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Sumitomo Marathon CP-20 Operating Manual
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Sumitomo Marathon CP-20 Operating Manual

Sumitomo Marathon CP-20 Operating Manual

Cryopump
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Marathon
CP-20 Cryopump
Operating Manual
Sumitomo (SHI) Cryogenics of America, Inc.
1833 Vultee Street
Allentown, PA 18103-4783
U.S.A.
Revision A: February 2016
267625A

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  • Page 1 ® Marathon CP-20 Cryopump Operating Manual Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 U.S.A. Revision A: February 2016 267625A...
  • Page 3 TABLE OF CONTENTS Page SAFETY.......................... 1 SERVICE ..........................INTRODUCTION ......................5 Cryopumps ......................5 PRINCIPLES OF OPERATION ..................7 DESCRIPTION ....................... 9 Cryopump Components ..................10 SPECIFICATIONS ......................11 Cold Head ......................11 Pumping Speeds ....................11 Throughput ......................11 Capacity ......................
  • Page 4 TABLE OF CONTENTS (continued) Page ACCESSORIES ......................27 Installation ......................27 Pumpout/Nitrogen Purge Adapter ..............28 Silicon Diode or Hydrogen Vapor Bulb Temperature Sensor ......28 OPERATION ........................ 29 Prestart Check ....................29 Startup....................... 30 Regeneration ..................... 32 Regeneration: Warm-Up Phase ..............32 Regeneration: Purge Phase .................
  • Page 5 TABLE OF CONTENTS (continued) Page TROUBLESHOOTING ....................55 Troubleshooting Guide ..................55 PARTS ......................... 63 Ordering ......................63 Parts Identification and Numbers ............... 63 ILLUSTRATIONS LIST Figure 1 Typical Cryopump System ................6 Figure 2 Equilibrium Vapor Pressure vs. Temperature ..........7 Figure 3 Parts Identification and Stages of Freezing during Cryopumping ....
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  • Page 7 SAFETY GENERAL SCAI equipment is designed to operate safely when the installation, operation and servicing are performed in accordance with the instructions in this technical manual. Consult the nearest SCAI Service Center with any questions you may have concerning the operation or maintenance of this equipment.
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  • Page 9 SERVICE HEADQUARTERS Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 Sales and Parts TEL: (800) 525-3072 (610) 791-6700 FAX: (610) 791-0440 Service TEL: (800) 525-3071 TEL: (610) 791-6750 SERVICE CENTERS Eastern Sumitomo (SHI) Cryogenics of America, Inc.
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  • Page 11 INTRODUCTION Cryopumps SCAI Cryopumps produce clean, fast vacuum for high-vacuum applications. The cryopump does not contribute any contamination to the vacuum chamber because it functions by capturing gases, and no moving parts or lubricants are exposed to the vacuum. Figure 1 shows the major components of typical cryopump systems: helium compressor •...
  • Page 12 Introduction Helium Compressor ® Marathon CP-20 Cryopump Cold Head Gas Lines Cable 1 Nitrogen Purge To Rough Pump Vent Relief Valve to a Safe Location To Temperature Monitor Figure 1 Typical Cryopump System...
  • Page 13 PRINCIPLES OF OPERATION A cryopump creates a vacuum by capturing gases from the vacuum chamber. The pump does this by solidifying gases onto cold surfaces. See Figure 3. Typical cryopumps have a cryogenic refrigerator (cold head) that produces refrigeration at two temperature levels and cools two, extended-surface cryopanels onto which the gases can freeze.
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  • Page 15 DESCRIPTION Figure 3 Parts Identification and Stages of Freezing During Cryopumping...
  • Page 16 Description Cryopump Components (See Figure 3) Cold Head: Provides the refrigeration necessary to cool the cryopanels. Cold Head Cylinder: This part of the cold head includes the heat station flanges onto which the cryopanels are mounted. First-Stage Cryopanel: Shields the second-stage cryopanel from radiant heat: Louver: A series of concentric rings that captures water vapor and shields the second-stage panel from radiant heat.
