Edwards ELD500 Series Instruction Manual
  1. Manuals
  2. Brands
  3. Edwards Manuals
  4. Security Sensors
  5. ELD500 Series
  6. Instruction manual
Edwards ELD500 Series Instruction Manual

Edwards ELD500 Series Instruction Manual

Leak detector
Hide thumbs Also See for ELD500 Series:
Table of Contents

Advertisement

Quick Links

ELD500 LEAK DETECTOR
INSTRUCTION MANUAL
Publication number: D135-10-880
Issue: C
Original Instructions
edwardsvacuum.com

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the ELD500 Series and is the answer not in the manual?

Questions and answers

Related Manuals for Edwards ELD500 Series

Summary of Contents for Edwards ELD500 Series

  • Page 1 ELD500 LEAK DETECTOR INSTRUCTION MANUAL Publication number: D135-10-880 Issue: C Original Instructions edwardsvacuum.com...
  • Page 2 D135-10-880C - Copyright notice Copyright notice © Edwards Limited 2018. All rights reserved. Trademark credits Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 3 Declaration of Conformity Edwards Ltd, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK The following product Leak detection system – ELD500: ELD500 WET, 200 - 240 V AC, 50/60 Hz D13510903 ELD500 WET, 100 V AC, 50/60 Hz D13510904...
  • Page 4 This page has been intentionally left blank.

  • Page 5: Table Of Contents

    D135-10-880C - Contents Contents Safety Key to the symbols ......................1 Symbols of vacuum technology ................... 3 Definition of terms ...................... 3 Description Design and function ......................5 Vacuum diagram ELD500 WET ..................6 Vacuum diagram ELD500 DRY ..................8 Vacuum diagram ELD500 FLEX ..................
  • Page 6 D135-10-880C - Contents Option (accessories) ..................... 27 Digital out (CONTROL) ..................27 Digital in (Control 2) ..................... 28 Recorder/RECORD ....................28 SERIAL/RS232 ....................... 29 Remote control (REMOTE1) ................. 29 Remote control (REMOTE2) ................. 29 CHARGE ........................ 30 Vacuum connections ....................30 Inlet port .......................
  • Page 7 D135-10-880C - Contents Scale linear/logarithmic ..................... 52 Display-range auto/manual ..................53 Time axis ........................54 Contrast ........................54 Background in standby ....................55 Lower display limit ..................... 55 Mode ..........................56 Trigger and alarms ......................56 Trigger level 1 ......................57 Trigger level 2 ......................
  • Page 8 D135-10-880C - Contents Service message exhaust oil filter ................ 74 Parameter save/load ....................75 Load parameter set ....................75 Save parameter set ....................75 Monitoring functions ....................75 Maximum evacuation time ................... 76 Contamination protection ..................77 Pressure limits for vacuum mode................. 77 Pressure limits for sniff mode ................
  • Page 9 D135-10-880C - Contents List of Figures View of the ELD500 ....................5 Vacuum diagram ELD500 ................... 6 Vacuum diagram ELD500 DRY ................... 8 Vacuum diagram ELD500 FLEX .................. 9 Dimensions ELD500 ....................17 Dimensions ELD500 side view ................. 18 Dimensions ELD500 FLEX ..................19 Remote control RC wireless ..................
  • Page 10 D135-10-880C - Contents List of Tables ELD500 WET physical data ..................12 ELD500 WET electrical data ..................13 ELD500 WET other data ................... 13 ELD500 WET environmental conditions ..............13 ELD500 DRY physical data ..................13 ELD500 DRY electrical data ..................14 ELD500 DRY other data ...................

  • Page 11: Safety

    Emphasizes additional application information and other useful information provided within these operating instructions. The Edwards ELD500 leak detector has been designed for safe and efficient operation when used properly and in accordance with these operating instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions.
  • Page 12 The leak detector must only be opened by such persons who have been authorised by  Edwards. The leak detector can be damaged when using the wrong voltage. The voltage must be  in the range 230 V (+/- 5%) or 115 V (+/- 5%) depending on the leak detector version.

  • Page 13: Symbols Of Vacuum Technology

    D135-10-880C - Safety Symbols of vacuum technology Given in the following are some important symbols which are used in this instruction manual. Vacuum pump in general Turbo molecular pump Measuring instrument Valve Definition of terms Term Description The range of the pre-amplifier and the vacuum ranges are selected automatically.
  • Page 14 D135-10-880C - Safety Term Description FINE is a measurement mode with inlet pressure FINE < 0.2 mbar. The minimum detectable leak rate is ≤ 5 x 10 mbar l/s. Precision is a measurement mode for the ELD500 DRY only from an inlet pressure < 0.01 mbar. In this mode PRECISION the ELD500 DRY has the highest sensitivity, the minimum detectable leak rate is...

