Aalborg GFM 17 Operating Manual page 27

Gfm mass flow meters
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ACTUAL GAS
Deuterium D
2
Diborane B
H
2
6
Dibromodifluoromethane CBr
Dichlorodifluoromethane (Freon-12) CCl
Dichlofluoromethane (Freon-21) CHCl
Dichloromethylsilane (CH
Dichlorosilane SiH
2
Dichlorotetrafluoroethane (Freon-114) C
1,1-Difluoroethylene (Freon-1132A) C
Dimethylamine (CH
Dimethyl Ether (CH
2,2-Dimethylpropane C
Ethane C
H
2
6
Ethanol C
H
O
2
6
Ethyl Acetylene C
H
4
Ethyl Chloride C
H
2
5
Ethylene C
H
2
4
Ethylene Oxide C
H
2
Fluorine F
2
Fluoroform (Freon-23) CHF
Freon-11 CCl
F
3
Freon-12 CCl
F
2
2
Freon-13 CClF
3
Freon-13B1 CBrF
3
Freon-14 CF
4
Freon-21 CHCl
F
2
Freon-22 CHClF
2
Freon-113 CCl
FCClF
2
Freon-114 C
Cl
F
2
2
4
Freon-115 C
ClF
2
5
Freon-C318 C
F
4
8
Germane GeH
4
Germanium Tetrachloride GeCl
Helium He
Helium He-1 (>50 L/min)
Helium He-2 (>10-50 L/min)
Hexafluoroethane C
Hexane C
H
6
14
Hydrogen H
-1
2
Hydrogen H
-2 (>10-100 L)
2
Hydrogen H
-3 (>100 L)
2
F
2
2
)
SiCl
3
2
2
Cl
2
2
H
2
)
NH
3
2
)
O
3
2
H
3
12
6
Cl
O
4
3
2
4
F
(Freon-116)
2
6
K FACTOR
Relative to N
1.00
.4357
.1947
F
.3538
2
2
.4252
F
2
.2522
.4044
Cl
F
.2235
2
4
F
.4271
2
2
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
2.43
2.05
.2421
.1792
1.0106
1.35
1.9
24
Cp
[Cal/g]
2
1.722
.508
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
1.241
1.241
.1834
.3968
3.419
3.419
3.419
Density
[g/I]
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
.1786
.1786
6.157
3.845
.0899
.0899
.0899

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