Related Manuals for entegris InVue NT6510
Summary of Contents for entegris InVue NT6510
- Page 1 P/N 01-1032525 | REV. B 02/19 InVue Integrated Flow ® Controllers, Models NT6510, NT6520 User guide...
-
Page 2: Table Of Contents
Terms and Conditions of Sale .. 34 Power Supply Requirements ... 11 Limited Warranty ......34 Electrical Connections ... 13 Wiring Diagrams ...... 16 Optional Connections .... 17 Setpoint Signal Setup ....18 Calibration Graphs ....19 Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 3: Introduction
The flow controller nonstandard InVue Integrated Flow does this in a precise manner until Controllers are available by contacting the actual flow signal is equal to Entegris. the setpoint. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 4: Factory Configured
24 VDC ± 10% Supply voltage Operation The batch controller type is for appli- Re-zeroed cations requiring flow rate control where the integral valve module will Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 5: General Considerations
OPERATING AMBIENT TEMPERATURE RANGE — The flow controller is designed to operate in ambient temperature, cleanroom environments. It is speci- fied to operate at temperatures of 10°C –65°C (50 °F –149°F). P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 6: Dimensions
" Super 300 Pillar 118.1 mm (4.65") 17.0 mm (0.67") 159.3 mm (6.27") tube fitting ⁄ " Super 300 Pillar 119.6 mm (4.71") 17.0 mm (0.67") 167.1 mm (6.58") tube fitting Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... - Page 7 Yes* — — — ⁄ " Yes** Yes** — — ⁄ " — — — *Flaretek and Pillar only. **Flaretek and PrimeLock only Please consult Entegris for custom flow range requirements. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
- Page 8 ⁄ " Super 300 Pillar tube fitting Top View 200.2 mm (7.88") 47 mm 187.5 mm (7.38") 7.1 mm (1.85") (0.28") 170.2 mm (6.70") 71.1 mm (2.80") Side View End View Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19...
-
Page 9: Installation
(See the Prepare Fluid Lines section on page 10). Tightening these nuts without the proper tubing installed may damage the unit's tube connections. Remove Unit from the Bag Gloves P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 10: Mounting Requirements
NOTE: The flow controller requires mounting in the direction of the fluid flow. #10 (M4) Pan head #10 (M4) Flat washer Recommended hardware Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 11: Mechanical Installation
PrimeLock tube fitting assembly to the fitting. instructions, visit www.entegris.com. Prepare Fluid Lines Slide the nut onto the tube Process fluid tube Connect Fluid Lines Prepare each tube end prior to installation P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 12: Power Supply Requirements
An induced power spike, creating is 600 ohms and includes the an interruption in power greater than resistance of measurement devices 10 milliseconds in duration, may and the interconnecting cable. cause the unit to reset. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... - Page 13 The flow controller will not be damag- NOTE: Do not power down the unit ed or compromised in any way if any until the homing cycle is complete. combination of wires are shorted together. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
-
Page 14: Electrical Connections
Ground (+24 VDC common) +24 VDC Violet Factory use only – do not connect White Factory use only – do not connect White/Red Dot-Dash Alarm (non-polarized) White/Red Dot-Dash Alarm (non-polarized) Pigtail Cable Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... - Page 15 Infor mation section of this user guide. Consult Entegris with any questions The following pin diagram and Table about electrical installation. 2 detail the wire connections for the flow controller type with G-coded electrical connector. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
- Page 16 Unused Connections Plug Orientation, Face View The 6-Violet/Pin O and 7-White/Pin P wires are for factory use only. Do not connect to power supply or ground. These wires must remain disconnected. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19...