  • Page 15: Description

    D135-10-880C - Description Description The ELD500 is a leak detector for helium or hydrogen. This instrument may be used to detect the location and the size of leaks on objects under test in two different ways: When the test sample has been evacuated first and is sprayed with helium on the outside. It is required that a vacuum connection is provided between the ELD500 and the test sample (vacuum mode).

  • Page 16: Vacuum Diagram Eld500 Wet

    D135-10-880C - Description Vacuum diagram ELD500 WET The vacuum diagram below shows the major components inside the ELD500 WET. Figure 2 Vacuum diagram ELD500 1. MS: Mass Spectrometer, Helium sensor (180° magnetic field mass spectrometer) 2. Turbo molecular pump (TMP, provides high vacuum conditions in the MS) 3.
  • Page 17 D135-10-880C - Description Besides maintaining the pressure in the mass spectrometer the pump system is used to evacuate the test parts. It is made sure that the pressure in the mass spectrometer is low enough under all circumstances. The valves V1, V2a, V2b, V4a control the gas flows when measuring.

  • Page 18: Vacuum Diagram Eld500 Dry

    D135-10-880C - Description Vacuum diagram ELD500 DRY The ELD500 DRY has a diaphragm pump as fore vacuum pump, making it suitable for applications where oil sealed systems can not be used. Furthermore the ELD500 DRY contains one more valve, the valve 4b. This valve opens step by step to regulate the inlet pressure into the turbo pump.

  • Page 19: Vacuum Diagram Eld500 Flex

    D135-10-880C - Description Vacuum diagram ELD500 FLEX The ELD500 FLEX has no roughing pump integrated as the other models. Therefore it can be used with an external pump only. This pump can be oil sealed or a dry version with a roughing capacity between 2.5 and 65 m /h.

  • Page 20: Vacuum Method

    D135-10-880C - Description Vacuum method For the purpose of leak detection on a test sample (vacuum method), the sample has to be evacuated so that Helium or Hydrogen which is sprayed on to the outside, can enter through any leaks due to the pressure differential for detection by the ELD500. The test sample is evacuated - START button (Figure 16 item 10) - by the backing pump or the...

  • Page 21: Partial Flow Method

    D135-10-880C - Description Partial flow method In the partial flow mode the test sample is additionally evacuated by an auxiliary pump. Using the optional partial flow pump set offers to the user the following advantages (ELD500 and ELD500 FLEX: faster response time ...

  • Page 22: Technical Data

    D135-10-880C - Description Technical data Technical data ELD500 WET Physical data Table 1 ELD500 WET physical data Maximum inlet pressure 15 mbar Minimum detectable Helium leak rates - in vacuum mode <5 x 10 mbar l/s - in sniffer mode <1 x 10 mbar l/s Minimum detectable Hydrogen leak rates...

  • Page 23: Electrical Data

    D135-10-880C - Description Electrical data Table 2 ELD500 WET electrical data 230 V a.c., +/- 5%, 50/60 Hz Power supply 115 V a.c., +/- 5%, 60 Hz 100 V a.c., +/- 5%, 50/60 Hz Power consumption 420 VA Type of protection IP40 Other data Table 3 ELD500 WET other data...

  • Page 24: Electrical Data

    D135-10-880C - Description Table 5 ELD500 DRY physical data (continued) - in sniffer mode < 1 x 10 mbar l/s Maximum Helium leak rate which can be 0.1 mbar l/s displayed Measurement range 11 decades Time constant of the leak rate signal <1 s (blanked off, 63% of the final value) Pumping speed (Helium) at the inlet...

  • Page 25: Ambient Conditions

    D135-10-880C - Description Table 7 ELD500 DRY other data (continued) Maximum audio alarm (dB (A)) Contamination level (to IEC 60664-1) Over-voltage category (to IEC 60664-1) Ambient conditions Table 8 ELD500 DRY ambient conditions For use within buildings Permissible ambient temperature (during +10 °C to +40 °C operation) Permissible storage temperature...

  • Page 26: Electrical Data

    D135-10-880C - Description Table 9 ELD500 FLEX physical data (continued) Ion source 2 filaments; Iridium/Yttrium-oxide Inlet port DN 25 KF Run-up time (after starting) < 2 minutes To get down to the minimum detected leak rate range some conditions must be fulfilled: ELD500 has to run at least 20 minutes ...

  • Page 27: Environmental Conditions

    D135-10-880C - Description Environmental conditions Table 12 ELD500 FLEX environmental conditions For use within buildings Permissible ambient temperature (during +10 °C to +40 °C operation) Permissible storage temperature -10 °C to +60 °C Maximum relative humidity 80% (up to 31°C) linear decreasing to 50% at 40 °C Maximum permissible height above sea level 2000 m...

