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SCS G3 Series Operator's Manual

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G3 Spin Coater Series
Model G3P-8
Operator's Manual
System Serial Number; ________________
Prepared for: ________________________
Make certain that everyone associated with this machine
becomes knowledgeable about the material contained in this manual
before using the equipment.
7645 Woodland Drive, Indianapolis, IN 46278-2707
Customer Service: P 317. 244.1200 F 317.240.2073
E
SCScustomerservice@SCScoatings.com
COPYRIGHT SPECIALTY COATING SYSTEMS

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  • Page 1 G3 Spin Coater Series Model G3P-8 Operator’s Manual System Serial Number; ________________ Prepared for: ________________________ Make certain that everyone associated with this machine becomes knowledgeable about the material contained in this manual before using the equipment. 7645 Woodland Drive, Indianapolis, IN 46278-2707 Customer Service: P 317.
  • Page 2 7645 WOODLAND DRIVE, - INDIANAPOLIS, IN 46278-2707 – PH. 800-356-8260 G3P-8 SERIAL NO. MODEL NO. AMPS PHASE VOLTS AMP MFG. DATE INT. CAPACITY SCHEMATICS...
  • Page 3 05/27/10...

  • Page 5: Table Of Contents

    OM-812-1027 Operator’s Manual Rev 13 TABLE OF CONTENTS SECTION 1 SAFETY ........................1 STANDARDS STATEMENT ....................1 GENERAL HAZARDS ......................1 1.2.1 Hazard Icons ........................2 POWER CORD (SHOCK) SAFETY ..................2 SERVICING ..........................2 SECTION 2 OVERVIEW ......................3 DESCRIPTION ..........................
  • Page 6 Rev 13 Operator’s Manual OM-812-1027 FORMS ..............................29 About You… ............................29 About the Equipment… ........................29 About Us… ............................29 VENDOR LITERATURE ........................31 DRAWINGS ............................33 INDEX ..........................67 TABLE OF CONTENTS G3P-8 SPIN COATER...
  • Page 7 OM-812-1027 Operator’s Manual Rev 13 TABLE OF FIGURES Figure 5-1: Facilities (Back) Panel ......................9 Figure 5-2: G3P Control Panel ....................... 11 Figure 5-3: G3P Display ........................12 Figure 5-4: Example G3P Program ......................15 Figure 6-1: Vacuum Switch Adjustment ....................20 Figure 6-2 Fuse Replacement ........................
  • Page 8 Rev 13 Operator’s Manual OM-812-1027 TABLE OF CONTENTS G3P-8 SPIN COATER...

  • Page 9: Safety

    10 minutes (high voltage may exist in the machine for some time after removal of power). CAUTION: The G3 series spin coater uses a ground type power plug, which must be connected to a grounded outlet to prevent electrical shock.

  • Page 10: Hazard Icons

    Rev 13 Operator’s Manual OM-812-1027 1.2.1 H AZARD CONS The following symbols may occur at points throughout the rest of the manual. Note and read each warning before attempting any operations associated with it. This symbol warns of the potential for an ELECTRICAL SHOCK. This symbol signifies a GENERAL WARNING, which accompanying text will explain.

  • Page 11: Overview

    SECTION 2 OVERVIEW DESCRIPTION The G3 series is family of compact spin coaters for low production spin coating applications and experimentation. The G3's provide the ability to hold your product wafer with a vacuum chuck and spin that chuck at precise speeds and for controlled periods of time.
  • Page 12 Rev 13 Operator’s Manual OM-812-1027 SECTION 2: OVERVIEW G3P-8 SPIN COATER...

  • Page 13: Specifications

    It is recommended that a shut-off valve be installed upstream of the unit on the N or clean, dry air supply. SCS does not supply a shut-off valve. The spin coater will not operate without vacuum. For safety reasons, the machine will not power up without a purge flow of at least 0.55 scfm of or clean, dry air.
  • Page 14 Rev 13 Operator’s Manual OM-812-1027 SECTION 3: SPECIFICATIONS G3P-8 SPIN COATER...

  • Page 15: Installation

    OM-812-1027 Operator’s Manual Rev 13 SECTION 4 INSTALLATION Note for international applications: The spin coater is provided to international users with an unterminated power cord so that the appropriate power plug (non-locking 250V, 10A), may be attached. The plug must meet the requirements of IEC227 or IEC245. NOTE: The supply circuit must be overcurrent protected at a value not exceeding 6 amps.
  • Page 16 Rev 13 Operator’s Manual OM-812-1027 SECTION 4: INSTALLATION G3P-8 SPIN COATER...

