Veeco Mark II Technical Manual
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Veeco Mark II Technical Manual

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Mark II
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Technical Manual
425959

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Summary of Contents for Veeco Mark II

  • Page 1 ⊕ Mark II Controller Technical Manual 425959...
  • Page 2 Mark II Controller Technical Manual...
  • Page 3 No warranties are granted or extended by this document. It is the policy of Veeco Instruments Inc. to improve products as new technology, components and materials become avail- able. Veeco Instruments Inc. therefore reserves the right to change specifications without prior notice.

  • Page 4: Table Of Contents

    Table of Contents Safety Overview Operating Principles Installation Operation Remote Operation Service Support Drawings Specifications Interface Connections Virtual Front Panel Serial Communications Protocol AI Servo Gain Environmental Safety...

  • Page 5: Safety

    Chapter 1: Safety Understanding the correct installation, operation, and maintenance pro- cedure is necessary for safe and successful operation. This safety alert sym- bol precedes safety messages in this manual, along with one of the three signal words explained below. Obey the messages that follow these words to avoid possible injury or death.
  • Page 6 Keep all guards and panels in place during routine system WARNING operation. Complete ion beam systems from Veeco Instruments Inc. are supplied with hardware interlocks and software safeguards at various points in the system. Whenever components or retrofits are added to existing systems, a local review of system safety is recommended.
  • Page 7 Symbols Used on the Controller Refer to manual Designates a chassis ground Designates a protective earth grounding point Dangerous voltage Unit in standby – power outputs deactivated Unit on – power outputs active Unit off – power off...

  • Page 8: Overview

    Chapter 2: Overview The Mark II Controller is factory configured for use with Veeco’s Mark/Mark series gridless ion source. The unit is able to automatically adjust the filament current, anode voltage and gas flow rate to provide an ion beam with user chosen values for energy and current. An optional...
  • Page 9 This Mark series Controller includes: Anode Supply – The anode supply is an isolated switching • power supply that produces a DC potential needed to accel- erate the electrons until they have enough energy to ionize gas atoms to sustain source discharge. Filament Cathode supply –...

  • Page 10: Operating Principles

    Source Considerations The Mark II Controller has been designed to power the Mark/Mark series end-Hall Effect type gridless ion source and neutralizer. This source type creates a beam of ions through the interaction of electric and mag- netic fields in the source’s discharge region.
  • Page 11 For steady state operation, the unit adjusts the gas flow and anode supply until the anode current and voltage are at the target values. The cathode supply is adjusted in response to neutralization current changes until the Emission Current, I , is larger than the Anode Current, I , by the speci- fied neutralization current offset or ratio.
  • Page 12 60% of the anode voltage. For example, the ion energy should be about 90eV for an anode voltage of 150V. Operation is typically possible over an ion energy range of 40 to 180eV. If the process chamber has other rapidly changing gas supplies (e.g., reac- tive gases introduced at the substrate), pressure fluctuations may occur at the source’s anode region during routine operation.

  • Page 13: Installation

    Chapter 4: Installation Inspection Unpack the Mark II Controller and inspect it carefully for any visible damage. If damage is found, notify the shipping company and Veeco immediately. Check that all accessories and options have been included with the unit.
  • Page 14 ”Figure 4.1” on Follow these steps to connect the controller (Refer to page 9 “Drawings” on page 40): and to the 1. Check that the ON/STANDBY and Mains Disconnect switches are in the OFF position before continuing. To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing.
  • Page 15 6. If the unit will have positive shut-off (P.S.O.) valve(s), connect the cable(s) between the appropriate row on the GAS FLOW P.S.O. con- nector on the controller’s rear panel and the user supplied P.S.O. valve(s) and power supply. 7. Make the following source gas connections: a.
  • Page 16 The unit has separate ground connections for user safety. To avoid electrical shock, maintain the safety ground connection during rou- WARNING tine operation. Interlock Connector The INTERLOCK connector is wired in series with pins on the output ”Figure 4.1” on page 9.
  • Page 17 It is the user’s responsibility to provide power to actuate the P.S.O. valves. Refer to the technical information provided with the valves. NOTE Remote Communication There are two methods of remote communication: analog (via a legacy protocol) and digital (using the EIA-232 command set). A single REMOTE connector has pin assignments for each method.

