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PICARRO SAM-C User Manual

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SAM-C
User Manual
Picarro Inc.
3105 Patrick Henry Drive
Santa Clara, CA 95054, USA
Phone: +1 408 962 3900 • Fax +1 408 962 3200
www.picarro.com
Document Number 40-0080 Revision C
This manual is the original instruction provided in English.

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  • Page 1 SAM-C User Manual Picarro Inc. 3105 Patrick Henry Drive Santa Clara, CA 95054, USA Phone: +1 408 962 3900 • Fax +1 408 962 3200 www.picarro.com Document Number 40-0080 Revision C This manual is the original instruction provided in English.

  • Page 2: Picarro Notices

    Picarro Notices Picarro has prepared this manual solely for the information of its customers and as a general guide for the selection, installation, operation, and maintenance of the products described. Each application for these products is unique, and Picarro is willing to assist customers in their assessment and evaluation of Picarro products for specific uses and operating environments.

  • Page 3: Contact Information

    Contact Information Please contact Picarro for questions regarding specific applications and additional information. General Technical Support: Email: support@picarro.com Phone: + 1 408 962 3991 European Technical Support: Email: support@picarro.com Phone: +31 85 888 1650 Customer Service: Email: orders@picarro.com Phone: + 1 408 962 3992 SAM-C UM P/N 40-0080 Rev.

  • Page 4: Table Of Contents

    Table of Contents Table of Contents Picarro Notices ......................2 Contact Information ...................... 3 Table of Contents ......................4 List of Figures ....................... 6 List of Tables ......................... 8 Introduction ......................9 Intended Use ....................9 Key Features ....................10 How SAM Works ..................
  • Page 5 System Status Page ..................60 Export Data Page ..................64 6.10 Settings Page ....................67 6.11 Viewer Settings Page ................... 76 Troubleshooting ....................78 Equipment Maintenance and Service ..............82 Replacement of Consumable Materials ............. 82 SAM-C UM P/N 40-0080 Rev. C...

  • Page 6: List Of Figures

    List of Figures List of Figures Figure 1: SAM-C Integrated System – Front Panel Closed and Opened ......9 Figure 2: System Diagram ..................... 11 Figure 3: Warning Label Locations ................17 Figure 4: Anti-tipping Foot and Illustration of Overturning and Lateral Forces ......................
  • Page 7 Figure 49: OS Date/Time – Leave Automatic Date & Time OFF ........75 Figure 50: Viewer Setting Page ..................76 Figure 51: Change Password Dialog ................77 Figure 52: Troubleshooting Unpopulated Screen ............80 Figure 53: Recovering from System/Display Freeze ............. 81 SAM-C UM P/N 40-0080 Rev. C...

  • Page 8: List Of Tables

    Table 4: Seismic Protection Calculations ..............19 Table 5: Summary of Material Construction Breakdown ..........20 Table 6: Log Data Severity Level Number and Color Meanings ........62 Table 7: Problem Troubleshooting ................78 P/N 40-0080 Rev. C SAM-C UM...

  • Page 9: Introduction

    25% of their TLV or LEL. The system is only suitable for connection of non-HPM calibration and reference gases. WARNING Figure 1: SAM-C Integrated System – Front Panel Closed and Opened SAM-C UM P/N 40-0080 Rev. C...

  • Page 10: Key Features

    SAM also keeps track of the last active plan and automatically recovers it in the event of a power-loss, resuming fab monitoring immediately. P/N 40-0080 Rev. C SAM-C UM...

  • Page 11: How Sam Works

    With SAM’s specialized design, Picarro has made great strides in reducing, and in some cases eliminating these effects entirely. It allows you to monitor up to 32 sample lines with high throughput and use pressurized clean and reference gases to run periodic checks on analyzer baseline and calibrations.

  • Page 12: Audience And Manual Scope

    Reference Settings, Thresholds, and Date, Time & NTP Server sync. Go to page 67. • Viewer: This page shows user data and login data. You can log in and out here. Go to page 76. P/N 40-0080 Rev. C SAM-C UM...

