KLA Tencor Alpha-Step IQ Operating Manual page 3

Birck N anotechnology C enter A lpha-­‐Step I Q S urface P rofiler
4. OPERATING G UIDE
1. L oading S amples
a. E nsure t he s tylus i s i n t he h igh p osition b efore l oading t he s ample. T his i s d one b y d ouble-­‐clicking t he " Up" a rrow s een o n
the c ontrol p anel. ( See f ig. 3 ) W hen t he s tylus i s i n h igh p osition t he " Stop" b utton w ill s witch f rom r ed t o g rayed o ut ( fig. 3 ).
b. F lip u p t he f ront p anel o n t he A SIQ, a llowing a ccess t o t he p latform.
c. P lace t he s ample o n t he p latform a nd, u sing f ingers o r t weezers, s lide t he s ample u ntil i t r ests u nder t he i lluminated a rea o f
the p latform.
d. L ower t he s tylus b y d ouble c licking t he D own a rrow ( fig. 3 ) a nd w aiting f or t he s tylus t o c ome i nto c ontact w ith t he s ample.
Press t he U p a rrow o nce b efore d oing a ny f ine t uning o f t he s ample's p osition.
e. F ine-­‐tune t he s ample's p osition i f n eeded. X a nd Y p osition i s a djusted u sing t he c ontrol k nobs o n t he l ower l eft s ide o f t he
tool. D o n ot p ush t he p latform a long t he X a nd Y a xes w ith y our h and. T he r otation o f t he p latform c an b e a djusted u sing
hands.
2. L oading/Creating a R ecipe
a. I f m aking a n ew r ecipe, c onsult S ection 3 o f t his g uide, S pecifications, t o d etermine y our n ecessary p arameters.
(optional) T o l oad a r ecipe f rom a p revious s ession p ress t he " Load. . . " b utton ( fig. 3 ).
b. S ave a r ecipe f or l ater u se w ith t he " Save A s. . . " b utton ( fig. 3 ) a nd t ype a f ilename b eginning w ith y our l ast n ame; e .g.,
rinehart01.aiq.
3. R unning a R ecipe
a. M ake s ure t he s tarting p oint i s l ined u p u nder t he r ed c rosshairs ( fig. 3 ).
b. F lip d own t he f ront p anel o n t he A SIQ, i solating t he p latform f rom t he s urrounding e nvironment.
c. P ress t he g reen " Start" b utton. T his w ill l ower t he s tylus t o t he s ample s urface i f i t i s n ot a lready i n c ontact.
d. D o n ot t ouch t he t ool w hile a s can i s r unning. W ait f or t he s can t o e nd o r p ress t he r ed " Stop" b utton t o a bort t he s can.
LOCATION: Cleanroom, L-Bay
F igure 3 : C ontrol P anel
EFFECTIVE: 02/23/15 CONTACT: srinehar@purdue.edu PAGE: 3 of 4