Table of Contents
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Turbo-V 550
969-9047 series
969-9048 series
969-9049 series
969-9050 series
87-900-874-01(B)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Table of Contents
Related Manuals for Varian 969-9047 series
Summary of Contents for Varian 969-9047 series
- Page 1 Turbo-V 550 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9047 series INSTRUKSTIONSBOG 969-9048 series BRUKSANVISNING 969-9049 series INSTRUKSJON MANUAL 969-9050 series OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-874-01(B) APRIL 2002...
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Page 5: Table Of Contents
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per L'uso
"Technical Information" per ulteriori dettagli. Le pompe turbomolecolari della serie Turbo-V550 devono IMMAGAZZINAMENTO essere utilizzate solo con uno degli appositi controllori Varian Durante il trasporto e l'immagazzinamento delle pompe non (serie 969-9444, 969-9544, 969-9445, 969-9545, 969-9871) e devono essere superate le seguenti condizioni ambientali: devono essere collegate ad una pompa primaria (vedere −... - Page 7 In caso di guasto è possibile usufruire del servizio di meccanica Varian. Per ulteriori dettagli vedere l'appendice riparazione Varian o del "Varian advanced exchange service", "Technical Information". che permette di ottenere una pompa rigenerata in sostituzione Per fissare la pompa per mezzo della sua base, è...
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Page 8: Gebrauchsanleitung
Nichtbeachtung -auch teilweise- der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V550 handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. - Page 9 Pumpenghehäuse unter 50°C abgesunken ist. Einzelklemme 22 Nm NM10-Gewinde Bei einem Defekt kann der Varian Service oder der " advanced Turbopumpen mit ConFlat-Eingangsflansch müssen mit dem exchange service" in Anspruch genommen werden. speziellen Varian-Befestigungsmaterial an die Vakuumkammer angeschlossen werden. Weitere Hinweise siehe Anhang ANMERKUNG “Technical Information”.
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Page 10: Mode D'emploi
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire aux... - Page 11 3,1 Nm. réparations ou un "advanced exchange service", remplir et faire Pour l’installation des accessoires en option, consulter parvenir au bureau local Varian la fiche "Sécurité et Santé" “Technical Information”. annexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe avant...
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Page 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 M10 En caso de avería se podrá utilizar el servicio de reparación Varian o el "Varian advanced exchange service", que permite La turbobomba con brida de entrada ConFiat se fijará a la obtener una bomba regenerada para sustituir la averiada.
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Page 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 Em caso de defeito é possível usufruir do serviço de reparação "Technical Information". Varian ou do "Varian advanced exchange service", que permite Para fixar a bomba através da sua base, é necessário utilizar obter uma bomba regenerada que substitua a bomba com três parafusos M6 fixados aos furos específicos existentes na...
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 50 °C is gezakt. schroefdraad In geval van storing is het mogelijk om de reparatiedienst van Varian of de "Varian advanced exchange service" in te De turbompomp met ConFlat inlaatflens moet aan de schakelen: zo krijgt men een ruilpomp ter vervanging van de vacuümkamer worden bevestigd met behulp van de speciale...
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Page 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 Turbomolekulærpumperne i V550 serien må kun anvendes ADVARSEL! med en af de særlige Varian kontrolapparater (serie 969-9444, 969-9544, 969-9445, 969-9545, 969-9871) og skal forbindes Når pumpen anvendes til pumpning af giftige, brandfarlige eller med en primær pumpe (se skemaet i "Technical Information").
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Page 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 är lägre än 50ºC. gänga M8 ISO 160 Dubbel klammer 22 Nm Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ersätta pumpen med en med gänga M10 renoverad pump. Enkel klammer med 22 Nm gänga M10 OBSERVERA Turbopumparna med intagsfläns ConFlat ska fästas till...
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 Se “Teknisk informasjon” for detaljer. ADVARSEL! Turbo-V550 serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (serie 969-9444, 969- Når pumpen brukes for å pumpe giftige, brannfarlige eller 9544, 969-9445, 969-9545, 969-9871), og må koples til radioaktive gasser skal de relevante forskriftene for de enkelte hovedpumpen (se skjema i "Teknisk informasjon").