  • Page 17: Operation

    OM-812-1027 Operator’s Manual Rev 13 SECTION 5 OPERATION This machine is designed for use in a normal laboratory or manufacturing working environment. In addition, the installation should be free from temperature extremes and vibration. PRE-START 1. Connect the N or clean, dry air purge supply and vacuum (if the optional internal pneumatic- powered vacuum pump is used, only the N or clean, dry air purge is needed).

  • Page 18: Vacuum Chuck

    Rev 13 Operator’s Manual OM-812-1027 2. On the G3P spin coater only, provides control signals for an (optional) unit for dispensing materials during the cycle. Note: On the G3P, the foot pedal may be connected through the dispenser. FUSE/VOLTAGE SLOT Use this for access to the F1 Fuse Carrier.

  • Page 19: Programming The G3P

    OM-812-1027 Operator’s Manual Rev 13 same wafer. If the lid is opened during a cycle, electronic breaking will be applied*. If a dispense action is in process, it will be terminated. *In rare instances (heavy chuck, high rotation speed) a "Motion Error" may occur; the chuck will then coast to a stop.

  • Page 20: G3P Programming

    Rev 13 Operator’s Manual OM-812-1027 breaking may fail; the chuck will coast to a halt. Do not open the lid until you are sure the rotation has stopped completely. In the Program/Edit mode, the following G3P controls are active. You are able to enter new recipes and modify the settings of existing recipes.

  • Page 21: Programming Hints And Tricks

    OM-812-1027 Operator’s Manual Rev 13 When the pointer is at Ramp, use the to set the Ramp Seconds. Then press ENTER and the number will be stored and the pointer will move to RPM. 5. RPM: (0 to 9999 RPM) This is the rotational speed for the spin coater for this step. When the pointer is at RPM, set the speed by using the .

  • Page 22: Recipe Example

    Rev 13 Operator’s Manual OM-812-1027 4. To edit or modify a step's variables: Go to those particular variables by using the ENTER or the and  and then change the variable by using the . REMEMBER to press ENTER afterwards, or the change will not be kept. 5.
  • Page 23 OM-812-1027 Operator’s Manual Rev 13 the chuck from returning to the Home position at the end of the run, set the step 0 Time to some number other than 0. Step 1 begins with a Ramp1-- 8 seconds up to an RPM1 of 2000. Dwell1 is set to keep the speed at 2000 for 10 seconds.

  • Page 24: Selecting A Program To Run

    Rev 13 Operator’s Manual OM-812-1027 SELECTING A PROGRAM TO RUN After the spin coater has completed its startup cycle, you can press START and it will attempt* to run whatever recipe is shown on its display. If there is no recipe, you must enter/select one. To select a different recipe on the G3P press MODE, change the recipe number, press ENTER, and then exit the Program/Edit mode by pressing MODE again.

  • Page 25: Error Messages

    OM-812-1027 Operator’s Manual Rev 13 ERROR MESSAGES If the display light does not come on after connecting the power and turning on the power switch, check that the N or clean, dry air purge is connected and has a pressure of at least 2 psi. Correct the cause of the error and press STOP/CLR ERROR to ready the machine for operation.

  • Page 26: Troubleshooting

    Rev 13 Operator’s Manual OM-812-1027 TROUBLESHOOTING Refer to the Error messages in the previous section. PROBLEM POSSIBLE CAUSE Spin coater will not or clean, dry air purge is not Verify or provide a N or clean, dry power up. present, or inadequate flow. air purge.

  • Page 27: Maintenance

    OM-812-1027 Operator’s Manual Rev 13 SECTION 6 MAINTENANCE CLEANING Use an appropriate solvent to clean the lid and the bowl; avoid damaging the bowl, lid, or drain hose. When using solvents such as N-Methylpyrrolidone (NMP) take care to avoid contact with the painted surfaces.

  • Page 28: Vacuum Switch Adjustment

    Rev 13 Operator’s Manual OM-812-1027 VACUUM SWITCH ADJUSTMENT See Figure 6-1. The Vacuum switch may need adjustment if the “Check Vacuum” error is displayed but no cause for it is apparent (the vacuum pump is working and the hose & motor shaft hole are not blocked).

