Aalborg DFM 26 Operating Manual

Digital mass flow meter
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Technical Data Sheet No.: TD0501M Rev. D
Date of Issue: September 2015

OPERATING MANUAL

DFM
Digital Mass Flow Meter

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Summary of Contents for Aalborg DFM 26

  • Page 1: Operating Manual

    Technical Data Sheet No.: TD0501M Rev. D Date of Issue: September 2015 OPERATING MANUAL Digital Mass Flow Meter...
  • Page 2 Aalborg7 is a registered trademark of Aalborg Instruments & Controls. NOTE: Aalborg reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
  • Page 3: Table Of Contents

    5.3.9 K Factors Settings..................5.3.10 Zero Calibration..................5.3.11 Flow Conditions Settings................5.3.12 LCD Backlit Energy-saving Setting............Flow, Temperature, Pressure Output Signals Configuration...... MAINTENANCE..............Introduction....................Flow Path Cleaning..................6.2.1 Restrictor Flow Element (RFE)..............6.2.2 DFM 26/27 Models..................6.2.3 DFM 36/37/46/47 models................
  • Page 4 TROUBLESHOOTING............Common Conditions................Troubleshooting Guide................Technical Assistance................CALIBRATION CONVERSIONS FROM REFERENCE GASES....APPENDIX I AALBORG DFM EEPROM Variables..........APPENDIX II INTERNAL USER SELECTABLE GAS FACTOR TABLE...... (INTERNAL "K" FACTORS) APPENDIX III GAS FACTOR TABLE ("K" FACTORS)..........APPENDIX IV COMPONENT DIAGRAM..............
  • Page 5: Unpacking The Dfm Mass Flow Meter

    Caution: It is the users responsibility to determine if the instrument is appropriate for their OXYGEN application, and for specifying O2 cleaning service if required. Aalborg is not liable for any damage or personal injury, whatsoever, resulting from the use of this instrument...
  • Page 6: Electrical Connections

    Burst pressure is 200 PSIA (13.6 bar)! DFM transducers are supplied with standard 1/4 inch (DFM 26/27 and 36/37) or 3/8 inch (DFM 46/47), or optional 1/8 inch inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow range.
  • Page 7: Output Signals Connections

    +12Vdc or +24Vdc (unipolar power supply) DC Power (+) --------------- pin 1 of the 25 pin "D" connector DC Power (-) --------------- pin 18 of the 25 pin "D" connector Caution: DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS YOUR DFM METER WAS ORDERED AND CONFIGURED FOR 24Vdc! (See power requirements label at the rear of the DFM meter) 2.2.2 Output Signals Connections Caution: When connecting the load to the output terminals, do not...
  • Page 8: Output Communication Parameters And Connections

    2.2.3 Communication Parameters and Connections The digital interface operates via RS485 (optional RS-232 is available) and pro- vides access to applicable internal data including: flow, temperature, pressure reading, auto zero, totalizer and alarm settings, gas table, conversion factors and engineering units selection, dynamic response compensation and linearization table adjustment.
  • Page 9 FUNCTION +15 Vdc (Optional +12 or +24 Vdc) Power Supply 0 5 Vdc or 4-20mA Flow Signal Output 0 5 Vdc or 4-20mA Temperature Signal Output (Optional) 0 5 Vdc or 4-20mA Pressure Signal Output (Optional) (reserved) (reserved) (reserved) Relay No. 1 - Common Contact Relay No.
  • Page 10: Principle Of Operation

    Use of the DFM flow transducer in a manner other than that specified in this man- ual or in writing from Aalborg7, may impair the protection provided by the equip- ment. PRINCIPLE OF OPERATION The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube.
  • Page 11: Specifications

    FLOW PRESSURE COEFFICIENT: 0.01% of full scale/psi (6.895 kPa) or better. FLOW RESPONSE TIME: DFM 26/27: 300ms time constant; approximately 1 second to within ±2% of set flow rate for 25% to 100% of full scale flow. DFM 36/46/37/47: 600ms time constant; approximately 2 seconds to within ±2% of set flow rate for 25% to 100% of...
  • Page 12 PRESSURE MEASUREMENT ACCURACY: ±1% of F.S. MAXIMUM PRESSURE DROP: 8 psi (at 100 L/min flow). See Table IV for pressure drops associated with various models and flow rates. TEMPERATURE MEASUREMENT RANGE: C to 50 TEMPERATURE MEASUREMENT ACCURACY: ±1 GAS AND AMBIENT TEMPERATURE: F to 122 F (0 C to 50...
  • Page 13: Ce Compliance

