Quorum Q150T ES Instruction Manual

Quorum Q150T ES Instruction Manual

Sample preparation system
Table of Contents

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Q150T S/E/ES
Sample Preparation System
Instruction Manual
10473
Issue 5
For technical and applications advice plus our on-line shop for
spares and consumable parts visit
www.quorumtech.com

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Table of Contents
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Summarization of Contents

Health and Safety Precautions
Health and Safety Overview
General safety principles and responsibilities for users and the company.
Hazardous Substances and WEEE Compliance
Requirements for assessing substances and product compliance with WEEE directive.
Hazard Signal Words and Fail-Safe
Defines keywords like WARNING/CAUTION and explains fail-safe mechanisms.
Introduction to the Q150T System
System Overview and Models
Overview of the Q150T system's capabilities, models, and basic functions.
Core Capabilities
Details on sputter coating, carbon coating, metal evaporation, and aperture cleaning.
Installation and Connections
Pre-installation and Required Services
Identifies suitable location, environmental conditions, and necessary gas/electrical supplies.
Unpacking and Initial Checks
Instructions for safely removing the instrument from packaging and checking for damage.
Connecting Gas, Power, and Vacuum
Guides for connecting gas inlets, electrical supply, pump, and vacuum hose.
Network Connection Setup
Steps to connect the instrument to a network via CAT5/5e cable.
Instrument Operation Basics
Initial Power-On and Standby Screen
How to switch on the instrument and navigate the initial standby display.
Running and Monitoring Process Profiles
Steps to select, start, and monitor pre-defined sputtering or evaporation processes.
Profile Management
Editing and Creating Process Profiles
Modifying existing profiles or creating new ones using the Profile Editor.
Managing Material Properties
Adding, editing, or deleting material definitions and their associated properties.
Application Guidelines
QT Timed and FTM Terminated Sputtering
Guidelines for SEM coatings using timed and FTM-terminated sputter processes.
Carbon Evaporation Techniques
Procedures for pulsed cord, controlled pulse cord, and pulsed rod carbon evaporation.
Metal Evaporation and Aperture Cleaning
Performing metal evaporation and using the configuration for aperture cleaning.
Ramped Profile for Carbon Coatings
Using the ramped profile for consistent carbon coatings and support layers.
Instrument Configuration and Management
Outgas Options and Glow Discharge
Configuring outgassing behavior and using glow discharge for cleaning/hydrophilisation.
Instrument Settings and Parameters
Configuring network, sputter, vacuum, maintenance, and hardware settings.
User and System Management
Managing user access levels, groups, and system overrideable parameters.
FTM, Clock, and Process Logging
Monitoring FTM status, setting date/time, and viewing process logs.
Accessories and Spares
Installing Inserts and Stages
Guides for installing sputter, carbon, metal evaporation, glow discharge inserts, and various stages.
FTM and Other Accessories
Installing the Film Thickness Monitor and other accessories like cylinders and gauges.
Spares and Replacement Parts
Lists available spare parts, consumables, and replacement targets for the Q150T.
Service, Maintenance, and Troubleshooting
Routine Maintenance Procedures
Schedule of regular maintenance tasks for the instrument and its components.
Troubleshooting and Error Messages
Guidance on diagnosing issues, understanding error messages, and warnings.
Appendices and Specifications
Profile Parameter Reference
Detailed lists of parameters for various profile types.
Technical Specifications and Deposition Rates
Key technical data, specifications, and sputtering deposition rate graphs.
Return of Goods Procedures
Information and procedures for returning equipment, including declaration forms.

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