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Inficon LDS3000 AQ Leak Detector Manuals
Manuals and User Guides for Inficon LDS3000 AQ Leak Detector. We have
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Inficon LDS3000 AQ Leak Detector manuals available for free PDF download: Translation Of The Original Operating Instructions, Original Operating Instructions
Inficon LDS3000 AQ Translation Of The Original Operating Instructions (170 pages)
Mass spectrometer module
Brand:
Inficon
| Category:
Laboratory Equipment
| Size: 9.96 MB
Table of Contents
Table of Contents
3
About this Manual
8
Other Associated Documents
8
Warnings
8
Target Groups
9
Definition of Terms
9
Safety
12
Intended Use
12
Duties of the Operator
13
Owner Requirements
13
Dangers
13
Scope of Delivery, Transport, Storage
16
Description
17
Function
17
Design of Device
18
Entire Device (LDS3000)
18
Entire Device (LDS3000 AQ)
19
Connection Block
23
MSB Box
23
Markings on the Device
26
Technical Data
26
Factory Settings
27
Mounting LDS3000
31
Adjust the Position of the Connections to the Installation Dimensions
31
Installing the Mass Spectrometer Module on the Test System
32
Select Connection ULTRA, FINE, or GROSS
33
Establish Component Connection
34
Establish Electrical Connections
35
Mounting LDS3000 AQ (Accumulation)
36
Adjust the Position of the Connections to the Installation Dimensions
36
Installing the Mass Spectrometer Module on the Test System
37
Select Components and Connect
39
Variant 1
39
Variant 2
42
Establish Electrical Connections
44
Operation LDS3000
45
Switching the Device on
45
Default Settings
46
Selecting a Unit for the Leak Rate
47
Select Device for Pressure
48
Select Compatibility Mode
48
Select Operation Mode
50
Select Gas Type (Mass)
51
Calibrate Device
52
Time and General Preferences
52
Internal Calibration Configuration and Start
54
External Calibration Configuration and Start
55
Start External Dynamic Calibration
57
External Calibration with Sniffer Line SL3000XL
59
Check the Calibration
60
Calibration Using the Internal Calibration Leak Test
60
Calibration Using the External Calibration Leak Test
60
Entering the Calibration Factor
61
Calibration Factor Sniffing
61
Calibration Factor Vacuum
61
Setting Machine and Sniff Factor
62
Setting Machine and Sniff Factor Manually
62
Setting Machine and Sniff Factor Using Machine Calibration
63
Starting and Stopping the Measurement
63
Loading and Saving Parameters
64
Copying Measurement Data, Deleting Measurement Data
64
Suppressing Gas Backgrounds with "ZERO" Functions
65
Suppressing Decreasing Gas Backgrounds with I·ZERO 3.0 Beta
66
Measurement Result Display with Signal Filters
68
Control of the Gas Ballast Valve of the Backing Pump
69
Selecting Display Limits
70
Setting Trigger Values
70
Setting Capillary Surveillance
71
Set the Rotation Speed of the Turbo Molecular Pump
71
Cathode Selection
72
Settings for the XL Sniffer Adapter
72
Display Equivalence Leak Rate
75
Calculate Equivalence Factor
75
Set Equivalence Factor and Molar Mass
76
Reset Settings
77
Operation LDS3000 AQ (Accumulation)
78
Switching the Device on
78
Default Settings
78
Selecting a Unit for the Leak Rate
79
Select Device for Pressure
80
Select Compatibility Mode
80
Making Basic Settings Via the Wizard
83
Determine Peak
84
Store Leak Rate of Calibration Leaks
84
Calibrate Device
85
Time and General Preferences
85
Entering the Calibration Factor
87
Calibration Factor Vacuum
87
Calibrate
87
Start and Stop Measurement (AQ Mode 2)
89
Perform ZERO
90
Setting Machine and Sniff Factor
90
Setting Machine and Sniff Factor Manually
91
Carrying out a Measurement
92
Loading and Saving Parameters
93
Copying Measurement Data, Deleting Measurement Data
93
Adjust "Zero Time Factor AQ
93
Selecting Display Limits
94
Set Pressure Monitoring
94
Set the Rotation Speed of the Turbo Molecular Pump
95
Cathode Selection
95
Reset Settings
96
Using the Expansion Module (LDS3000, LDS3000 AQ)
97
Selecting the Type of Expansion Module
97
Settings for I/O Module IO1000
97
General Interface Settings
97
Assigning Inputs and Outputs
97
Assigning the Digital Inputs of the I/O Module
106
Assigning the Digital Outputs of the I/O Module
108
Settings for Bus Module BM1000
110
Warning and Error Messages (LDS3000, LDS3000 AQ)
111
Illustration of Error Codes with the Help of the Status Leds
120
