Brooks 5850i Manuals

Brooks 5850i Manuals

Manuals and User Guides for Brooks 5850i. We have 1 Brooks 5850i manual available for free PDF download: Installation And Operation Manual

Brooks 5850i Installation And Operation Manual

Brooks 5850i Installation And Operation Manual (62 pages)

Mass Flow Controller

Brand: Brooks | Category: Controller | Size: 1.49 MB

Table of Contents

Table of Contents
5
Introduction
7
Installation
7
Operation
7
Maintenance
7
Purpose
7
Description
7
Command Steps, Soft Start Disabled
8
Specifications
9
Receipt of Equipment
11
Recommended Storage Practice
11
Return Shipment
12
Gas Connections
12
Installation
13
Model 5850I Dimensions
13
In-Line Filter
14
D" Type Connector Pin Arrangement
14
Recommended Filter Size
14
Electrical Interfacing
15
Maximum Allowable Loop Resistance
15
Common Electrical Hook-Ups
16
Configuring the PC Board
17
Theory of Operation
19
Operating Procedure
20
Flow Sensor Operational Diagram
20
Zero Adjustment
21
Flow Control System Block Diagram
21
Calibration Procedure
22
Model 5850I Calibration Connections
24
Adjustment Potentiometer Location
24
PC Board Jumper Location & Function
25
Response
26
Fast Response Adjustment
26
Bench Troubleshooting
29
Torque Sequence for the Valve Retainer Plate
31
Sensor Troubleshooting
31
Voltmeter Connections for Valve Adjustment
36
Conversion Factors (Nitrogen Base)
41
Model 5850I Orifice Sizing Nomograph
45
Example Nomograph
46
Model 5850I Standard Restrictors
48
Model 5850I Parts Drawing
51
Model 5850I Replacement Parts List
53

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