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- Page 1 ® Marathon CP-8 Cryopump Technical Manual Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 U.S.A. Revision D: April 2012 266810A...
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Page 3: Table Of Contents
TABLE OF CONTENTS Page SAFETY.......................... 1 SERVICE ..........................INTRODUCTION ......................5 Cryopumps ......................5 PRINCIPLES OF OPERATION ..................7 DESCRIPTION ....................... 9 Cryopump Components ..................10 SPECIFICATIONS ......................11 Cold Head ......................11 Pumping Speeds ....................11 Throughput ......................11 Capacity ...................... - Page 4 TABLE OF CONTENTS (continued) Page ACCESSORIES ......................27 Installation ......................27 Pumpout/Nitrogen Purge Adapter ..............28 Silicon Diode or Hydrogen Vapor Bulb Temperature Sensor ......28 OPERATION ........................ 29 Prestart Check ....................29 Startup....................... 30 Cold Head Orifice Adjustment ................32 Crossover Pressure Determination ..............
- Page 5 TABLE OF CONTENTS (continued) Page TROUBLESHOOTING ....................55 Troubleshooting Guide ..................55 PARTS ......................... 63 Ordering ......................63 Parts Identification and Numbers ............... 63 ILLUSTRATIONS LIST Figure 1 Typical Cryopump Systems ................6 Figure 2 Equilibrium Vapor Pressure vs. Temperature ..........7 Figure 3 Parts Identification and Stages of Freezing during Cryopumping ....
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Page 7: Safety
SAFETY GENERAL SCAI equipment is designed to operate safely when the installation, operation and servicing are performed in accordance with the instructions in this technical manual. Consult the nearest SCAI Service Center with any questions you may have concerning the operation or maintenance of this equipment. - Page 8 (This page is intentionally blank.)
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Page 9: Service
SERVICE HEADQUARTERS Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 Sales and Parts TEL: (800) 525-3072 (610) 791-6700 FAX: (610) 791-0440 Service TEL: (800) 525-3071 TEL: (610) 791-6750 SERVICE CENTERS Eastern Sumitomo (SHI) Cryogenics of America, Inc. - Page 10 (This page is intentionally blank.)
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Page 11: Introduction
INTRODUCTION Cryopumps SCAI Cryopumps produce clean, fast vacuum for high-vacuum applications. The cryopump does not contribute any contamination to the vacuum chamber because it functions by capturing gases, and no moving parts or lubricants are exposed to the vacuum. Figure 1 shows the major components of typical cryopump systems: helium compressor •... - Page 12 1 Nitrogen Purge 2 To Rough Pump 3 Vent Relief Valve to a Safe Location 4 To Temperature Monitor Multiple Cryopump Application 2 or 3 Marathon CP-8 Cryopumps Helium Compressor Cold Head Cables Gas Lines Figure 1 Typical Cryopump Systems...
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Page 13: Principles Of Operation
PRINCIPLES OF OPERATION A cryopump creates a vacuum by capturing gases from the vacuum chamber. The pump does this by solidifying gases onto cold surfaces. See Figure 3. Typical cryopumps have a cryogenic refrigerator (cold head) that produces refrigeration at two temperature levels and cools two, extended-surface cryopanels onto which the gases can freeze. - Page 14 (This page is intentionally blank.)