  • Page 18: Operation

    Chapter 5: Operation General “Installation” on page 9 Refer to to verify that the Mark II Controller is ready to power up before continuing. Confirm that installation and start-up information in the source technical manual has been followed as well.
  • Page 19 rather than by simply touching. If the wrong screen area is touched, keep finger contact with the screen and slide off the button before lifting away. The controller is ready to receive configuration information for your sys- tem. Beginning Automatic Operation This section explains how to configure the unit and prepare it for routine operation.
  • Page 20 The AI Servo Configuration selections are only applicable when the ANODE CURRENT CONTROL MODE (on the Auto Mode Con- “Auto figuration list) is set to Anode Current Setpoint. Refer to Mode Configuration” on page 21 for details. Enter Adjustable Parameters – A Source Run Data sheet is provided with each new Mark series ion source.
  • Page 21 Follow these steps to properly configure the controller to match the MFC: 1. Press the UTILITIES button; the Select Function dialog box opens. Figure 5.1 UTILITIES - Select Function Dialog Box 2. Press the MFC Configuration button; the MFC Configuration list opens.
  • Page 22 3. Press the values in the SOURCE GAS 1 column; the ‘Is this MFC Installed?’ dialog box opens. 4. Press the Active button; the MFC Valve Size keypad opens. The valve size is the maximum gas flow used to calibrate the valve. 5.
  • Page 23 MFC. It is intended primarily for diagnostic/troubleshoot- ing purposes and to perform gas line purging; the automatic start sequence is disabled. For best results, Veeco recommends using the controller in AUTO mode for routine operation. NOTE Figure 5.4 Touch Screen -...
  • Page 24 Gas Line Purging Follow these steps to remove any trapped air in the gas line(s) after initial installation or whenever the process gas supply changes. Purge the line(s) after process chamber pumpdown, but before NOTE beginning source operation. 1. Press the MANUAL button; the button’s indicator changes to green. 2.
  • Page 25 5. Press the Source Gas Flow display bar and the GAS On/Off button again; the green indicator goes out. 6. Open the main shut-off valve on the gas regulator or the supply source. 7. Adjust the gas regulator valve to 140kPa ±10kPa (20 psig ±2 psig). Auto Mode Configuration The Auto Mode Configuration of analog inputs 2 and 3 may be set from Table 6.1: on...
  • Page 26 4. The FILAMENT START CURRENT has Auto mode as the factory setting. This means that during the auto start sequence, the control- ler will raise the cathode current until the source ignites, then adjust to the target value. To manually adjust the filament start current, press the display bar. The Filament Start Current keypad opens.
  • Page 27 The Neutralization Setpoint control mode is the recommended choice. NOTE After one of the buttons is pressed, the dialog box closes and the selection appears on the display bar. 7. Press a neutral screen area to close the Auto Mode Configuration list. AI Servo Configuration Follow these steps to set the AI Servo Configuration: 1.
  • Page 28 3. To select the ANODE CURRENT SERVO GAIN MODE, press the display bar; the AI Servo Gain Mode dialog box opens. Figure 5.8 UTILITIES - AI Servo Gain Mode Dialog Box. The are two different AI Servo Gain modes available for anode cur- rent setpoint control, depending on local application needs: Fixed Gain –...
  • Page 29 5. To match the servo gain to the source type, press the ANODE CUR- RENT SERVO GAIN display bar; the Select Ion Source Type dialog box opens. Figure 5.9 ANODE CUR- RENT SERVO GAIN - Select Ion Source Type Dialog Box. 6.
  • Page 30 Refer to for suggested custom gain factor ranges, as well as the factory default values. Veeco recommends using the source type specific Anode Current Servo Gain values, as they have been tested and optimized for the NOTE routine ion source ignition and setpoint change conditions.
  • Page 31 Enter Adjustable Parameters Follow these steps to enter adjustable parameters into the controller: 1. Press the AUTO button; the button’s indicator changes to green. The BEAM button replaces the ANODE, and CATHODE buttons on the right side of the screen. Figure 5.11 Anode Voltage Keypad 2.
  • Page 32 Source Gas Start Flow Follow these steps to identify the start flow parameter: 1. Choose a trial value, either from the Source Run Data sheet or prior operating experience. 2. Use Figure 5.12 to optimize the start gas flow. Begin Auto Figure 5.12 Finding a Start Start Gas Flow...
  • Page 33 and source gas flow (up to their target limits) to maintain the target anode current and neutralization parameters. Figure 5.13 Touch Screen - AUTO Mode, Beam On STATUS EVENTS Window The STATUS EVENTS window displays the steps the controller per- forms and reports any errors or faults that may occur.
  • Page 34 Press any of the module status indicators to open the MODULE STA- TUS INFORMATION window. This window provides module activity details and general controller condition. Figure 5.14 Touch Screen - Module Status Information Audible Status Indicators The controller has two audio alarms: The module status alarm sounds if any module status indi- •...
  • Page 35 Follow these steps to change the alarm sound settings: 1. Press the UTILITIES button; the Select Function dialog box opens. 2. Press the Audio Configuration button; the Audio Configuration List opens. Figure 5.15 Audio Configura- tion List. 3. Press the desired display bar to a.
  • Page 36 Shut Down 1. Press the BEAM button; the green indicator goes out. 2. Wait at least 15 minutes before venting the process chamber to atmo- sphere. To avoid overheating and possible magnet damage, let the source cool at least 15 minutes before venting the process chamber to atmo- CAUTION sphere.