  • Page 13: Equipment Ratings/Specification Table

    “yyyy” consists of alpha codes which indicate the analyzer models installed in your SAM system (See Table 2 below for model code matrix). For example: SAM-C-32-ADGH is a 32 port system containing analyzer models SI3401, SI2108, SI5450, and SI9110. SAM-C UM...

  • Page 14: Table 2: Sam System Analyzer Model Codes

    Analyzer Model Gases Measured SI3401 , HF, HCl SI2104 SI2205 SI2108 SI2306 HF, NH SI2103 SI5450 SI9110 VOC * * VOCs: Acetic Acid, Acetone, D3 Siloxane, D6 Siloxane, NMP, HMDSO, IPA, PGME, PGMEA, TMS P/N 40-0080 Rev. C SAM-C UM...

  • Page 15: Safety Information, Warnings, And Hazards

    Safety Information, Warnings, and Hazards 2. Safety Information, Warnings, and Hazards Advisory Notice – General Use Using SAM in a manner not specified by Picarro may result in damage to SAM and render it unsafe to operate. Warning Warning/Information Symbols and Text...

  • Page 16: Warning Symbols On The System

    EMO switch has been pressed to disconnect power. ELECTRICAL LOCKOUT POINT: This indicates the location to place an electrical lockout device to prevent accidental electrical energizing of the SAM system. SEISMIC ANCHOR POINT: Indicates seismic anchor placement locations. P/N 40-0080 Rev. C SAM-C UM...

  • Page 17: Warning Label Locations

    Warning) On Left-Rear Panel: Above Power OFF Switch (Electrical Lockout Point) Anti-tipping Foot On Right-Rear Panel (Asphyxiation Warning) On Left-and Right Sides of Frame (four places): (Seismic Anchor Point) Figure 3: Warning Label Locations SAM-C UM P/N 40-0080 Rev. C...

  • Page 18: Seismic Protection Provisions

    Based on the calculations of the overturning and lateral forces, each anchor bolt is subjected to a worst-case tensile force of 116.85 lbf and a lateral force of 59.1 lbf. Figure 4: Anti-tipping Foot and Illustration of Overturning and Lateral Forces P/N 40-0080 Rev. C SAM-C UM...

  • Page 19: Environmental Impact/Suitability For Recycling

    Tensile force on an anchor bolt 116.85 lbf Total number of anchor bolts Number of anchor bolts on one side of the SAM-C Distance between two opposing sets of anchor bolts 35.83 in Shortest distance from a set of anchor bolts to G 16.65 in...

  • Page 20: Table 5: Summary Of Material Construction Breakdown

    Summary of Material Construction Breakdown The following table shows the overall approximate percentage by weight of material to show suitability of recycling, based on the SAM-C-32-N configuration. The total weight of the system is approximately 570 lbs. without the analyzers.

  • Page 21: Hardware Setup Prerequisites

    2110 mm depth (with doors open), and 2020 mm height. • Space Requirements for Service: The SAM-C needs to have at least 1m space on the right side of the chassis for servicing. If this is not practicable, servicing will require the system to be switched off, unanchored, and rolled to a more open location.

  • Page 22: Clean And Reference Gases

    The line from the Clean source must be plugged into the “CLEAN” fitting, and the line from the Reference Gas tank must be plugged in to the “REF” fitting. See Figure 5 below. NOTE P/N 40-0080 Rev. C SAM-C UM...

  • Page 23: Figure 5: Clean, Reference Gas, And Exhaust Ports At Rear Panel

    Hardware Setup Prerequisites Clean/Reference Ports Exhaust Outlet Figure 5: Clean, Reference Gas, and Exhaust Ports at Rear Panel SAM-C UM P/N 40-0080 Rev. C...

  • Page 24: Hardware Equipment Installation

    Be aware of your fab safety requirements during installation. The safety of your overall system is the responsibility of your onsite staff. CAUTION Short circuit current rating (SCCR) of the SAM-C is 5 kA. NOTE Visual Inspection A manufacturer trained service partner will install the system and perform the following visual inspection.

  • Page 25: Sam Equipment - Key Components

    Power Distribution Unit Power Sequencers Figure 7: SAM System Components (Front View) EMERGENCY OFF Switch Touchscreen UI Power Off Switch Drop-down Keyboard Power On Switch USB Ports USB Ports Figure 8: SAM System Front Panel Components SAM-C UM P/N 40-0080 Rev. C...

