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Edwards nAPG200 Instruction Manual
Edwards nAPG200 Instruction Manual

Edwards nAPG200 Instruction Manual

Active pirani gauge

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nAPG200 Active Pirani Gauge
INSTRUCTION MANUAL
edwardsvacuum.com
Original instructions
D1G0009880_B

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Summary of Contents for Edwards nAPG200

  • Page 1 Active Pirani Gauge INSTRUCTION MANUAL edwardsvacuum.com Original instructions D1G0009880_B...
  • Page 2 Decades of Expertise: With 30+ years in the industry, Ezzi Vision is highly experienced in vacuum technology and its applications. Quality Assurance: We ensure that every Edwards pump meets the highest standards of performance and reliability. Innovative Solutions: Leading in technological advancements, we provide the latest Edwards pumps, known for their innovation and efficiency.
  • Page 3 Copyright notice ©Edwards Limited 2022. All rights reserved. Published: 6/27/2022 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Swagelok® is a registered trademark of Swagelok Company ® is a registered trademark of Swagelok Company ®...
  • Page 4 Contents 1. Safety and compliance ................6 1.1 Definition of Warnings and Cautions ..............6 1.2 Safety symbols ....................7 2. Introduction ..................... 8 2.1 Description ......................8 2.1.1 Item number and description matrix........... 8 3. Technical data ..................11 3.1 Operating and storage conditions ..............
  • Page 5 5.3.7 Parameter control ................29 5.3.8 Gauge run parameters ............... 29 5.3.9 Operation errors ................29 5.4 Bakeout......................30 6. Maintenance ..................31 6.1 Replace the gauge tube.................. 31 7. Fault finding ................... 32 8. Disposal ....................34 9.
  • Page 6 List of Figures Figure 1: General view ......................8 Figure 2: Item number matrix....................9 Figure 3: Item description matrix..................10 Figure 4: Dimensions (mm) ....................12 Figure 5: Electrical connectors ....................16 Figure 6: 9 way D-sub connector with setpoint transistor ............ 17 Figure 7: 9 way D-sub connector with solid state relay ............
  • Page 7 D1G0009880_B - Safety and compliance 1. Safety and compliance For safe operation from the start, read these instructions carefully before you install or commission the equipment and keep them safe for future use. Read all the safety instructions in this section and the rest of this manual carefully and make sure that you obey these instructions.
  • Page 8 D1G0009880_B - Safety and compliance 1.2 Safety symbols The safety symbols on the products show the areas where care and attention is necessary. The safety symbols that we use on the product or in the product documentation have the following meanings: Warning/Caution An appropriate safety instruction must be followed or caution to a po- tential hazard exists.
  • Page 9 (around filament). Refer to Figure: General view. The nAPG200 is a digital gauge. All gauge calibration and control functions are carried out over serial communications. Use RS232 for point to point systems and RS485 for point to point or multi-drop systems.
  • Page 10 D1G0009880_B - Introduction Table 1 Options Characteristic Description Different filament materials which have been selected for Filament/Pressure their ability to measure low pressures and/or their resistance range to corrosion Setpoint Transistor setpoint or 1 solid state relay Flange Different vacuum flanges are available Communications proto- Gauges are available with RS232 or RS485 communication protocols...
  • Page 11 D1G0009880_B - Introduction Figure 3 Item description matrix APG200 RS485 NW25 9 PIN DSUB Filament/pressure range M : Standard filament 5x10 mbar to 1000 mbar LC : Corrosion resistant filament 1x10 to 1000 mbar MP : Corrosion resistant filament 5x10 mbar to 1000 mbar (model dependent) Setpoint [Blank] : Transistor setpoint...
  • Page 12 D1G0009880_B - Technical data 3. Technical data 3.1 Operating and storage conditions Table 2 Operating and storage conditions Parameter Value Ambient operating temperature range +5 °C to +60 °C Ambient storage temperature range -30 °C to +70 °C 150 °C (with electronics housing re- Bakeout temperature moved) 80% RH up to 31 °C decreases linearly to...
  • Page 13 D1G0009880_B - Technical data 3.3 Mechanical data Table 5 Mechanical data Characteristic Value Units Dimensions Refer to Figure: Dimensions (mm) Enclosure rating IP40  200 Mass Internal volume of tube NW16 NW25 1/8" NPT 4VCR Flange 8VCR Bare tube DN16CF Figure 4 Dimensions (mm) Characteristics Dimension (mm)