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Page 15: Description
DESCRIPTION Louver, Water Mounting Flange Second Stage Cryopanel 10K to 20K Nitrogen, Oxygen, Argon First Stage Cryopanel 50K to 90K Hydrogen Adsorber on Vacuum Enclosure Charcoal Cold Head Cylinder Relief Valve Port Pumpout Variable Orifice (135° from Gas Port Return Coupling) Gas Return Coupling Gas Supply Coupling Purge Port... -
Page 16: Cryopump Components
Description Cryopump Components (See Figure 3) Cold Head: Provides the refrigeration necessary to cool the cryopanels. Cold Head Cylinder: This part of the cold head includes the heat station flanges onto which the cryopanels are mounted. First-Stage Cryopanel: Shields the second-stage cryopanel from radiant heat: Louver: A series of concentric rings that captures water vapor and shields the second-stage panel from radiant heat. -
Page 17: Specifications
Specifications Cold Head SCAI model CH-204S. Pumping Speeds 1500 liters/second Water 4200 liters/second Argon 1250 liters/second Hydrogen 2300 liters/second Nitrogen 1470 liters/second Throughput Argon, 11.0 Torr-liters/sec or 870 sccm. Capacity Argon, 1200 std. liters Hydrogen, 25 std. liters Crossover Rating 220 torr-liters (air) Cooldown Time 75 minutes to 20 K... -
Page 18: Standard Single Temperature Sensor Connector
Specifications Standard Single Temperature Sensor Connector The receptacle is a 4 pin, bayonet connector, shell size 10. See Figure 14 for terminal polarities. Accuracy: ±2.0 K for 4 K to 25 K, ±5.0 K for 25 K to 450 K Optional Dual Temperature Sensor Connector (for MCC) The receptacle is a 10 pin, bayonet connector, shell size 12. -
Page 19: Adapter Fittings (Optional Accessories)
(7.5 psia to 16.0 psia) Magnetic Field Limits < 150 gauss Maintenance Interval Cold head valve and displacer seals: 13,000 operating hours (18 months) Supplier Name and Address Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee Street Allentown, PA 18103-4783 U.S.A. (610) 791-6700... -
Page 20: Regulatory Compliance
Regulatory Compliance Declaration of Conformity April 2012 Manufacturer’s Name Sumitomo (SHI) Cryogenics of America, Inc. Manufacturer’s Address 1833 Vultee Street Allentown, PA 18103 U.S.A. Authorized Representative’s Name Sumitomo (SHI) Cryogenics of Europe, Ltd. Authorized Representative’s Address 3 Hamilton Close Houndmills Industrial Estate... -
Page 21: Installation
INSTALLATION Introduction ® Install the Compressor, the Marathon CP-8 Cryopump and the Gas Lines according to the following procedures. To prevent contaminating the components or the system, it is important to follow the procedures in this manual step by step. NOTE Do not begin to install the components if 99.995% pure helium gas is not available. - Page 22 Installation 2. Inspect the following: 2.1 Check the Tip-N-Tell Sensor mounted on the compressor. (Some compressors also have a Tip-N-Tell mounted on the outside of the shipping container.) If the Tip-N- Tell Sensor shows no mishandling and there is no apparent physical damage, proceed to the sections Compressor Position and Compressor Checkout.
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Page 23: Cryopump Lifting Instructions
Installation 5. Inspect the cryopump. If it is damaged, contact the nearest SCAI Service Center and notify the delivering carrier. 6. All components in the gas system were cleaned and charged with helium gas at the factory. Allow the compressor to reach room temperature. Read the pressure gauge(s) on the compressor before connecting it into the system to determine if leaks have occurred which may require leak checking, charging or gas cleanup. -
Page 24: Compressor Position
Installation Adjustable Non-Slip Nylon Chain Sling Cylinder Lift Sling Nylon Lift Sling Figure 6 Lifting the Cryopump with Commercial Lift Equipment Compressor Position Place the compressor in a location that is protected from the elements and where the ambient temperature will always be within the range specified in the Cooling Requirements section of the Compressor manual. -
Page 25: Remove The Existing Pumping System
Installation 2. Be sure the power switch on the compressor is off. Plug the power cord into customer's electrical receptacle. Switch on the power to the compressor. Check that the circuit breaker is closed. 3. Press the power switch on the compressor. Power switch indicator will light and the compressor will start. -
Page 26: Temperature Sensor Cable Assembly (Optional Accessory)
Installation Temperature Sensor Cable Assembly (Optional Accessory) SCAI can furnish a cable assembly (optional) to connect the silicon diode temperature sensor to a controller/indicator. See the Parts section in this manual. If you furnish a cable and the mating plug, P/N 34760, see Figure 18 for the wiring schematic. Proceed as follows: 1. -
Page 27: Install The Gas Manifolds (If Used)
Installation The cryopump's mounting flange bolts to a gate valve that isolates the cryopump's chamber from the main vacuum chamber. This type of mounting is the most common, because it is versatile. A cryopump mounted to a valved chamber can be cooled down, kept cold or regenerated independently of the main chamber. -
Page 28: Install The Gas Lines
Installation Install the Gas Lines Tools required: Open end wrenches, 1”, 1 1/8”, and 1 3/16” Gas line couplings are shipped with protective dust plugs and the cryopump and compressor couplings are protected with dust caps. Do not remove the plugs and caps until the gas lines are ready to be attached. - Page 29 Installation AVOID GAS LEAKS. Check the condition of the gasket seal on the male half of each Aeroquip coupling. Be sure the gasket seal is in place and the sealing surfaces on both the male and female halves are clean before connecting. Replace the gasket seal if it is damaged or missing.