  • Page 28: Dimensions Eld500 Side View

    D135-10-880C - Description Figure 6 Dimensions ELD500 side view Page 18...

  • Page 29: Ordering Information

    D135-10-880C - Description Figure 7 Dimensions ELD500 FLEX Ordering information ELD500 WET, 220 to 240V, 50/60Hz D13510903 ELD500 DRY, 220 to 240V, 50/60Hz D13520903 ELD500 WET, 100 to 120V, 50/60Hz D13510904 ELD500 DRY, 100 to 120V, 50/60Hz D13520904 ELD500 FLEX D13530000 ELD500 WET, 105V, 60Hz D13510906...

  • Page 30: Accessories

    D135-10-880C - Description Accessories The following parts can be ordered additionally: ELD 500 RC-wired D135 50 100 ELD 500 RC-wireless D135 50 110 ELD 500 RC -wired 8m extension cable 14022 ELD500 RC-wireless additional transmitter D135 50 130 ELD 500 SL D135 50 300 ELD 500 SL - extender interface D135 50 200...

  • Page 31: Remote Control Rc Wired And Rc Wireless

    The ELD500 auto-start cable (D13550631) allows the electrical start and stop of a connected Edwards nXDS pump. This will start and stop the connected pump with the power on and off of the ELD500. This function needs to be enabled in the ELD500 software: Settings >...

  • Page 32: Default Settings

    D135-10-880C - Description Default settings The following parameters are set like shown when in the menu of the ELD500 under Settings > Parameters, Load/Save is chosen. Scale linear Display range: 4 decades Time axis: 32 seconds LCD inverted Background in standby mode: Calibration request: Mass: 4 (helium)
  • Page 33 D135-10-880C - Description Service message exhaust oil filter (ELD500 only) Contamination protection Switch-off limit for contamination 1E-3 mbar l/s protection: (Limits: 1E-6 mbar l/s … 1E+3 mbar l/s) Page 23...
  • Page 34 D135-10-880C - Description This page has been intentionally left blank. Page 24...

  • Page 35: Installation

    D135-10-880C - Installation Installation Placement WARNING: Product can be up to 40kg. Ensure 2 people are present for the unpacking and remove packaging needed to ensure a safe lift. On subsequent moves unsure it is done with 2 people. Unpack the ELD500 immediately after delivery, even if it will be installed later on. Examine the shipping container for any external damage.

  • Page 36: Electrical Connections

    D135-10-880C - Installation Electrical connections Mains power WARNING: Generally the local regulations for electrical connections must be observed. Before connecting the ELD500 to the mains, ensure that the mains voltage rating of the ELD500 matches the locally available mains voltage. The instrument must exclusively be connected to a single phase supply with specified fuses fitted (circuit breaker 10 A maximum according to IEC/EN 60898 with tripping characteristic B).

  • Page 37: Connection For The Controller Signal And Accessories

    D135-10-880C - Installation Connection for the controller signal and accessories Option (accessories) The ELD500 SL or the partial flow adaptor may be connected to the option port (Figure 9 item 9): Contact pins 1 and 3 are fused together with a 0.8 A slow-blow fuse. The amount of power which can be drawn is limited to 10 W.

  • Page 38: Digital In (Control 2)

    D135-10-880C - Installation Digital in (Control 2) These inputs can be used to control the ELD500 with a programmable logic controller (PLC). The contacts are numbered from bottom to top. CAUTION: Maximum input voltage 35 V. Table 15 Digital in (Control 2) connector pin-outs Assignment PLC in free selectable PLC in free selectable...

  • Page 39: Serial/Rs232

    D135-10-880C - Installation SERIAL/RS232 This RS232 interface, Figure 9 item 5, is wired as data communication equipment (DCE) and permits the connection of a personal computer (PC) for monitoring and data logging. The connection is made through a 9 pin sub-D socket. For more information refer to chapter Interfaces and the Interface Description.

  • Page 40: Charge

    D135-10-880C - Installation Table 19 Remote control (REMOTE2) connector pin-outs Assignment Free Connected to pins 6 and 7 Connected to pins 4 and 7 Connected to pins 4 and 6 Free 7.5 V CHARGE The USB interface is for charging remote controls only. The USB port does not allow data exchange.

  • Page 41: Gas Ballast Connection

    D135-10-880C - Installation Gas ballast connection For the mode gas ballast it is recommended to use helium-free gases at atmospheric pressure. Ambient air can be contaminated with helium due to spraying or charging. In this case a gas supply line (that is, nitrogen, fresh air, and so forth) should be connected to the hose coupling, Figure 9 item 3.
  • Page 42 D135-10-880C - Installation This page has been intentionally left blank. Page 32...

