Complex Vacuum Generator & External Vacuum Controller for High Speed & Stable Response
Vacuum Generator VN & External Vacuum Controller VNP Series
C
haracteristics
•
Perfect for use in an IC chip loader, IC handlers and other semiconductor manufacturing devices.
•
Limited space can be utilized.
Small size and lightweight vacuum generator & external vacuum controller.
In particular, the height is lowered for small space use.
•
High speed, yet stable respose is realized. (ON/OFF=Max. 5msec)
Direct operated solenoid valve is used for the main valve.
●Conventional Vacuum Generator
•
Small workpiece is removed gently at vacuum break with blow-off.
Air supply port for blow-off is independent. Therefore, not only conventional flow adjustment but also using external regulator easily make the fine adjustment of blow-off
air.
•
Common supply port type is also available.
Air supply port for vacuum generation and blow-off are common.
190
Stand alone type
●
Weight
Pilot valve signal
Vacuum
Atmospheric pressure
→Time
Large dispersion in response time
Vacuum Generator VN
Indivisual air supply port type
Gauge Union Type Regulator
Circuit Diagram
●
Air supply PV port for vacuum generation
Air supply PS port for vacuum break
Blow-off flow adjusting needle
0
90
10
80
20
70
30
60
40
50
●Vacuum Generator VN
Small-sized plug-in Type
Vacuum Filter
Suction solenoid valve
Ejector
Blow-off solenoid valve
Vacuum port (V)
Manifold type
●
Pilot valve signal
Vacuum
High speed response
Atmospheric pressure
→Time
Small dispersion in response time
Fine control of the pressure dedicated to
vacuum break prevents small workpieces
blow off.
Vacuum Pad
Workpiece
Silencer
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