  • Page 26: Figure 9: Sam System Components (Back View)

    RJ-45 Ethernet Port SAM Computer KVM Switch Analyzer Analyzer Analyzer Pumps Analyzer Pumps Analyzer Pumps Analyzer Pumps Analyzer Power Analyzer Input Panel Power Distribution SAM Pump Sequencer Figure 9: SAM System Components (Back View) P/N 40-0080 Rev. C SAM-C UM...

  • Page 27: Figure 10: Sam Right Side View

    Figure 10: SAM Right Side View The front and back doors are hinged and swing open. The side panels are NOT hinged and come off completely. A manufacturer-trained service partner should only remove them. CAUTION SAM-C UM P/N 40-0080 Rev. C...

  • Page 28: Analyzer Installation And Setup

    3. Connect the power cord to each analyzer and ensure that the power switch is in ON position. Note: The Power plug is locked when inserted. To remove, slide the red release tabs back and pull. P/N 40-0080 Rev. C SAM-C UM...

  • Page 29: Electrical Connections And Startup

    1. Ensure that all the power cables are seated properly. Check the sampling controller back panel, all analyzer back panels, and the external power distribution unit for the power cord connection. 2. Ensure that the EMERGENCY OFF button is in the release position. SAM-C UM P/N 40-0080 Rev. C...
  • Page 30 110-120 VAC power supply (rated 35A) and connect the sampling system electrical connection to the step-up transformer 220-240 VAC outlet. Note: The Inlet plug is supplied with SAM but connector on the user end is not. P/N 40-0080 Rev. C SAM-C UM...

  • Page 31: Hardware Equipment Operation

    GUI. 2. Follow the instructions in the Analyzer user manual to properly shut down each analyzer. 3. Repeat these steps for any additional analyzers, changing the KVM port number pressed based on KVM position. SAM-C UM P/N 40-0080 Rev. C...

  • Page 32: Sam Emergency Off Sequence

    The EMERGENCY OFF switch is located on the front left side of the SAM (Figure 12). 1. Press the switch to activate the emergency shut down sequence. 2. Once activated, all power will be cut immediately. Figure 12: Emergency Stop Switch Location P/N 40-0080 Rev. C SAM-C UM...

  • Page 33: Sam Emergency Stop Reset Sequence

    2. Check that SAM is properly connected to a suitable VAC outlet (see the SAM Power Up Sequence). 3. Press the green ON button on the front of the SAM chassis. The ON indicator should light up in green. SAM-C UM P/N 40-0080 Rev. C...

  • Page 34: Using Sam - Basic Gui Operations

    If a full system startup is not needed, you will be taken directly to the SAM Home Page. If full system startup is needed, the sequence explained below (System Startup) will take place before taking you to the home page. Figure 13: Login Page P/N 40-0080 Rev. C SAM-C UM...

  • Page 35: Figure 14: System Startup Status Pop-Up Screen

    Figure 14: System Startup Status Pop-up Screen If any one of the services or drivers fails during startup, the sequence will pause. If this occurs, contact Picarro Support for assistance. If you wish to close the pop-up while startup is still running, click the X in the upper right corner.

  • Page 36: Navigation Panel

    Go to page 41 to learn more. Numerical View : This icon takes you to the Numerical View Page. It shows the most recent values of species in your system. Go to page 53 to learn more. P/N 40-0080 Rev. C SAM-C UM...
  • Page 37 Go to page 67 to learn more. Viewer: This icon takes you to the Viewer Settings Page. It shows user and login data. You can log in and out here. Go to page 76 to learn more. SAM-C UM P/N 40-0080 Rev. C...

  • Page 38: General Gui Page Functions

    2 days at a time. Large amounts of data ports) will cause system slowdown and the display to freeze. See Section 7, Troubleshooting for recovery instructions if this occurs. Figure 18: GUI Page Viewing Features P/N 40-0080 Rev. C SAM-C UM...
  • Page 39 NH3 (ppb) 0.000000001 → NH3 (ppb) 1.000n • NH3 (ppb) 0.000001 → NH3 (ppb) 1.000μ • NH3 (ppb) 0.001 → NH3 (ppb) 1.000m • NH3 (ppb) 1,000 → NH3 (ppb) 1.000k • NH3 (ppb) 1,000,000 → NH3 (ppb) 1.000M SAM-C UM P/N 40-0080 Rev. C...

