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3.4.
Arc Suppression Specification
Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3
indicates the arc energy and adjustable parameters for user. As soon as the arc is detected by arc
voltage detection within 1 micro sec, power ON delay after a micro ARC will be approximately 5
microseconds. When the micro ARC is cleared normal pulsing resumes.
Hard Arcs (defined as those micro Arcs which cannot be extinguished with the standard micro
ARC algorithm of a 5 microsecond shutdown) will be detected within low impedance after the initial
micro ARC started. Number of detected arcs is displayed by the front panel display or from
communication interface. If hard arc inside vacuum chamber occur, the hard arc flag will be raised
and the power will shut down for a predetermined time.
10~250 V
signal of
switching
Table 3.3 Arc Energy Specification and Adjustable Parameters for User
Item
Reverse Time
Voltage Level Recognizing as
Arc
Hard Arc Shutdown time
Arc Energy
0V
Arc Voltage
Trip Level
Voltage
Arc Detected
Detection Circuit Activated
Arc Occurs
Current
0A
-1~-2A
t
1
Figure 3.4 Arc Suppression Mechanisms
Specification
5u sec
10V to 250V, adjustable
200us to 10000us
< 200uJ per 1kW
Detection
Reverse
Time
Time
Switching on
t
t
t
2
3
4
14.
Recovery
Time
t
t
t
5
6
Condition
10V Step, 100V Default
After Low Z output, power will
shutdown
With System
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