  • Page 29: Changing The Fuses

    OM-812-1027 Operator’s Manual Rev 13 CHANGING THE FUSES Fuses F2 and F3 are in commonly used fuse carriers. Turn the cap with a small flat-blade screwdriver and pull out the fuse and carrier. Replace with only with an exact electrical equivalent. Fuse F1 is in the main power cord/switch assembly.
  • Page 30 Rev 13 Operator’s Manual OM-812-1027 SECTION 6: MAINTENANCE G3P-8 SPIN COATER...

  • Page 31: Replacement Parts

    Fragile substrates should be supported across the entire surface. For formal quotation, delivery, and Conditions of Sale, please contact your SCS sales representative or call 1-317-244-1200. TYPE H: O-RING VACUUM HOLDING (H) DESIGN Used to hold relatively heavy substrates such as glass, quartz, ceramic and metal.
  • Page 32 Rev 13 Operator’s Manual OM-812-1027 TYPE CS: FLAT SURFACE CROSS AND SCROLL (CS) DESIGN Used to hold a thin, planar surfaced substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Part Number Description 131-047 Vacuum Chuck, Type CS (SST), 1/8"...
  • Page 33 OM-812-1027 Operator’s Manual Rev 13 TYPE L: O-RING VACUUM HOLDING CHUCK WITH MECHANICAL LOCATING (L) FINGERS Designed for heavy, large or unsymmetrical substrates. Guide fingers assist in positioning and holding substrates. An O-ring seal is also provided. Part Number Description 131-013 Vacuum Chuck, Type L (SST), 1 3/4"...
  • Page 34 Rev 13 Operator’s Manual OM-812-1027 SECTION 7: REPLACEMENT PARTS G3P-8 SPIN COATER...

  • Page 35: Appendix 27 Limited Warranty Policy

    (12) months from the date of shipment. SCS will replace materials for a period of twelve (12) months from the date of shipment, and provide labor, if required, for a period of six (6) months from the date of shipment to correct warranty defects.
  • Page 36 This warranty shall not cover, and SCS shall not be liable for, losses of supplies or time, damages to materials, or consequential damages of any nature, arising from or attributable to equipment sold to the Purchaser by SCS.

  • Page 37: Forms

    … please refer to the following questionnaire before contacting SCS for customer assistance. It tells you what information you will need in order to complete any transactions with SCS. Fill it out even if you intend to communicate by phone; this will enable you to have all the necessary information available to complete the transaction on the first call.
  • Page 38 Rev 13 Operator’s Manual OM-812-1027 APPENDIX B: FORMS G3P-8 SPIN COATER...

  • Page 39: Vendor Literature

    OM-812-1027 Operator’s Manual Rev 13 APPENDIX C: VENDOR LITERATURE TIMER NAIS PM5S VACUUM PUMP GAST Series 75R G3P-8 SPIN COATER APPENDIX C: VENDOR LITERATURE...
  • Page 40 Rev 13 Operator’s Manual OM-812-1027 APPENDIX C: VENDOR LITERATURE G3P-8 SPIN COATER...

  • Page 41: Drawings

    OM-812-1027 Operator’s Manual Rev 13 APPENDIX D: DRAWINGS The following drawings/schematics are provided on the next pages, in the order listed here. AD-812-1054-1 Final Assembly AD-812-1058-1 Final Assembly 220V AD-812-1046-1 Basic Assembly AD-812-1050-1 Basic Assembly w/ I VAC AD-385-1058-1 Housing Assembly AD-026-1051-1 Base Assembly AD-490-1046-1...
  • Page 42 Rev 13 Operator’s Manual OM-812-1027 APPENDIX D: DRAWINGS G3P-8 SPIN COATER...
  • Page 43 OM-812-1027 Operator’s Manual Rev 13 G3P-8 SPIN COATER APPENDIX D: DRAWINGS...
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  • Page 75: Index

    OM-812-1027 Operator’s Manual INDEX For general areas of Information, refer first to the Table of Contents in the front of the manual. For specific items, see this index. Options, 5 Back Panel, 9 Check Vacuum, 17 Programming, G3P, 11 Chuck, Vacuum, 10 Ramp, 12 Disp., 13 Recipe, 12...

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