-
Page 17: Wiring Diagrams
Normally open switch 09-Green/Pin J For re-zeroing Power supply 02-Red/Pin R 24 VDC ± 10% 08-Black/Pin E Setpoint control signal 12-Gray/Pin S Electrical cable 11-Pink/Pin G 0–5 VDC or 0–10 VDC P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 18: Optional Connections
Power supply 24 VDC ± 10% 03-Orange/Pin M Flow loop 04-Yellow/Pin Pressure loop Flow display/ measurement device 05-Blue/Pin L Electrical cable Pressure display/ measurement device 01-Brown/Pin A Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 19: Setpoint Signal Setup
Setpoint F = 500 mL/min Span = 10 VDC - 0 VDC = 10 VDC FS = 1250 mL/min Setpoint = (500 mL/min) (10 VDC) (1250 mL/min) Setpoint = 4.0 VDC P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 20: Calibration Graphs
20.5 mAdc Do not operate below 10 psig. Do not operate above 60 psig. Pressure (psig) NOTE: Specifications are subject to change without notice. Please consult Entegris for the most current information. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 21: Unit Operation
The unit must be re-zeroed at operating process temperature con- ditions and after any temperature change for the accuracy specifica- tions to apply. See the Maintenance P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 22: Performance
This can be useful if constant 69 kPa (10 psig) pressure drop. (trickle) flow for deionized water systems is required. Pressure Accuracy The accuracy of the analog pressure output is ± 1% of full scale. These Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 23: Operational Reliability
9.1 kg (20 lbs) straight and Before ordering, please consult 4.5 kg (10 lbs) at 90 degrees without Entegris for options on configuring being damaged. alarm relay outputs and alarm delays differently than the factory presets. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. -
Page 24: Led Status Codes
Delay time = P delay PointLow) normal (after P delay default = Ø P delay) Only P1 activates alarm P=Pressure P1=Inlet pressure signal P2=Other pressure signal SP=Setpoint G=Green R=Red Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 25: Diagnostic Guide
“dirty" power. The noise spikes on the power supply will cause the unit output to be noisy or cause the unit to enter a reset mode. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. - Page 26 Operating pressure drop. Pressure Drop Requirements on page 21. Verify the pressure drop meets the requirements according to the Operating Pressure Drop Requirements on page 21. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19...
- Page 27 10. Unit opens (port- Line pressure can push Keep power applied to unit. to-port leak) when the motorized valve Do not pressurize unit while power is turned off. open. powered off. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
-
Page 28: Maintenance
5°C (9°F). Best performance will be achieved by re-zeroing between each dispense cycle. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... - Page 29 (as discussed above) at any time. Auto-zero applies to the flow module only. The manual re-zero will zero the flow module and valve position. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
-
Page 30: Reference
69 kPa – 414 kPa (10 psig – 60 psig) Over-pressure limit 690 kPa (100 psig) NOTE: Specifications are subject to change without notice. Please consult Entegris for the most current information. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 31: Ordering Information
Yes* — — — ⁄ " Yes** Yes** — — ⁄ " — — — *Flaretek and Pillar only. **Flaretek and PrimeLock only Please consult Entegris for custom flow range requirements. P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc. - Page 32 “Electrical Mating Cables for InVue Flow Controllers NT6510 and NT6520 – Accessory" (p. 33) for ordering information. *** For options not shown here, please contact Entegris. Product specified with a flared tube connection is packaged with two PVDF nuts.
- Page 33 “Electrical Mating Cables for InVue Flow Controllers NT6510 and NT6520 – Accessory" (p. 33) for ordering information. *** For options not shown here, please contact Entegris. Product specified with a flared tube connection is packaged with two PVDF nuts.
-
Page 34: Certifications
+1 800-394-4084. A Return Materials ready when calling. Authorization (RMA) number, MSDS requirements and a product packag- ing and return procedure will be provided at that time. Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19... -
Page 35: For More Information
Entegris’ products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warranty any failure in the case of customers using unapproved foreign components. Corporate Headquarters Customer Service 129 Concord Road...
Need help?
Do you have a question about the InVue NT6510 and is the answer not in the manual?
Questions and answers