17
Technical Information
Typical Layout Diagram
12 Roughing line with valve (optional)
13 Turbopump
14 Fan
15 Flexible connection
With Standard Rack Controller
Figure 30
1
2
3
4
5
6
7
8
9
10 Fore-vacuum pump control relay
222/234
Turbo-V standard rack controller
Vent valve
Vacuum pump shut-off valve (optional)
System vent valve (optional)
Vacuum chamber
Ionization gauge
Fore-vacuum pump connecting flange
Oil mist eliminator
Fore-vacuum pump with internal one-way valve
Turbo-V 81-T User Manual / 87-900-984-01 (G)