entegris NT6500 User Manual
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entegris NT6500 User Manual

Nt integrated flow controller with devicenet communication
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P/N 2608 | REV. B 05/19
NT
Integrated Flow
™
Controller with DeviceNet
™
Communication
User Guide

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Summary of Contents for entegris NT6500

  • Page 1 P/N 2608 | REV. B 05/19 Integrated Flow ™ Controller with DeviceNet ™ Communication User Guide...

  • Page 2: Table Of Contents

    Electrical Connections ... 12 For More Information ....62 Unit Operation ......14 Terms and Conditions Operating Environment ..14 of Sale ........... 62 Performance ......14 Limited Warranty ......62 Reliability Information .... 16 Entegris, Inc. | User Guide...

  • Page 3: Introduction

    DeviceNet I/O IFC control interface MAC ID, baud rate, status LEDs Power Flow and pressure Valve measurement control Flow module Valve module Fluid flow Fluid flow Fluid flow Figure 1. System block diagram. User Guide | Entegris, Inc.

  • Page 4: Factory Configured

    Operation Flowmeter zeroed re-zero routine. Upon application of a setpoint greater than or equal to 5%, a new differential pressure (DP) zero value will be stored in non- volatile memory and the unit will Entegris, Inc. | User Guide...

  • Page 5: General Considerations

    69 kPa (10 psid) and the unit may not perform within specification. For this example, either increase the inlet pressure or decrease the back pressure to obtain a 69 kPa (10 psid) pressure drop. User Guide | Entegris, Inc.

  • Page 6: Storage Temperature Range

    These devices may produce on the CAN protocol. electrical transients that may affect unit measurements. An induced power spike, creating an interruption in power greater than 10 msec in duration, may cause the unit to reset. Entegris, Inc. | User Guide...
  • Page 7 IFC has detected an error and cannot communicate on the network. Data Rate 500 Kb,2 250 Kb,1 125 Kb,0 Node Address (00-63) Figure 2. DeviceNet switches and status LEDs located on the top side of the flow controller. User Guide | Entegris, Inc.
  • Page 8 2 selects 500 Kb. The “PGM" label indicates the software program- mable switch positions. Electrical Isolation The degree of electrical isolation between power and DeviceNet communication is as listed below: From Power, 24 VDC DeviceNet Comm Isolation degree >500 VAC/VDC Entegris, Inc. | User Guide...

  • Page 9: Dimensions

    130 mm (5.12") 19.6 mm (0.77") 247.7 mm (9.75") ¹/ " 127 mm (5.00") 133.6 mm (5.26") 21.6 mm (0.85") 251.7 mm (9.91") ³/ " 134.9 mm (5.31") 141.5 mm (5.57") 25.7 mm (1.01") 257.8 mm (10.15") User Guide | Entegris, Inc.

  • Page 10: Installation

    (See Prepare Fluid Lines on page open under cleanroom conditions. 11). Tightening these nuts without the proper tubing installed may damage the unit’s flared tube connections. Remove Unit from the Bag Entegris, Inc. | User Guide...

  • Page 11: Mounting Requirements

    NOTE: The flow controller requires mounting in the direction of the fluid flow. Recommended Hardware #10 (M4) Pan head #10 (M4) Flat washer 217.2 mm (8.55") 47.0 mm (1.85") User Guide | Entegris, Inc.

  • Page 12: Mechanical Installation

    To prepare the fluid lines, begin by sliding the supplied nuts onto the fluid tube. Prepare Fluid Lines Process fluid tube Slide the nut onto the tube Process fluid tube Connect Fluid Lines Flare each tube end prior to installation Entegris, Inc. | User Guide...

  • Page 13: Electrical Connections

    White 24V common Blue No connection Black 1 Drain 2 V+ Red 3 V– Black 4 CAN_H White 5 CAN_L Blue DeviceNet communication cable 1 N/C 2 +24V Power 3 24V COM cable 4 N/C User Guide | Entegris, Inc.
  • Page 14 7 Newton-centimeters. connector is a 5-pin, micro-style, 12 mm, male type. FUNCTION ASSIGNMENT COLOR Drain Bare wire Black CAN_H White CAN_L Blue Data Rate 500 Kb,2 250 Kb,1 125 Kb,0 Node Address (00-63) Data rate Entegris, Inc. | User Guide...

