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Related Manuals for BRONKHORST EL-FLOW Base Series
Summary of Contents for BRONKHORST EL-FLOW Base Series
- Page 1 Instruction manual EL-FLOW Base series Mass Flow Controllers Doc. no.: 9.17.061N Date: 08-04-2019 ATTENTION Please read this instruction manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 The material in this manual is for information purposes only, and is subject to change without notice. Page 2 EL-FLOW Base Series Mass Flow Controllers 9.17.061...
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Page 3: Table Of Contents
Change control mode: ..........................27 LED indications ..............................28 Basic Parameters and Properties ........................29 3.9.1 Introduction .............................. 29 3.9.2 Basic Parameters ............................30 Advanced Operation ........................31 Reading and Changing Instrument Parameters ....................31 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 3... - Page 4 Software for conversion factor calculation ....................36 4.2.2 Maximum pressure drop........................... 36 Troubleshooting ..........................37 General ................................37 LED indications ..............................37 Troubleshooting summary general ........................37 Removal and Return Instructions ....................39 Service ............................40 Page 4 EL-FLOW Base Series Mass Flow Controllers 9.17.061...
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Page 5: General Product Information
BRONKHORST® General Product Information 1.1 Introduction This user guide covers the EL-FLOW Base Series mass flow controllers for gasses as shown in the pictures below. Included herein is product information, installation instructions, operation, maintenance, troubleshooting and technical specifications. F-201CB F-201AB... -
Page 6: Warranty
BRONKHORST® 1.5 Warranty The products of Bronkhorst® are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and the instructions in this manual and that they are not subjected to abuse, physical damage or contamination. -
Page 7: Model Key
The instrument is fitted with either Viton or Kalrez seals. Which sealing material is used is shown in the last character of the model key. Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is a general guide only. Operating conditions may substantially change the accuracy of this guide. -
Page 8: Calibration
BRONKHORST® 1.6.4 Calibration EL-FLOW Base instruments are Air or N2 calibrated. Bronkhorst® certifies that all instruments meet the rated accuracy. They have been calibrated using measurement standards traceable to the standards of the Dutch Metrology Institute (VSL). The calibration is converted to the customer’s gas and conditions using a detailed conversion model. -
Page 9: Operating Principles
In general instruments with these sensors may be mounted horizontal, as well as in a vertical position, at low operating pressures. Sensor flow 10 mln/min Air 10 mln/min Air 10 mln/min Air 10 mln/min Air 10 mln/min Air LFE(4x) flow Example of a 50 ml /min measurement part 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 9... -
Page 10: Solenoid Valve Principle
1.7.3 Solenoid Valve Principle The control valve used in the EL-FLOW Base series is a standard, direct operated control valve. It is a normally closed solenoid valve. The plunger is lifted by the force of the magnetic field of the coil. The diameter of the orifice under the plunger is optimised for the customer’s application. -
Page 11: Installation Instructions
The preferred mounting position of EL-FLOW Base mass flow controllers is horizontal. Other mounting positions may introduce a zero shift and/or little gas and pressure dependency of the zero signal. When 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 11... -
Page 12: Fluidic Connections
Swagelok RS-type adapters combined with AS013 (70°Sh) o-rings for leak tight installation. Bronkhorst® highly recommends the use of Swagelok RS-type stainless steel adapters, e.g. part number SS-400-1-4RS. Adapters can be ordered separately to the instruments. Contact your local distributor for more information. -
Page 13: Electrical Connections
Refer to Hookup EL-FLOW Base, document nr. 9.16.091, for more details. Bronkhorst® recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection. -
Page 14: System Purging
When indication is showing 0% signal and the green indication LED is burning continuously again, then zero has been performed well. For information how to start the zeroing procedure over RS232 FlowBus or RS485 ModBus check chapter 4.1.4, “Auto Zeroing” Page 14 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 15: Basic Operation
Setpoints below 2% of the full scale will be interpreted as 0% setpoint. When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 or Modbus/RS485 for reading/changing parameters (e.g. controller response or other fluid selection). 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 15... -
Page 16: Digital Communication Protocol Detection (Flow-Bus Rs232 Or Modbus Rs485)
660 ms? message and stay in the detected protocol. Answer is sent The protocol is detected. The instrument will remember the detected Protocol Detected protocol as long as the instrument is powered. Page 16 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 17: Basic Rs232 Flowbus Operation
BRONKHORST® 3.4 Basic RS232 Flowbus operation RS232 Flowbus communication can be used for operating your instrument using the Bronkhorst® FLowDDE server application. Physical layer and communication protocol are detected automatically upon reception of messages. These messages must be sent using the correct combination of physical layer and communication protocol. -
Page 18: Modbus Rs485 Operation
Base Base mass flow meter/controller mass flow meter/controller mass flow meter/controller Remark: See hookup diagram for details Bronkhorst® advices the following resistor values for the following voltages: Supply voltage Bias Pull-up resistor Termination resistor Bias Pull-down resistor termination RT1 & RT2... -
Page 19: Slave Address, Baud Rate And Parity Setup
Default instruments will be delivered to customers on address 1 and with a baud rate of 19200 baud and EVEN parity. The slave address, baud rate and parity of the Bronkhorst® meter/controller Modbus slave can be changed to fit the instrument in your existing Modbus network. Changing the slave address, baud rate and parity can be done in the following ways. - Page 20 “310: Fieldbus2 baudrate” must be selected. And to read/change the parity parameter “336: Fieldbus2 parity must be selected”. To change one of these parameters parameter “7: Initreset” has to be set to ‘64’ first. Page 20 EL-FLOW Base Series Mass Flow Controllers 9.17.061...
