Table Of Contents - SCS LABCOTER 2 Operator's Manual

OM-610-1002-1

TABLE OF CONTENTS

SECTION 1 SAFETY............................................................................................................................. 1
1.1 GENERAL INFORMATION......................................................................................................... 1
1.2 VAPORIZER AND PYROLYSIS SECTION ................................................................................ 2
1.2.1 Pyrolysis Furnace ....................................................................................................................... 2
1.3 DIMER LOADING DOOR ............................................................................................................ 3
1.4 DEPOSITION CHAMBER VACUUM SENSOR ......................................................................... 3
1.5 INLET BAFFLE............................................................................................................................. 3
1.6 GLASS VIEWPORTS.................................................................................................................... 3
1.7 SERVICING................................................................................................................................... 4
1.8 NITROGEN.................................................................................................................................... 4
SECTION 2 OVERVIEW...................................................................................................................... 5
SECTION 3 EQUIPMENT SPECIFICATION ................................................................................... 7
3.1 PDS-2010 ....................................................................................................................................... 7
3.2 TUMBLER OPTION ..................................................................................................................... 7
SECTION 4 INSTALLATION.............................................................................................................. 9
4.1 PDS 2010 INSTALLATION REQUIREMENTS .......................................................................... 9
4.2 ON SITE SERVICES PROVIDED BY THE CUSTOMER ........................................................... 9
4.3 SHIPPING DAMAGE.................................................................................................................... 9
4.4 UNPACKING................................................................................................................................. 9
4.5 EQUIPMENT PLACEMENT ...................................................................................................... 10
4.6 INSPECTION............................................................................................................................... 10
4.7 ELECTRICAL POWER INSTALLATION ................................................................................. 10
4.8 CHILLER (O
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4.9 LIQUID NITROGEN (O
4.10 TUMBLER (O
4.11 CONNECT AND CHECK ........................................................................................................... 11
4.12 ON SITE SERVICE PROVIDED BY SCS CUSTOMER SERVICE (O
SECTION 5 OPERATION .................................................................................................................. 13
5.1 PURPOSE OF EQUIPMENT....................................................................................................... 13
5.2 VACUUM CONCEPTS ............................................................................................................... 13
5.2.1 Vacuum ......................................................................................................................................... 13
5.2.2 Pressure ........................................................................................................................................ 13
5.2.3 Vacuum Levels .............................................................................................................................. 14
5.2.4 Vacuum Pumps.............................................................................................................................. 14
5.2.5 Gas Flow....................................................................................................................................... 14
5.2.6 Outgassing .................................................................................................................................... 15
5.2.7 Base Pressure................................................................................................................................ 16
5.2.8 Coating Pressure........................................................................................................................... 16
5.3 PARYLENE DEPOSITION TECHNOLOGY............................................................................. 16
5.3.1 Parylene Types.............................................................................................................................. 16
5.3.2 Parylene Deposition...................................................................................................................... 18
5.4 CONTROL PANEL ..................................................................................................................... 21
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