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Related Manuals for Quorum SC7610
Summary of Contents for Quorum SC7610
- Page 1 SC7610 Sputter Coater Operating Manual Document Number OM-SC7610 Issue 1 (01/02)
- Page 2 No performance guarantees, however, can be given in circumstances where these component packages are used in conjunction with equipment supplied by companies other than Quorum Technologies Quorum Technologies Ltd. Company No. 4273003. Registered offices 30/34 North Street Hailsham, East Sussex, England, BN27 1DW...
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Page 3: Chapter 1 - Contents
Chapter 1 - Contents Chapter 2 - Health and Safety General section which applies to all Quorum Technologies products detailing the very important issues of Health and Safety applicable when using sample preparation equipment. Chapter 3 - Introduction Introduces this manual. -
Page 4: Table Of Contents
2.6.1 Personal Operational Risks ............ 10 2.6.2 Hazardous Materials ............... 10 Good Working Practices ..............11 SC7610 Sputter Coater Specific Safety Hazards ......11 2.8.1 Contamination ................ 11 Chapter 3 - Introduction.................... 12 Return of Goods................12 Returns Procedure ................12 Chapter 4 - Description .................... - Page 5 No Discharge Current ..............28 Spare Parts ..................28 Chapter 8 - Fault Finding ..................29 Trouble Shooting / Fault Finding ............ 29 Fault Prevention ................29 Chapter 9 - Agents ....................30 Chapter 10 - Index ....................31 Issue 1 SC7610 Sputter Coater...
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Page 6: Illustrations
Tables Table 2.1 - Personal Operational Risks ..............10 Table 4.1 - SC7610 Sputter Coater, Front Panel Control Descriptions ...... 17 Table 4.2 - SC7610 Sputter Coater, Rear Panel Connection Descriptions ....18 Table 7.1 - Spare Parts ....................28 Table 8.1 - Trouble Shooting .................. -
Page 7: Chapter 2 - Health And Safety
This section of the Manual applies to all surface analysis and surface preparation equipment supplied by Quorum Technologies Polaron range of products, not just the particular instrument for which the manual refers. Included in this chapter are details on warning notations, good working practices and information on European Community (EC) legislation regarding “Control Of Substances Hazardous to Health”... -
Page 8: Servicing
2.4.1 Disclaimer All service work on the equipment should be carried out by qualified personnel. Quorum Technologies cannot be liable for damage, injury or consequential loss resulting from servicing from unqualified personnel. Quorum Technologies will also not be liable for damage, injury or consequential loss resulting from incorrect operation of the instrument or modification of the instrument. -
Page 9: Hazard Warning Labels Used In Equipment Manuals
They will take the form of the triangular warning symbol accompanied by an international warning sign and bold type lettering beginning with “WARNING-HAZARD TO HEALTH!” as shown in Figure 2.5. Issue 1 SC7610 Sputter Coater... -
Page 10: Risk Analysis
Hazardous Gases Quorum Technologies has no control over the gases used within the system. It is therefore viewed as the customers responsibility to assess the hazards involved and take appropriate precautions when using explosive, toxic or corrosive gases or gases which may result in hazardous products as a result of a chemical reaction. -
Page 11: Good Working Practices
Obey safety regulations regarding lifts, hoists and machine tools. Always make sure you understand a procedure well before attempting it for the first time. SC7610 Specific Safety Hazards The following Safety Hazards are specific to the SC7610 Sputter Coater. WARNING HAZARD TO HEALTH! The Power Supply used in the Model SC7610 unit can operate at up to 1200V D.C... -
Page 12: Chapter 3 - Introduction
Return of Goods If goods are to be returned to Quorum Technologies for repair or servicing the customer should contact their local distributor or the factory direct before shipment. A "Returns Authorisation Number" should be obtained in advance of any shipment. This number is to be clearly marked on the outside of the shipment. -
Page 13: Chapter 4 - Description
Description Equipment Each SC7610 Sputter Coater when supplied as a complete package, includes the basic unit, a Gold Palladium target, a start up kit and operation manual. Items can be ordered as a full package or separately against the following numbers:... -
Page 14: Overview
(CA7615) and a Carbon fibre head (CA076F) or Carbon rod head (CA076R). The SC7610 comes complete with a one metre of 20mm bore vacuum hose and fittings and requires only the addition of a rotary pump with a capacity of 50 litres / minute or greater (see "options and accessories”). -
Page 15: Physical Description
Description OM-SC7610 Physical Description The SC7610 Sputter Coater is a simple to operate compact magnetron sputtering system designed to be used for coating Scanning Electron Microscopy (SEM) specimens. The system can only be operated in manual mode. The SC7610 Sputter Coater is comprised of three main parts:... -
Page 16: Operational Description
Interlocks Safety interlocks are incorporated in the SC7610 Sputter Coater to prevent power being switched on with the chamber top plate not in the closed position. Also to cut power to the instrument if vacuum pressure is lost. -
Page 17: Sc7610 Panel Details
SC7610 Panel Details The SC7610 Sputter Coater is designed to be bench mounted, it provides 0 - 1.2 kV D.C. output. Process current of up to 0 - 50 mA is available with a 180 second timer to control the process. -
Page 18: Sc7610 Rear Panel Connections
4.6.2 SC7610 Rear Panel Connections The connection points and other components mounted on the rear panel of the SC7610 Sputter Coater are described below and identified in Figure 4.4 and described in Table 4.2. Figure 4.4 – SC7610 Sputter Coater, Rear Panel Connections. -
Page 19: Chapter 5 - Installation
If any damage is found, notify the carrier and Quorum Technologies (or local agent) immediately. If it is necessary to return the shipment, use the packaging as supplied and follow the instructions in this manual for return of goods paragraph 3.1. -
Page 20: Sc7610 Installation
3-way plug (which can be wired by the user) is supplied. (ii) Connect the mains (POWER IN) cable via a suitable plug to the local supply, in accordance with the cable colour coding: Brown Live Blue Neutral Green/Yellow Earth SC7610 Sputter Coater Issue 1... - Page 21 Installation OM-SC7610 Figure 5.1 – SC7610 Connections Issue 1 SC7610 Sputter Coater...