- Page 21 LEDs will flash 2 times. For bus-address 3 / 38400 the green LED will flash 0 times, the red LED will flash 3 times and both LEDs will flash 3 times. 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 21...
- Page 22 (Pattern: 0.1 sec on, 0.1 sec off). As soon as the switch is pressed-down, this LED (or both LEDs) will be off and the counting sequence will start. Note 3: The parity setting cannot be read or changed using the micro-switch. Page 22 EL-FLOW Base Series Mass Flow Controllers 9.17.061...
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Page 23: Implementation Class
02, ILLEGAL DATA ADDRESS, in case of writing to non-existing address, or writing to a part of a multiregister parameter (float, long, etc) 03, ILLEGAL DATA VALUE, in case of reading less than 1 or more than 123 registers 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 23... -
Page 24: Available Parameters
Identification number Unsigned char 0x0E2C 3628 0x0E2D 3629 RW Normal step c. resp. Unsigned char 0x0E45 3653 0x0E46 3654 RW Stable situation c. resp. Unsigned char 0x0E51 3665 0x0E52 3666 Page 24 EL-FLOW Base Series Mass Flow Controllers 9.17.061... - Page 25 0. Details and meaning can be found in document 9.17.023 Operation instructions digital instruments. This document can be found at: http://www.bronkhorst.com/en/downloads/instruction_manuals/ 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 25...
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Page 26: Push-Button Operation
Manual install. The bus address and baudrate can be changed by means of micro-switch en LEDs. The procedure is described in 3.5.1 (Change bus- address/MAC-ID and baud rate). LED indications using micro-switch at power-up situation of an instrument Page 26 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 27: Micro-Switch Use For Reading/Changing Control Mode
0.5 sec off Instrument returns to normal running/operation mode. Changes are valid when they are made within the time-out times. See parameter ‘Control mode’ for behaviour at power-up of the instrument. 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 27... -
Page 28: Led Indications
Variable Bus activity on the Modbus interface Continuously Critical error message A serious error occurred in the instrument Instrument needs service before further using Red LED indication modes (no switch used) Page 28 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 29: Basic Parameters And Properties
PDU Address and register number to address parameters using the ModBus protocol. [address] Hexadecimal PDU address . [index] Decimal register number. For the ModBus protocol every 2 bytes are addressed separately. Check chapter 3.55, “Modbus RS485 operation” for more details. 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 29... -
Page 30: Basic Parameters
RS232 FlowBus After power-up the control mode will always be set to DIGITAL_INPUT or ANALOG_INPUT, depending on customer’s requirement. Check chapter 4.1.6, Changing Default Control Mode, to change the start-up mode. Page 30 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 31: Advanced Operation
Type Access Range FlowDDE FlowBus ModBus PDU RW Unsigned char[13] 113/6 0xF130..0xF136/61745..61751 User definable alias string. Maximum 13 characters allow the user to give the instrument his own tag name. 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 31... -
Page 32: Fluid Information
113/4 0xF120..0xF127/61729..61736 Digital instrument manufacturing configuration information string. This string can be used by Bronkhorst® to add extra information to the model number information. 4.1.3 Fluid Information Next parameters give information about the fluid range of the instrument. Fluid name... -
Page 33: Controller Response Adjustment
Td (PID-Td) Type Access Range FlowDDE FlowBus ModBus PDU RW Float 0…1E+10 114/23 0xF2B8..0xF2B9/62137..62138 Differentiation action in seconds of the PID controller. Default Value: 0.0 This value should not be changed. 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 33... -
Page 34: Changing Default Control Mode
Read IOStatus Add 64 to the read value Write IOstatus Procedure for changing default analog operation to default digital operation: Read IOStatus Subtract 64 from the read value Page 34 EL-FLOW Base Series Mass Flow Controllers 9.17.061... -
Page 35: Display Filter
Read IOStatus Add 8 to the read value Write IOstatus Procedure to disable the micro switch: Read IOStatus Subtract 8 from the read value Write IOstatus 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 35... -
Page 36: Using Other Gasses Than Specified
Check chapter 1.7, “Operating Principles”, for detailed information about the sensor principle. 4.2.1 Software for conversion factor calculation Bronkhorst® gathered the physical properties of over 600 fluids in a database called FLUIDAT. Application software, such as FLOW CALCULATIONS, enables the user to calculate accurate conversion factors, not only at 20°C/1 atm but at any temperature/pressure combination, both for gases and for... -
Page 37: Troubleshooting
5c) replace pressure regulator or try ‘5b’ Valve sleeve or internals damaged 5d) replace damaged parts and adjust valve, see ‘1e’ or return to factory Controller adjustment wrong 5e) adjust controller 9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 37... - Page 38 ‘1e’ Pressure too high or much too low 6b) apply correct pressure High flow at zero setpoint Damaged diaphragm (only applicable to 7a) replace membrane seal valves with membrane) Page 38 EL-FLOW Base Series Mass Flow Controllers 9.17.061...
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Page 39: Removal And Return Instructions
If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the instrument. Important: Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely: NL801989978B01 If applicable, otherwise contact your distributor for local arrangements. -
Page 40: Service
BRONKHORST® Service For current information on Bronkhorst® and service addresses please visit our website: http://www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e-mail: ...