Table of Contents
Related Manuals for Honda Electronics W-357-1MQG-SKC
Summary of Contents for Honda Electronics W-357-1MQG-SKC
- Page 1 Ultrasonic Cleaner Pulse Jet W-357-1MQG-SKC Instruction Manual Please carefully read this instruction manual before using this product. Please use the product correctly. Please keep this document where it can be easily accessed.
-
Page 2: Table Of Contents
Foreword Thank you for purchasing the Ultrasonic Cleaner Pulse Jet. This ultrasonic cleaner, using quartz vibration unit, cleans fine contamination that cannot be removed by using only pure water. This process is done by ejecting ultrasonic water onto a semiconductor (e.g. silicon wafer). This document describes how to use the device correctly and also lists important safety instructions to prevent injury, malfunction, damage (e.g. -
Page 3: Safety Precautions
1. Safety Precautions 1. Safety Precautions The following signs describe safety hazards and damages according to the safety level. Incorrect use of the device may result in a critical accident and you may be killed or severely injured. Incorrect use of the device may result in being killed or severely injured. -
Page 4: Safety Instructions
2. Safety Instructions This device has been carefully manufactured to ensure safe use. However, if you don't follow the safety instructions described in this document, you may be injured or the device may be damaged. Before you start using this device, please read this document carefully and learn how to operate the device safely and correctly. - Page 5 2. Safety Instructions 2-2. Basic Safety Instructions Please carefully read and follow the safety instructions described in this section. If you ignore these safety instructions, an accident may occur that may kill or injure you. Connect the device to a power source by using a grounded outlet, or connect the ground cable to the ground terminal.
- Page 6 2. Safety Instructions Please carefully read and follow the safety instructions described in this section. If you ignore these safety instructions, you may be killed or severely injured. Carefully handle the cleaning and waste solutions. Learn first aid procedures well in advance.
- Page 7 2. Safety Instructions 2-3. Safety Precautions Precautions when installing the device ＊ Make sure to unplug the power cable when you connect a cable (e.g., power cable, output cable, optional cable). ＊ Do not install the device where you cannot operate the power switch or connect/disconnect the power plug.
- Page 8 2. Safety Instructions Safety precautions when operating the device ＊ Do not touch the power cable or power outlet with wet hands. ＊ Do not connect/disconnect the output connector with wet hands. Do not touch the nozzle accidentally. ＊ If an alarm is output, and if you need to touch the device (e.g., cables, nozzle), except the operation panel, turn the power of the generator off first and then disconnect the power cable.
- Page 9 2. Safety Instructions Safety in maintenance ＊ Do not open the cover of the device. ＊ Only qualified maintenance personnel should maintain the device. ＊ If the generator gets wet, turn the primary power off immediately and then turn off the power switch. Contact your dealer for further instructions.
-
Page 10: Components
3. Components 3. Components ① Generator ② Nozzle (with output cable (1.5m) and junction cable (3.5m)) ③ Power cable * 100V (2m) or 200V (3m) ④ 3P-2P grounding conversion adaptor * Not attached to the power cable (200V (3m)) ⑤ Output connector holding plate ⑥... -
Page 11: Functions And Features
4. Functions and Features 4. Functions and Features ① The device (W-357-1MQG-SKC) is a quartz vibration ultrasonic cleaning unit. It uses 1MHz ultrasonic waves; the maximum output is 12W. The device consists of the generator and the nozzle with an internal ultrasonic transducer, which are connected by the cable. -
Page 12: Device Installation And Cable Connection
5. Device Installation and Cable Connection 5. Device Installation and Cable Connection 5-1. Caution ① When you connect the nozzle, output cable and optional cables, first disconnect the power plug. ② Do not install the device where the generator vent is blocked or where you cannot operate the power switch or connect/disconnect the power plug. - Page 13 5. Device Installation and Cable Connection 5-4. Connecting the SENSOR Connector ① Connect the 3-pin connector (provided) to which the control cable is connected to the SENSOR connector (generator (rear-side)). Connect the RED line and WHITE line of the control cable (connected to SENSOR connector) to OUTPUT of the flow switch.