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Page 30: Install The Cold Head Cable
Installation Install the Cold Head Cable 1. Connect one end of the cold head cable to the cold head receptacle on the compressor. 2. Connect the other end to the cold head cable receptacle on the cryopump. Connect the Purge Gas, Vacuum and Vent Lines AVOID ASPHYXIATION. - Page 31 Installation 4. If pumping flammable, corrosive or toxic gases, connect a vent line to the pressure relief valve port of the cryopump and direct the vented gases to a safe location. A vent line connected to the relief valve port must maintain at least a 33 mm (1.3") inside diameter for at least 40.1 mm (1.58") from the flange of the relief value port to prevent restricting the gas flow.
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Page 32: Remote On/Off Cable (Optional Accessory)
Installation Vent Adapter Stop NW40 Flange 2.13" (2.125") Figure 11b Vent Adapter (Optional) P/N 260936B Remote On/Off Cable (Optional Accessory) A remote on/off cable for the compressor can be furnished as an accessory. To install the cable: 1. Disconnect the power to the compressor. 2. -
Page 33: Accessories
ACCESSORIES ® The Marathon CP-8 Cryopump has been designed to allow its utility ports to be reconfigured in the field by the installation of various accessory options. All CP-8 pumps have three 1.33" O.D. metal seal utility ports in the base of the vacuum enclosure as shown in Figure 3. Each of these ports can be adapted to a specific function by attaching the appropriate accessory. -
Page 34: Pumpout/Nitrogen Purge Adapter
Accessories Pumpout/Nitrogen Purge Adapter Tool required: 9/64" Hex key wrench Installation Procedure: Slip a new copper gasket over the tube extending from the adapter. Insert the tube into the appropriate utility port and gently work the tube through a hole in the first-stage cryopanel. -
Page 35: Operation
OPERATION SPECIAL PROCEDURES for CRYOPUMPING OXYGEN and OZONE Be aware of the presence and concentration of oxygen and/or ozone in the process gases being cryopumped. If oxygen concentrations exceed 20% (richer than in normal air), the cryopump system must be constructed, operated and maintained according to oxygen manufacturer’s standards. -
Page 36: Startup
Operation Startup The cryopump should be mounted to a gate valve attached to the vacuum chamber so that the cryopump can be isolated and left running while the pressure in the main vacuum chamber cycles from atmospheric to crossover pressure. AVOID ASPHYXIATION. - Page 37 Operation Figure 12 Evacuate the Cryopump Figure 13 Evacuate the Vacuum Vacuum Enclosure Chamber and Cool Down the Cryopump 1. Before starting the cryopump, rough pump the vacuum enclosure to 5 x 10 - torr (50 microns of mercury) to establish an insulating vacuum. See Figure 12. During rough pumping, use a suitable trap such as molecular sieve or liquid nitrogen to prevent oil from backstreaming into the vacuum enclosure.
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Page 38: Cold Head Orifice Adjustment
Operation Figure 14 Steady State Cryopumping NOTE During cooldown, the cold head may be noisy. When the unit is cooled down, the noise level will decrease to normal. If this does not occur, refer to the procedure in Cold Head Orifice Adjustment, which follows. Cold Head Orifice Adjustment PREVENT EQUIPMENT DAMAGE. -
Page 39: Crossover Pressure Determination
Operation Because maximum refrigeration is produced when the full stroke length of the displacer is utilized, it is normal for a very light tapping to occur when the unit is adjusted for minimum temperature. The unit can be adjusted to reduce the tapping noise. However, this results in a slightly shorter displacer stroke which causes a decrease in refrigeration produced and therefore an increase in first- and second-stage operating temperatures. -
Page 40: Regeneration: Purge Phase
Operation 4. Allow the second-stage temperature to rise to at least 280 K for effective desorption of gases from the charcoal. EXPLOSION HAZARD. AVOID INJURY. Establish a cleaning schedule based on pressure rise to keep the relief valve free of dirt generated during the vacuum process. -
Page 41: Regeneration: Evacuation Phase
Operation Purging with nitrogen only: 1. Use a nitrogen supply to break the vacuum and warm up the cryopump. The nitrogen supply pressure should be high enough to open the pressure-relief valve, but less than 105 kPa (15 psig). 2. Stop the purge when the cold second-stage panel reaches 280 K. Purging with nitrogen and an outside heat source: 1. -
Page 42: Restarting After A Power Failure
Operation Cryopumps having connections that are all copper gasketed can be baked out to 150° C with the cryopump running. Very low pressures can be achieved with these pumps by using this method. See the Parts section for typical replacement parts recommended for ultra-high vacuum (UHV) service. -
Page 43: Shutdown: One Cryopump In A Multiple Cryopump System
Operation Shutdown: One Cryopump in a Multiple Cryopump System Some compressors are capable of operating up to three cryopumps simultaneously. If only one cryopump is to be shut down: 1. Close the gate valve to isolate the cryopump from the main vacuum chamber. 2. - Page 44 (This page is intentionally blank.)