  • Page 15: Unit Operation

    Correction factors for viscosity CAUTION! The flow controller may and specific gravity changes may be be damaged if it is subjected to any obtained from Entegris by calling or level of vacuum pressure (less than following the sensing and control atmospheric pressure).
  • Page 16 Pressure Measurement Accuracy The accuracy of the pressure output is ± 1% of full scale. These calcula- tions include the effects of linearity, hysteresis and repeat- ability, measured at 23°C (73°F). Entegris, Inc. | User Guide...

  • Page 17: Reliability Information

    The cable will withstand a static The valve system can withstand pull test of 9.1 kg (20 lbs) straight 3.5 million open/close cycles and 4.5 kg (10 lbs) at 90 degrees before the control performance without being damaged. is compromised. User Guide | Entegris, Inc.

  • Page 18: Diagnostic Guide

    Verify the inlet pressure is at least 69 kPa (10 psig) greater than the outlet pressure. Entegris, Inc. | User Guide...
  • Page 19 8. Net LED flashes green. Network down. Reconnect to network. Valve goes to safe position, default position is closed. User Guide | Entegris, Inc.

  • Page 20: Maintenance

    Object does this. This is the default command in the Analog Sensor setting. Object is sent to begin a re-zero process. The ‘Stop_Zero_Adjust’ service command in the Analog Sensor Object is sent to stop the re-zero process. Entegris, Inc. | User Guide...

  • Page 21: Reference

    -40° – 50°C (-40° – 122°F) Operating pressure 69 – 414 kPa (10 – 60 psig) Over-pressure limit 690 kPa (100 psig) NOTE: Specifications are subject to change without notice. Please consult Entegris for the most current information. User Guide | Entegris, Inc.

  • Page 22: Ordering Information

    NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION Ordering Information NT Integrated Flow Controller, NT6500: part number 6500  –     –       –       –       –       –   Primary/secondary seal...

  • Page 23: Certifications

    Open DeviceNet Vendor Association (ODVA) approved conformance tests at the independent, authorized ODVA Training and Technology Center in Ann Arbor, MI. Entegris has been issued an official Declaration of Conformity from ODVA for this product. User Guide | Entegris, Inc.

  • Page 24: Devicenet Communication Integrated Flow Controller Device

    1 I/O and 1 explicit Assembly Required at least 1 input and 1 output S-Device supervisor Required S-Sensor calibration Optional 0 or more S-Analog sensor Required S-Analog actuator Required S-Single stage controller Required Entegris, Inc. | User Guide...
  • Page 25 DESCRIPTION Instance 1 Flow Virtual sensor that calculates the fluid flow rate based on various sensed para meters, for example, differential pressure. Instance 2 Pressure The measured fluid pressure. P/N 01-2608 | Rev. B 03/19 User Guide | Entegris, Inc.
  • Page 26 The flow sensor feeds the process variable to the S-Single stage controller object. S-Single stage controller Feeds the control variable to the S-Analog actuator object. S-Analog actuator Operates the Flow Control Valve of the device. Entegris, Inc. | User Guide...
  • Page 27 NVC = Nonvolatile Constant: value is NOTE: Attribute Tables that include an "NV" column use the following fixed, determined by software. nomenclature: These values are “hardcoded” and not settable. V = Volatile: value is lost upon power cycle. User Guide | Entegris, Inc.

  • Page 28: Identity Object

    NVC Device UINT Indication of 0000 type general type of product Required Product UINT Indication of 0001 code a particular product of an individual vendor Required NVC Revision STRUCT Major USINT revision Minor USINT revision Entegris, Inc. | User Guide...
  • Page 29 Retrieves an 1–255 Single (USINT) attribute value Required Reset Type (USINT) Emulates power Type 0 = cycling the Reset. device. [default if parameter is omitted] Type 1= Return to the out–of–box config- uration, then Reset. User Guide | Entegris, Inc.

  • Page 30: Message Router Object

    Services 2.0 – Class Services – Message Router Object PARAMETER CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION VALUES Required Get_Attribute_ Attribute ID Retrieves an 1–255 Single (USINT) attribute value Instance 1 No instance attributes No instance services Entegris, Inc. | User Guide...