  • Page 43: Operation

    D135-10-880C - Operation Operation Media compatibility/purge gas The ELD500 is a leak detector for helium and hydrogen. Only air and clean gases must be used with the ELD500. The leak detector is not suitable for pumping liquids or gases containing dust ...

  • Page 44: The Display In Run-Up Mode

    D135-10-880C - Operation The Display in run-up mode In run-up mode the display shows: Speed of the turbomolecular pump  Fore-vacuum pressure  State of emission  Active filament  A bar graph which shows the run-up progress  Change the contrast if the display is to bright or dark (see Control panel).

  • Page 45: Call For Calibration

    D135-10-880C - Operation Figure 10 Display: measurement mode with bar graph Call for calibration In all modes the Softkey no.5 is used to get to the calibration routine. Refer to Calibration further information regarding calibration. Speaker volume On the left hand side two loud speaker symbols are shown, combined with the signs + and - (Figures 10 and 11).

  • Page 46: Measurement Mode With Bar Graph

    D135-10-880C - Operation Measurement mode with bar graph The display shows the leak rate in big digital figures, see Figure 10. The unit of the leak rate is shown, too. Underneath the leak rate the inlet pressure is displayed in smaller digits. The units of leak rate and pressure can be defined in the menu (see Units).

  • Page 47: Start-Up And Measure

    D135-10-880C - Operation Start-up and measure 1. Unpack the ELD500 and inspect it for any external damage (refer to Placement). 2. Connect the instrument to the mains power (refer to Electrical connections). For the ELD500 FLEX connect the fore vacuum pump and switch it on. 3.

  • Page 48: Measure With A Test Object

    D135-10-880C - Operation 12.Press the STOP button Figure 12 item 12 to stop the measurement. The ELD500 goes into standby mode. 13.Press the STOP button Figure 12 item 12 again until the message STANDBY/VENTED appears on the display. The inlet is vented now. 14.Remove the helium test leak from the inlet port and put a blind flange onto the inlet port again.

  • Page 49: Control Panel

    D135-10-880C - Operation Control panel The Control panel Figure 12 contains a liquid crystal display (LC Display), the START, STOP, ZERO and MENU buttons and eight Softkeys for the different menus and inputs selections. Figure 12 Control panel Softkey no. 1 Softkey no.

  • Page 50: Zero Activation

    D135-10-880C - Operation ZERO button Pushing the ZERO button Figure 12 item 11 enables the zero mode (see Filter and background). When pressing ZERO the currently measured leak rate is taken as a background signal and is subtracted from all further measurements.

  • Page 51: Softkeys

    D135-10-880C - Operation To see the measurement signal (including underground), press the ZERO button again. The saved value will be reset to zero. The underground signal will not be suppressed anymore (Figure 14). MENU button When pressing the MENU button (Figure 12 item 13) the selecting menu is shown at the display.

  • Page 52: Numerical Entry Of The Trigger Level, Sample Of The Digit

    D135-10-880C - Operation Example To change the trigger level 1.0 x 10 mbar l/s to 3 x 10 mbar l/s, press 2/3 (Softkey no. 3, Figure 16). Consider that the first digit is displayed inverted. If not, change the digit with (Softkey no.

  • Page 53: Interfaces

    D135-10-880C - Operation Interfaces Under Main menu > Settings > Interfaces the parameters for the interface can be set. Softkey 2: Location of control The location of control for the leak detector can be defined Softkey 3: Define recorder output Customer defined selection for the recorder output Softkey 4: RS232...

  • Page 54: Define Recorder Output

    D135-10-880C - Operation Softkey 5: Local & PLC The ELD500 is controlled via the Digital In connector or/and the START, STOP and ZERO buttons at the control panel and remote control. Softkey 6: Local & RS232 The ELD500 is controlled via the Digital In connector or/and the START, STOP and ZERO buttons at the control panel and remote control.

  • Page 55: Recorder Output: P1 And P2 Legacy

    D135-10-880C - Operation LR exponent The exponent is recorded as step function: U = 1 to 10 V with steps of 0.5V per decade, starting with 1 V = 1 x 10 mbar l/s (Figure 19). LR linear There will be two decades, the lower decade with voltages from 0.1 to 1.0V, the upper from 1.0 to 10.0 V output.

  • Page 56: Rs232

    D135-10-880C - Operation RS232 Main Menu > Settings > Interfaces > RS232 Softkey 2: Baud rate and end sign Settings for the baud rate selectable between 1200 and 19200, as well as end sign between CR+LF, CR or LF. Softkey 3: Data, Parity, Stop bits The settings for Data (7 or 8), Parity (Even, Odd, None) and Stop bits (1 or 2) can be selected...