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Page 45: Maintenance
MAINTENANCE Cryopump Handling and Shipping We at Sumitomo (SHI) Cryogenics of America, Inc. appreciate your buying and using our cryopumps. We are always available to answer questions regarding use or service of the equipment. Also, our Service Centers are prepared to maintain, repair or exchange your cryopumps when service is required, provided no hazardous materials are present in your cryopumps. - Page 46 Maintenance AVOID INJURY. Establish safe handling procedures for cryopanels and louvers that may hold toxic or radioactive gases. Contamination by some gases can result in serious injury or death to personnel. See the Cryopump Handling and Shipping procedure in the Maintenance section of this technical manual. Procedures in this manual apply only to uncontaminated cryopumps.
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Page 47: Compressor Adsorber Replacement
Maintenance PRESERVE YOUR WARRANTY. Modification to equipment without the consent of the manufacturer will void the warranty. Specifications require the use of 99.995% pure helium gas. Using a lesser quality of helium can damage the system and void the warranty. AVOID SYSTEM CONTAMINATION. -
Page 48: Disconnect The Gas Lines
Maintenance 2. Using two wrenches, disconnect the gas lines from the cryopump. Install dust caps and plugs on the cold head and gas line couplings. See the next section. 3. Disconnect the cold head cable, vacuum roughing line, nitrogen purge line and temperature sensor cable from the cryopump. -
Page 49: Cryopanel Maintenance
Maintenance 3. Screw dust plugs finger tight into the Aeroquip couplings on the gas lines. 4. If the cold head is not to be vented, screw dust caps onto its two Aeroquip couplings. Cryopanel Maintenance Tools required: 7 mm combination wrench 5 mm hex key wrench 3 mm hex key wrench Flat nose pliers... -
Page 50: Disassemble And Clean The Cryopanels
Maintenance Disassemble and Clean the Cryopanels AVOID INJURY. Extreme cold can cause frostbite. Cryopanels remain cold for some time after power is turned off. Allow sufficient time for warm-up before disassembly. The cryopump has been warmed up, vented to atmospheric pressure and removed from the vacuum chamber. -
Page 51: Clean The Relief Valve
Maintenance 3. Install the inlet louver after checking that the indium gaskets are in place. Install the stainless steel flat washers and lock washers. Torque the M4 x 0.7 hex nuts to fasten the inlet louver to the first-stage cryopanel to 1.4 N-m (12.5 in. -
Page 52: Standard Silicon Diode
Maintenance 2. Remove the rupture disc assembly, including the copper gasket which forms the seal between the two knife edges of the flange. 3. With a new rupture disc assembly, reinstall the parts in reverse order. Standard Silicon Diode An encapsulated silicon diode is furnished to measure the temperature of the cold head's second-stage heat station. -
Page 53: Functional Check Of The Dual Silicon Diode
Maintenance Functional Check of the Dual Silicon Diode Tools required: Current source, 10 microamps ± 1% Digital voltmeter, 3 1/2 digits. To check if the first-stage diode is functioning properly: 1. Connect the positive side of a 10-microamp DC current source to pin B of the diode connector. -
Page 54: Cold Head Maintenance
Maintenance Cold Head Maintenance Tools required: 5-mm hex key wrench Slotted screwdriver Metric socket head torque wrench. Cold head maintenance can be performed and the displacer can be removed from the cryopump without relieving the vacuum in the cryopump. Allow the cryopump to warm to room temperature. -
Page 55: Charging And Venting
Maintenance Charging and Venting Charging or venting is required whenever the equalization pressure of the system is outside the range as stated in the Specifications section of the compressor manual. See these Specifications for equalization pressures at different ambient temperatures. Venting a component to atmospheric pressure is required if leaking self-sealing couplings need to be disassembled for repairs. -
Page 56: Gas Cleanup
Maintenance Gas Cleanup These procedures are required if leaks in the factory charged gas lines, the cryopump or the compressor have reduced the pressure to less than 140 kPa (20 psig). Parts that have lost their pressure must not be assembled into the system until they have been cleaned, to avoid contaminating the system with air and water vapor. -
Page 57: Gas Cleanup Of The Compressor
Maintenance 9. Connect the cold head cable to the cold head. Be sure the other end of the cable is connected to the compressor. 10. Open the vent valve on the adapter fitting installed on the return coupling of the cold head. 11. - Page 58 Maintenance fully coat the joint being tested. • allow time for bubbles to form at a small leak. • look carefully for the smallest bubble formations. • After solution testing is completed, use water to wash all residues from joints and couplings. In either method of testing, do not assume that one leak is the only one.