    (wetted) materials offered in the dif- ferent models. INLET AND OUTLET CONNECTIONS: Model DFM 26/27: standard 1/4" compression fittings, Model DFM 36/37: standard 1/4" compression fittings, Model DFM 46/47: standard 3/8" compression fittings.
  • Page 14 Table I DFM 26/27 Low Flow Mass Flow Meters* CODE scc/min [N std liters/min [N CODE 0 to 10 0 to 1 0 to 20 0 to 2 0 to 50 0 to 5 0 to 10 0 to 100...
  • Page 15 3.23 22.3 31.4 3100 4.56 DFM 46/47 5500 8.08 55.7 Table V Approximate Weights MODEL WEIGHT SHIPPING WEIGHT 3.70 lbs (1.68 kg) DFM 26/27 transmitter 2.20 lbs (1.00 kg) 4.34 lbs (1.97 kg) DFM 36/46/37/47 transmitter 2.95 lbs (1.33 kg)
  • Page 16: Operating Instructions

    OPERATING INSTRUCTIONS Preparation and Warm Up It is assumed that the Digital Mass Flow Meter has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF. When applying power to a flow meter within the first two seconds you will see on the LCD display: the product name, the software version, and revision of the EEPROM table.
  • Page 17: Programming Dfm Using Lcd And Keypad

    Programming DFM using LCD and Keypad All features of the flow meter can be accessed via the local four button keypad and LCD.The LCD incorporates an energy-saving auto shut-off backlit feature. If enabled, after 15 minutes of operation without user intervention the LCD backlit turns off.
  • Page 18: Dfm Main Menu

    Relay Settings: - No assignment (relay is not assigned to any events). - High Flow Alarm condition. - Low Flow Alarm condition. - Range between High and Low Flow Alarm condition. - Totalizer reached set limit. - High Temperature Alarm condition. - Low Temperature Alarm condition.
  • Page 19: Gas Flow Engineering Units Settings

    The following menu options are available: Units of Measure - View or Change the Units of Measure for Flow process variable. Gas Table Select - View or Change the Gas Table. Totalizer - View or Change settings for Totalizer. Alarm Settings - View or Change settings for Flow , Pressure and Temperature Alarm.
  • Page 20 The following Engineering Units menu options are available: 1. % F.S. - percent of full scale. 2. L/min - Liters per minute. 3. L/h - Liters per hour. 4. mL/min- milliliters per minute. 5. mL/h - milliliters per hour. 6. SCFH - cubic feet per hour. 7.
  • Page 21: Gas Table Settings

    point (.). Pressing the (p) button one more time will change the digit on the high- lighted position of the cursor back to 0. The same is true in reverse, when press- ing the (q) button. Only one decimal point is allowed. If changing position of the decimal point is required, change decimal point to any desired digit then move the cursor to the required position and adjust it to the decimal point with (p) or (q) button.
  • Page 22: Totalizer Settings

    Note: By default the DFM is shipped with at least one valid calibration table (unless optional additional calibrations were ordered). If instead of the valid Gas Name (for example NITROGEN) the main screen displays Gas designator as "Uncalibrated", then user have chosen the gas table which was not calibrated.
  • Page 23 Note: Before enabling the Totalizer, ensure that all totalizer settings are configured properly. Totalizer Start values have to be entered in %F.S. engineering unit. Totalizer will not totalize until the flow rate becomes equal or more than the Totalizer Start value. Totalizer Stop values have to be entered in volume / mass based engineering units.
  • Page 24: Alarm Settings

    Use (p) or (q) buttons to highlight "Start at Flow" option and press the (u) [Enter] button. The following screen will appear: ’ Figure b-11, Totalizer Settings (Start) Pressing (p) or (q) will increment or decrement Start Flow value per 0.1% F.S. respectively.
  • Page 25 configurable limits and then provides feedback to the user visually via the LCD (only for Flow) or via a Relay contact closure. There are three different Alarms: = Gas Flow = Gas Temperature = Gas Pressure Each alarm has several attributes which may be configured by the user. These attributes control the conditions which cause the alarm to occur and also specify actions to be taken when the Process Variable is outside the specified conditions.
  • Page 26: Relay Assignment Settings

