With Standard Rack Controller - Agilent Technologies Turbo-V 81-M Series User Manual

With Standard Rack Controller

Figure 29
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10 Fore-vacuum pump control relay
11 Connection for water cooling
12 Roughing line with valve (optional)
13 Turbopump
14 Flexible connection
Turbo-V 81-M User Manual / 87-900-983-01 (E)
Turbo-V standard rack controller
Vent valve
Vacuum pump shut-off valve (optional)
System vent valve (optional)
Vacuum chamber
Ionization gauge
Fore-vacuum pump connecting flange
Oil mist eliminator
Fore-vacuum pump with internal one-way valve
Technical Information
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