  • Page 17 Specifications Cold Head SCAI model CH-210. Pumping Speeds 9,700 liters/second Water 29,100 liters/second Argon 8,300 liters/second Nitrogen 9,900 liters/second Hydrogen 14,000 liters/second Throughput Argon, 11.3 torr-liters/sec or 900 sccm Capacity Argon, 6,000 std. liters Hydrogen, 33 std. liters Crossover Rating 400 torr-liters (nitrogen) Cooldown Time 190 minutes to 20 K...
  • Page 18 Specifications Standard Single Temperature Sensor Connector The receptacle is a 4 pin, bayonet connector, shell size 10. See Figure 14 for terminal polarities. Accuracy: ±2.0 K for 4 K to 25 K, ±5.0 K for 25 K to 450 K Optional Dual Temperature Sensor Connector (for MCC) The receptacle is a 10 pin, bayonet connector, shell size 12.
  • Page 19 (7.5 psia to 16.0 psia) Magnetic Field Limits < 150 gauss Maintenance Interval Cold head valve and displacer seals: 13,000 operating hours (18 months) Supplier Name and Address Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 U.S.A. (610) 791-6700.
  • Page 20 Regulatory Compliance Declaration of Conformity ® Marathon CP-20 Cryopump Manufacturer’s Name Sumitomo (SHI) Cryogenics of America, Inc. Manufacturer’s Address 1833 Vultee Street Allentown, PA 18103 U.S.A. Authorized Representative’s Name Sumitomo (SHI) Cryogenics of Europe, Ltd. Authorized Representative’s Address 3 Hamilton Close...
  • Page 21 INSTALLATION Introduction ® Install the Compressor, the Marathon CP-20 Cryopump and the Gas Lines according to the following procedures. To prevent contaminating the components or the system, it is important to follow the procedures in this manual step by step. NOTE Do not begin to install the components if 99.995% pure helium gas is not available.
  • Page 22 Installation 2. Inspect the following: 2.1 Check the Tip-N-Tell Sensor mounted on the compressor. (Some compressors also have a Tip-N-Tell mounted on the outside of the shipping container.) If the Tip-N- Tell Sensor shows no mishandling and there is no apparent physical damage, proceed to the sections Compressor Position and Compressor Checkout.
  • Page 23 Installation Inspect the cryopump. If it is damaged, contact the nearest SCAI Service Center and notify the delivering carrier. All components in the gas system were cleaned and charged with helium gas at the factory. Allow the compressor to reach room temperature. Read the pressure gauge(s) on the compressor before connecting it into the system to determine if leaks have occurred which may require leak checking, charging or gas cleanup.
  • Page 24 Installation Adjustable Non-Slip Nylon Chain Sling Cylinder Lift Sling Nylon Lift Sling Figure 6 Lifting the Cryopump with Commercial Lift Equipment Compressor Position Place the compressor in a location that is protected from the elements and where the ambient temperature will always be within the range specified in the Cooling Requirements section of the Compressor manual.
  • Page 25 Installation 2. Be sure the power switch on the compressor is off. Plug the power cord into customer's electrical receptacle. Switch on the power to the compressor. Check that the circuit breaker is closed. 3. Press the power switch on the compressor. Power switch indicator will light and the compressor will start.
  • Page 26 Installation Temperature Sensor Cable Assembly (Optional Accessory) SCAI can furnish a cable assembly (optional) to connect the silicon diode temperature sensor to a controller/indicator. See the Parts section in this manual. If you furnish a cable and the mating plug, P/N 34760, see Figure 18 for the wiring schematic. Proceed as follows: Prepare the sensor cable as illustrated in Figure 7.
  • Page 27 Installation The cryopump's mounting flange bolts to a gate valve that isolates the cryopump's chamber from the main vacuum chamber. This type of mounting is the most common, because it is versatile. A cryopump mounted to a valved chamber can be cooled down, kept cold or regenerated independently of the main chamber.
  • Page 28 Installation PREVENT EQUIPMENT DAMAGE. Do not crimp the gas lines. Subsequent attempts to bend the gas lines can damage them. NOTE SCAI recommends having 99.995% pure helium gas available at the installation site in case gas needs to be added to the system. See Refrigerant Quality in Specifications in this manual.
  • Page 29 Installation Figure 10 Connect a Gas Line to the Compressor or Cryopump 6. Connect the return gas line to the return coupling on the compressor or to the return gas manifold. 7. Remove the dust caps from the helium supply and return couplings on the cryopump. Screw the dust plugs from the gas lines into the dust caps from the cryopump and store them.
