MKS Microvision2 Manuals

MKS Microvision2 Manuals

Manuals and User Guides for MKS Microvision2. We have 1 MKS Microvision2 manual available for free PDF download: Hardware Manual

MKS Microvision2 Hardware Manual

MKS Microvision2 Hardware Manual (50 pages)

Brand: MKS | Category: Measuring Instruments | Size: 1 MB

Table of Contents

Table of Contents
3
Overview
5
1 Specifications

6
- Mechanical
  6
  - Microvision2
    6
  - 24VDC Power Supply
    6
  - Analyser
    6
- Electrical
  7
  - Power Supply
    7
- Environmental
  7
  - Temperature Range
    7
- Safety
  7
- Connectors
  7
- Warning Labels
  8
- Ventilation
  8
4 Rear Panel Connections

11
- X-Trip
  11
- Audio Socket
  12
- Emission Indicator
  12
- Multiplier Indicator
  12
- Power Indicator
  12
- Gauge Connector
  13
- Power
  13
- Analogue I/O Connector
  14
- Digital I/O Connector
  15
- Ethernet
  16
- External Multiplier Protection
  16
5 Analyser Installation

17
- Unpacking
  17
- Inspecting the Analyser
  17
- Installing the Analyser
  18
- Checking the System Pressure
  18
- Mounting the Analyser
  19
6 Microvision2 Installation

20
- Installation
  20
- Electrical Connections
  20
7 Connecting to the Ethernet Port

21
8 Baking

28
9 Analyser Maintenance

29
- Overview
  29
- Ohmmeter Analyser Checks
  30
- Checking Filaments
  31
- Changing Filaments
  32
  - Removing the Filaments
    32
  - Open Ion Source
    32
  - Fitting Filaments
    34
  - Open Ion Source
    34
  - Removing the Filaments
    35
  - PVD / CVD Ion Source
    35
  - Fitting Filaments
    37
  - PVD / CVD Ion Source
    37
- Ion Source Cleaning
  38
  - Cleaning While Fitted to the Analyser
    38
  - Removing to Clean or Replace
    39
  - Open Ion Source
    39
  - Refitting the Open Ion Source
    41
  - Removing to Clean or Replace
    42
  - PVD / CVD Ion Source
    42
  - Refitting the PVD / CVD Ion Source
    44
  - Analyser Pin-Outs
    45
11 Spare Parts

46
- Filaments
  46
- Ion Source
  46
- Support Contact Numbers
  47

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