Related Manuals for Varian 969-9860
Summary of Contents for Varian 969-9860
- Page 1 Hand-held MANUALE DI ISTRUZIONI Terminal BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 969-9860 INSTRUCTION MANUAL 87-900-847-01 (B) APRIL 2002...
- Page 2 Hand-held Terminal...
-
Page 5: Table Of Contents
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................2 MODE D’EMPLOI........................ 3 INSTRUCTIONS FOR USE ....................4 TECHNICAL INFORMATION....................5 HAND-HELD TERMINAL DESCRIPTION ..............5 USE ..........................5 General ............................... 5 Monitor Mode ............................5 Program Mode ............................ 5 FRONT / REMOTE/ 232 Selection ..................... 5 Monitor Relay Programming ....................... -
Page 6: Istruzioni Per L'uso
Di seguito sono illustrati il pannello dell'Hand Held professionale. L'utilizzatore deve leggere attentamente Terminal. il presente manuale di istruzioni ed ogni altra Per maggiori dettagli fare riferimento alla sezione informazione addizionale fornita dalla Varian prima "Technical Information". dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità... -
Page 7: Gebrauchsanleitung
Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. In den folgenden Abschnitten sind alle erforderlichen Informationen für die Sicherheit des Bedieners bei der Anwendung Geräts aufgeführt. Detaillierte technische Informationen sind im Anhang "Technical... -
Page 8: Mode D'emploi
à la section "Technical Information". autre indication supplémentaire fournie par Varian, avant l'utilisation de l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... -
Page 9: Instructions For Use
More details are contained in the other additional information supplied by Varian before appendix "Technical Information". operating the equipment. Varian will not be held responsible for any events occurring due to non- compliance, even partial, with these instructions,... -
Page 10: Technical Information
TECHNICAL INFORMATION • HAND-HELD TERMINAL DESCRIPTION Press the CYCLE NUMBER once and the display shows: The Hand-held terminal is on LCD alphanumeric display and keyboard, which provides useful real time X X X X C Y C L E X X X X X m indications of the operating conditions/parameters of the Turbo-V 60 pump series when connected to a P U M P... -
Page 11: Monitor Relay Programming
TECHNICAL INFORMATION The display shows: Monitor Relay Programming • The display shows: R S 2 3 2 S P E E D T H R E S H O L D B A U D R A T E X X X X S E L E C T I O N : X X K R P M where: XXXX = means 600, 1200, 2400, 4800, 9600... -
Page 12: Reset Command
TECHNICAL INFORMATION After selection, press PUMP CURRENT to confirm; the display will be as show in the following figure. Cycle diagram If YES is selected, the pump life shall be reset to 000. After Reset Command selecting YES, press PUMP CURRENT •... -
Page 13: Starting The Pump
TECHNICAL INFORMATION Starting the Pump Operating the Pump If the forepump and vent device are not operated by the After the starting period, if the system has a vacuum controller, close the vent valve and switch on the leak or the pressure in the pump/chamber is high (from forepump. -
Page 14: Speed Adjustment
TECHNICAL INFORMATION The display shows: After starting, a LS appears on the right bottom corner of the following displays. H I G H S P E E D With normal LOW SPEED operation, the pump will run at about 2/3 of its nominal speed and achieves a base S E L E C T : X X X X X R P M pressure... -
Page 15: Pump Shutdown
TECHNICAL INFORMATION Pump Shutdown Remote Control Mode Operation Press the front panel STOP pushbutton or remove the If remote signals are used to operate the controller, it remote signal; the power from the turbopump will be must be programmed for remote operation (see removed and the pump will begin to slow down. -
Page 16: Error Messages
TECHNICAL INFORMATION ERROR MESSAGES F A U L T : C O N T R O L L E R For a certain type of failure, the controller will self-diagnose the error and the following messages will O V E R T E M P E R A T U R E be displayed. - Page 17 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 18 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 19 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...