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Related Manuals for entegris NT 6500
Summary of Contents for entegris NT 6500
- Page 1 P/N 1223 | REV. J 08/20 Integrated Flow ™ Controller, Model 6500 User Guide...
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Page 3: Table Of Contents
Valves ......... 11 Terms and Conditions .... 27 Electrical Connections ... 12 Limited Warranty ..... 27 Wire Connections ....13 Wiring Diagram ......14 Optional Connections .... 15 Setpoint Signal Setup ....16 Calibration Graphs ....17 Entegris, Inc. | User Guide... -
Page 4: Introduction
Power Flow signal Setpoint NT Integrated Flow Controller, Model 6500 control interface Inlet pressure Flow, pressure Valve signal measurement control Fluid flow Fluid flow Fluid flow Flow module Valve module User Guide | Entegris, Inc. -
Page 5: Factory Configured
The batch controller type is for applications that require the valve module to fully close between batch dispense cycles. The batch controller will form a leak-tight seal from 414 kPa (0 to 60 psig) inlet pressure. Entegris, Inc. | User Guide... -
Page 6: General Considerations
The power supply must provide this example, either increase the inlet continuous 1.0 ADC service for pressure or decrease the can ister each flow controller installed. pressure to obtain a 69 kPa (10 psid) pressure drop. User Guide | Entegris, Inc. - Page 7 The flow controller will withstand supply enables accessibility for the continuous application of 30 VDC troubleshooting or replacement. on any wire without compromising the unit. NOTE: Do not power down the unit until the homing cycle is complete. Entegris, Inc. | User Guide...
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Page 8: Dimensions
NT INTEGRATED FLOW CONTROLLER, MODEL 6500 DIMENSIONS — Top View 7.1 mm (0.28") 72.9 mm (2.87") 47.0 mm 197.6 mm (7.78") (1.85") 216.7 mm (8.53") 229.9 mm (9.05") End View 65.5 mm (2.58") User Guide | Entegris, Inc. - Page 9 (9.75") (0.77") 1⁄2" 127.0 mm 133.6 mm 251.7 mm 21.6 mm (5.00") (5.26") (9.91") (0.85") 3⁄4" 134.9 mm 141.5 mm 257.8 mm 25.7 mm Cable connector (12DXX) (5.31") (5.57") (10.15") (1.01") *IFC with DeviceNet communication Entegris, Inc. | User Guide...
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Page 10: Installation
Do not tighten the nuts that protect the flared tube connections during shipment. (See Prepare Fluid Lines on page 10). Tightening these nuts without the proper tubing installed may damage the unit’s flared tube onnections. Remove Unit from the Bag Gloves User Guide | Entegris, Inc. -
Page 11: Mounting Requirements
NOTE: The flow controller requires mounting in the direction of the fluid flow. Recommended Hardware #10 (M4) Pan head #10 (M4) Flat washer Entegris, Inc. | User Guide... -
Page 12: Mechanical Installation
To prepare the fluid lines, begin by sliding the supplied nuts onto the fluid tube. Prepare Fluid Lines Process fluid tube Slide the nut onto the tube Process fluid tube Connect Fluid Lines Flare each tube end prior to installation User Guide | Entegris, Inc. -
Page 13: Proper Installation And Opera Tion With On/Off
Installation and Operation Example with Two On/O Valves Flow direction Flow direction Valve #1 Valve #2 NT Integrated Flow Controller, Model 6500 Entegris, Inc. | User Guide... -
Page 14: Electrical Connections
The mounting receptacle uses arrow. a Viton gasket seal at the mounting ® panel. The pin contacts for the electrical connection are gold plated for performance and corrosion resistance. Align white marks Electrical cable Snap User Guide | Entegris, Inc. -
Page 15: Wire Connections
(gray, Com setpoint). Further, if the setpoint input is 4–20 mA, the setpoint control signal must be from a source type, not a sink type. Consult Entegris with any questions about electrical installation. See the Wiring Diagram on page 14. -
Page 16: Wiring Diagram
4–20 mA 10-Tan (+) Normally open switch 09-Green re-zeroing Power supply 02-Red (+) 24 VDC ± 10% 08-Black (-) Electrical cable Low impedance common connection Setpoint control signal 12-Gray (-) 0–5 VDC 11-Pink (+) 0–10 VDC User Guide | Entegris, Inc. -
