KLA Tencor Alpha-Step IQ Operating Manual page 4

Birck N anotechnology C enter A lpha-­‐Step I Q S urface P rofiler
4. R eviewing D ata
4a. L eveling
Access t he L eveling s ettings b y p ressing t he " Leveling" b utton. F rom t his d ialogue t here a re s everal d ifferent o ptions
for l eveling o ut s can d ata, u sing z ones t o g et a m ore a ccurate r epresentation o f t he s ample s urface.
4b. D ata R eview Mode
Press t he " Data R eview" b utton a t t he t op o f t he s creen w hen t o s ave s can d ata. A SIQ's s oftware g enerates a
customizable r eport. T here a re t hree w ays t o s ave a r eport. T he r eport c an b e s aved i n A SIQ's p roprietary f ile f ormat,
which c an o nly b e r ead w ith A SIQ's s oftware. A lternatively t he d ocument c an b e p rinted t o M icrosoft X PS f ormat a nd
saved o n a f lash d rive. L astly t he d ata c an b e s aved i n p laintext A SCII f ormat a nd m anipulated a fterwards i n t he u ser's
program o f c hoice.
5. U nloading a S ample
a. E nsure t he s tylus i s i n t he h igh p osition b efore u nloading y our s ample. T his i s d one b y d ouble-­‐clicking t he " Up" a rrow s een
on t he c ontrol p anel. ( See f ig. 3 ) W hen t he s tylus i s i n h igh p osition t he " Stop" b utton w ill t urn f rom r ed t o g rayed o ut ( fig. 3 ).
b. F lip u p t he f ront p anel o n t he A SIQ, a llowing a ccess t o t he p latform.
c. U sing f ingers o r t weezers, s lide t he s ample o ut f rom u nder t he i lluminated a rea o f t he p latform, t hen r emove i t f rom t he
chamber.
d. F lip d own t he f ront p anel o n t he A SIQ.
5. TROUBLESHOOTING
1. V ibration S ources
Your s can d ata c an b e c ompromised i f t he s ample v ibrates d uring s cans. A void c ommon s ources o f v ibration s uch a s f oot-­‐
tapping o r l oud n oises.
2. S ystem L imitations
When u sing t he A SIQ b ear i n m ind t hat t he s tylus t ip i s s loped, a nd t his m ay l ead t o a l oss o f a ccuracy o n s tep h eight
measurements. A n e xample s ituation i s d epicted b elow.
F igure 4 : M easurement E rror E xample
Direct a ny f urther q uestions t o S ean R inehart a t s rinehar@purdue.edu.
LOCATION: Cleanroom, L-Bay
S tylus T ip
-­‐-­‐-­‐-­‐ S tylus P ath
S ample S urface
EFFECTIVE: 02/23/15 CONTACT: srinehar@purdue.edu PAGE: 4 of 4