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VHS-4
Varian VHS-4 Manuals
Manuals and User Guides for Varian VHS-4. We have
1
Varian VHS-4 manual available for free PDF download: Instruction Manual
Varian VHS-4 Instruction Manual (60 pages)
Diffusion Pumps
Brand:
Varian
| Category:
Power Pump
| Size: 0.99 MB
Table of Contents
Table of Contents
7
Instructions for Use
13
Introduction
21
Pump Specifications
21
Pump Operational Specifications
21
VHS-4 Speed and Throughput Curves
24
VHS-4 Wiring Information
24
VHS-4 Dimensions
25
VHS-6 Speed and Throughput Curves
26
VHS-6 Wiring Information
26
VHS-6 Dimensions
27
VHS-250 Speed and Throughput Curves
28
VHS-250 Wiring Information
28
VHS-250 Dimensions
29
Installation
30
Unpacking
30
Pump Oil Installation
30
Vacuum System Connections
31
Cooling Water Connections
31
Electrical Connections
32
Thermal Switch
33
Startup
35
Shutdown
36
General Maintenance
37
Inspection Requirements
37
Cleaning
38
VHS-4 and VHS-6 Cold Cap Removal/Installation
39
VHS4 and VHS-6 Cold Cap Removal/Installation
39
VHS-250 Cold Cap Removal/Installation
40
Jet Assembly Removal/Installation
41
VHS-4 Diffusion Pump Jet Assembly
42
VHS-6 and 250 Diffusion Pump Jet Assembly
43
Heater Replacement
44
VHS-6 and VHS-250 Heater Mounting
44
VHS-4 Heater Mounting
45
Pump Fluid Charge
46
Leakage
47
Outgassing
47
Poor Pump or System Performance
48
VHS-4 Models
51
VHS-4 Replacement Parts
51
VHS-6 Models
52
VHS-6 Replacement Parts
53
VHS-250 Models
54
VHS-250 Replacement Parts
54
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