  • Page 31: Devicenet Object

    1 = Auto reset (not supported) Required Alloca- Struct See service tion Info parameter BYTE Allocation Choice USINT Masters MACID Required MACID BOOL Changed 0 = No change Swt Chg since last 1 = Changed reset (media access) User Guide | Entegris, Inc.
  • Page 32 0 × 02 = Poll connection set 0 × 03 = Both Required Release_ Allocation Releases 0 × 01= Group_2_ choice predefined Explicit Identifier_Set master/slave 0 × 02 = Poll connection set 0 × 03 = Both Entegris, Inc. | User Guide...
  • Page 33 Master USINT Master’s MACID = 0-63 Allocate success BYTE Message body format 0 = 8/ 8 [default] (number of bits 1 = 8 /16 for Class/Instance identifiers) 2 = 16 /16 3 = 16 /8 User Guide | Entegris, Inc.

  • Page 34: Assembly Object

    SUPPORTED NAME PARAMETERS DESCRIPTION VALUES Required Get_Attribute_ Attribute ID Retrieves an 1–255 Single (USINT) attribute value Required Set_Attribute_ Attribute Sets an attribute Attribute Single ID (USINT); value ID = 1–255 Value Value = attribute specific Entegris, Inc. | User Guide...
  • Page 35 NAME NAME NUMBER NUMBER NAME NUMBER TYPE Flow S-Analog sensor Value Pressure S-Analog sensor Value Valve S-Analog actuator Value Override S-Analog actuator Override USINT Setpoint S-Single stage Setpoint controller Status S-Device supervisor Exception BYTE status User Guide | Entegris, Inc.
  • Page 36 LSB, is in the Low-ordered index, Address) also known as Little endian. Services 4.N – Instanc Services – Assembly Object PARAMETER CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION VALUES Required Get_Attribute_ Attribute ID Retrieves an 1–255 Single (USINT) attribute value Entegris, Inc. | User Guide...

  • Page 37: Connection Object

    P Conn ID UINT Exp Resp. CAN ID = 10xxxxxx011; x = MACID Required C Conn ID UINT Exp Req. CAN ID = 10xxxxxx100; x = MACID Required Initial BYTE Group IDs = 0×21 Comm charac- teristics User Guide | Entegris, Inc.
  • Page 38 SUPPORTED NAME PARAMETERS DESCRIPTION VALUES Required Get_Attribute_ Attribute ID Retrieves an 1–255 Single (USINT) attribute value Required Set_Attribute_ Attribute Sets an attribute Attribute Single ID (USINT); value ID = 1–255 Value Value = attribute specific Entegris, Inc. | User Guide...
  • Page 39 Required C Conn UINT Path length = 06 Path length Required C Conn EPATH Path to which = 20 04 24 NN 30 Path connection 03 (hex) where consumes NN = assembly inst id User Guide | Entegris, Inc.
  • Page 40 SUPPORTED NAME PARAMETERS DESCRIPTION VALUES Required Get_Attribute_ Attribute ID Retrieves an 1–255 Single (USINT) attribute value Required Set_Attribute_ Attribute Sets an attribute Attribute Single ID (USINT); value ID = 1–255 Value Value = attribute specific Entegris, Inc. | User Guide...

  • Page 41: S-Device Supervisor Object

    20 name characters Required Manu- SHORT ASCII text, “6500” facturer’s STRING max. 20 model characters number Required NVC Software SHORT ASCII text, “x.xx” current revision STRING max. 6 Application Code level characters SW revision User Guide | Entegris, Inc.
  • Page 42 = Device detail bits specific alarm b2 = Vendor specific alarm b3 = Reserved b4 = Common warning b5 = Device specific warning b6 = Vendor specific warning b7 = 1 Entegris, Inc. | User Guide...
  • Page 43 = Flow high b3 = 0 b4 = 0 b5 = 0 b6 = Pressure low b7 = Pressure high Detail [1] BYTE b0 : b7 = 0 Detail [2] BYTE b0 : b7 = 0 User Guide | Entegris, Inc.
  • Page 44 = Internal diagnostics b1 = 0 b2 = EPROM b3 = EEPROM b4 = RAM b5 = 0 b6 = Internal real-time b7 = 0 Detail [1] BYTE b0 : b7 = Not supported Entegris, Inc. | User Guide...
  • Page 45 Required Alarm BOOL Enables the 00 = Disabled enable setting of 01 = Enabled alarm bits (default) Required Warning BOOL Enables the 00 = Disabled enable setting of 01 = Enabled warning bits (default) User Guide | Entegris, Inc.
  • Page 46 Moves the device out of the abort state Required Perform_Diags Test ID Causes the 0 = Standard (USINT) device to 1-63 = perform a set Reserved of diagnostic 64-127 = routines Device profile 128-255 = Vendor specific Entegris, Inc. | User Guide...

