Adjustment Of Eucentric Plane; Adjustment Of Beam Incidence - LEO 912 OMEGA Brief Manual

Microscope Operation
1.5.6
1.5.7
6
•
Shift spot to the index point of the small screen with the encoders X,Y in
the field ILLUMINATION.
•
Repeat the beam alignment till the spot positon is identical at 5 nm and
100 nm spot size.
•
Push button STORE GUN ALIGNM. and answer PROCEED ? with Y(es).
•
Return to main menu with button RETURN and push button ILL. MODE to
select TEM illumination.
– The BEAM ALIGNMENT function is automatically deactivated, when leaving
the GUN menu.

Adjustment of eucentric plane

•
Move specimen rod all the way in.
•
Activate AIS mode in the main menu.
•
Insert an objective aperture and center it (see chapter "Center objective
aperture").
•
Select magnification 25.000x and move specimen detail to the center of the
small screen.
•
Calibrate objective lens with button CALIBRATE in the field FOCUS.
•
Switch on focus aid with button AID.
– Illuminated ON indicates FOCUS AID is active; specimen detail is moving.
•
Focus specimen mechanically using Z-CONTROL buttons, until specimen
detail does not move any more.
– Specimen is now in the eucentric plane of the goniometer.
•
Switch off FOCUS AID with button AID.

Adjustment of beam incidence

SPECIAL NOTE:
This adjustment step is very important for a single field condenser/objective lens.
Asymmetric diffraction fringes are created by a tilted illumination.
•
Deactivate AIS mode in the main menu.
•
Select magnification 63.000x.
Basic alignment
LEO 912 OMEGA