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PICARRO SAM-C Installation And Start-Up Manual
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PICARRO SAM-C Installation And Start-Up Manual

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SAM-C
Installation and Startup Manual
Picarro Inc.
3105 Patrick Henry Drive
Santa Clara, CA 95054, USA
Phone: +1 408 962 3900 • Fax +1 408 962 3200
www.picarro.com
Document Number 40-0099 Revision A
This manual is the original instruction provided in English.

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  • Page 1 SAM-C Installation and Startup Manual Picarro Inc. 3105 Patrick Henry Drive Santa Clara, CA 95054, USA Phone: +1 408 962 3900 • Fax +1 408 962 3200 www.picarro.com Document Number 40-0099 Revision A This manual is the original instruction provided in English.
  • Page 2 Picarro Notices Picarro has prepared this manual solely for the information of its customers and as a general guide for the selection, installation, operation, and maintenance of the products described. Each application for these products is unique, and Picarro is willing to assist customers in their assessment and evaluation of Picarro products for specific uses and operating environments.
  • Page 3 Contact Information Please contact Picarro for questions regarding specific applications and additional information. General Technical Support: Email: support@picarro.com Phone: + 1 408 962 3991 European Technical Support: Email: support@picarro.com Phone: +31 85 888 1650 Customer Service: Email: orders@picarro.com Phone: + 1 408 962 3992 SAM-C Installation/Startup P/N 40-0099 Rev.
  • Page 4 General Prerequisites .................. 20 Clean and Reference Gases ................ 21 Hardware Equipment Installation ............... 23 Visual Inspection ..................23 SAM-C Equipment – Key Components ............24 Analyzer Installation and Setup..............27 Electrical Connections ................. 28 P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 5 Power Down Sequence ................30 SAM-C Emergency Off Sequence ............... 32 SAM-C Emergency Stop Reset Sequence ..........32 SAM-C SEMI System Software User Manual ............. 33 Troubleshooting ....................34 Equipment Maintenance and Service ..............36 Preventive Maintenance and Replacement of Consumable Materials ......................
  • Page 6 List of Figures List of Figures Figure 1: SAM-C Integrated System – Front Panel Closed and Opened ......8 Figure 2: System Diagram ..................... 11 Figure 3: Warning Label Locations ................16 Figure 4: Anti-tipping Foot and Illustration of Overturning and Lateral Forces ......................
  • Page 7 List of Tables List of Tables Table 1: Equipment Ratings and Specifications ............12 Table 2: SAM-C System Analyzer Model Codes ............13 Table 3: Warning/Information Icon Types ..............14 Table 4: Seismic Protection Calculations ..............18 Table 5: Summary of Material Construction Breakdown ..........19 Table 6: Problem Troubleshooting ................
  • Page 8 The SAM-C and integrated analyzers are not intended to process hazardous materials at levels higher than 25% of their TLV (Threshold Limit Value) or LEL (Lower Explosive Limit).
  • Page 9 • EASY-TO-USE DATA EVALUATION TOOLS: The SAM-C GUI enables you to track current conditions and to track the history of conditions. SAM-C is always monitoring and collecting concentration data on multiple species from each port in your fab. You can view a history of changes and spot trends, by species, by location, and by specified time period.
  • Page 10 With SAM-C’s specialized design, Picarro has made great strides in reducing, and in some cases eliminating these effects entirely. It enables you to monitor up to 32 sample lines with high throughput and use pressurized clean and reference gases to run periodic checks on analyzer baseline and calibrations.
  • Page 11 Once the system has been installed and started, The user will refer to the included software operation manual. SEMI System Software Refer to the SEMI Vx.x System Software User Manual (Picarro PN 40-0096) included with this system for instructions on system operation. SAM-C Installation/Startup...
  • Page 12 “yyyy” consists of alpha codes which indicate the analyzer models installed in your SAM system (See Table 2 below for model code matrix). For example: SAM-C-32-ABG0 is a 32 port system containing analyzer models SI3401, SI2104, and SI5450. P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 13 Introduction Table 2: SAM-C System Analyzer Model Codes Code Analyzer Model Gases Measured SI3401 , HF, HCl SI2104 SI2205 SI2108 SI2306 HF, NH SI2103 SI5450 SAM-C Installation/Startup P/N 40-0099 Rev. A...
  • Page 14 Safety Information, Warnings, and Hazards 2. Safety Information, Warnings, and Hazards Advisory Notice – General Use Using SAM-C in a manner not specified by Picarro may result in damage to SAM and render it unsafe to operate. Warning Warning/Information Symbols and Text...
  • Page 15 Bold text is for actions to take (such as clicking on or touching a UI button), cautions, statements, and text you should type or select in screens. Warning Symbols on the System The following symbols appear as labels on the SAM-C system as needed to indicate potential hazards. Symbol Meaning...
  • Page 16 Warning) On Left-Rear Panel: Above Power OFF Switch (Electrical Lockout Point) Anti-tipping Foot On Right-Rear Panel (Asphyxiation Warning) On Left-and Right Sides of Frame (four places): (Seismic Anchor Point) Figure 3: Warning Label Locations P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 17 Safety Information, Warnings, and Hazards Seismic Protection Provisions To prevent the SAM-C unit from tipping over during a seismic event, each SAM-C is equipped with four anti-tipping feet. Each foot is constructed of welded 12- gauge cold rolled steel and bolted to the side of the unit with four 10 mm long stainless steel M6 hex head bolts.