  • Page 40: Figure 19: Numerical Magnitude Units

    Using SAM – Basic GUI Operations In this example, 400.0m = 0.400 ppb Figure 19: Numerical Magnitude Units P/N 40-0080 Rev. C SAM-C UM...

  • Page 41: Setup Page

    Figure 20: Setup Page 2. To create a measurement cycle, click the Edit Plan button in the left panel. A default schedule with an existing measurement plan will display (Figure 21). SAM-C UM P/N 40-0080 Rev. C...

  • Page 42: Figure 21: Schedule Screen

    5. Enter the measurement duration in seconds only. (You must enter the duration.) 6. Repeat steps 4 and 5 for as many channels as you like. The maximum number of measurements that can be taken is 500. P/N 40-0080 Rev. C SAM-C UM...

  • Page 43: Figure 22: Blue Radio Button Showing On The Schedule Screen

    You will receive a Plan error notice as shown NOTE below: 10. Adjust as needed. 11. Click OK. Close the schedule. SAM-C UM P/N 40-0080 Rev. C...
  • Page 44 Figure 23. Pressing cancel returns you to the Setup/Command Panel. Note that the View Running Plan button is only visible when a plan is running. Otherwise the button is not visible on the Setup page. P/N 40-0080 Rev. C SAM-C UM...

  • Page 45: Figure 23: View Running Plan Displayed

    When the bank is cleaning, the bank will be highlighted in blue (Figure 24 below). 3. To stop the Clean cycle, select Standby. The bank border will return to the default color. SAM-C UM P/N 40-0080 Rev. C...

  • Page 46: Figure 24: Cleaning A Bank (Highlighted In Blue)

    5. Click on a line in the schedule 6. Click the Clean button and add a duration to the schedule. Save your plan. Click the OK button. 7. Click the Run Plan button or the Loop Plan button. P/N 40-0080 Rev. C SAM-C UM...

  • Page 47: Figure 25: Measuring Reference Gas For Calibration Verification

    (Figure 25) to manually activate the reference gas valve. All banks will be highlighted yellow while reference gas is flowing. You can also run a reference gas as part of a plan. Figure 25: Measuring Reference Gas for Calibration Verification SAM-C UM P/N 40-0080 Rev. C...

  • Page 48: Figure 26: Identify Available Ports Activated

    When a bank is undergoing available port identification, it will be highlighted green. The adjacent bank shown below is awaitng port identification and will be highlighted green after the first bank is completed. Figure 26: Identify Available Ports Activated P/N 40-0080 Rev. C SAM-C UM...
  • Page 49 Note that the label is plan-specific. That is, if the user begins to make a new plan, the default will appear. 2. Under the Edit Bank and Channel Names menu, enter a new name or many new names. 3. Click the Ok button. SAM-C UM P/N 40-0080 Rev. C...

  • Page 50: Figure 27: Zero Settings Applied To A Port

    1. Zero Port is assigned to a port which is enabled but is not part of a measurement plan. (Blue band at bottom of port status box indicates zeroing is applied to that port.) P/N 40-0080 Rev. C SAM-C UM...
  • Page 51 3. Zero Port is assigned to a port and the port is disabled and not in a measurement plan. 4. Zero Port is assigned to a clean input on a manifold bank. 5. Zero Port is assigned to the reference port button. SAM-C UM P/N 40-0080 Rev. C...
  • Page 52 Edit Labels: This enables you to change the names of channels. Note: This button is grayed out and not functional while a plan is running. However, the user can click the Standby button to activate the Edit Labels button. P/N 40-0080 Rev. C SAM-C UM...

  • Page 53: Numerical View Page

    Figure 28: Numerical View Page 2. Select port, species, or instruments from drop-down list, on the upper left of the screen. 3. Select multiple, single, or all. When finished, click on the screen. The new values will display. SAM-C UM P/N 40-0080 Rev. C...
  • Page 54 10. Click the drop-down arrow to see or change the Refresh Interval. The available refresh intervals are: Off, 1, 2, 5, 10, 30 second(s), 1, 5, 15 minutes, 1, 2 hour(s), and 1 day. P/N 40-0080 Rev. C SAM-C UM...