    Mode Run/Stop - Allows the user to Enable/Disable Flow Alarm Low Alarm - The value of the monitored Flow in % F.S. below which is considered an alarm condition. Note: The value of the Low alarm has to be less then the value of the High Alarm.
  • Page 27 Figure b-15, Relay Assignment Screen The user selects a Relay by scrolling up/down the list of available Relays until the desired Relay is highlighted and then presses the (u) [Enter] button. The follow- ing screen will appear: Figure b-16, Relay #1 Action Settings The user can configure the Relay action from 9 different options: No Action : (N) No assignment (relay is not assigned to any events).
  • Page 28: K Factors Settings

    5.3.9 K Factors Settings Conversion factors relative to Nitrogen for up to 32 gases are stored in the DFM (see APPENDIX II). In addition, provision is made for a user defined conversion factor. Conversion factors may be applied to any of the ten gas calibrations via key- pad or digital interface commands.
  • Page 29 Note: Before performing Zero Calibration make sure the device is powered up for at least 30 minutes and absolute no flow condition is established. Shut off the flow of gas into the Digital Mass Flow Meter. To ensure that no seep- age or leak occurs into the meter, it is good practice to temporarily disconnect the gas source.
  • Page 30: Flow Conditions Settings

    Figure b-20, Zero Calibration (Completed) If the device was unable to adjust Sensor reading to within 120 ± 2 counts, then Auto Zero is considered as unsuccessful and user will be prompted with "Auto Zero is Failed!" screen. 5.3.11 Flow Conditions Settings For DFM 27/37/47 models the flow reading can be displayed for standard or actu- al conditions (Temperature / Pressure adjusted).
  • Page 31: Lcd Backlit Energy-Saving Setting

    0-5 Vdc, 0-10 Vdc or 4-20 mA output signals (see Table VI). Note: DFM 26/36/46 models are equipped with gas flow rate output signal only. DFM 27/37/47 models in addition provide output signals...
  • Page 32: Maintenance

    Analog output signals of 0-5 Vdc, (0-10 Vdc optional) or 4-20 mA are attained at the appropriate pins of the 25-pin "D" connector (see Figure b-1) on the side of the DFM transducer. Table VI Analog Output Jumper Configuration 0-5 VDC 0-10 VDC 4-20 mA ANALOG SIGNAL...
  • Page 33: Flow Path Cleaning

    The particular RFE used in a given Mass Flow Meter depends on the gas and flow range of the instrument. 6.2.2 DFM 26/27 models Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE from the inlet connection.
  • Page 34: Dfm 36/37/46/47 Models

    6.2.3 DFM 36/46/37/47 Models Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet side of the meter. This will release the short square block containing the inlet com- pression fitting. The 60 micron filter screen will now become visible. Remove the screen.
  • Page 35: Gas Flow Calibration Of Dfm Mass Flow Meters

    analog output calibration only), an insulated (plastic) screwdriver, a flow regulator (for example - metering needle valve) installed upstream from the Mass Flow Meter and a pressure regulated source of dry filtered nitrogen gas (or other suit- able reference gas). It is recommended to use Aalborg7 supplied calibration and maintenance software to simplify the calibration process.
  • Page 36 Gas flow calibration parameters are stored in the Gas Dependent portion of the EEPROM memory separately for each of 10 calibration tables. See APPENDIX I for complete list of gas dependent variables. Note: Make sure the correct gas number and name is selected as current on the main DFM screen.
  • Page 37: Analog Output Calibration Of Dfm Mass Flow Meters

    !11,MR,133[CR] - reads EEPROM address 133 !11,MW,133,3450[CR] - writes new sensor value (3450 counts) in to the index 133 Once 100% F.S. calibration is completed user can proceed with calibration for another 9 points of the linearization table using the same approach. Note: It is recommended to use Aalborg7 supplied calibration and maintenance software for gas table calibration.
  • Page 38: Initial Setup

