scale Standard Specifications (Contact Alicat for available options.) Performance Whisper MCW & MCRW Mass Flow Controller Accuracy at calibration ±...
  • Page 66 WHISPER MCW: 0 - 0.5 sccm 26.67mm 0 - 1 sccm 1.050in 0 - 2 sccm 0 - 5 sccm 0 - 10 sccm 0 - 20 sccm 98.98mm 3.897in 8.53mm 8.53mm .336in .336in 84.77mm 13.34mm 13.34mm 3.338in .525in M5X0.8 (10-32 UNF) .525in BOTH SIDES...
  • Page 67 WHISPER MCRW: 194.31mm 0 - 5 slpm 7.650in 0 - 10 slpm 0 - 20 slpm 57.15mm 40.64mm 2.250in 1.600in 139.56mm 126.67mm 5.495in 4.987in 28.45mm 12.70mm 1.120in .500in 15.75mm 20.32mm 1/4 NPT 28.58mm .620in .800in Both Sides 68.58mm 1.125in 82.55mm 2.700in 3.250in 5.08mm...
  • Page 68 WHISPER MCRW: 184.79mm 0 - 50 slpm 7.275in 0 - 100 slpm 0 - 250 slpm 57.15mm 40.64mm 2.250in 1.600in 139.56mm 5.495in 28.45mm 20.32mm 1.120in .800in 8.13mm .320in 28.58mm 3/4 NPT 20.32mm 68.58mm 82.55mm 1.125in Both Sides .800in 2.700in 3.250in 5.08mm 19.05mm .200in...
  • Page 69 WHISPER MCRWH 0 - 1000 slpm                                   ...

  • Page 70: Mcv & Mcvs Technical Specifications

    Technical Data for MCV & MCVS Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 20 slpm Full Scale The Alicat MCV mass flow controller is designed for applications that require tight shut-off such as vacuum coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides positive shut-off of 1 x 10 atm scc/sec Helium max.
  • Page 71 MCV-Series All ranges 141.73mm 5.580in 9.53mm .375in 6.35mm .250in THRU 28.58mm 1.125in 1/8" NPT 120.76mm 4.755in 15.94mm 15.94mm 4.76mm .628in .628in .188in 160.78mm 19.05mm 19.05mm 1/4" VCRM Both Sides 6.330in .750in .750in 170.74mm 38.10mm 6.722in 1.500in MCV approximate weight: 3.0 lb. DATE 5/4/2017 MCVS-Series...

  • Page 72: Mcp Technical Specifications

    Technical Data for MCP Moderate Flow Mass Flow Controllers 0 to 10 slpm Full Scale through 0 to 250 slpm Full Scale Alicat MCP mass flow controllers are fitted with a high performance valve for low pressure applications. The following specifications are applicable to Alicat MCP-Series Mass Flow Controllers only. Standard Operating Specifications (Contact Alicat for available options) Performance MCP Mass Flow Controller...
  • Page 73 MCP-Series 0 - 10 splm 0 - 20 slpm 40.64mm 1.600in 110.92mm 4.367in 12.70mm 12.70mm .500in .500in 20.32mm 96.08mm 1/4 NPT 20.32mm .800in 3.783in Both Sides .800in 46.04mm 1.813in 14.29mm 4.45mm .563in .175in 36.20mm 1.425in .136in 3.45mm .450in 11.43mm DATE 4/4/2017 8-32 UNC .350in...
  • Page 74 MCP-Series SAE 0 - 50 splm 40.64mm 0 - 100 slpm 1.600in 110.92mm 4.367in 12.70mm 12.70mm .500in .500in 146.60mm 20.32mm 5.772in 20.32mm .800in .800in 9/16-18 UNF .725in 18.42mm J1926 Port 19.05mm Both Sides .750in 4.45mm .175in 36.20mm 1.425in 8-32 UNC .375in[9.53mm] 82.55mm 3.250in...