- Page 14 5. Device Installation and Cable Connection 5-5. Connecting the REMOTE connector ① Connect the control cable to the 4-pin connector (provided). Connect the control cable to the REMOTE connector (generator (rear-side)). (The REMOTE connector allows you to turn ON/OFF the emission of the ultrasonic waves.) ②...
- Page 15 5. Device Installation and Cable Connection 5-6. Connecting the ALARM cable ① To install a warning buzzer or warning light, connect the control cable to the 5-pin connector (provided) and connect the control cable to ALARM/4-20mA (generator (rear)). (Pins 1 - 3 are used in ALARM.) ②...
- Page 16 5. Device Installation and Cable Connection 5-8. Connection to the RS-422A To operate the device via Serial communication, connect the RS-422A interface to the external equipment (e.g., PC). The following describes the pin assignment of D-sub9 pin (male) of RS-422A connector. RS-422A Fig.
-
Page 17: Installing The Device - Cautions
6. Installing the Device - Cautions We propose this cleaning concept by the requirement of “nozzle type megasonic cleaner with less liquid consumption”. The important things for this cleaning method are the spin speed of the wafer or moving speed of LCD panel, liquid amount and the distance between the nozzle and cleaning object (wafer, LCD panel). -
Page 18: Operation
7. Operation 7. Operation 7-1. Caution ① The customer should provide a water flow switch that turns "ON" (CLOSE) the device when the water flow is specified value or more. (Contact capacity: 12V/18mA or more) ② Connect the control cable to the SENSOR connector and connect the RED/WHITE lines of the control cable to the contact of the water flow switch. - Page 19 7. Operation 7-3. Setting ① You can change the mode in the MENU screen. When you press the MENU key, the MENU screen appears. (You cannot change the mode while the generator is running.) When you press the ESC key in the MENU screen, the previous screen appears. ②...
- Page 20 7. Operation ④ Selecting RS-422A The Machine Address (ID) of RS-422A is displayed at the bottom of the screen. ⑤ INT mode - Changing the output power When you press the keys, the digit position ("Wset" number - Underlined) changes. When you press the keys, the numeral (underlined) is incremented or decremented.
- Page 21 7. Operation 7-4. Oscillation ① Oscillation REMOTE ON or SENSOR ON starts emitting ultrasonic waves. REMOTE OFF stops emitting ultrasonic waves. The box shows the measurement values. From top left: High-frequency voltage, High-frequency current, High-frequency power Lower line: Transducer impedance, Frequency, Heat sink temperature The measured power is shown by the bar graph.
- Page 22 7. Operation The generator, transducer and output cable have high voltage. Do not open the cover of the device. When you touch the device (e.g., connecting the cables), make sure to disconnect the power cable from the power source. If you don't disconnect the power cable, you may be killed or severely injured.
-
Page 23: Effective Ultrasonic Cleaning - Hints
8. Effective Ultrasonic Cleaning - Hints 8. Effective Ultrasonic Cleaning - Hints ① The irradiation area of the ultrasonic is the flat tip area of the nozzle. Place the irradiation area and wafer in parallel. Set the distance between the nozzle and the cleaning object to approx. -
Page 24: Menu Operation
9. MENU Operation 9. MENU Operation 9-1. Keys ･･････････ Select MENU ･･････････ Enter ESC ･･････････Cancel, or Go to the Previous screen 9-2. CONTROL MODE You can select the mode to set the output power. INT (Key entry) RS-422（RS-422A） 9-3. RS - 422 ADDRESS You can set the Machine Address (ID) when RS-422A is used. - Page 25 9. MENU Operation 9-4. RESERVE1 This is a parameter for function extension. It is set as "0" in the standard specification. 9-5. CONTRAST You can change the contrast level of the LCD display panel. 9-6. DISPLAY DATA ① Osc: Cumulative time (Hour:Minute:Second) that the generator outputs the ultrasonic waves (This cannot be cleared to "0".) ②...