  • Page 37: Remote Operation

    Chapter 6: Remote Operation General The Mark II Controller may be operated remotely via analog/digital control or EIA-232. All remote control signals are available on the ”Table C.2:” on REMOTE connector on the rear of the unit. See page 51.
  • Page 38 Once Analog Input 3 is set to represent the neutralizer current, the target Table 6.1: on page is calculated by the equation shown in MAX186 Figure 6.1 Analog Input Equivalent Circuit Analog In + SCLK 10K, 1% SW300A 0.01uF SSTRB DOUT 10K, 1% DGND...
  • Page 39 “Service Support” on page 39 10V DC full scale. Contact for assistance, if this voltage range is required. SW301E Figure 6.2 Analog Output Equivalent Circuit 1K, 1% 1K, 1% AGND LM324 Analog Out 1K, 1% 15.8K, 1% 0.1uF AGND The Remote Run signal is used to place the unit into REMOTE mode and to start/run the source.
  • Page 40 up previously with the EIA-232 interface or from the unit’s front panel. “Remote Run Only” on page Refer to Analog I/O Configuration Follow these steps to configure the analog inputs from the controller’s front panel. Remote I/O 1. Press the UTILITIES button; the Select Function dialog box opens. 2.
  • Page 41 After the last button is pressed, the dialog box closes and all of these selections appear on the display bar. The Handshake parameter has no effect when the analog control option is installed. NOTE 4. Follow the steps in “Remote Run Only” or “Remote Run with Ana- log Control”...
  • Page 42 Remote Run with Analog Control 1. Follow these steps to enable the analog inputs from the controller’s front panel: a. Press the UTILITIES button; the Select Function dialog box opens. b. Press the Remote I/O Configuration button; the Remote I/O Configuration list opens.

  • Page 43: Service Support

    Phone: 1.888.221.1892 Fax: 970.493.1439 ftcsupport@veeco.com When contacting Veeco Instruments Inc. for parts or service: Provide the ion source model number and serial number. Provide the controller model and serial number; a list of all operating parameters and/or error messages displayed by the unit; gas flow rate;...

