Brooks 5851i Manuals

Brooks 5851i Manuals

Manuals and User Guides for Brooks 5851i. We have 1 Brooks 5851i manual available for free PDF download: Installation And Operation Manual

Brooks 5851i Installation And Operation Manual

Brooks 5851i Installation And Operation Manual (64 pages)

Mass Flow Controller

Brand: Brooks | Category: Controller | Size: 1.92 MB

Table of Contents

Table of Contents
6
Purpose
8
Description
8
Command Steps, Soft Start Disabled
9
Specifications
10
Receipt of Equipment
12
Recommended Storage Practice
12
Return Shipment
13
Gas Connections
13
Model 5851I Dimensions
14
Installation
14
D Connector Shielded Cable Hookup Diagram
15
In-Line Filter
15
Maximum Allowable Loop Resistance
16
Electrical Interfacing
16
Common Electrical Hook-Ups, Voltage I/O Version
17
Configuring the PC Board
19
Theory of Operation
20
Flow Sensor Operational Diagram
21
Operating Procedure
21
Flow Control System Block Diagram
22
Zero Adjustment
22
Calibration Procedure
23
Fast Response Adjustment
25
Response
25
PC Board Jumper Location & Function
26
Model 5851I Calibration Connections
27
Adjustment Potentiometer Location
27
General
30
Troubleshooting
30
Torque Sequence for the Valve Retainer Plate
33
Valve Adjusting Spacer Locations
35
Sensor Tube
36
Disassembly and Assembly
36
Voltmeter Connections for Valve Adjustment
37
Controller Body
38
Use of the Conversion Tables
40
Use of Orifice Sizing Nomograph
41
Conversion Factors (Nitrogen Base)
42
Example Nomograph
46
Model 5851I Orifice Sizing Nomograph
47
Model 5851I Restrictor Element Assembly
48
Model 5851I Restrictor Element Orientation in
48
Restrictor Sizing
49
General
52
Model 5851I Parts Drawing
53
CE Certification of Mass Flow Equipment
57

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