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Summary of Contents for entegris NT 6500
- Page 1 P/N 2609 | REV. A 09/04 Integrated Flow ™ Controller, Model 6500 with DeviceNet Communication ™ Installation Guide...
- Page 2 Other devices shown in this guide are not supplied. Step 2: Remove Unit from the Bag Gloves This unit has been assembled and double-bagged under cleanroom conditions. To maintain purity, only open under cleanroom conditions. Entegris, Inc. | Installation Guide...
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Page 3: Step 3: Mount The Unit
Step 3: Mount the Unit Recommended hardware CAUTION The unit requires mounting in the direction of the fluid flow. #10 (M4) Pan head (in•lbs.) #10 (M4) Flat washer This unit may be positioned in any orientation. Installation Guide | Entegris, Inc. - Page 4 Overtightening of the nuts will result in fitting damage. Flare each tube end Recommended nut torque prior to installation FITTING SIZE ⁄ " ⁄ " ⁄ " ⁄ " Torque (in•lbs.) Torque (N•m) 0.56 0.90 1.24 1.58 Entegris, Inc. | Installation Guide...
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Page 5: Power Cable
FUNCTION ASSIGNMENT COLOR Cable materials are constructed No connection Brown with 22 AWG wire and a PVC jacket. The connector is a 4-pin, +24V White 12 mm male type. 24V common Blue No connection Black Installation Guide | Entegris, Inc. - Page 6 NT IFC, MODEL 6500 WITH DEVICENET COMMUNICATION Step 7: Set DeviceNet Switches Data Rate The NT Integrated Flow Controller, Model 6500 with DeviceNet Communication is ready for operation. Entegris, Inc. | Installation Guide...
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Page 7: Limited Warranty
Entegris’ products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components. Corporate Headquarters Customer Service 129 Concord Road...
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