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Page 24: Käyttöohjeet
Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Page 25 (typpi tai argooni) jotta laakerit suojataan Information”-liitteestä. (katso liite “Technical information”). Sarjan V550 turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9444, 969- 9544, 969-9445, 969-9445, 969-9871) ja niiden täytyy olla VAARA! yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information").
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Page 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgièn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂... - Page 27 22 Nm el∂kwsh M10 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj 11 Nm Monˇ m◊ggenh Varian ˇ sto “Varian advanced exchange service”, pou saj d∂nei th el∂kwsh M8 ISO 160 22 Nm Diplˇ m◊ggenh dunatÒthta na antikatastˇsete thn calasm◊nh antl∂a me m∂a el∂kwsh M10...
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Page 28: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 See the appendix "Technical Information" for a detailed description. In the case of breakdown, contact your local Varian service To fix the pump by means of its base, it is necessary to use center who can supply a reconditioned pump to replace that three M6 screws fixed to the foreseen holes of the pump base.
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Page 30: Technical Information
TECHNICAL INFORMATION The turbine rotor is supported by permanently lu- DESCRIPTION OF THE TURBOPUMP bricated high precision ceramic ball bearings in- The Turbo-V550 pump is available in four versions stalled on the forevacuum side of the pump. which differ only in their inlet flange. They are: The static blades of the stator are made of stainless steel. -
Page 31: Technical Specification
ISO 100 and 160: 14 (31) Start-up time < 3 minutes CFF 6” and 8”: 18 (39.6) Recommended mechanical: Varian SD 300 forepump diaphragm: Varian MD 60 * According to standard DIN 28 428, the base pressure is that measured in a leak-free test... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-874-01(B)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump. INLET SCREEN INSTALLATION The screen can be removed as shown in the fol- lowing figure. The inlet screens mod. 969-9302 and 969-9304 prevents the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Page 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. In the event of turbopump overheat, the pump will be automatically cut out by the thermis- tor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Page 35: Water Cooling Kit Installation
TECHNICAL INFORMATION The assembled kit must be screwed into the suit- WATER COOLING KIT INSTALLATION able holes of the pump body with a recommended Two types of water cooling kits are available to be closing torque of 5 Nm. mounted when the pump is used under heavy load conditions or when air cooling is insufficient. -
Page 36: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION Position the fan on the pump, ensuring that the holes in the plate line up with those in the pump base. Insert the respective washers and screws and tighten with a screwdriver. Connect the fan to the controller. A fan kit model 969-9314 is available for air cool- ing the pump. -
Page 37: Gas Purge Valve Installation
TECHNICAL INFORMATION GAS PURGE VALVE INSTALLATION VENT VALVE INSTALLATION A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump. To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the fol- lowing figure, The vent valve mod. -
Page 38: Vent Device Installation
TECHNICAL INFORMATION Tighten the valve using a 16 mm. hexagonal span- Unscrew and remove the threaded plug (see figure ner with a torque of 2.5 Nm. below). CAUTION Do not overtighten the valve as this may damage the thread on the pump. Screw the flange mod. -
Page 39: Vibration Isolator Installation
Then fix the two flanges with the clamps or claws as shown in the figure. For ConFlat flange connections we recommend Turbo-V controller using Varian hardware. To facilitate assembly and dismantling, apply Fel- Vent valve pro C-100 high temperature lubricant to the screw... -
Page 40: Connection Configurations
TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 25 NW is available to connect the Turbo-V550 to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bel- lows. -
Page 41: Pump Used With Corrosive Gases
Adjust the pressure regulator in order to read a gas flow rate of 0.1 to 0.8 mbar l/s. CAUTION To prevent bearing damage, Varian suggests a 1. Purge gas line 2. Pressure regulator minimum purge gas flow rate of 10 sccm (0.17 3. -
Page 42: Accessories
220 V Triscroll Dry Vacuum Pump PTS PTS03001UNIV 300 single phase, universal motor Triscroll Dry Vacuum Pump PTS PTS03003UNIV 300 3 phase, universal motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-874-01(B) - Page 43 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 44 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 45 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...