  • Page 57: Define Plc Inputs

    D135-10-880C - Operation The following digital out signals are selectable. Trigger 1; Trigger 2 and 3 analog Trigger 1 Is open in case Trigger Level 1 is exceeded or the machine is not in condition of measuring. Zero active: Is closed in case Zero function is running. Ready: Is closed in case machine is in measurement mode (Emission on, no error).

  • Page 58: Plc Inputs

    D135-10-880C - Operation Table 22 PLC inputs Assignment PLC in free selectable PLC in free selectable PLC in free selectable PLC GND Description of operation mode of the Digital In. The contacts are numbered from bottom to top. The PLC inputs are working only if the correct location of control has been set. The actual pin setting can be seen under Info / View internal data.

  • Page 59: Scaling Recorder Output

    D135-10-880C - Operation Change from high to low: approve that external test leak is closed and leak rate signal is stable. Signals at these inputs are only accepted if the location of control is set to PLC, All or Local and PLC.

  • Page 60: Main Menu

    D135-10-880C - Operation Main menu The main menu, Figure 23, shows 7 sub-menus. In these sub-menus groups of technical features are put together logically. From here the next levels of the menu tree can be reached. All following chapters show the path to get to the described menu line right underneath the headline.

  • Page 61: Overview Menu Structure

    D135-10-880C - Operation Figure 23 Overview menu structure 1. Level 2. Level 3. Level Scale linear / logarithmic Display range Time axis View Contrast Background in standby Lower display limit Mode Sniff/Vacuum Trigger Level 1 Trigger Level 2 Trigger Level 3 Trigger &...

  • Page 62: View

    D135-10-880C - Operation View Main menu > View In this menu, Figure 24, all features that influence the data display are put together. Figure 24 Display: view menu Key no. Name Description Back Return to the main menu. Scale linear/logarithmic Settings for bar graph and trend mode.

  • Page 63: Display-Range Auto/Manual

    D135-10-880C - Operation Softkey 2: Linear Pressing this key switches the display to a linear scale, starting at zero.  (Number of decades) Softkey 3: Pressing this key reduces the number of displayed decades. The minimum value is 2 decades. Only available if log (softkey 6) was chosen. Softkey 6: Logarithmic The scaling will be displayed logarithmically.

  • Page 64: Time Axis

    D135-10-880C - Operation Time axis Main menu > View > Time axis The length of the time axis in trend mode can be changed in given steps between 16 and 960 seconds.  Softkey 3: Decrease the length of the time axis. The minimum value is 16 seconds. Softkey 5: Help text ...

  • Page 65: Background In Standby

    D135-10-880C - Operation Background in standby Main menu > View > Background in standby The internal background leak rate can be displayed in standby mode or not. The default setting is OFF. Softkey 3: The background leak rate will not be shown. Softkey 5: Help text.

  • Page 66: Mode

    D135-10-880C - Operation Mode Main menu > Mode The mode menu Figure 25 enables the sub-menu to select the different working modes. Figure 25 Display: mode menu Key No. Name Description Cancel Return to the main menu without any changes of the present settings.

  • Page 67: Trigger Level 1

    D135-10-880C - Operation Key No. Name Description Back Return to the main menu. Trigger level 1 Definition of Trigger level 1. Chapter 3.8.1 Trigger level 2 Definition of Trigger level 2. Chapter 3.8.2 Trigger level 3 Definition of Trigger level 2. Chapter 3.8.3 Units Selection of leak rate and pressure units.

  • Page 68: Units

    D135-10-880C - Operation Units Main menu > Trigger and Alarms > Units The preferred leak rate unit can be selected. There is the choice of 4 (mbar, Pa, Torr, atm) pressure units and 5 leak rate units (mbar l/s, Pa m /s, Torr l/s, atm cc/s, s ft /yr).

  • Page 69: Alarm Delay

    D135-10-880C - Operation  Softkey 7: Increase the regular volume. The maximum value is 15. Alarm delay Main menu > Trigger and Alarms > Alarm delay In some applications (for instance during pump down in a „chamber test system“) it might be necessary to block an alarm for some time after pressing START.

  • Page 70: Pinpoint

    D135-10-880C - Operation Pinpoint The tone of the acoustical signal changes its frequency only in a leak rate-window, Figure which ranges from one decade below the Trigger level 1 up to one decade above the Trigger level 1. Below the window the tone is constantly low, above the window it is constantly high. Example: The Trigger level 1 is 4 x 10 mbar l/s.

  • Page 71: Calibration

    D135-10-880C - Operation Calibration Main menu > Calibration In the menu Calibration, Figure 29, the selection between internal and external calibration can be chosen. Refer to Calibration for a detailed description of the calibration. Figure 29 Display: calibration menu Settings Main menu >...

  • Page 72: Vacuum Settings

    D135-10-880C - Operation Key No. Name Description Miscellaneous Settings like date or time (see Miscellaneous (language, calibration request, service interval...)). Parameter save / Store and load sets of parameters (see Parameter save/ load load). Monitoring Choose functions of protection of the ELD500 in this mode functions (see Monitoring...

