Orion KRF110-V-04E Quick Start Manual page 9

6. Pressure-Flow rate diagram
2000
1500
1000
500
0
60
Conditions: 1 atmospheric pressure
20℃
KRF110-V-04
Vacuum Specification
50 40
Vacuum (kPa)
−8−
Spec.No. KRF110-V-04E
30 20
60Hz
50Hz
10 0