    32 PresOutScaleV - DAC 0-5/0-10 Analog Output Scale for Pressure 33 PresOutScale_mA- DAC 4-20mA Analog Output Scale for Pressure Note: Models DFM 26/36/46 do not support temperature and pressure measurement and have only one gas flow analog output. 7.3.1 Initial Setup Power up the Mass Flow Meter for at least 3 minutes prior to commencing the cal- ibration procedure.
  • Page 39: Gas Flow 0-5 Vdc Analog Output Calibration

    7.3.2 Gas flow 0-5 Vdc analog output calibration 1. Install jumpers J2 on the analog PC board for 0-5 Vdc output (see Table VI). 2. Connect a certified high sensitivity multi meter set for the voltage measurement to the pins 2 (+) and 15 (-) of the 25 pins D connector. 3.
  • Page 40: Gas Temperature 4-20 Ma Analog Output Calibration (Dfm 27/37/47)

    5. Save TempOutScaleV in to the EEPROM: !11,MW,29,X[CR] Where: X - the calculated TempOutScaleV value. 7.3.5 Gas temperature 4-20 mA analog output calibration (DFM 27/37/47) 1. Install jumpers J3 on the analog PC board for 4-20 mA output (see Table VI). 2.
  • Page 41: Gas Pressure 4-20 Ma Analog Output Calibration (Dfm 27/37/47)

    7.3.7 Gas pressure 4-20 mA analog output calibration (DFM 27/37/47) 1. Install jumpers J4 on the analog PC board for 4-20 mA output (see Table VI). 2. Connect a certified high sensitivity multi-meter set for the current measurement to the pins 4 (+) and 17 (-) of the 25 pin D connector. 3.
  • Page 42: Commands Structure

    unit using either a custom software program or a "dumb terminal." All values are sent as printable ASCII characters. For RS-485 interface the start character is always (!), and the command string is terminated with a carriage return (line feeds are automatically stripped out by the DFM).
  • Page 43 Note: Address 00 is reserved for global addressing. Do not assign global address for any device. When command with global address is sent, all devices on the RS-485 bus execute the command, but do not reply with acknowledge message. The global address can be used to change RS-485 address for a particular device with unknown address: Make sure only one device (which address has to be changed) is connected to the RS-485 network.
  • Page 50: Troubleshooting

    TROUBLESHOOTING Common Conditions Your DFM Digital Mass Flow Meter was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was calibrated according to your desired flow and pressure conditions for a given gas or a mixture of gases. It was carefully packed to prevent damage during shipment.
  • Page 51: Troubleshooting Guide

    INDICATION LIKELY REASON SOLUTION No zero reading after Embedded temperature Perform Auto Zero Procedure (see section 15 min. warm up time has been changed. 5.3.10 "Zero Calibration"). and no flow condition. LCD Display remains Power supply is bad or For 12 or 24 Vdc option: blank when unit is polarity is reversed.
  • Page 52 INDICATION LIKELY REASON SOLUTION Gas flows through the The gas flow is too low Check maximum flow range on transducer's DFM, but LCD Display for particular model of front panel and make required flow reading and The output DFM. adjustment. voltage 0-5 Vdc signal DFM26/27 models: Unscrew the inlet compression fitting of the...
  • Page 53: Technical Assistance

    Technical Assistance Aalborg Instruments will provide technical assistance over the phone to qualified repair personnel. Please call our Technical Assistance at 845-770-3000. Please have your Serial Number and Model Number ready when you call. CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor. The K factor is derived from gas density and coefficient of specific heat.
  • Page 54: Appendix I Aalborg Dfm Eeprom Variables

    APPENDIX I AALBORG7 DFM EEPROM Variables Rev.A3 [12/05/2004] Gas Independent Variables INDEX NAME DATA TYPE NOTES BlankEEPROM char[10] Do not modify. Table Revision. SerialNumber char[20] Serial Number ModelNumber char[20] Model Number SoftwareVer char[10] Firmware Version TimeSinceCalHr float Time since last calibration in hours. Options1 uint Misc.
  • Page 55 INDEX NAME DATA TYPE NOTES TAInScaleV float ADC Temp. Analog In Scale (0-5V) TAInOffsetV float ADC Temp. Analog In Offset (0-5V) PAInScaleV float ADC Pressure Analog In Scale (0-5V) PAInOffsetV float ADC Pressure Analog In Offset (0-5V) SensorZero uint D/A Value for Sensor Zero [0-4095 counts] Klag [0] float DRC Lag Constant [Do Not Alter]...
  • Page 56 Calibration Table: Gas Dependent Variables. INDEX NAME DATA TYPE NOTES GasIdentifer char[27] Name of Gas [If not calibrated = "Uncalibrated"] FullScaleRange float Full Scale Range in SLPM. StdTemp float Standard Temperature StdPressure float Standard Pressure StdDensity float Gas Standard Density Name of Gas used for Calibration CalibrationGas char[27]...
  • Page 57: Appendix Ii Internal User Selectable Gas Factor Table

