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Top-notch basic performance facilitates inspections
Optical System
Nikon's renowned CFI60 optics are the fusion of CF design
and infinity optics. These new optics feature longer working
distances and high N.A.'s. They also produce brighter
images with more contrast and reduced flare.
High-contrast darkfield images
A new illumination
system produces a
Signal to Background
(S/B) ratio that is
nearly three times
greater than former
models. This
improves sensitivity
during darkfield
observations, enabling the detection of minute scratches
and surface irregularities within the sample, and provides
exceptionally high contrast.
Safeguards against
contamination
The body of this microscope is finished with electrostatic
discharge (ESD) coatings to prevent foreign particles from
adhering to it. Furthermore, the motorized nosepiece uses
a shielded center-motor that traps foreign particles inside,
preventing them from falling onto the sample.
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SEMI S2-93A, S8-95 compliant
design
ECLIPSE L200A
Conventional model
A tilting trinocular eyepiece tube with a lower eyepoint
designed to be closer to the operator allows you to sit in a
more natural erect position. Microscope controls located
comfortably up-front in the microscope base minimize
hand movement, allowing you to concentrate on the
inspection process.
Centerable motorized
nosepiece
The sextuple motorized
nosepiece not only has
the same encoded
positioning system
offered on the Eclipse
L200, but it also offers
three adjustable objective
positions that improve
par-centricity even more.
Vibration-isolation design
Thanks to Computer-Aided
Engineering, the L200A is three
times less susceptible to
floor vibrations when
compared with conventional
models in this class. This
reduces the chance of
unwanted blur or image
shifts even during high-
magnification
observations.
Accessories to enhance performance
CFI LU/L Plan series objectives Illumination systems
Type
Magnifi-
N.A.
W.D.
•12V-100W halogen lamphouse
cation
(mm)
•100W mercury lamphouse
CFI L Plan Epi*
2.5X
0.075
8.80
•150W metal halide
CFI LU Plan Epi*
5X
0.15
23.50
lamphouse
10X
0.30
17.30
•75W xenon lamphouse
20X
0.45
4.50
50X
0.80
1.00
100X
0.90
1.00
Stages and wafer
CFI LU Plan Epi ELWD*
20X
0.40
13.00
50X
0.55
10.10
holders
100X
0.80
3.50
CFI L Plan Epi SLWD*
20X
0.35
24.00
•8x8 Stage
50X
0.45
17.00
•8-inch (200mm) wafer holder
100X
0.70
6.50
•6-inch (150mm) wafer holder
CFI LU Plan Apo Epi*
150X
0.95
0.30
•6-inch (150mm) mask holder
CFI L Plan Apo Epi WI*
150X
1.25
0.25
•5-inch (125mm) mask holder
CFI LU Plan BD
5X
0.15
18.00
•4-inch (100mm) mask holder
10X
0.30
15.00
20X
0.45
4.50
50X
0.80
1.00
100X
0.90
1.00
CFI LU Plan BD ELWD
20X
0.40
13.00
50X
0.55
9.80
100X
0.80
3.50
CFI LU Plan Apo BD
150X
0.90
0.42
* A nosepiece adapter is needed to use these objectives.
System Diagram
C-Mount/ENG-Mount TV
Photomicrographic System
Zooming Adapter
FX-III Series
CF Projection Lenses
PLI 2X, 2.5X, 4X, 5X
V-T Photo Adapter
Confocal Unit
(Under development)
Illumination
Double Port
Systems
(Under
development)
HMX-3
Mercury
Mercury Lamphouse
Lamphouse
Lampsocket
HMX-3B
Adapter
100W
Epi
Collector
Lens
Stages
Xenon
Xenon Lamphouse
Lampsocket 75W
HMX-4
Fiber
Guide
Metal Halide Starter
Adapter
Liquid Fiber Guide
12V-100W Halogen
Lamphouse
DXM1200 digital camera
The DXM1200 Digital Camera achieves ultra-
high-quality digital images equivalent to
approximately 12 million output pixels, plus
has a low-noise design for clear, low-light
image capture. The camera's software can be
set to automatically categorize the images
taken, sort them and save them, all
automatically—a powerful feature when you
take a large number of photomicrographs.
C-Mount/ENG-Mount
Digital Still Camera/
Eyepieces
CCD Camera
C-Mount CCD Camera
CFI UW 10X
TV Adapter
TV Adapter
CFI UW 10XM
CFI 10X
CFI 10XM
YM-TI Trinocular
L2-TT Trinocular Tilting
CFI 12.5X
Eyepiece Tube
Eyepiece Tube
CFI 15X
Adapter
Auto Focus Module
Filar Micrometer
10XA
Motorized
DIC Module
Filter Sliders
Pinhole Slider
Breadth Shield
LU Nosepiece
Adapter
CFI LU/L Plan
Epi Objectives
L200A
8x8 Stage
Remote
Controller
Motorized Scanning
Stage ISS200
ISS200 Remote Controller
8" Wafer
4-6-inch
4-6-inch
Holder
Wafer Holder
Mask Holder
L Stage for NWL860
Wafer Loader
CFI LU Plan BD
Objectives
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