Page 17: Optional Connections
The outputs are optically isolated. Using a separate power supply is possible. Power supply 24 VDC ± 10% 03-Orange flow loop 04-Yellow pressure loop Flow display/ measurement device Electrical cable 05-Blue Pressure display/ measurement device 01-Brown Entegris, Inc. | User Guide... -
Page 18: Setpoint Signal Setup
Range of Product = 0-1250 mL/min F × Span Setpoint = 500 mL/min Span = 10 VDC - 0 VDC = 10 VDC = 1250 mL/min (500 mL/min) × (10 VDC) Setpoint (1250 mL/min) Setpoint 4.0 VDC User Guide | Entegris, Inc. -
Page 19: Calibration Graphs
BELOW 0 psig DO NOT OPERATE ABOVE 60 psig (414 kPa) mA output values indicated on graph Pressure (psig) NOTE: Specifications are subject to change without notice. Please consult the factory for the most current information. Entegris, Inc. | User Guide... -
Page 20: Unit Operation
(less than errors. Correction factors for viscosity atmospheric pressure). and specific gravity changes may be obtained from Entegris by calling or NOTE: To perform within specifica- following the sensing and control tion, the available inlet pressure product links at www.entegris.com. - Page 21 The typical 69 kPa (10 psid). response time is within 3 seconds from 10% to 95% SP. The flow controller will respond to setpoint changes within 50 msec of receiving the new setpoint value. Entegris, Inc. | User Guide...
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Page 22: Diagnostic Guide
Pressure on page 19. high flow rates. Verify the pressure drop meets the requirements according to the Minimum Operating Pressure on page 19. Viscosity and specific Correct for viscosity and specific gravity. gravity offsets. User Guide | Entegris, Inc. - Page 23 10. Unit opens Line pressure can push Keep power applied to unit. (port-to-port the motorized valve Do not pressurize unit while leak) when open. powered off. power is turned off. Entegris, Inc. | User Guide...
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Page 24: Maintenance
In most applications, the re-zero procedure may be automated using switches, a PLC or other logic controller devices. User Guide | Entegris, Inc. -
Page 25: Proper Installation And Opera Tion With On/Off
BATCH unit. adequate time before the upstream valves are closed. Installation and Operation Example with Two On/O Valves Flow direction Flow direction Valve #1 Valve #2 NT Integrated Flow Controller, Model 6500 Entegris, Inc. | User Guide... -
Page 26: Reference
Load effect on 4–20 mA outputs RLoad 0–600 ohms, no effect Electrical connection Pigtail connector: 6’, 12’, 30’ GA FEP-jacketed cable 12 Pin connector (without mating cable) 12 Pin connector: 6’, 12’, 30’ PVC-jacketed cable User Guide | Entegris, Inc. -
Page 27: Performance Specifications
• 1⁄4" Flaretek tube fitting combinations: PART NUMBER 1⁄4" F02 — — — — — 3⁄8" F03 — — — 1⁄2" F04 — — — 3⁄4" F06 — — — — — — — Entegris, Inc. | User Guide... - Page 28 T4 = 0 – 1 250 mL/min T9 = 0 – 4 0 L/min * Selection is dependent on application and chemical media. Please contact Entegris for best selection. ** Flow ranges are scaled to zero flow, measurement is from 10 to 100% of full scale flow range.
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Page 29: Certifications
— — Entegris products are de- For technical support, contact signed and tested to meet Entegris at +1 800 394 4084. Please the most current CE require- have the complete model number, ments. Please visit www.entegris.com chemical and application information for the most current information. - Page 30 NT INTEGRATED FLOW CONTROLLER, MODEL 6500 Notes User Guide | Entegris, Inc.
- Page 31 NT INTEGRATED FLOW CONTROLLER, MODEL 6500 Notes Entegris, Inc. | User Guide...
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Page 32: Terms And Conditions
Entegris’ products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warranty any failure in the case of customers using unapproved foreign components. Corporate Headquarters Customer Service 129 Concord Road...
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