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Page 59: Leak Repair
Maintenance Electrical receptacle flange to housing Cap screws to housing Receptacle insulator Adapter to housing Poppet seat Motor housing to base Adapter to body Poppet seat Motor base to warm flange Adapter to base Figure 20 Possible Points of Gas Leaks Leak Repair Leaks in the convoluted metal tubing cannot be repaired. - Page 60 (This page is intentionally blank.)
- Page 61 TROUBLESHOOTING The Troubleshooting Guide that follows lists problems that can occur with the system components and suggests causes and corrective actions. See additional troubleshooting and testing procedures in the Compressor and Cold head manuals. ELECTRIC SHOCK. Disconnect the power to the compressor before troubleshooting the electrical components.
- Page 62 Troubleshooting Problem Possible Cause Corrective Action Run light comes on for 30 Defective motor contactor or Measure the motor relay coil seconds, then goes off, but open circuit to the motor resistance. See the compressor the compressor does not contactor. manual.
- Page 63 Troubleshooting Problem Possible Cause Corrective Action Compressor starts but shuts Incorrect current draw. Measure the current. Check the down sometime later. motor winding resistances. See (continued) the compressor manual. If checks reveal failed motor windings or a locked rotor, consult a SCAI Service Center. Compressor overload relay If water and power checks opens.
- Page 64 Troubleshooting Problem Possible Cause Corrective Action Valve motor does not start Blown fuse in the compressor Check the fuse. Replace if when the compressor starts. electrical box. blown. Consult a SCAI Service (continued) Center if the problem persists. Valve motor hums but does Open circuit in the cold head Disconnect the cable.
- Page 65 Troubleshooting Problem Possible Cause Corrective Action Temperature is cycling. Contaminated gas is causing Perform Gas Cleanup and a cold head freezing-thawing Charging procedure on the cold cycle. head (procedure in this manual) and on the compressor and gas lines. See their manuals. If the problem remains, consult a SCAI Service Center.
- Page 66 Troubleshooting Problem Possible Cause Corrective Action Cooldown time is excessively Loss of refrigeration. Refer to the Troubleshooting long. (continued) Guides in the compressor and cold head manuals. Silicon diode is inoperative. Refer to Functional Check in the Silicon Diode Maintenance section in this manual.
- Page 67 Troubleshooting Problem Possible Cause Corrective Action Temperature of the second- Incorrectly mounted Tighten the cryopanels to the stage cryopanel is less than cryopanels. heat stations. Check for 20 K, but the pressure is damaged or missing indium above 5 x 10 torr.
- Page 68 Troubleshooting Problem Possible Cause Corrective Action Cryopump suddenly warms Power interruption. Regenerate the cryopump. up. (continued) Silicon diode is inoperative. Refer to Silicon Diode in the Maintenance section of this manual. Cold head does not start or Cold head or compressor is Refer to the Troubleshooting starts and stops inoperative.
- Page 69 PARTS Ordering The nameplate fastened to the cold head's motor housing identifies the cryopump as follows: Model Number Part Number Serial Number Date of Manufacture Furnish this complete information when ordering parts. Also, order parts by part number and name. Refer to the next section for Parts Identification and Numbers. Parts Identification and numbers ®...
- Page 70 Parts Item Part Name Quantity Part Number Rupture disc,124 kPa (18 psia) 260022A2 Rupture disc, elbow 262900B1 Pumpout/nitrogen purge adapter 266708A01 Pumpout/thermocouple gauge port 266682A01 Blank for 1.33” O.D. accessory port 260021A2 O-ring for nitrogen purge port 77183 Copper gasket for 1.33” O.D. accessory port 43100 Plug, 4-socket, for temperature sensor cable, for single 34080...
- Page 71 Parts ® Typical replacement parts for Marathon CP-8 Cryopumps used in ultra-high vacuum (UHV) service. Item Part Name Quantity Part Number Copper gasket for Conflat 10” O.D. main flange 43204 Metal seal, Helicoflex, between the cold head’s warm 77204 flange and the vacuum enclosure Copper gasket for 1.33”...
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