  • Page 30 Installation 3. Connect a temperature-sensor cable from the temperature controller/indicator to the temperature-sensor connector. EXPLOSION HAZARD. AVOID INJURY. A relief valve or a rupture disc must always be installed on a cryopump. Do not remove, modify, block or restrict any pressure relief devices. Material failure and resulting pressure release can cause serious injury.
  • Page 31 Installation Figure 11a Relief Valve Vent Connection Detail Vent Adapter Stop NW40 Flange 2.13" (2.125") Figure 11b Vent Adapter (Optional) P/N 260936B Remote On/Off Cable (Optional Accessory) A remote on/off cable for the compressor can be furnished as an accessory. To install the cable: Disconnect the power to the compressor.
  • Page 32 Installation Switch on the power to the compressor. The system can now be operated from the compressor or from the remote switch. When using the remote switch, the power switch on the compressor must be in the stop position. To verify that the cable installation is correct, close the remote switch. Run the system for one minute, then stop.
  • Page 33 ACCESSORIES ® The Marathon CP-20 Cryopump has been designed to allow its utility ports to be reconfigured in the field by the installation of various accessory options. All CP-20 pumps have three 1.33" O.D. metal seal utility ports in the base of the vacuum enclosure as shown in Figure 3. Each of these ports can be adapted to a specific function by attaching the appropriate accessory.
  • Page 34 Accessories Pumpout/Nitrogen Purge Adapter Tool required: 9/64" Hex key wrench Installation Procedure: Slip a new copper gasket over the tube extending from the adapter. Insert the tube into the appropriate utility port and gently work the tube through a hole in the first-stage cryopanel.
  • Page 35 OPERATION SPECIAL PROCEDURES for CRYOPUMPING OXYGEN and OZONE Be aware of the presence and concentration of oxygen and/or ozone in the process gases being cryopumped. If oxygen concentrations exceed 20% (richer than in normal air), the cryopump system must be constructed, operated and maintained according to oxygen manufacturer’s standards.
  • Page 36 Operation The cryopump should be mounted to a gate valve attached to the vacuum chamber so that the cryopump can be isolated and left running while the pressure in the main vacuum chamber cycles from atmospheric to crossover pressure. See Figure 12. 1.
  • Page 37 Operation EXPLOSION HAZARD. AVOID INJURY. If flammable, corrosive or toxic gases are cryopumped, a vent pipe must be connected to the relief valve or the rupture disc outlet. Vent to a safe location. EXPLOSION HAZARD. AVOID INJURY. Provide a fail - safe, automatic shutdown of all ignition sources in the vacuum chamber when the cryopump shuts down.
  • Page 38 Operation Regeneration Regeneration removes the frozen, trapped gases from the cryopump and returns it to its full, rated capacity. The process has four phases: warm-up, purge, evacuate and cooldown. Because the time between regenerations depends upon the cryopump application, the user must determine the most suitable interval between regeneration cycles.
  • Page 39 Operation Figure 12 Warm Up and Purge the Cryopump 4. Allow the second-stage temperature to rise to 305 K/290 K for effective desorption of gases from the charcoal. Regeneration: Purge Phase For safety and minimum regeneration cycle time, continue purging the cryopump with dry nitrogen gas.
  • Page 40 Operation Purging with nitrogen and a blanket heater: 1. Follow instructions for "Purging with nitrogen only.” Additionally, install an insulated blanket heater in direct contact with the external surface of the cryopump enclosure and operate it with a thermostat. See the Accessories and Parts sections in this manual for blanket heater. 2.
  • Page 41 Operation 2. Monitor the pressure inside the cryopump chamber. If it rises above 0.1 torr, (100 microns), turn off the cryopump and go to Evacuation Phase, Step 2. 3. Rough pump the vacuum chamber down to crossover pressure, or lower, while the cryopump cools down.
  • Page 42 Operation Vacuum Baking PREVENT EQUIPMENT DAMAGE. Do not heat cryopanels and cylinder assemblies above 80° C (176° F). If pressures below 10 Torr are required, it is recommended to vacuum bake the vacuum chamber walls and the cryopump vacuum enclosure to drive off water vapor that has adsorbed onto them.
