SCS LABCOTER 2 Operator's Manual page 7

Parylene deposition system
Table of Contents

Advertisement

OM-610-1002-1
6.2.5 Feed-Thru Rebuild ........................................................................................................................ 40
6.3
PROCESS TEMPERATURE CONTROLLERS.......................................................................... 41
6.3.1 Verifying the WEST Model 6100+ Temperature Controller......................................................... 42
6.3.2 Vacuum Controller........................................................................................................................ 42
6.3.3 Calibrating the Granville-Phillips Zero Pressure Simulator........................................................ 43
6.3.4 Verifying the WEST Model 6100+ Vacuum Process Controller................................................... 43
6.3.5 Vacuum Amplifier Circuit Board Calibration............................................................................... 44
6.4
PROCESS CONTROLLER PARAMETERS .............................................................................. 45
6.4.1 To Enter the Configuration Mode:................................................................................................ 45
6.4.2 To Exit the Configuration Mode: .................................................................................................. 45
6.4.3 To Enter the Setup Mode: ............................................................................................................. 46
6.4.4 To exit the Setup Mode: ................................................................................................................ 46
6.4.5 Factory Settings ............................................................................................................................ 47
6.4.6 Detailed Description of Parameters ............................................................................................. 51
6.5
OPERATION AND MAINTENANCE LOGS............................................................................. 55
6.6
SUPPLIES FOR SERVICING ..................................................................................................... 56
6.7
COATING PROBLEMS AND SOLUTIONS.............................................................................. 56
SECTION 7
COMPONENT LOCATION & PART NUMBERS .................................................... 59
7.1
7.2
FD-610-1007-1 FACILITIES DRAWING................................................................................................ 61
AD-610-1010-1 120V ASSEMBLY ......................................................................................................... 63
AD-610-1011-1 220V ASSEMBLY ......................................................................................................... 65
AD-610-1065-1 200 VOLT ASSEMBLY................................................................................................. 67
AD-286-1041-1 BASIC FRAME ASSEMBLY 1 OF 2 ............................................................................ 69
AD-286-1041-1 BASIC FRAME ASSEMBLY 2 OF 2 .............................................................................. 71
AD-610-1001-4 ELECTRICAL PANEL ASSEMBLY ............................................................................ 73
AD-215-1007-1 LOAD DOOR ASSEMBLY ........................................................................................... 75
AD-374-1029-2 HEATER ASSEMBLY .................................................................................................. 77
AD-241-1007-1 FIXTURE ROTATION ASSEMBLY ............................................................................ 79
AD-157-1019-1 LN2 CHILLER ASSEMBLY 1 OF 2.............................................................................. 81
AD-157-1019-1 LN2 CHILLER ASSEMBLY 2 OF 2.............................................................................. 83
AD-724-1097-1 LN2 LEVEL CONTROLLER ASSEMBLY .................................................................. 85
AD-241-1008-1 STANDARD FIXTURE ................................................................................................. 87
D50016 VACUUM CHAMBER............................................................................................................... 89
AD-088-1031-1 CHAMBER WITH VIEWPORT & LID......................................................................... 91
FP-088-1081-1 REDUCED DOME CHAMBER...................................................................................... 93
AD-285-1161-1 TUMBLE KIT 1 OF 3 .................................................................................................... 95
AD-285-1161-1 TUMBLE KIT 1 OF 3 .................................................................................................... 95
AD-285-1161-1 TUMBLE KIT 2 OF 3 ...................................................................................................... 97
AD-285-1161-1 TUMBLE KIT 3 OF 3 ...................................................................................................... 99
AD-285-1055-1 TUMBLE ADAPTOR 1 OF 2 ........................................................................................ 101
AD-285-1055-1 TUMBLE ADAPTOR 2 OF 2 ........................................................................................ 103
AD-241-1185-1 FIXTURE 3" .................................................................................................................... 105
AD-684-1005-1 TUMBLER BASKET (OPTION)................................................................................. 107
SECTION 8
SPARE PARTS ............................................................................................................. 109
8.1
SPARE PARTS KITS................................................................................................................. 109
SA-285-1028-3 BASIC SPARE PARTS KIT ........................................................................................... 109
SA-285-1033-2 COMPREHENSIVE SPARE PARTS KIT ..................................................................... 110
Operator's Manual
.................................................................... 59
........................................................................................ 59
Rev 37

Hide quick links:

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the LABCOTER 2 and is the answer not in the manual?

This manual is also suitable for:

Pds 2010

Table of Contents