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Basic alignment
1.5.4
1.5.5
LEO 912 OMEGA
•
Select SHIFT function with button SHIFT/FOCUS in the field
SPECTROMETER.
•
Shift tip of the spectrum caustic to the index point of the screen with
the affiliated encoder.
•
Correct vertical deviation of the spectrum with the IMAGE SHIFT encoder Y.
•
Switch to IMAGE mode with button IMAGE/SPEC.
Alignment of TEM- and SPOT-illumination
•
Switch to spot illumination with button ILL Mode and and set spot size to
100 nm with button ILL. APERTURE/SPOT SIZE ∆ ∇.
•
Calibrate C 3 with button CALIBRATE in the field FOCUS.
– Spot should be imaged on the viewing screen.
•
Move spot to index point on the small screen with illumination encoders
X, Y in SHIFT/DEFL mode.
•
Switch to TEM mode and deactivate AIS mode.
•
Center condenser aperture to the index point of the small screen.
•
Switch back to spot mode.
•
Increase magnification to 31.500x and readjust spot to the center as
described above.
•
Increase magnification to 125.000x and readjust spot to the center.
•
Switch to TEM with button ILL MODE and center AIS aperture to
the large screen.
Beam alignment
•
Select 20.000x with buttons MAGNIFICATION ∆ ∇ .
•
Select SPOT mode with button ILL. MODE in the field BRIGHTNESS and
set spot size to 5 nm with buttons SPOT SIZE ∆ ∇ .
•
Calibrate objective lens with button CALIBRATE in the field FOCUS.
Focus spot with encoder SPOT FOCUS.
•
Move spot to index point with encoders ILL. SHIFT.
•
Activate the function BEAM ALIGNM. in the menu GUN.
•
Set spot size to 100 nm with buttons SPOT SIZE ∆ ∇ .
Microscope Operation
5
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