LEYBOLD MAG Series Manuals

LEYBOLD MAG Series Manuals

Manuals and User Guides for LEYBOLD MAG Series. We have 1 LEYBOLD MAG Series manual available for free PDF download: Operating Instructions Manual

LEYBOLD MAG Series Operating Instructions Manual

LEYBOLD MAG Series Operating Instructions Manual (112 pages)

Turbomolecular Pumps with Magnetic Bearing, Electronic Frequency Converter

Brand: LEYBOLD | Category: Water Pump | Size: 4 MB

Table of Contents

Operating Instructions
1
Table of Contents
2
General Safety Information

4
1 Description

7
- System Overview
  7
- Compatibility with Pumped Media
  9
- Design of the MAG
  10
- Function and Design of the MAG.DRIVE Digital
  12
- Standard Specification
  14
- Technical Data
  15
- Ordering Data
  21
  - Pump Configuration
    22
2 Installation

34
- Unpacking - Storing - Transportation
  44
- Operating Environment
  44
- Connecting the MAG to the Vacuum Chamber
  45
- Connecting the Backing Pump
  48
- Connecting the Cooling Water
  50
- Connecting the Purge Gas
  53
- Installing the MAG.DRIVE Digital
  58
- Power Supply Connection X19
  59
- Pump Connection
  59
- Control Plug X14
  60
  - Emergency off
    60
- Interface Connector
  62
3 Operation

66
- General Operation Rules
  66
- Temperature Management System
  68
- Power Control System (PCS)
  70
- Operation at High Gas Throughput or High Forevacuum Pressure
  70
- Bakeout
  71
- Operation with the START and STOP Keys
  72
- Remote Control
  73
- Operation with Plug-In Control
  75
- Operating Statuses
  76
- Operating Menu
  80
- Basic Menu
  80
- Menü System Info
  81
- Menu Failure Storage
  82
- Menu Set Converter
  83
- Menu Set Pump
  84
- Menu Set TMS
  84
- Menu Set Purge / Vent
  84
- Frequency Settings
  85
- Total View of the Menu
  88
4 Maintenance

90
- Cleaning
  90
- Changing the Rotor
  90
- Changing the Touch-Down Bearings
  90
- Cleaning the Frequency Converter Internally
  91
- Removing the Pump from the System
  91
- Service at Leybold's
  92
- Disposal
  92
5 Troubleshooting

94
- Warning Messages
  95
- Failure Messages
  97
- Malfunctions
  103
- EC Manufacturer's Declaration
  
  104
- EC Conformance Declaration
  
  105
  - Operating Instructions for Magdigital-Series
    110
- Index
  
  111

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