  • Page 55: Graphical View Page

    The concentration values will show (Figure 29). Figure 29: Graphical View Page 2. To get a closer view of values shown, select an area of the screen. The graph will update to display only the portion selected. SAM-C UM P/N 40-0080 Rev. C...
  • Page 56 2. Select multiple, single, or all. 3. When finished, click on the screen. The new values will display. 4. From the species drop-down menu, you can also select cavity pressure. P/N 40-0080 Rev. C SAM-C UM...

  • Page 57: Data Analysis Page

    The Vertical shows the Species Concentration (Y) • The Horizontal shows the Time Frame (X) Figure 30: Data Analysis Page 2. To get a closer view of values shown, select an area of the screen. SAM-C UM P/N 40-0080 Rev. C...

  • Page 58: Figure 31: Close Up View Of Concentration Values

    A list of concentration values for all relevant species corresponding to the location of the red vertical bar will display as shown in Figure 31 below. Species Concentration (Y-Axis) Time Frame (X-Axis) Figure 31: Close Up View of Concentration Values P/N 40-0080 Rev. C SAM-C UM...
  • Page 59 2. Select multiple, single, or all. 3. When finished, click on the screen. The new values based on the selections made will display. 4. From the species drop-down list, you can also select cavity pressure. SAM-C UM P/N 40-0080 Rev. C...

  • Page 60: System Status Page

    Note: The system status page is primarily for viewing system conditions, not for managing them. View Analyzer Status This Analyzer Status section shows the warm box temperature, the cavity temperature, the cavity pressure, and the measuring status. P/N 40-0080 Rev. C SAM-C UM...

  • Page 61: Figure 33: Analyzer Status

    The log file data section shows events with the time stamp, the log course (blue), the current severity (see chart below) and the appropriate tags. Log Course Severity Level Event Tag Time Stamp Figure 34: Log Data SAM-C UM P/N 40-0080 Rev. C...

  • Page 62: Figure 35: Network Device Status

    SAM dynamically detects the hardware that is connected to its system and configures itself. Use this section to validate your connections. It shows the status of network devices and serial drivers, and their associated hardware. Figure 35: Network Device Status P/N 40-0080 Rev. C SAM-C UM...

  • Page 63: Figure 36: Serial Driver Status

    Using SAM – Basic GUI Operations Figure 36: Serial Driver Status SAM-C UM P/N 40-0080 Rev. C...

  • Page 64: Export Data Page

    Species, Analyzer, or Port you would like to evaluate. Select one, multiple, or all. 3. From the species drop-down list, you can also select the Warm Box Temperature and Cavity Pressure. You can select one, multiple, or all. P/N 40-0080 Rev. C SAM-C UM...

  • Page 65: Figure 38: Setting Custom Absolute Time Range

    For Raw Data, you can set a time range of 7 days or less. Figure 38: Setting Custom Absolute Time Range When Averaging Data format is selected, the user must input a Time Range and Averaging Time for downloading the Averaging data. NOTE SAM-C UM P/N 40-0080 Rev. C...
  • Page 66 • The Plan Name next to the Port Number. These files are also temporarily saved to the SAM system; they will be purged from the SAM system when you reboot. NOTE P/N 40-0080 Rev. C SAM-C UM...

  • Page 67: 6.10 Settings Page

    Zero port corrects data from all other ports for possible analyzer drift. This page also provides a utility for resetting the zero offset or staging previous historical offset values. The following steps describe the actions that can be taken with this tab:: SAM-C UM P/N 40-0080 Rev. C...
  • Page 68 Date drop-down to the Staging panel: 5. In the Staging panel, click Save Changes to apply the offset values to the analyzer. Once the changes are saved, the notification below appears: P/N 40-0080 Rev. C SAM-C UM...

  • Page 69: Figure 40: Si9110 Example Exported Data Showing Interference Flag States

    No interference at this data point. Interference at this data point. Insufficient information at this data point to discern whether or not interference is present. Figure 40: SI9110 Example Exported Data Showing Interference Flag States SAM-C UM P/N 40-0080 Rev. C...