  • Page 73: Eld500 Flex

    D135-10-880C - Operation Softkey 5: Purge in measurement The purging during measurement mode can be switched on Softkey 6: Sniffer factor Setting for the sniffer factor Softkey 7: Machine factor Setting for the machine factor Softkey 8: Leak rate internal test leak Setting for the internal test leak ELD500 FLEX The menu for the ELD500 FLEX version allows the following vacuum settings which varies to...

  • Page 74: Vent Delay

    D135-10-880C - Operation Softkey 3: The function automatic purge is off. Softkey 6: The function automatic purge is on. When changing from measure to standby the vacuum fore-pump will be purged automatically for 20 seconds. Vent delay Main menu > Settings > Vacuum settings > Vent delay Through this menu item it is possible to define the delay time until the inlet port is vented when operating the STOP button.

  • Page 75: Vacuum Ranges Eld500 Dry

    D135-10-880C - Operation Softkey No. 3: FINE only In this mode the ELD500 remains after falling below 0,2 mbar at the inlet flange. Valve V1 will be closed. When the pressure at the inlet flange is increasing > 0.2 mbar the ELD500 switches immediately into evacuation mode.

  • Page 76: Partial Flow Setup/Pump Setup

    D135-10-880C - Operation Softkey No. 6: Precision In this mode the ELD500 DRY achieves the maximum sensitivity. Softkey No. 7: Normal (default settings) This is the default setting. The activity runs through the vacuum ranges from GROSS to FINE. Partial flow setup/pump setup Main menu >...

  • Page 77: Partial Flow Setup Eld500 Flex

    D135-10-880C - Operation Softkey 5: Help text.  Softkey 6: Increase the pumping speed of the partial flow pump. The entry of the nominal pumping speed of the partial flow pump can be increased. The maximum pumping speed is 80 m Default setting is 25 m ...

  • Page 78: Partial Flow Setup For The Eld500 Flex

    D135-10-880C - Operation Softkey 7: Fore-pump type The ELD500 FLEX with partial flow system can be operated with a dry (for example, Scroll pump) fore-pump or a wet pump (oil sealed). This key is for choosing a wet (oil sealed) fore vacuum pump. Partial flow setup for the ELD500 FLEX ...

  • Page 79: Sniffer Factor

    D135-10-880C - Operation Sniffer factor Main menu > Settings > Vacuum settings > Sniffer factor The sniffer factor takes into account, after an internal calibration, an external partial flow ratio, for example the SL extender interface or an auxiliary pump with sniffer line connected via T-piece to the leak detector.

  • Page 80: Leak Rate Internal Test Leak

    D135-10-880C - Operation Leak rate internal test leak Main menu > Settings > Vacuum settings > Leak rate internal test leak The value of the internal test leak can be set. See Numerical entries for the description of the entry. Normally there is no reason to edit the leak rate of the internal test leak besides after a change or a recertification of the internal test leak.

  • Page 81: Calculate Inlet Area Background

    D135-10-880C - Operation The ELD500 DRY allows the following settings Softkey 3: Background suppression Setting of the internal condition for the background. Softkey 7: Leak rate filter The type of leak rate filter can be chosen. Calculate inlet area background Main menu >...

  • Page 82: Leak Rate Filter

    D135-10-880C - Operation Leak rate filter Main menu > Settings > Filter and Background > Leak rate filter Softkey 3: Fixed A leak rate filter with a fixed time constant is used Softkey 6: Auto Auto makes sure, that the signals are averaged in optimized time intervals, based on the leak rate intensity.

  • Page 83: Time And Date

    D135-10-880C - Operation Softkey 5 Service interval fore-pump Setting service time interval fore-pump Softkey 7: Service interval exhaust oil filter Setting service time interval exhaust oil filter Softkey 8: Service message exhaust oil filter Setting service message exhaust oil filter Time and date Main menu >...