Display Warnings as Errors
120
Operating CU1000 (Optional)
122
Touchscreen Elements
122
Measurement Display Elements
122
Elements of the Error and Warning Display
125
Settings and Functions
125
Touch Screen Settings
125
Operator Types and Authorizations
129
Logging out the Operator
130
Reset Settings
130
Recording Data
131
Calling up Information
132
Display Equivalence Leak Rate for Other Gas
134
Gas Equivalent Selection
135
Configure Gas List
136
Calculate Equivalence Factor
137
Set Equivalence Factor and Molar Mass
138
Gas Library
139
Updating the Software
146
Updating the Software of the Control Unit
147
Checking and Updating the Software Version of the MSB Box
147
Updating the Software of the I/O Module
148
Maintenance
150
Maintenance at INFICON
150
General Maintenance Information
150
Change Oil Reservoir of Turbo Molecular Pump
152
Introduction
152
Flood the Turbo Molecular Pump
152
Removing Old Oil Wick Cartridge
153
Exchange Porex Rods
155
Inserting a New Oil Reservoir
156
Confirm Maintenance Work
159
LDS3000 AQ - Maintenance Relevant Components
160
Maintenance Plan
160
Decommissioning
163
Shutting down the Leak Detector
163
Disposing of the Mass Spectrometer Module
163
Send in Mass Spectrometer Module for Maintenance, Repair or Disposal
163
Appendix
164
CE Declaration of Conformity
164
Declaration of Incorporation
165
Declaration of Contamination
166
Rohs
167
Index
168
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Inficon LDS3000 AQ Original Operating Instructions (138 pages)
Mass spectrometer module
Brand:
Inficon
| Category:
Control Unit
| Size: 7.64 MB
Table of Contents
Table of Contents
3
1 About These Instructions
7
Other Associated Documents
7
Target Groups
7
Warnings
7
Definition of Terms
8
2 Safety
11
Intended Use
11
Owner Requirements
11
Duties of the Operator
12
Dangers
12
3 Shipment, Transport, Storage
14
4 Description
15
Function
15
Device Setup
16
Entire Device (LDS3000)
16
Entire Device (LDS3000 AQ)
16
Connection Block
20
MSB Box
20
Nameplate
23
Technical Data
24
Factory Settings
25
5 Mounting LDS3000
28
Adjust the Position of the Connections to the Installation Dimensions
28
Installing the Mass Spectrometer Module on the Test System
29
Select Connection ULTRA, FINE, or GROSS
30
Establish Component Connection
31
Establish Electrical Connections
32
6 Mounting LDS3000 AQ (Accumulation)
33
Adjust the Position of the Connections to the Installation Dimensions
33
Installing the Mass Spectrometer Module on the Test System
34
Select Components and Connect
36
Establish Electrical Connections
38
7 Operation LDS3000
39
Switching the Device on
39
Default Settings
40
Selecting a Unit for the Leak Rate
42
Select Device for Pressure
43
Select Compatibility Mode
43
Select Operation Mode
45
Select Gas Type (Mass)
46
Calibrating the Device
47
Time and General Preferences
47
Internal Calibration Configuration and Start
49
External Calibration Configuration and Start
50
Start External Dynamic Calibration
52
External Calibration with Sniffer Line SL3000XL
54
Check the Calibration
55
Calibration Using the External Calibration Leak Test
55
Calibration Using the Internal Calibration Leak Test
55
Calibration Factor Sniffing
56
Calibration Factor Vacuum
56
Entering the Calibration Factor
56
Setting Machine and Sniff Factor
57
Setting Machine and Sniff Factor Manually
57
Setting Machine and Sniff Factor Using Machine Calibration
58
Starting and Stopping the Measurement
58
Loading and Saving Parameters
59
Copying Measurement Data, Deleting Measurement Data
60
Suppressing Gas Backgrounds with "ZERO" Functions
60
Measurement Result Display with Signal Filters
61
Control of the Gas Ballast Valve of the Backing Pump
62
Selecting Display Limits
63
Setting Trigger Values
63
Setting Capillary Surveillance
63
Set the Rotation Speed of the Turbo Molecular Pump
64
Cathode Selection
65
Settings for the XL Sniffer Adapter
65
Resetting the Settings
68
8 Operation LDS3000 AQ (Accumulation)
69
Switching the Device on
69
Default Settings
69
Selecting a Unit for the Leak Rate
70
Select Device for Pressure
71
Select Compatibility Mode
71
Making Basic Settings Via the Wizard
73
Determine Peak
74
Store Leak Rate of Calibration Leaks
75
Calibrating the Device
76
Time and General Preferences
76
Entering the Calibration Factor
77
Calibration Factor Vacuum
77
Calibrating
78
Perform ZERO
80