    APPENDIX II INTERNAL "K" FACTORS CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. K Factor DENSITY INDEX ACTUAL GAS Relative [Cal/g] [g/I] to N 1.0000 .240 1.293...
  • Page 58: Appendix Iii Gas Factor Table ("K" Factors)

    APPENDIX III GAS FACTOR TABLE (“K FACTORS”) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. K Factor DENSITY Relative INDEX ACTUAL GAS [Cal/g] [g/I] to N Acetylene C...
  • Page 59 K Factor DENSITY Relative INDEX ACTUAL GAS [Cal/g] [g/I] to N Cyclopropane C .4584 .3177 1.877 Deuterium D 1.00 1.722 1.799 .4357 .508 1.235 Diborane B .1947 9.362 Dibromodifluoromethane CBr Dichlorodifluoromethane (Freon-12) CCl .3538 .1432 5.395 .4252 .140 4.592 Dichlofluoromethane (Freon-21) CHCl Dichloromethylsilane (CH SiCl .2522...
  • Page 60 K Factor DENSITY INDEX ACTUAL GAS Relative [Cal/g] [g/I] to N 1.0106 3.419 .0899 Hydrogen H -1 (<10-100 L) 1.35 Hydrogen H -2 (>10-100 L) 3.419 .0899 Hydrogen H -3 (>100 L) 3.419 .0899 Hydrogen Bromide HBr 1.000 .0861 3.610 Hydrogen Chloride HCl 1.000 .1912...
  • Page 61 K Factor DENSITY INDEX ACTUAL GAS Relative [Cal/g] [g/I] to N Oxygen Difluoride OF .6337 .1917 2.406 Ozone .446 .195 2.144 Pentaborane B .2554 2.816 Pentane C .2134 .398 3.219 Perchloryl Fluoride ClO .3950 .1514 4.571 Perfluoropropane C .174 .197 8.388 Phosgene COCl .4438...
  • Page 62: Appendix Iv Component Diagram

    APPENDIX IV COMPONENT DIAGRAM DFM Analog PC Board TOP...
  • Page 63 COMPONENT DIAGRAM DFM Analog PC Board BOTTOM...
  • Page 64 COMPONENT DIAGRAM DFM Digital PC Board TOP...
  • Page 65 COMPONENT DIAGRAM DFM Digital PC Board BOTTOM...
  • Page 66: Appendix V Dimensional Drawings

    APPENDIX V DIMENSIONAL DRAWINGS 25-PIN D-CONNECTOR MALE 5.00 [127.0] 0.50 [12.7] 4.25 [108.0] 0.63 [15.9] 6.27 [159.3] 1.63 [41.3] 6-32-2B 0.15 DEEP 0.28 [7.1] 0.69 [17.5] 2.69 [68.3] 0.53 [13.5]...
  • Page 67 DIMENSIONAL DRAWINGS 25-PIN D-CONNECTOR MALE 5.25 [133.4] 0.50 [12.7] 5.25 [133.4] 7.27 [184.6] 0.63 [15.9] 7.49 [190.2] 2.00 [50.8] 6-32-2B 0.15 DEEP 0.32 [8.3] 0.69 [17.5] * FOR HIGH FLOW MASS FLOW METER 0.80 [20.3] 2.69 [68.3]...
  • Page 68: Appendix Vi Warranty

    CAUTION: This product is not intended to be used in life support applications! TRADEMARKS Aalborg7 is a registered trademark of Aalborg Instruments. VCR7 is a registered trademark of Swaglok Marketing Co. Buna7 is a registered trademark of DuPont Dow Elastometers.

This manual is also suitable for:

Dfm 36Dfm 27Dfm 37Dfm 46Dfm 47

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