  • Page 44: Drawings

    Appendix A: Drawings Table A.1: Drawings Drawing Description Number “Controller Block Diagram” n.a. “Mark II⊕ Filament Cathode, Fluid 426663 Cooled Wiring Diagram” DIAG “Mark II⊕ Filament Cathode, Radiantly 426668 Cooled Wiring Diagram” DIAG...
  • Page 45 Controller Block Diagram Line Power In 200-240V~ 50/ Digital Remote 60 Hz, 1φ 20A Interlock Source P.S.O. 300V DC 25A AC Anode Supply +370VDC Cathode Supply Power Line Conditioner +5VDC +15VDC Controller –15VDC +12VDC Touch Screen/Front Panel Standby...
  • Page 46 Mark II⊕ Filament Cathode, Fluid Cooled Wiring Diagram 426663 SOURCE ASSY KEY FOR MARK II+ HCES FLUID COOLED ASSY HOOKUP USER WATER SUPPLY VEECO SUPPLIED: BLACK MAX TEMP: 104 degs F (40 degs C) REQUIRED USER SUPPLIED: MAGENTA DASHED MIN TEMP: 50 degs F (10 degs C)
  • Page 47 Mark II⊕ Filament Cathode, Radiantly Cooled Wiring Diagram 426668 SOURCE ASSY KEY FOR MARK II+ HCES FLUID COOLED ASSY HOOKUP VEECO SUPPLIED: BLACK REQUIRED USER SUPPLIED: MAGENTA DASHED PRESSURE GAUAGE OPTIONAL ITEMS: GREEN RECOMMENDED FOR OPTIONAL USER SUPPLIED ITEMS: GREEN DASHED This is frame 2 of 2 for Mark II+ P.S.

  • Page 48: Specifications

    Appendix B: Specifications General The Mark II Controller consists of a single chassis containing the cath- ode power supply, the anode power supply and a gas flow controller, with separate connecting cables. The unit is designed for continuous opera- tion.
  • Page 49 Electrical Installation The controller is a Class I grounded type equipment intended to be mounted in an enclosed instrument rack, which only allows the front of the unit to be accessible during operation. Since the controller does not have an integral Mains Disconnect, the user must provide a suitable exter- nal Disconnect switch for the controller.
  • Page 50 Environmental The controller is intended for indoor use only, requiring ordinary protec- tion, and is not protected against harmful ingress of moisture. It is designed to operate in a laboratory environment with minimal shock or vibration. • Ambient Temperature: • Operational: 10 to 35°C (50 to 95° F) •...
  • Page 51 Transport The controller will meet the transportation shock and vibration require- ments of the International Safe Transit Association (ISTA) specification, parts 2 and 2A, when properly packaged in its factory supplied shipping container. Controller The controller has the following characteristics: Common Supply/Module Features These features are common to the Cathode and Anode Supplies and Cur- rent Modules...
  • Page 52 Cathode Supply (Filament Cathode) • Current Range: 0.0 to 25.0A RMS • Maximum Voltage: 50V RMS • Adjustable Current target • Cathode Current display • Emission Current display • Adjustable Current limit • Neutralizer Current display Interfaces “Interface Connections” on page 50 Refer to for detailed interface infor- mation.
  • Page 53 Serial Interface Complete power system operation can be accomplished via a single EIA- 232 serial interface from a DB-25 receptacle on the controller’s rear panel. MFC Interface (analog) • Four MFC outputs via supplier specific protocol on DB-15 • Four positive shut-off valves via dry closure contact on two pins of an eight pin soft shell connector (no voltage is sup- plied to these pins) Controller Interlock...

