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Karl Suss MA6 Operating Manual page 2

Mask aligner nano fabrication unit
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Turn On
1. Switch On the cooling delay control
2a. Turn On power supply
2b. Press "CP" button.
2b. Press "Start".
3. Turn on switch on the Controller unit.
In case of turn on error hit "Off" button and after 2 min delay
repeat "ON" => "CP" => "Start"
Turn Off
Turn off the tool in the following sequence:
Controller => Power supply unit => Cooling delay control.
Turn On/Off instructions
Zx

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