  • Page 18 WEEE (Waste for Electrical and Electronic Equipment) and RoHS Directives. At the end of life of the instrument, the SAM-C system shall be dismantled, and the hazardous materials shall be identified, sorted, and collected. The WEEE directive sets minimum standards for recycling of electrical and electronic waste.
  • Page 19 Summary of Material Construction Breakdown The following table shows the overall approximate percentage by weight of material to show suitability of recycling, based on the SAM-C-32 configuration. The total weight of the system is approximately 570 pounds without the analyzers.
  • Page 20 2110 mm depth (with doors open), and 2020 mm height. • Space Requirements for Service: The SAM-C needs to have at least 1m space on the right side of the chassis for servicing. If this is not practicable, servicing will require the system to be switched off, unanchored, and rolled to a more open location.
  • Page 21 When nitrogen or any other gases that are not 100% air are connected to the system, the SAM-C needs to be installed in a well-ventilated location. Doors and panels need to be opened for ventilation prior to entering SAM-C. CAUTION Viable Surrogate Reference Gases •...
  • Page 22 Hardware Setup Prerequisites Clean/Reference Ports Exhaust Outlet Figure 5: Clean, Reference Gas, and Exhaust Ports at Rear Panel P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 23 Hardware Equipment Installation 4. Hardware Equipment Installation While it is likely that the SAM-C hardware will be installed by a manufacturer trained service partner, the following guidelines are Picarro’s recommendations for installation. Be aware of your fab safety requirements during installation.
  • Page 24 Analyzer Pumps Analyzer Pumps Analyzer Pumps Analyzer Pumps Analyzer Analyzer SAM Pump Power Distribution Unit Power Sequencers Figure 7: SAM-C System Components (Front View) EMERGENCY OFF Switch Touchscreen UI Power Off Switch Drop-down Keyboard Power On Switch USB Ports USB Ports Figure 8: SAM-C System Front Panel Components P/N 40-0099 Rev.
  • Page 25 Sample Inlets Clean and Reference Ports RJ-45 Ethernet Port SAM Computer KVM Switch Analyzer Analyzer Analyzer Pumps Analyzer Power Analyzer Input Panel Power Distribution SAM Pump Sequencer Figure 9: SAM-C System Components (Back View) SAM-C Installation/Startup P/N 40-0099 Rev. A...
  • Page 26 Sampling Controllers Analyzer Pumps SAM Pumps Figure 10: SAM-C Right Side View The front and back panels are hinged for easy opening. However, the side panels are not hinged and must be removed for access. A manufacturer-trained service partner should only remove them.
  • Page 27 Sampling Controllers Analyzers Power Distribution Figure 11: SAM-C Left Side View Analyzer Installation and Setup 1. Install the front rack-mount onto the analyzer. 2. Make the following connections to the analyzer (back side) area. 3. Connect the power cord to each analyzer and ensure that the power switch is in ON position.
  • Page 28 1. Ensure that all the power cables are seated properly. Check the sampling controller back panel, all analyzer back panels, and the external power distribution unit for the power cord connection. 2. Ensure that the EMERGENCY OFF button is in the release position. P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 29 110-120 VAC power supply (rated 35A) and connect the sampling system electrical connection to the step-up transformer 220-240 VAC outlet. Note: The Inlet plug is supplied with SAM-C but the connector on the user end is not. Caution: Ensure that the step-up transformer provides a ground connection to the SAM-C.
  • Page 30 220-240 VAC wall socket (or step up transformer in areas with 110-120 VAC supply). 2. Press the ON switch on the front face of the SAM-C chassis. The power up sequence is automatic once the ON switch is pressed.
  • Page 31 KVM position. If the hot keys are not functioning, toggle the KVM Switch manually. The Switch can be found by opening the door at the front of the SAM-C. Use the buttons on the front of the KVM.
  • Page 32 2. Check that SAM-C is properly connected to a suitable VAC outlet (see the SAM-C Power Up Sequence). 3. Press the green ON button on the front of the SAM-C chassis. The ON indicator should light up in green. P/N 40-0099 Rev. A...
  • Page 33 Hardware Equipment Operation 6. SAM-C SEMI System Software User Manual For user interface operation instructions, refer to the manual, SEMI Vx.x System Software User Manual (Picarro PN 40-0096) included in your SAM-C shipment. SAM-C Installation/Startup P/N 40-0099 Rev. A...
  • Page 34 Simple troubleshooting should take no more than 30 minutes. CAUTION After the EMO switch is engaged and the system power is cut, the following components remain LIVE: circuit breaker, surge protector, line filter, 24VDC, 2.2A power supply. WARNING P/N 40-0099 Rev. A SAM-C Installation/Startup...
  • Page 35 USBs are connected to the rack integrated PC. Mouse not Mouse USB Ensure that only the mouse USB is functioning connection connected to the KVM unit and that all other USBs are connected to the rack integrated PC. SAM-C Installation/Startup P/N 40-0099 Rev. A...
  • Page 36 Fan Assemblies and Pumps Fans: Picarro recommends that cooling fan assemblies be replaced every 2 years. Pumps: SAM-C pumps cannot be rebuilt on-site. Picarro recommends pump replacement every 2 years to avoid system downtime. P/N 40-0099 Rev. A SAM-C Installation/Startup...