  • Page 54: Interface Connections

    Appendix C: Interface Connections General The Mark II Controller rear panel is the connection point for the vari- ”Figure 4.1” on ous components and communication interfaces. Refer to page 9. The protocols and pin assignments are summarized here. Interlock Physical – The INTERLOCK connector is a type DB-9 receptacle.
  • Page 55 Remote Communication Physical – The REMOTE connector is a type DB-25 receptacle. Electrical – This interface is legacy system compatible. Refer to Table C.2: Linearity is assumed for the entire range. The maximum anode volt- age value is adjustable. The 0 to +5V DC ranges may be changed to NOTE “Analog Remote Control”...
  • Page 56 Table C.2: Remote Interface Connector Pin Assignments (Continued) Signal Signal Function Name Type Beam On switch: This input signal is used in conjunction with BEAM pin 20. When these two pins are shorted, the controller is placed INPUT in AUTO mode and the beam is turned on. When these two pins are open, the beam is turned off.
  • Page 57 Gas Flow Connectors Analog MFC Physical – There are four numbered GAS FLOW connectors; each is a type DB-15 receptacle. GAS FLOW 4 is reserved. ® Electrical – The interface is pin compatible with the Brooks brand ther- mal mass flow controller (MFC), but may be used with MFCs using the same supply voltage and signals shown in Figure C.3: Table C.3: Gas Flow Connector Pin Assignments Pin No.
  • Page 58 Digital MFC This feature is not yet available. NOTE ® Physical – The DIGITAL MFC connector is a female RJ-12, Molex brand part number 95003-2661; the mating connector (available sepa- rately) is 90075-0031 or equivalent. Electrical – Supports EIA-485. Refer to Figure C.4: for pin assignment. Table C.4: Digital MFC Connector Pin Assignment Pin No.
  • Page 59 Figure C.1 Rear Panel Gas Flow P.S.O. Connector Pin Orientation 1 2 3 4 5 6 7 8 The coil inductance of certain solenoids may cause a voltage spike when the valve opens. The voltage transients on P. S. O. contacts NOTE must not exceed 100V.
  • Page 60 P.S.O. valves are installed in a number of ways. Figure C.2 shows one common configuration. The P.S.O. valve (provided by others) should be normally closed, to match the Gas Flow P.S.O. relay’s normally open contacts. This relay closes when the controller turns on the gas flow. Elec- trical current flows to the P.S.O.
  • Page 61 Source ® Physical – The SOURCE connector is a 16-pin AMP brand metal shell CPC type. Electrical – Refer to Table C.6: for pin assignment. Table C.6: Source Interface Connector Pin Assignments Pin No. Name In Name Out Function This output signal is the DC Voltage to the source (referenced to pin 15).

  • Page 62: Virtual Front Panel

    Follow these steps to install the Virtual Front Panel program: 1. Close all open desktop applications software on the PC; temporarily disable all virus detection and firewall software. 2. Insert the Veeco supplied CD into the PC’s drive. The software’s ® setup screen opens and the InstallShield Wizard launches.
  • Page 63 3. Click the Next> button on the Welcome window; the Software License Agreement window opens. a. Click the Yes button if you accept the agreement; the Choose Destination Location dialog box opens. b. The default location is C:\Program Files; click the Browse button to enter an alternate location.
  • Page 64 b. Run the Virtual Front Panel program, by either selecting it from the Start menu or double clicking the Mark+ VFP icon on your desktop; the Select Comm Port dialog box opens. Figure D.2 Virtual Front Panel Select Comm Port Dialog Box c.