  • Page 75: Mce Technical Specifications

    Technical Data for MCE and MCES Flow Mass Flow Controllers 0 – 0.5 sccm Full Scale through 0 – 20 slpm Full Scale MCE mass flow controllers are built with a proportional valve positioned within the base of the unit. Please contact Alicat for MCE controller application information.
  • Page 76 MCE-Series All Ranges 38.10mm 1.500in 116mm 4.57in 11.18mm 11.18mm .440in .440in 124mm 19.05mm 19.05mm 1/4" VCRM 4.882in .750in Both Sides .750in 69.85mm 9.53mm 2.750in 12.70mm .375in .500in 28.58mm 1.125in 2X 8-32 UNC .350in 8.89mm DATE 1/5/2016 REV. MCE-1SLPM-D-MSPEC MCE approximate weight: 3.0 lb. MCES-Series All Ranges 38.10...

  • Page 77: Mcd And Mcrd Technical Specifications

    Technical Data for Alicat MCD and MCRD Dual Valve Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale Standard Operating Specifications (Contact Alicat for available options) Performance MCD Mass Flow Controller MCRD Mass Flow Controller Accuracy at calibration conditions ±...
  • Page 78 MCD-Series 0 - 20 slpm shown                             MCRD-Series 0 - 2000 slpm shown ...

  • Page 79: Mcs And Mcrs Technical Specifications

    Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers Alicat MCS and MCRS instruments are built for use with aggressive gases. For the most part, these instruments maintain the specifications of equivalently ranged MC and MCR-Series devices. Standard Compatible Gas List for MCS and MCRS Controllers 75% CO2 / 25% Ar C-75 Argon...
  • Page 80 MCS-Series: 0 – 0.5 sccm 0 – 1 sccm 26.67mm 0 – 2 sccm 1.050in 0 – 5 sccm 0 – 10 sccm 0 – 20 sccm 0 – 50 sccm 111.68mm 4.397in 8.53mm 8.53mm .336in .336in 84.77mm 13.34mm 13.34mm 3.338in M5X0.8 (10-32 UNF)
  • Page 81 MCRS-Series: 0 – 50 slpm 57.15mm 40.64mm 0 – 100 slpm 2.250in 1.600in 194.31mm 7.650in 139.56mm 144.45mm 5.495in 5.687in 12.70mm 28.45mm .500in 1.120in 1/4 NPT 184.79mm 15.75mm 20.32mm Both Sides 7.275in .620in .800in 28.58mm 1.125in 68.58mm 82.55mm 2.700in 5.08mm 3.250in 19.05mm .200in 47.63mm...
  • Page 82 MCRS-Series: 0 – 500 slpm 57.15mm 40.64mm 0 – 1000 slpm 2.250in 1.600in 0 – 1500 slpm 139.28mm 151.79mm 5.484in 5.976in 4X 8-32 UNC 3/4 NPT .375in 9.53mm 13.21mm Both Sides .520in 28.45mm 28.45mm 1.120in 4.76mm 184.79mm 7.85mm 1.120in .188in 7.275in .309in 4X 8-32 UNC...
  • Page 83 MCRS-Series: 0 – 3000 slpm 73.66mm 57.15mm 2.900in 2.250in 152.07mm 5.987in 24.38mm 24.38mm .960in .960in 226.06mm 1-1/4 NPT 36.83mm 28.58mm 8.900in Both Sides 1.450in 1.125in 97.79mm 88.90mm 3.850in 3.500in 5.08mm 34.29mm 25.40mm .200in 1.350in 1.000in 47.63mm 1.875in 9.53mm 68.58mm .375in 2.700in 8-32 UNC .328in[8.33mm]...