  • Page 47: S-Analog Sensor Object

    1 = Valid attribute (Invalid: e.g., contains a not warmed valid value up yet) Required Value INT or Analog input The corrected, specified by value converted, data type if calibrated final supported value of the sensor User Guide | Entegris, Inc.
  • Page 48 Optional Warning Same as Determines [default] = trip value the value Minimum point below which value for its a warning data type condition will occur Entegris, Inc. | User Guide...
  • Page 49 ** With Autozero enabled, upon setpoint = 0, the device will close the valve then wait a delay period before beginning the sensor nulling process. The Autozero status can be monitored to detect when the nulling process actually begins. User Guide | Entegris, Inc.
  • Page 50 01 = Flow instance diagnostics subclass Vendor Damping USINT Low-pass 0 = disabled specific coefficient filter coef- 1 – 6 = n ficient [default] = τ τ ≈ 0.25 sec) 62.5ms* 2 7 – 255 = reserved Entegris, Inc. | User Guide...
  • Page 51 2. Actuator Override = Hold (the valve freezes in its current position) 3. Sensor Zero_Adjust (closes the valve and, after a settling period, begins the zeroing) 4. Sensor Stop_Zero_Adjust (valve returns to previously held position) 5. Actuator Override = Normal (the device begins normal control) User Guide | Entegris, Inc.
  • Page 52 The value of = 6000 value Full scale for the sensor Optional Alarm trip Same as Determines the [default] = point high value value above Maximum which an alarm value for its condition will data type occur Entegris, Inc. | User Guide...
  • Page 53 2 (τ ≈ 0.25 sec) 7 – 255 = Reserved * Counts are interpreted as a “Percent of full scale” where a Count value of 24576 (6000 hexadecimal) corresponds to 100%. This allows a maximum reading of 133.33%. User Guide | Entegris, Inc.
  • Page 54 VALUES Required Get_Attribute_ Attribute ID Retrieves an 1 – 255 Single (USINT) attribute value Required Get_Attribute_ Attribute Sets an attribute Attribute ID = Single ID (USINT); value 1 – 255 Value Value = attribute specific Entegris, Inc. | User Guide...

  • Page 55: S-Analog Actuator Object

    2 = On For values other than zero (normal 3 = Hold control), the 4 – 127 = Value attribute Reserved is ignored 128-255 = Vendor specific Required Value UINT Analog output value User Guide | Entegris, Inc.
  • Page 56 Stepper motor controller * Counts are interpreted as a “Percent of Full Scale” where a Count value of 24576 (6000 hexadecimal) corresponds to 100%. This allows a maximum reading of 133. Entegris, Inc. | User Guide...
  • Page 57 Value = attribute specific Vendor Load_Stepper None Causes the specific _Defaults Stepper driver to revert to default parameters Vendor Update_ None Updates the specific DeviceNet Stepper visible Stepper Parameter_ attributes from Attributes the Stepper driver User Guide | Entegris, Inc.

  • Page 58: S-Single Stage Controller Object

    Required Status BYTE Alarm and warn- b0 : b5 = 0 ing state of this b6 = Warning object instance exception b7 = Alarm exception Vendor NVF Track Tuning specific band limit parameter** Entegris, Inc. | User Guide...
  • Page 59 VALUES Required Get_Attribute_ Attribute ID Retrieves an 1 – 255 Single (USINT) attribute value Required Set_Attribute_ Attribute Sets an attribute Attribute ID = Single ID (USINT); value 1 – 255 Value Value = attribute specific User Guide | Entegris, Inc.

  • Page 60: S-Sensor Calibration Object

    Attributes 64.1 – Instance Attributes – S-Sensor Calibration Object 1 ATT. ACCESS DATA ATTRIBUTE REQUIRED SUPPORTED RULE NAME TYPE DESCRIPTION VALUES Required NVF Calibration UINT Identifies the [default] = ID number calibration (e.g., fluid type) Entegris, Inc. | User Guide...
  • Page 61 VALUES Required Get_Attribute_ Attribute ID Retrieves an 1 – 255 Single (USINT) attribute value Required Set_Attribute_ Attribute Sets an attribute Attribute ID = Single ID (USINT); value 1 – 255 Value Value = attribute specific User Guide | Entegris, Inc.

  • Page 62: For More Information

    Entegris’ products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warranty any failure in the case of customers using unapproved foreign components. Corporate Headquarters Customer Service 129 Concord Road...

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