  • Page 43 Operation System Shutdown 1. Close the gate valve to isolate the cryopump from the main vacuum chamber. 2. Stop the compressor. The cryopump will stop. 3. Expect gas release through the cryopump's pressure relief valve as described in the section Regeneration: Warm-up Phase.
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  • Page 45 MAINTENANCE Cryopump Handling and Shipping We at Sumitomo (SHI) Cryogenics of America, Inc. appreciate your buying and using our cryopumps. We are always available to answer questions regarding use or service of the equipment. Also, our Service Centers are prepared to maintain, repair or exchange your cryopumps when service is required, provided no hazardous materials are present in your cryopumps.
  • Page 46 Maintenance AVOID INJURY. Establish safe handling procedures for cryopanels and louvers that may hold toxic or radioactive gases. Contamination by some gases can result in serious injury or death. See the Cryopump Handling and Shipping procedure in the Maintenance section of this technical manual. Procedures in this manual apply only to uncontaminated cryopumps.
  • Page 47 Maintenance PRESERVE YOUR WARRANTY. Modification to equipment without the consent of the manufacturer will void the warranty. Specifications require the use of 99.995% pure helium gas. Using a lesser quality of helium can damage the system and void the warranty. AVOID SYSTEM CONTAMINATION.
  • Page 48 Maintenance 2. Using two wrenches, disconnect the gas lines from the cryopump. Install dust caps and plugs on the cold head and gas line couplings. See the next section. 3. Disconnect the cold head cable, vacuum roughing line, nitrogen purge line and temperature sensor cable from the cryopump.
  • Page 49 Maintenance 3. Screw dust plugs finger tight into the Aeroquip couplings on the gas lines. 4. If the cold head is not to be vented, screw dust caps onto its two Aeroquip couplings. Cryopanel Maintenance Tools required: 7 mm combination wrench 5 mm hex key wrench 4 mm Hex key wrench Flat nose pliers...
  • Page 50 Maintenance Disassemble and Clean the Cryopanels AVOID INJURY. Extreme cold can cause frostbite. Cryopanels remain cold for some time after power is turned off. Allow sufficient time for warm-up before disassembly. The cryopump has been warmed up, vented to atmospheric pressure and removed from the vacuum chamber.
  • Page 51 Maintenance 3. Install the inlet louver after checking that the indium gaskets are in place. Install the stainless steel flat washers and lock washers. Torque the M4 x 0.7 hex nuts to fasten the inlet louver to the first-stage cryopanel to 1.4 N-m (12.5 in.
  • Page 52 Maintenance 1. Remove the six socket head cap screws on the utility port flange. 2. Remove the rupture disc assembly, including the copper gasket which forms the seal between the two knife edges of the flange. 3. With a new rupture disc assembly, reinstall the parts in reverse order. Standard Silicon Diode An encapsulated silicon diode is furnished to measure the temperature of the cold head's second- stage heat station.
  • Page 53 Maintenance Functional Check of the Dual Silicon Diodes Tools required: Current source, 10 microamps ± 1% Digital voltmeter, 3 1/2 digits. To check if the first stage diode is functioning properly: 1. Connect the positive side of a 10-microamp DC current source to pin B of the diode connector.
  • Page 54 Maintenance Cold Head Maintenance Tools required: 5-mm hex key wrench Flat blade screwdriver Metric socket head torque wrench. Cold head maintenance can be performed and the displacer can be removed from the cryopump without relieving the vacuum in the cryopump. Allow the cryopump to warm to room temperature. Cryopanels need not be removed to withdraw the valve motor and the displacer from the cold head cylinder.
  • Page 55 Maintenance EXPLOSION HAZARD. AVOID INJURY. Never use compressed gas from a cylinder without a proper regulator. Overpressure can cause serious injury if the system equipment ruptures. Always wear eye protection when handling pressurized gas lines and other pressurized equipment. PREVENT EQUIPMENT DAMAGE. For compressors with a charge/vent fitting, use one wrench to support the body of the charge/vent fitting while removing or installing the dust plug or the charge line nut with the other wrench.
  • Page 56 Maintenance Gas Cleanup of the Cold Head Tools required: Open end wrenches 1”, 1 1/8”, 1 3/16” NOTE This procedure can be done only after the cryopump has warmed to room temperature. This procedure is required every time the cold head has been opened to the atmosphere, to avoid contaminating the system with air and water vapor.