Setting Machine and Sniff Factor
81
Setting Machine and Sniff Factor Manually
81
Carrying out a Measurement
82
Loading and Saving Parameters
83
Copying Measurement Data, Deleting Measurement Data
83
Adjust "Zero Time Factor AQ
84
Selecting Display Limits
84
Set the Rotation Speed of the Turbo Molecular Pump
84
Cathode Selection
85
Resetting the Settings
85
9 Using the Expansion Module (LDS3000, LDS3000 AQ)
87
Selecting the Type of Expansion Module
87
Settings for I/O Module IO1000
87
General Interface Settings
87
Assigning Inputs and Outputs
87
Assigning the Digital Inputs of the I/O Module
95
Assigning the Digital Outputs of the I/O Module
98
Settings for Bus Module BM1000
100
10 Warning and Error Messages (LDS3000, LDS3000 AQ)
101
Illustration of Error Codes with the Help of the Status Leds
109
11 Operating CU1000 (Optional)
110
Touchscreen Elements
110
Measurement Display Elements
110
Elements of the Error and Warning Display
113
Settings and Functions
113
Touch Screen Settings
113
Operator Types and Authorizations
117
Functions
118
Logging out the Operator
118
Resetting the Settings
118
Recording Data
119
Calling up Information
120
Checking and Updating the Software Version of the MSB Box
123
Updating the Software
123
Updating the Software of the Control Unit
123
Updating the Software of the I/O Module
124
12 Maintenance
126
Maintenance at INFICON
126
General Maintenance Information
126
Maintenance Plan
127
Maintenance Work
128
Change Operating Fluid Reservoir of Turbo Molecular Pump
128
13 Decommissioning the Measuring Instrument
133
Shutting down the Leak Detector
133
Disposing of the Mass Spectrometer Module
133
Returning the Mass Spectrometer Module
133
14 Appendix
134
CE Declaration of Conformity
134
Declaration of Incorporation
135
Declaration of Contamination
136
Inficon LDS3000 AQ Original Operating Instructions (77 pages)
Mass spectrometer module
Brand:
Inficon
| Category:
Control Unit
| Size: 1.93 MB
Table of Contents
Table of Contents
4
About These Instructions
7
Target Groups
7
Other Associated Documents
7
Displaying Information
7
Warnings
7
Text Markings
7
Safety
9
Intended Use
9
Owner Requirements
9
Operator Requirements
10
General Safety Information
10
Shipment, Transport, Storage
12
Description
13
Function
13
Device Setup
14
Overall Device
14
Connection Block
15
MSB Box
15
Technical Data
17
Mechanical Data
17
Electrical Data
17
Physical Data
17
Ambient Conditions
18
Factory Settings
18
Installation
20
Adjust the Position of the Connections to the Installation Dimensions
20
Installing the Mass Spectrometer Module on the Test System
21
Connecting the Mass Spectrometer Module to the Test System
22
Establish Component Connection
23
Establish Electrical Connections
24
Operation
25
Switching the Unit on
25
Default Settings
26
Selecting Compatibility Mode and Operating Mode
26
Select Gas Type (Mass)
28
Calibrating the Device
28
Internal Calibration
30
External Calibration
31
External Dynamic Calibration
33
External Calibration with Sniffer Line SL3000XL (Accessories)
35
Check the Calibration
35
Entering the Calibration Factor
37
Setting Machine and Sniff Factor
37
Starting and Stopping the Measurement
39
Loading and Saving Parameters
39
Copying Measurement Data, Deleting Measurement Data
40
Suppressing Gas Backgrounds with "ZERO" Functions
40
Measurement Result Display with Signal Filters
41
Decontaminating the Backing Pump
42
Selecting a Unit for the Leak Rate
42
Select Unit for Pressure
43
Selecting Display Limits
43
Setting Trigger Values
44
Setting Capillary Surveillance
44
Turbo Molecular Pump Set-Up
44
Ion Source Set-Up
45
Setting the Preamplifier
46
Settings for the XL Sniffer Adapter
47
Selecting the Type of Expansion Module
49
Settings for I/O Module IO1000
49
6.22.1 General Interface Settings
49
6.22.2 Assigning Inputs and Outputs
50
Settings for Bus Module BM1000
60
Warning and Error Messages
60
6.24.1 Illustration of Error Codes with the Help of the Status Leds
67
Resetting the Settings
67
Maintenance
68
Maintenance at INFICON
68
General Maintenance Information
68
Maintenance Plan
69
Maintenance Work
70
Change Operating Fluid Reservoir of Turbo Molecular Pump
70
Decommissioning the Device
74
Shutting down the Leak Detector
74
Disposing of the Mass Spectrometer Module
74
Returning the Mass Spectrometer Module
74
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