  • Page 14 D1G0009880_B - Technical data Table 6 Electrical data Parameter Data ▪ 15 to 48 V d.c. nominal ± 10% ▪ Limited-energy circuit/source in accordance Electrical supply voltage with IEC 61010-1 Maximum power consumption 1.5 W Maximum inrush current 150 mA Electrical connector 9 way D-sub male ID resistor...
  • Page 15 D1G0009880_B - Technical data Parameter Value ▪ Mark ▪ < +1 V (I maximum: -2 mA) ▪ Space ▪ > +2 V (I maximum: +2 mA) ▪ Maximum input ▪ ±12 V RS485 ▪ Output differential ▪ > 1.5 V (I maximum: ±25 mA) ▪...
  • Page 16 Check that your package contains the following items: Table 10 Checklist of items Description Quantity Check  nAPG200 gauge  Test report  Instruction manual 4.2 Install the gauge WARNING: HIGH PRESSURE Risk of damage to equipment. Use a co-seal or trapped O-ring carrier to connect the gauge to a vacuum system.
  • Page 17 D1G0009880_B - Installation For precision, we recommend that the atmosphere and vacuum adjustment must be done before use. Refer to Maintenance on page 31. 4.3 Connect the gauge 4.3.1 Connect to the vacuum system To connect the gauge to the vacuum system: ▪...
  • Page 18 D1G0009880_B - Installation Recommended electrical connec- Setpoint transistor Solid state relay tion Refer to Figure: Electrical connectors ID resistor RS485/RS232 common Setpoint output signal Relay 1 closing contact Not connected Relay 1 common RS485 negative/RS232 transmit RS485 positive/RS232 receive Recommended electrical connections Figure 6 9 way D-sub connector with setpoint transistor A.
  • Page 19 D1G0009880_B - Installation Figure 7 9 way D-sub connector with solid state relay A. Gauge B. Connector C. Electrical supply D. RS485/R232 serial communication Note: For setpoint transistor variants only, The setpoint output is an active low open-collector transistor capable of operating a d.c. relay or control logic. If you connect an external relay, use a suppression diode to protect the gauge from transient voltages generated when the relay is set to off.
  • Page 20 D1G0009880_B - Installation The RS485 interface can be used for multi-drop communication with multiple gauges from the digital gauge range. Connect the RS232 The RS232 interface uses two lines for data transfers and an additional line as a signal common. Hardware handshaking is not implemented. The connector pin out is not compatible with standard serial leads and these must not be used.
  • Page 21 D1G0009880_B - Operation 5. Operation WARNING: HIGH FILAMENT TEMPERATURE Risk of injury or damage to equipment. Do not use the gauge to measure the pressure of explosive or flammable gases or mixtures. The gauge has a heated filament which operates approximately at 100 °C. The temperature of the filament can be higher in fault conditions.
  • Page 22 D1G0009880_B - Operation Error indication If an error occurs within the gauge, the LED indicator will illuminate red and flash. Refer Fault finding on page 32. 5.2 Serial communications The communications to the digital gauge range are ASCII based text and work on the client/server principle.
  • Page 23 D1G0009880_B - Operation Objects and configurations Each parameter or function within the digital gauge has an object number that is used to reference it. Some objects have more than one configuration associated with them, for these objects the configuration type is sent and returned as the first parameter in the data field.
  • Page 24 D1G0009880_B - Operation Normal response Data cr Error response Value query Query format: Normal response Data cr Error response Multi-drop prefix Command or Query prefix format Response prefix format Data cr 5.2.3 Response error codes The error codes returned in the case of command or query failure are consistent across all our products that support serial communications: Table 13 Response error codes Error code...
  • Page 25 D1G0009880_B - Operation 5.2.4 Communications timings Because of the complexity of the product, precise message timings are not defined, the following values are provided for guidance. Latency estimates are comms query and reply flight time. Processor latency may add up to 3.5 ms. Table 14 Communications timings 9600 19200...
  • Page 26 D1G0009880_B - Operation Status flag Meaning Gauge Gas type: 0 = Nitrogen, 1 = Argon, 2 = Helium, 3 = Gas type , 4 = Neon, 5 = Krypton, 6 = Xenon Not applicable to this gauge * Gauge specific errors are bits 6 to 11 inclusive. 5.3 Gauge operation under serial control When you operate the gauge, refer to the summary of serial query/commands in Serial...
  • Page 27 D1G0009880_B - Operation Figure 9 Gas dependency of APG200 with M, MP filament/pressure characteristic Figure 10 Gas dependency of APG200 with LC filament/pressure characteristic Note: X-axis - True pressure Y-axis - Indicated pressure Page 26...