  • Page 57 Maintenance 13. After running 30 to 45 seconds, close off the helium supply with the gas cylinder valve (not the regulator). Watch the regulator pressure gauge. When the pressure falls to 35 to 70 kPa (5 to 10 psig), open the gas cylinder valve to increase the pressure to 690 kPa (100 psig). 14.
  • Page 58 Maintenance Leaks occur most frequently at threaded joints. However, they can occur also at brazed and welded joints. The flat gasket in the face of the Aeroquip male coupling seals the joint. A leak at this gasket seal can be detected only when a gas line is connected. A leak here can be caused by: the coupling not fully tightened.
  • Page 59 Maintenance Leak Repair Leaks in the convoluted metal tubing cannot be repaired. Discard the damaged gas line and install a new one. Leaks at welded joints require special skills to repair. Consult a SCAI Service Center. Leaks at threaded joints are frequently stopped by tightening the coupling. Continued leakage after tightening requires coupling repair.
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  • Page 61 TROUBLESHOOTING The Troubleshooting Guide that follows lists problems that can occur with the system components and suggests causes and corrective actions. See additional troubleshooting and testing procedures in the Compressor and Cold head manuals. ELECTRIC SHOCK. Disconnect the power to the compressor before troubleshooting the electrical components.
  • Page 62 Troubleshooting Problem Possible Cause Corrective Action Run light comes on for 30 Defective motor contactor or Measure the motor relay coil seconds, then goes off, but open circuit to the motor resistance. See the compressor the compressor does not contactor. manual.
  • Page 63 Troubleshooting Problem Possible Cause Corrective Action Compressor starts but shuts Incorrect current draw. Measure the current. Check the down sometime later. motor winding resistances. See (continued) the compressor manual. If checks reveal failed motor windings or a locked rotor, consult a SCAI Service Center. Compressor overload relay If water and power checks opens.
  • Page 64 Troubleshooting Problem Possible Cause Corrective Action Valve motor does not start Open circuit in the cold head Disconnect the cable. Check when the compressor starts. cable. each conductor for continuity. (continued) Replace the cable if necessary. Blown fuse in the compressor Check the fuse.
  • Page 65 Troubleshooting Problem Possible Cause Corrective Action Temperature is cycling. Contaminated gas is causing Perform Gas Cleanup and a cold head freezing-thawing Charging procedure on the cold cycle. head (procedure in this manual) and on the compressor and gas lines. See their manuals. If the problem remains, consult a SCAI Service Center.
  • Page 66 Troubleshooting Problem Possible Cause Corrective Action Cooldown time is excessively Loss of refrigeration. Refer to the Troubleshooting long. (continued) Guides in the compressor and cold head manuals. Silicon diode is inoperative. Refer to Functional Check in the Silicon Diode Maintenance section in this manual.
  • Page 67 Troubleshooting Problem Possible Cause Corrective Action Temperature of the second- Incorrectly mounted Tighten the cryopanels to the stage cryopanel is less than cryopanels. heat stations. Check for 20 K, but the pressure is damaged or missing indium above 5 x 10 torr.
  • Page 68 Troubleshooting Problem Possible Cause Corrective Action Cold head does not start or Cold head or compressor is Refer to the Troubleshooting starts and stops inoperative. Guide in the compressor intermittently. manual. Open circuit in the cold head Disconnect the cable. Check cable.
  • Page 69 PARTS Ordering The nameplate fastened to the cold head's motor housing identifies the cryopump as follows: Model Number Part Number Serial Number Date of Manufacture Furnish this complete information when ordering parts. Also, order parts by part number and name. Refer to the next section for Parts Identification and Numbers. Parts Identification and Numbers ®...
  • Page 70 Parts Item Part Name Quantity Part Number Rupture disc, 172 kPa (25 psig) 260022A2 Rupture disc, elbow, 172 kPa (25 psig) 262900B1 Pumpout/nitrogen purge port/thermocouple gauge port 266682A13 (capped VCR) Blank for 1.33” O.D. accessory port 260021A2 O-ring for nitrogen purge port 77183 Copper gasket for 1.33”...