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Target Life Mode
3.7. Mechanical Specification
The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports
of Delta "HPP-1K5A01KAT" sputtering power supply are described as below:
Item
Physical Dimension
Weight
Cooling
AC Input Connector
DC Output Connector
User Port
Host Port
Figure 3.6 Mechanical Drawing of Delta "HPP-1K5A01KAT" sputtering power supply
1 to 15000 kWh
Table 3.4 Mechanical Specification
Description
482.6(W)x132.5(H)x560(L)mm
19"(W)x5.2"(H)x23.6"(L)
(19" 3U)
32kg
Fan Cooling
Harting Han Q/5 series p/n 09120052633
7/16 Connector, Female
Analog I/O: 15-pin female D-sub
Digital I/O: 9-pin female RS232 and RS485 and RJ45
Mechanical Drawing
Unit: mm (inch)
16.
Monitoring if the output energy
reaches the setting of kWh.
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