  • Page 84: Service Interval Fore-Pump

    Setting for the service interval of the fore-pump. This setting depends on the use of the ELD500 WET but latest after 4000 running hours or one year the oil in the pump should be controlled. Contact Edwards for more details on the wet pump (see Exchanging the oil).
  • Page 85 D135-10-880C - Operation Parameter save/load Main menu > Settings > Parameter save load Enables to save and load individual settings or reload the default settings. Softkey 2 to 4: The names of the current values can be saved under a free selectable name. The saving of 3 different sets is possible.
  • Page 86 D135-10-880C - Operation Softkey No. 6: Pressure limits for vacuum mode Setting for the pressure limits between evacuation, GROSS and FINE mode. Softkey No. 7: Pressure limits for sniff mode Definition of the upper and lower limit of the sniffer pressure Maximum evacuation time Main menu >...
  • Page 87 D135-10-880C - Operation Contamination protection Main menu > Settings > Surveillance > Contamination Protection If enabled, this mode will cause the ELD500 to close all inlet valves as soon as the measured leak rate exceeds the programmed limit. Once the START key is pressed, the value must drop below the limit once as the function will otherwise be triggered when the alarm delay time has elapsed.
  • Page 88 D135-10-880C - Operation Softkey No. 5: Help text  Softkey No. 6: Increase change over threshold EVAC-GROSS Selectable between 3 - 15 mbar  Softkey No. 7: Increase change over threshold GROSS-FINE Selectable between 0.05 - 0.2 mbar, respectively 0.05 - 0.1 mbar for ELD500 DRY and ELD500 FLEX Pressure limits for sniff mode Main menu >...

  • Page 89: Display: Information Menu

    D135-10-880C - Operation Information Main menu > Information The Information Menu Figure 31 enables sub-menus to select different kinds of information belonging to the ELD500. Figure 31 Display: information menu Softkey 2: View settings The current settings will be displayed on 5 pages, for example trigger levels, test leak mass, date and time.

  • Page 90: Display: Access Control Menu

    D135-10-880C - Operation Service Main menu > Information > Service With the main menu special functions can be accomplished (for example, manual switching of the valves). The access to the service menu is protected by a PIN. This PIN is not communicated with the delivery of the leak detector but after an adequate service training.
  • Page 91 D135-10-880C - Operation Softkey 6: Zero at FINE When reaching the FINE mode and leak rate falls below trigger level 3 the ZERO function is started automatically. Softkey 7: Enable Softkey ZERO is selectable. Default setting. Access to CAL function Main menu >...

  • Page 92: Display: External Calibration, Step 1

    D135-10-880C - Operation During the calibration procedure the mass spectrometer is tuned to the maximum helium or hydrogen signal and this signal is referred to the known leak rate of the internal or external test leak. Although the ELD500 is a very stable instrument a calibration is recommended every day with heavy use, or before using the ELD500 from time to time, to make sure that ambient temperature changes or dirt or other impacts don’t adulterate the measurements.

  • Page 93: Display: External Calibration, Step 2

    D135-10-880C - Operation Check the leak rate printed on the test leak and compare it with the leak rate at the display. If the leak rates are not identical press Edit leak rate (Softkey no. 4) and correct the value. If the leak rates are okay press START (Softkey no.

  • Page 94: Display: External Calibration, Step 5

    D135-10-880C - Operation Figure 37 Display: external calibration, Step 5 The bar graph display shows a signal which must not decrease any more. There might be a small fluctuation which is okay. If so press OK (Softkey no. 8). Figure 38 Display: external calibration, Step 6 When the signal is stable confirm with o.k.
  • Page 95 D135-10-880C - Operation When calibrating internal it is also monitored if the newly calculated factor of calibration is higher than 10 or lower than 0.1. In this case a warning (see W81 resp. W82 in Chapter 5.2.) is displayed and the calibration will be interrupted. Switching off/shutting down The ELD500 can be switched off any time by using the mains switch.
  • Page 96 D135-10-880C - Operation This page has been intentionally left blank. Page 86...
  • Page 97 D135-10-880C - Maintenance Maintenance Safety information WARNING: During all maintenance and connection work, make sure that the mains cable have been reliable disconnected and do not carry a mains voltage.The leak detector must only be used in with the hoods closed. The electrical connections must only be provided by a trained electrician as specified, for example, by the regulations EN 50110-1.

  • Page 98: Back View Of The Eld500

    D135-10-880C - Maintenance Maintenance work Opening of the ELD500 Figure 40 Back view of the ELD500 Openings for removal of the cover for the mechanical section Four screws at the chassis for loosening the cover for the electronics section. Mechanical cover Electronic cover To open the ELD500 follow the next steps: 1.
  • Page 99 D135-10-880C - Maintenance 6. In doing so, the cover should be moved somewhat to the front by the downward motion of the screwdrivers. The cover may be lifted up by the upwards motion of the screw drivers so that the cover is disengaged completely. 7.
  • Page 100 When changing the oil use the same type of oil which was previously in the pump. If an oil type change is desired, consult Edwards. The oil should be changed after the first 100 operating hours and then at least every 2000 - 3000 operating hours or after one year.
  • Page 101 D135-10-880C - Maintenance Remove the oil fill plug and fill in with fresh oil. Screw the oil fill plug back in. The tightening torque for the bolts has been specified at 10 Nm. Cleaning The housing of the ELD500 is made of painted plastic parts. Thus for the purpose of cleaning, only such agents should be used which are generally also used for other painted or plastic surfaces (mild household cleaning agents, for example).