-
Page 26: Rs-422A
10. RS-422A 10. RS-422A 10-1. RS-422A Specification Electrical characteristics EIA RS-422 compliant Communication method Half-duplex Synchronization scheme Asynchronous Transmission rate 9600 bps Start bit 1 bit Data length 7 bit Parity Even parity Stop bit 1 bit Delimiter Character code ASCII code Machine address (ID) 0 - E... - Page 27 10. RS-422A 10-2. Communication Commands and Responses Communication Send Response command “I[ID],W[Power: 3 digits]W, [BCCH], “I[ID], W[Power: 3 digits]W, [BCCH], [BCCL], Output power [BCCL], [CR]” [CR]” setting W command * Power: Set in the range [000～120] Only 422 mode is valid. “I[ID], STA, [BCCH], [BCCL], [CR]”...
- Page 28 10. RS-422A 10-3. Error response If an error occurs after [CR], an error response is returned. Example) “[ID],COMERR,[BCCH],[BCCL],[CR]” ・ If the set value is out of scope, NUMERR is returned. (Only W and A commands (Output setting command) Error response Error command Priority in error Description...
-
Page 29: Generator - Outline View
11. Generator - Outline View 11. Generator - Outline View －27－... -
Page 30: Nozzle - Outline View
12. Nozzle - Outline View 12. Nozzle - Outline View －28－... -
Page 31: Cable (Provided) - Outline View
13. Cable (provided) - Outline View 13. Cable (provided) - Outline View R E D R E D WHITE WHITE BLACK BLACK SHIELD SHIELD Control cable 2P-3P conversion plug Power cable (100V) Power cable (230V) －29－... -
Page 32: Generator - Connection Diagram
14. Generator - Connection Diagram 14. Generator - Connection Diagram F l o w s w i t c h C o n t a c t c a p a c i t y 1 2 V D C , 1 8 m A o r m o r e <... -
Page 33: Product Specifications
15. Product Specifications 15. Product Specifications ● Generator Model W-357-1MQG-SKC Oscillation method Separately excited oscillation by the fixation of oscillated frequency Oscillation frequency 1MHz (Nominal) Output range 0〜12W (Allowable input to the nozzle for continuous operation is 10W when the transducer is cooled by the air purging.) - Page 34 15. Product Specifications (4) RS-422A Connector: Dsub-9pin(M) - 2 units: Parallel connection 9600bps, 7bit, Stop1bit, Even parity, BCC Machine Address (ID): 0 - E (Set in MENU screen) Output power setting, Status read (5) LCD MENU setting Control Mode setting RS-422A - Machine number setting LCD contrast setting MENU display...
- Page 35 15. Product Specifications ● Nozzle Maximum input Material Case PCTFE Nozzle tip Quartz glass Cable clamp Nylon Transducer Packing Silicon rubber Screw PEEK Joint PTFE, ECTFE Liquid temperature 20～50ºC Tube size: External diameter 6mm Joint for air purge Elbow type joint: 30-6ME2-C (Manufacturer: Flowell) Recommended pressure: 0.01MPa External dimensions Reference diagram: Nozzle - Outline View (page 28)
-
Page 36: Precautions In Using The Device
16. Precautions in Using the Device 16. Precautions in Using the Device The following describes the precautions to use with this product. (1) Generator The maximum power output is 12W and it is adjustable every 0.1W. However, the allowable max. output to the nozzle is 10W for continuous operation with air purging (Pressure of air purge : 0.01MPa) . -
Page 37: Appendix 1: Alarm Code List （W-357-1Mqg
Appendix 1: Alarm code list （W-357-1MQG） Alarm Description 10 Backup data error Abnormal backup data 20 Low frequency The frequency is lower than the lower limit when the frequency is automatically set. 21 High frequency The frequency is higher than the upper limit when the frequency is automatically set. - Page 38 When the after service such as the repair is required, please contact the seller of product with the detailed information about the malfunction. Do Not Duplicate W-357-1MQG-SKC Industrial Equipment Division 20 Oyamazuka, Oiwa-cho, Toyohashi, Aichi 441-3193, Japan TEL : +81-532-41-2774 FAX : +81-532-41-2923 URL: https://www.honda-el.co.jp/en/...
Need help?
Do you have a question about the W-357-1MQG-SKC and is the answer not in the manual?
Questions and answers