Advertisement
e. Set STG/TSA/BSA button to dark to activate microscope
motors.
f. Adjust microscope to the mask alignment marks. Move
the left/right objective to the left/right mask alignment
mark by the X-Y-JOYSTICK (joystick on the right).
5. Wafer Alignment
a. Focus on the wafer plane.
b. Change STG/TSA/BSA button to illuminated.
c. Use joysticks to align the wafer alignment marks central
symmetrical to the mask alignment marks.
6. Exposure
a. Press Exposure key.
7. Unload wafer
8. Unload Mask
a. Hit the CHANGE MASK key and the mask holder will be
released. Pull the mask holder out, flip it by 180° and
store it on the tray to your left.
b. Hit ENTER to switch the mask vacuum off.
Zx
Advertisement