  • Page 84: Mcq And Mcrq Technical Specifications

    Technical Data for Alicat MCQ and MCRQ Mass Flow Controllers 0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale Alicat MCQ and MCRQ units are for high pressure applications. The flow rate is dependent on the pressure in that lower pressures will yield lower flow rates.
  • Page 85 MCQ-Series 0 – 0.5 sccm 0 – 1 sccm 26.67mm 0 – 2 sccm 1.050in 0 – 5 sccm 0 – 10 sccm 0 – 20 sccm 0 – 50 sccm 111.68mm 4.397in 8.53mm 8.53mm .336in .336in 84.77mm 13.34mm 13.34mm 3.338in .525in M5X0.8...
  • Page 86 MCRQ-Series 0 – 50 slpm 57.15mm 40.64mm 0 – 100 slpm 2.250in 1.600in 194.31mm 7.650in 139.56mm 144.45mm 5.495in 5.687in 12.70mm 28.45mm .500in 1.120in 1/4 NPT 184.79mm 15.75mm 20.32mm Both Sides 7.275in .620in .800in 28.58mm 1.125in 68.58mm 82.55mm 2.700in 5.08mm 3.250in 19.05mm .200in 47.63mm...
  • Page 87 MCRQ-Series 0 – 500 slpm 0 – 1000 slpm 57.15mm 40.64mm 2.250in 1.600in 0 – 1500 slpm 139.28mm 151.79mm 5.484in 5.976in 4X 8-32 UNC 3/4 NPT .375in 9.53mm 13.21mm Both Sides .520in 28.45mm 28.45mm 1.120in 4.76mm 184.79mm 7.85mm 1.120in .188in 7.275in .309in 4X 8-32 UNC...
  • Page 88 MCRQ-Series 0 – 3000 slpm 73.66mm 57.15mm 2.900in 2.250in 152.07mm 5.987in 24.38mm 24.38mm .960in .960in 226.06mm 1-1/4 NPT 36.83mm 28.58mm 8.900in Both Sides 1.450in 1.125in 97.79mm 88.90mm 3.850in 3.500in 5.08mm 34.29mm 25.40mm .200in 1.350in 1.000in 47.63mm 1.875in 9.53mm 68.58mm .375in 2.700in 8-32 UNC .328in[8.33mm]...

  • Page 89: Profibus Technical Specifications And Pin-Outs

    All other operating specifications are shown in the Technical Data page for standard Alicat instruments. All standard device features and functions are available and operate in accordance with the standard Alicat Scientific device operating manual provided with the device. Meter or Small Valve...

  • Page 90: Eight Pin Mini-Din Pin-Out

    Eight Pin Mini-DIN Connector Pin-Outs If your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to reference the following pin-out diagram.         Standard 8 Pin Mini-DIN Pin-Out Mini-DIN Pin Function cable color...

  • Page 91: Locking Industrial Connector Pin-Out

     Locking Industrial Connector Pin-Outs If your Alicat Instrument was ordered with a Six Pin Locking Industrial connection, please be sure to reference the following pin-out diagram.              ...

  • Page 92: Pin D-Sub Common Pinouts

    9 pin D-Sub Common Pinouts If your instrument was ordered with a DB9 connection, be sure to check the calibration label on the device or the calibration data sheet and reference the appropriate pinout diagram. Male Connector Front View Female Connector Front View Common Pinouts DB9 (Female) DB9A / DB9K...

  • Page 93: 15 Pin D-Sub Common Pinouts

    15 pin D-Sub Common Pinouts If your instrument was ordered with a DB15 connection, be sure to check the calibration label on the device or the calibration data sheet and reference the appropriate pinout diagram. Female Connector Front View Male Connector Front View DB15 DB15A DB15B...

  • Page 94: High Density 15 Pin D-Sub Common Pinouts

    MATERIAL DRAWING IS THE SOLE PROPERTY OF 316L Stainless surfaces. Analog Out 2 surfaces. ALICAT SCIENTIFIC, INC. ANY 4. Remove all burrs 4. Remove all burrs REPRODUCTION IN PART OR AS A WHOLE FINISH WITHOUT THE WRITTEN PERMISSION OF 5. Do not Scale Drawing 5.

  • Page 95: Information For Csa And Atex Labeled Devices

    Additional Information for Alicat CSA and ATEX Approved Devices II 3 G EEx nA IIC T4 Class I, Div. 2 Group A, B, C and D T4 24 Vdc, 0.800A max Class I, Zone 2 AEx nA IIC T4 WARNINGS: EXPLOSION HAZARD –...
  • Page 96 HAZARDOUS. EXPLOSION HAZARD – SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR CLASS I, DIVISION 2. Alicat Scientific, Inc. Tucson, AZ USA Tel: 520-290-6060 www.AlicatScientific.com USE of Alicat instruments (L, LC, LCR, M, MW, MS, MC, MCD, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC, PCD, PCS, PCR and PCRS product families) in applications requiring ATEX Class 1 Zone 2 Certification.
  • Page 97 Product is required as the result of repairs to Product pursuant to this Warranty. Failure of Buyer to send Product to Alicat Scientific for recalibration on a yearly basis after a period of 36 months from date of manufacture will remove any and all obligations regarding repair or replacement of Product as outlined by this Warranty to Buyer from Alicat Scientific.

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