  • Page 102: Assembly Fuses

    D135-10-880C - Maintenance No 1 F1 on MSV Fuse 24 V system voltage of the mass spectrometer supply. rating: T 2A Loosen control panel (two Phillips screws). Loosen the panel which holds the MSV board in place (two Phillips screws). Pull the MSV board (the board at the back) up to the top.
  • Page 103 5. Clean or replace the filter (xxxxxxxxxx) 6. Screw back the plexiglas cabinet hand tight. 7. Check the oil level of the wet pump and fill it up when necessary (contact Edwards for more details). 8. Finally re-install the cover for the mechanical section.

  • Page 104: Spare Parts For Eld

    D135-10-880C - Maintenance Maintenance kit ordering numbers Table 23 Spare parts for ELD EDL500 wet maintenance kit D13510710 EDL500 dry maintenance kit D13520710 EDL500 flex maintenance kit D13530710 Page 94...
  • Page 105 D135-10-880C - Troubleshooting Troubleshooting The ELD500 is equipped with comprehensive self-diagnostic facilities. If an error or warning condition is detected it is indicated via the LC display to the operator. An audio signal is generated when an error or warning occurs. The frequency changes every 400 ms from 500 to 1200 Hz and vice versa so that the signal stands out well from ambient noises normally encountered.

  • Page 106: Fault Finding

    Service the fore pump EEPROM defective EEPROM write time out MC 68 defective EEPROM parameter queue Software problem, contact Edwards service. overflow The 24 V voltage for the external output 1 is too high 24 V for external output 1 is too high.
  • Page 107 D135-10-880C - Troubleshooting Table 24 Fault finding (continued) Displayed message Description and possible solutions Signal MVPZN on the MSV board is active. 24 V signal voltage is too low, U < 18.3 V. Fuse F1 on the MSV board has blown. 24 V voltage at MSV board is Reference voltage UREF on the MSV board XT7/1 too low!
  • Page 108 Fuse F4 on the wiring backplane has blown. Drive electronics Turbo Drive S is defective. The frequency converter Turbo Drive S indicates Unknown TMP error an unknown error code. Inform Edwards service TMP frequency is too low! TMP frequency is too low! Frequency converter is faulty.
  • Page 109 D135-10-880C - Troubleshooting Table 24 Fault finding (continued) Displayed message Description and possible solutions Ambient temperature too high. Temperature at electronic unit Ventilation failure. is too high (> 59 °C) Air filter dirty and have to be changed. Ambient temperature is too high. Temperature at electronic unit Internal ventilation has failed.
  • Page 110 Short circuit in the pump’s motor or the connecting cable TMP error: Short circuit in Check to see if the connecting cable is undamaged, TMP-motor or connecting exchange if required. cable Inform Edwards service in case of short circuit in TMP motor Page 100...
  • Page 111 Fore vacuum or high-vacuum pressure to high: TMP error: Run-up time out Reduce the inlet pressure of the ELD500 Bearing defective: Inform Edwards service for repair Max. motor temperature has been exceeded. Fore vacuum or high-vacuum pressure to high:...
  • Page 112 D135-10-880C - Troubleshooting Table 24 Fault finding (continued) Displayed message Description and possible solutions Maximum evacuation time "Test sample has got a GROSS leak." and "Wrong until measurement exceeded. setting (too short) of maximum time of Within the pre set evacuation evacuation."...
  • Page 113 D135-10-880C - Troubleshooting Table 24 Fault finding (continued) Displayed message Description and possible solutions EEPROM on back plane is empty and was initialized with default valves. Enter all parameters All EEPROM parameter lost. again. Check the settings. The EEPROM might be faulty when warning comes up again after power up.
  • Page 114 D135-10-880C - Troubleshooting This page has been intentionally left blank. Page 104...
  • Page 115 D135-10-880C - Waste disposal Waste disposal The equipment may have been contaminated by the process or by environmental influences. In this case the equipment must be decontaminated in accordance with the relevant regulations. We offer this service at fixed prices. Further details are available on request.
  • Page 116 D135-10-880C - Waste disposal This page has been intentionally left blank. Page 106...
  • Page 117 Complete the Declaration (HS2) and send it to Edwards before you dispatch the equipment. It is important to note that this declaration is for Edwards internal use only, and has no relationship to local, national or international transportation safety or environmental requirements.
  • Page 118 Read the Return of Edwards Equipment – Procedure (HS1) before you complete this Declaration • Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions • Send this form to Edwards before you return your equipment as per the procedure in HS1...
  • Page 119 This page has been intentionally left blank.
  • Page 120 edwardsvacuum.com...

This manual is also suitable for:

Eld500 wetEld500 dryEld500 flexD13510903D13520903D13510904 ... Show all

Table of Contents