  • Page 65: Serial Communications Protocol

    Appendix E: Serial Communications Protocol General The Mark series Serial Communications Protocol has two command types: a query command and a set command. Each command must include a four character checksum, followed by a carriage return [CR] to be sent successfully. The command format is: [Cmd][4-ch Checksum][CR] The controller responds with an acknowledgement containing a response code (or string), a timestamp, and a checksum, followed by a carriage...
  • Page 66 Table E.1: NAK Codes (Continued) Function Code Number out of range < Event Type Number out of range Too many characters to be a valid command (18 char- acters maximum) > Invalid character in the event type/function code field Command is not valid for this controller configuration The carriage return and line feed are defined as: [CR] = 0x0D [LF] = 0x0A...
  • Page 67 Query Commands Table E.2: Query Commands Name Syntax Response Read Target See Read Target State, RT Minimum Value Read Target See Read Target State, RT Maximum Value Aa,[Timestamp],[Checksum][CR][LF] where Read No. of Event Types a = Number of Event types Aa,bc,defghi,jklmno,ppppp,qqqqq,rrrrr,sssss,ttttt,uuuuu,vvvvv,wwwww,[Timestamp], [Checksum][CR][LF] where a = Events Available, ‘0’...
  • Page 68 Table E.2: Query Commands (Continued) Name Syntax Response i = Cathode Module On/Off Bit 0 = On/Off Bit 1-2 = 0 = Set by controller 1 = Set by front panel RS232 2 = Set by user RS232 3 = Set by user digital I/O Bits 4-7 = 0x3 j = Beam/Control State Bit 0 = Interlock Made?
  • Page 69 Read Power Sup- ‘2’ = Mark II, ply Model ‘3’ = Mark II High Output, ‘4’ = Mark III c = Cathode Type: ’1’ = Filament, ‘2’ = HCES d = Number of Source Gases Installed? ‘0’ = None, ‘1’ = 1, ‘2’ = 2, ‘3’ = 3...
  • Page 70 Table E.2: Query Commands (Continued) Name Syntax Response Aaaaaa,bbbbb,ccccc,ddddd,eeeee,fffff,ggggg,hhhhh,iiiii,jjjjj,kkkkk,lllll,mmmmm,nnnnn,ooooo,ppppp,qqqqq,[Time stamp],[Checksum][CR][LF] where a = Anode Voltage b = Anode Current c = Source Gas 1 Flow d = Source Gas 1 Start Flow e = Source Gas 1 Flow Limit f = Source Gas 1 Run Proportion g = Source Gas 2 Flow Read Target h = Source Gas 2 Start Flow...
  • Page 71 Set Commands Table E.3: Set Commands Name Syntax Units Description Set Anode On/Off n.a. Turns the anode on and off when the controller is in the MANUAL mode. Set Anode Current amperes Sets the anode current when the controller’s AI SETPOINT feature is active in the AUTO mode. Set Anode Voltage volts Sets the target voltage for the anode.
  • Page 72 Table E.3: Set Commands (Continued) Name Syntax Units Description Set Master Gas to MFC 1 n.a. Sets Source Gas channel 1 as the master gas channel. Set Source Gas 1 Flow Run Sets Source Gas channel 1 flow as a proportion (percentage) of the Master Gas channel flow when the Proportion controller is in the AUTO mode.
  • Page 73 Event List Table E.4: Event List Type Name Code Data Description A = (Hex) New On/Off State (0 = Off, 1 = On) B = (Hex) Module ID (see above) C = (Hex) Source of change: Module On/Off Sta- ‘Module On/Off 1 = Controller tus (type 000) Change’...
  • Page 74 Table E.4: Event List (Continued) Type Name Code Data Description A = (Hex) Info: 1 = Source Gas Ramping To Start Target 2 = Anode Voltage Ramping to Start Target 3 = Filament Current Ramping to Start Target 4 = Ramping Filament Current to Ignite Source 5 = Source Discharge Has Started Source Startup (type 6 = Switching Gas Mix to Run Proportions...

  • Page 75: Ai Servo Gain

    Also included here are the factory recommended default values for current and legacy Veeco source types and companion Mark II Controller. In most manufacturing installations and applications, it is sufficient to confirm...
  • Page 76 Table F.1: AI Servo Gain Values and Settings Gain Comment The factory recommended default value for the Mark II/II ion source. The recommended custom range setting 30 to 300 for the Mark II/II ion source. Custom Gain Setting The Custom Gain setting (on the Select Ion Source Type dialog box, ”Figure 5.9”...
  • Page 77 instances, the user may start with the factory recommended AI Servo Gain value and then experimentally determine a more appropriate custom gain setting. A lower AI Servo Gain factor will result in slower gas adjustment to meet the anode current setpoint. If the ion source routinely takes substantially longer than a minute to reach the target anode current setpoint at start- up, it is likely that the fixed AI Servo Gain value is too low.

  • Page 78: Environmental Safety

    Appendix G: Environmental Safety The equipment that you bought has required the extraction and use of natural resources for its production. It may contain hazardous substances that could impact health and the environment. In order to avoid the dis- semination of those substances in our environment and to diminish the pressure on the natural resources, we encourage you to use the appropri- ate take-back systems.

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