  • Page 70: Figure 41: Settings Page - Thresholds Tab Active - Default View

    Threshold setup starts with the Settings page and clicking on the Thresholds tab; the users will be greeted with the following page (Figure 41). Figure 41: Settings Page – Thresholds Tab Active – Default View P/N 40-0080 Rev. C SAM-C UM...

  • Page 71: Figure 42: Filtering Threshold By Port And Species

    Edit Individual as shown in Figure 43. Here you will notice that the Port selection filter is no longer available, but the Species filtering dropdown still is. Here you can select all or any number of individual species for setting thresholds. SAM-C UM P/N 40-0080 Rev. C...

  • Page 72: Figure 43: Setting Thresholds On Global Level

    See the example in Figure 45. This warning will pop up if the alarm value entered is less than the warning value. Figure 44: Example – Threshold Warning and Alarm Levels Set for Acetic Acid P/N 40-0080 Rev. C SAM-C UM...

  • Page 73: Figure 45: Example D3_Siloxane Data Analysis - Thresholds Exceeded

    Figure 45: Example D3_SILOXANE Data Analysis – Thresholds Exceeded Exceeded Thresholds in Tables: Each number in a data table that exceeds its corresponding threshold will be reflected by orange or red colors (Figure 46). SAM-C UM P/N 40-0080 Rev. C...

  • Page 74: Figure 46: Thresholds Exceeded In Numerical Data

    Large changes in time can cause system to malfunction. Do not change the clock while Analyzers are running. Shut down all Analyzers CAUTION before changing the clock on the SAM. See Section 5.2, Power Down Sequence. P/N 40-0080 Rev. C SAM-C UM...

  • Page 75: Figure 48: Date/Time/Ntp Server Settings Tab

    Analyzers. To avoid this issue, make your time settings using the Date, Time, & NTP Server feature on the Settings page (shown above in Figure 48). DO NOT ENABLE! Figure 49: OS Date/Time – Leave Automatic Date & Time OFF SAM-C UM P/N 40-0080 Rev. C...

  • Page 76: 6.11 Viewer Settings Page

    2. Make adjustments, and click the Save button when done. 3. You must place your cursor over the Viewer icon on the navigation panel to select and open the keyboard shortcuts panel or to sign-out. Figure 50: Viewer Setting Page P/N 40-0080 Rev. C SAM-C UM...

  • Page 77: Figure 51: Change Password Dialog

    Include at least one character from at least 3 of these categories: ▪ Uppercase letter ▪ Lowercase letter ▪ Numbers ▪ Special character Re-enter the new password in the Confirm password field Click Change Password to update the password. Figure 51: Change Password Dialog SAM-C UM P/N 40-0080 Rev. C...

  • Page 78: Troubleshooting

    Check the sample line for any blockage. Pump operation Check to see if the sample pump is degraded functioning by feeling for exhaust. Operation sequence Check that the operation sequence has been defined adequately and is running. P/N 40-0080 Rev. C SAM-C UM...
  • Page 79 (see Figure 52 become unresponsive. Figure 53. below) Click on the Picarro icon located in the upper left corner of the screen (Figure 53). SAM-C UM P/N 40-0080 Rev. C...

  • Page 80: Figure 52: Troubleshooting Unpopulated Screen

    Troubleshooting Unpopulated screen or Unpopulated screen with templating message. Press F5 to recover Figure 52: Troubleshooting Unpopulated Screen P/N 40-0080 Rev. C SAM-C UM...

  • Page 81: Figure 53: Recovering From System/Display Freeze

    F4 (or option + fn + F4 depending on the state of the fn lock) until arriving at a screen that looks like this. 2. Click on the Picarro icon located in the upper left corner of the screen. Figure 53: Recovering from System/Display Freeze SAM-C UM P/N 40-0080 Rev.

  • Page 82: Equipment Maintenance And Service

    There are no customer serviceable parts on this system. Please contact your manufacturer trained service partner to schedule service calls, and trained personnel will perform any required service or maintenance. 9. Replacement of Consumable Materials There are no customer serviceable parts on this system. P/N 40-0080 Rev. C SAM-C UM...

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