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Page 22: Chapter 6 - Operation
OM-SC7610 Operation The SC7610 Sputter Coater is designed to be durable and has a long lifetime. The Instrument does contain items, primarily the Target that has finite lifetimes, in order to sustain optimum performance it will need replacing periodically. The lifespan of the Target is dependant on a number of factors, including operating in good vacuum levels, contamination and the purity of the gas being used. -
Page 23: Coating Process
35mm between top of the sample and the target provides a satisfactory general purpose setting. (iv) Mount the stubs (with attached samples) on the sample stage. Position the glass cylinder and top plate on the sputter coater, to enclose the sample. Issue 1 SC7610 Sputter Coater... - Page 24 When the chamber pressure returns to atmosphere, close the vent valve, lift the top plate clear of the glass chamber. Remove the specimens. If further specimens are not to be coated immediately, close the top plate to seal the chamber. (See Paragraph 6.3(a)-(v)) SC7610 Sputter Coater Issue 1...
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Page 25: Sputtering Rates
The graphs show typical sputter rates achieved on a standard instrument under the conditions as specified and are intended only as a guide to coating thickness. Sputtering rate SC7610 Plasma Current (mA) Gold Au/Pd Platinum Nickel Silver Palladium Copper Figure 6.1 – SC7610 Sputtering Rates Issue 1 SC7610 Sputter Coater... -
Page 26: Chapter 7 - Maintenance
Return the sputter coater to its working position. Reconnect the electrical, vacuum, gas and water connectors to the cabinet rear panel. When taking the system back into service carry out the Test Procedure (see chapter 6.1), this will ensure the system is thoroughly dried out. SC7610 Sputter Coater Issue 1... -
Page 27: Target Replacement
Position the Top Plate assembly on the vacuum chamber and reconnect the services previously removed. When taking the system back into service carry out the Test Procedure (see chapter 6.1), this will ensure the system is thoroughly dried out. Issue 1 SC7610 Sputter Coater... -
Page 28: No Discharge Current
” (F1- 240V) 405020210 Fuse – 2A Type T 20mm (F2, F4- 110V) 405030210 Fuse – 3A Type T 20mm (F2, F4- 240V) 405006210 Fuse – 630mA Type T 20mm (F3) Table 7.1 - Spare Parts SC7610 Sputter Coater Issue 1... -
Page 29: Chapter 8 - Fault Finding
If problems continue to occur, for example the fuse blows immediately when a new one is fitted, contact the Customer Service Department at Quorum Technologies or your local agent, see Section 9 for list of agents Trouble Shooting / Fault Finding... -
Page 30: Chapter 9 - Agents
Agents OM-SC7610 Agents List of Agents Supporting QUORUM TECHNOLOGIES Products. H D Scientific Supplies Pty Ltd Philips Electron Optics BV Medic Corporation Ltd. Omega Scientific Taiwan Ltd. P O Box 6044 Building AAE 20 Peterkin Street 5F-1,415 Sec. 4 Blacktown Business Centre... -
Page 31: Chapter 10 - Index
COSHH Return of Goods Returns Procedure Risk Analysis escription Disclaimer afety Policy quipment SC7610 Front Panel Controls SC7610 Installation SC7610 Coater Specification ault Finding SC7610 Rear Panel Connections Fault Prevention SC7610 Specific Safety Hazards Serious Damage to Instruments ood Working Practices...