Section 4
Setting Parameters
Setting Parameters
This section describes buffer size, buffer interval, and logging data.
Buffer Size and Buffer Interval
Buffer size of the measurement data to be accumulated in the ZS controller and its buffer
interval can be changed. To change buffer size and buffer interval, change the parameters
below:
* Use DATAGET and DATASET commands to change and view the parameter.
Unit No.
7Ch
Logging Data Type
Data to be accumulated in the ZS controller can be selected.
When using ZS-LDC
Up to 3 data types can be accumulated.
Unit No.
7Ch
* Setting varies depending on the measurement mode.
- When "THICK/GAP - FILM/OTHERS - TRANSFER" mode is selected
Value
Details
0
No accumulation
1
Result of area 1
2
Result of area 2
3
Thickness/gap value
ZS Series
4-8
CompoWay/F Communication Command Reference
Data No.
Parameter
2h
Flow data accumulation
mode
3h
Buffer interval
4h
Buffer size
Data No.
Parameter
5h
Accumulation data 1
6h
Accumulation data 2
7h
Accumulation data 3
Details
0: OFF
1: ON
1 to 65535
1 to 1000
Details
*