  • Page 28 D1G0009880_B - Operation 5.3.4 Gauge adjustments For optimum accuracy it is recommended that both atmosphere and vacuum adjustments are carried out before use. The gauge can be adjusted for atmosphere and vacuum when set to a gas type of nitrogen. Gauge adjustments are not supported for other gas types.
  • Page 29 D1G0009880_B - Operation The status of the gauge during this adjustment is displayed in the gauge status that is returned when the gauge pressure is read. The calibration in process bit will be cleared when the adjustment is complete. Do the atmosphere and vacuum adjustments after the optimum accuracy. Query/command Description Atmosphere adjustment...
  • Page 30 D1G0009880_B - Operation Query/command Description !S791 n Set Pulsed LED status indicator n=0 Pulsed LED disabled, n=1 Pulsed LED enabled Read Pulsed LED status indicator status reply "=S791 n" ?S791 n=0 Pulsed LED disabled n=1 Pulsed LED enabled 5.3.7 Parameter control Gauge commands can be locked to prevent accidental adjustment by sending the command lock to the gauge.
  • Page 31 D1G0009880_B - Operation Table 16 Error indication LED indication Meaning Cause Change rate Colour On (s) Off (s) Filament broken, tube not 0.25 0.25 Tube error fully inserted, temperature compensator broken Calibration could not be ach- Calibration error ieved If the gauge enters an error state, the condition will latch until the issue is rectified and the error is subsequently acknowledged.
  • Page 32 D1G0009880_B - Maintenance 6. Maintenance 6.1 Replace the gauge tube You must install a replacement tube to the gauge if: ▪ The gauge tube is contaminated. ▪ The atmosphere or vacuum adjustment cannot be achieved. ▪ The filament is broken. Refer to Figure: Replace the gauge tube.
  • Page 33 D1G0009880_B - Fault finding 7. Fault finding Table 17 Faults Fault LED not lit on page 32 Pressure reading incorrect on page 32 Gauge shows calibration error on page 32 Gauge shows broken filament on page 33 Fault LED not lit Cause Incorrect electrical supply voltage.
  • Page 34 D1G0009880_B - Fault finding Fault Gauge shows broken filament Cause Tube is missing. Remedy Install the tube. Remove the electrical connector and insert back. Cause Wrong type of tube is installed. Remedy Check that the correct type of tube is installed (M, MP or LC). Cause Filament is broken.
  • Page 35 D1G0009880_B - Disposal 8. Disposal ▪ Dispose of the gauge, components and accessories safely as per all local and national safety and environmental requirements. ▪ You can recycle the gauge and cables. Contact us or the supplier for more information. ▪...
  • Page 36 D1G0009880_B - Spares 9. Spares Order the spare parts and accessories from our nearest company or distributor. When you order, give: ▪ Model and item number of your equipment ▪ Serial number (if any) ▪ Item number and description of the part. Figure 12 Replacement tube spares A A A Filament/pressure range...
  • Page 37 D1G0009880_B - Serial command quick reference guide 10. Serial command quick reference guide Table 18 Serial command quick reference guide Object Operations and Config ID Parameter Notes Lockable Read gauge identity: Hardware version, Wildcard gauge type Software version, Name Set Node Address: ...
  • Page 38 D1G0009880_B - Serial command quick reference guide Object Operations and Config ID Parameter Notes Lockable Set high setpoint threshold: 1.0 x 10  !S754 0; n.nE±nn 9.9 x 10 must be  Low threshold ?S754 0 Read high setpoint threshold Setpoint Set low setpoint threshold: 1.0 x 10 ...
  • Page 39 D1G0009880_B - Serial command quick reference guide Object Operations and Config ID Parameter Notes Lockable Clear atmosphere and vacuum calibration,  Clear calibration !S760 reset LED pulsing: 1 = set calibrations to de- fault values Trigger Tube Calibration 1234 = password ...
  • Page 40 D1G0009880_B - Service 11. Service 11.1 Return the equipment or components for service Before you send your equipment to us for service or for any other reason, you must send us a completed Declaration of Contamination of Vacuum Equipment and Components – Form HS2.
  • Page 41 West Sussex T: +42(0) 580 582 728 RH15 9TW documentation@edwardsvacuum.com APG200 Active Pirani Gauge nAPG200 Active Pirani Gauge Is in conformity with the relevant Union harmonisation legislation: 2014/30/EU Electromagnetic compatibility (EMC) directive Class B Emissions, Industrial Immunity Restriction of certain hazardous substances (RoHS) directive...
  • Page 42 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Nick Barratt - Engineering Manager, Eastbourne Ed Neuss – General Manager, Eastbourne...
  • Page 43 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III:  6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight  6(c) Copper alloy containing up to 4% lead by weight ...
  • Page 44 edwardsvacuum.com...